WO2001057471B1 - Capteur visuel a deplacement - Google Patents
Capteur visuel a deplacementInfo
- Publication number
- WO2001057471B1 WO2001057471B1 PCT/JP2001/000656 JP0100656W WO0157471B1 WO 2001057471 B1 WO2001057471 B1 WO 2001057471B1 JP 0100656 W JP0100656 W JP 0100656W WO 0157471 B1 WO0157471 B1 WO 0157471B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- measurement
- displacement
- moved
- visual
- displacement sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001556274A JP3797422B2 (ja) | 2000-01-31 | 2001-01-31 | ビジュアル式変位センサ |
DE60139047T DE60139047D1 (de) | 2000-01-31 | 2001-01-31 | Optischer verschiebungssensor |
EP01902697A EP1167918B1 (en) | 2000-01-31 | 2001-01-31 | Optical displacement sensor |
US09/937,480 US6724491B2 (en) | 2000-01-31 | 2001-01-31 | Visual displacement sensor |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-27429 | 2000-01-31 | ||
JP2000027429 | 2000-01-31 | ||
JP2000393787 | 2000-11-19 | ||
JP2000-393787 | 2000-11-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001057471A1 WO2001057471A1 (fr) | 2001-08-09 |
WO2001057471B1 true WO2001057471B1 (fr) | 2004-03-11 |
Family
ID=26584858
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2001/000656 WO2001057471A1 (fr) | 2000-01-31 | 2001-01-31 | Capteur visuel a deplacement |
Country Status (5)
Country | Link |
---|---|
US (1) | US6724491B2 (ja) |
EP (1) | EP1167918B1 (ja) |
JP (1) | JP3797422B2 (ja) |
DE (1) | DE60139047D1 (ja) |
WO (1) | WO2001057471A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7024285B2 (ja) | 2017-09-26 | 2022-02-24 | オムロン株式会社 | 変位計測装置、システム、および変位計測方法 |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001289614A (ja) * | 2000-01-31 | 2001-10-19 | Omron Corp | 変位センサ |
JP4833503B2 (ja) * | 2003-02-28 | 2011-12-07 | パナソニック電工Sunx株式会社 | 厚さ測定装置 |
JP4548595B2 (ja) * | 2004-03-15 | 2010-09-22 | オムロン株式会社 | センサ装置 |
DE102005011344B4 (de) * | 2004-03-15 | 2014-02-13 | Omron Corporation | Sensorvorrichtung |
JP4728609B2 (ja) * | 2004-07-20 | 2011-07-20 | 株式会社キーエンス | 光学式変位計 |
JP4648665B2 (ja) * | 2004-07-26 | 2011-03-09 | 株式会社キーエンス | 光学式変位計 |
WO2006019070A1 (ja) * | 2004-08-20 | 2006-02-23 | Bridgestone Corporation | 帯状部材の測長方法および装置 |
US20060054843A1 (en) * | 2004-09-13 | 2006-03-16 | Electronic Design To Market, Inc. | Method and apparatus of improving optical reflection images of a laser on a changing surface location |
US7400415B2 (en) * | 2005-03-15 | 2008-07-15 | Mitutoyo Corporation | Operator interface apparatus and method for displacement transducer with selectable detector area |
KR100728482B1 (ko) * | 2005-03-15 | 2007-06-13 | 오므론 가부시키가이샤 | 계측 영역의 자동 설정 수단을 구비한 변위 센서 |
JP4532324B2 (ja) * | 2005-03-31 | 2010-08-25 | 京セラキンセキ株式会社 | 被加工物の製造方法 |
JP5082314B2 (ja) * | 2006-07-14 | 2012-11-28 | オムロン株式会社 | 変位センサ |
JP2008045928A (ja) * | 2006-08-11 | 2008-02-28 | Omron Corp | 光学式計測装置および光学式計測装置の制御方法 |
US7986356B2 (en) * | 2007-07-25 | 2011-07-26 | Hewlett-Packard Development Company, L.P. | System and method for determining a gamma curve of a display device |
JP5202012B2 (ja) * | 2008-02-06 | 2013-06-05 | 株式会社キーエンス | 光学式変位計 |
CN101780649B (zh) * | 2009-01-16 | 2012-10-10 | 鸿富锦精密工业(深圳)有限公司 | 刀具检测系统及方法 |
CN101819024B (zh) * | 2010-03-22 | 2011-06-15 | 中南大学 | 一种基于机器视觉的二维位移检测方法 |
US9234770B2 (en) * | 2010-04-19 | 2016-01-12 | Qualcomm Incorporated | Dynamic sensor range |
US20120127487A1 (en) * | 2010-11-18 | 2012-05-24 | Sergey Potapenko | Methods and apparatuses for measuring the thickness of glass substrates |
JP4821934B1 (ja) * | 2011-04-14 | 2011-11-24 | 株式会社安川電機 | 3次元形状計測装置およびロボットシステム |
WO2013028196A1 (en) * | 2011-08-25 | 2013-02-28 | Alliance For Sustainable Energy, Llc | On-line, continuous monitoring in solar cell and fuel cell manufacturing using spectral reflectance imaging |
JP6248510B2 (ja) * | 2013-09-27 | 2017-12-20 | 株式会社ニコン | 形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、形状測定プログラム、及び記録媒体 |
EP3156763B1 (en) * | 2014-06-13 | 2019-02-06 | Nikon Corporation | Shape measurement device |
JP6728842B2 (ja) * | 2016-03-24 | 2020-07-22 | オムロン株式会社 | 光学計測装置 |
CN109313011A (zh) * | 2016-05-30 | 2019-02-05 | 索尼公司 | 信息处理装置、信息处理方法、程序和成像系统 |
CN106441138B (zh) * | 2016-10-12 | 2019-02-26 | 中南大学 | 基于视觉测量的变形监测方法 |
US10480935B2 (en) | 2016-12-02 | 2019-11-19 | Alliance For Sustainable Energy, Llc | Thickness mapping using multispectral imaging |
JP2022132827A (ja) * | 2021-03-01 | 2022-09-13 | オムロン株式会社 | 変位センサ及び状態監視方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4648717A (en) * | 1984-02-06 | 1987-03-10 | Robotic Vision Systems, Inc. | Method of three-dimensional measurement with few projected patterns |
US4650333A (en) * | 1984-04-12 | 1987-03-17 | International Business Machines Corporation | System for measuring and detecting printed circuit wiring defects |
US4891772A (en) * | 1987-04-15 | 1990-01-02 | Cyberoptics Corporation | Point and line range sensors |
US4846577A (en) * | 1987-04-30 | 1989-07-11 | Lbp Partnership | Optical means for making measurements of surface contours |
JPS63277910A (ja) * | 1987-05-09 | 1988-11-15 | Toshiba Mach Co Ltd | 赤外線厚さ計の検出信号処理方法 |
US5129010A (en) * | 1989-12-15 | 1992-07-07 | Kabushiki Kaisha Toyoto Chuo Kenkyusho | System for measuring shapes and dimensions of gaps and flushnesses on three dimensional surfaces of objects |
US5280542A (en) * | 1989-12-28 | 1994-01-18 | Kabushiki Kaisha Toyota Chuo Kenkyusho | XYZ coordinates measuring system |
JP3036103B2 (ja) | 1991-04-05 | 2000-04-24 | オムロン株式会社 | 画像処理装置および方法 |
JP2959875B2 (ja) | 1991-07-04 | 1999-10-06 | 松山株式会社 | 畝立て方法及び畝立て装置 |
US5668631A (en) * | 1993-12-20 | 1997-09-16 | Minolta Co., Ltd. | Measuring system with improved method of reading image data of an object |
US5546189A (en) * | 1994-05-19 | 1996-08-13 | View Engineering, Inc. | Triangulation-based 3D imaging and processing method and system |
JPH08219721A (ja) | 1995-02-14 | 1996-08-30 | Sony Corp | 画像処理装置 |
US5969820A (en) * | 1996-06-13 | 1999-10-19 | Canon Kabushiki Kaisha | Surface position detecting system and exposure apparatus using the same |
US6064759A (en) * | 1996-11-08 | 2000-05-16 | Buckley; B. Shawn | Computer aided inspection machine |
US5923427A (en) * | 1997-07-10 | 1999-07-13 | Banner Engineering Corporation | Optical triangulation distance sensing system and method using a position sensitive detector and an automatic power controlled light source |
JP3028945B2 (ja) * | 1998-04-17 | 2000-04-04 | 日本電気株式会社 | 多階調丸め補正処理方法およびパターン検査装置 |
-
2001
- 2001-01-31 WO PCT/JP2001/000656 patent/WO2001057471A1/ja active Application Filing
- 2001-01-31 JP JP2001556274A patent/JP3797422B2/ja not_active Expired - Lifetime
- 2001-01-31 US US09/937,480 patent/US6724491B2/en not_active Expired - Lifetime
- 2001-01-31 EP EP01902697A patent/EP1167918B1/en not_active Expired - Lifetime
- 2001-01-31 DE DE60139047T patent/DE60139047D1/de not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7024285B2 (ja) | 2017-09-26 | 2022-02-24 | オムロン株式会社 | 変位計測装置、システム、および変位計測方法 |
Also Published As
Publication number | Publication date |
---|---|
EP1167918B1 (en) | 2009-06-24 |
JP3797422B2 (ja) | 2006-07-19 |
EP1167918A4 (en) | 2006-11-22 |
US20020154318A1 (en) | 2002-10-24 |
EP1167918A1 (en) | 2002-01-02 |
WO2001057471A1 (fr) | 2001-08-09 |
JPWO2001057471A1 (ja) | 2004-08-26 |
US6724491B2 (en) | 2004-04-20 |
DE60139047D1 (de) | 2009-08-06 |
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