WO2003052347A3 - Verfahren zur dreidimensionalen messung einer oberfläche - Google Patents

Verfahren zur dreidimensionalen messung einer oberfläche Download PDF

Info

Publication number
WO2003052347A3
WO2003052347A3 PCT/EP2002/014915 EP0214915W WO03052347A3 WO 2003052347 A3 WO2003052347 A3 WO 2003052347A3 EP 0214915 W EP0214915 W EP 0214915W WO 03052347 A3 WO03052347 A3 WO 03052347A3
Authority
WO
WIPO (PCT)
Prior art keywords
dimensional measurement
partial region
partial
dimensional
progress
Prior art date
Application number
PCT/EP2002/014915
Other languages
English (en)
French (fr)
Other versions
WO2003052347A2 (de
Inventor
Ralf Christoph
Original Assignee
Werth Messtechnik Gmbh
Ralf Christoph
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Werth Messtechnik Gmbh, Ralf Christoph filed Critical Werth Messtechnik Gmbh
Priority to AU2002366374A priority Critical patent/AU2002366374A1/en
Priority to EP02804921A priority patent/EP1459033A2/de
Publication of WO2003052347A2 publication Critical patent/WO2003052347A2/de
Publication of WO2003052347A3 publication Critical patent/WO2003052347A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N13/00—Stereoscopic video systems; Multi-view video systems; Details thereof
    • H04N13/20—Image signal generators
    • H04N13/204—Image signal generators using stereoscopic image cameras
    • H04N13/207—Image signal generators using stereoscopic image cameras using a single 2D image sensor
    • H04N13/236—Image signal generators using stereoscopic image cameras using a single 2D image sensor using varifocal lenses or mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N13/00—Stereoscopic video systems; Multi-view video systems; Details thereof
    • H04N13/20—Image signal generators
    • H04N13/271—Image signal generators wherein the generated image signals comprise depth maps or disparity maps

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Die Erfindung bezieht sich auf ein Verfahren zur dreidimensionalen Messung einer Oberfläche (46) eines Objektes (48, 84) nach dem Autofokusprinzip mittels eines Koordinatenmessgerätes (10). Um eine hochauflösende Beschreibung von dreidimensionalen Oberflächen zu ermöglichen, wird vorgeschlagen, dass der Messbereich (32) in Teilbereiche (1, 2, 3, 4, 5, 6, 7, 8, 9) unterteilt wird und Kontrast jeden Teilbereichs während des Verfahrens eines optischen Sensors (28) entlang seiner optischen Achse (50) gleichzeitig oder im Wesentlichen gleichzeitig bestimmt wird.
PCT/EP2002/014915 2001-12-19 2002-12-19 Verfahren zur dreidimensionalen messung einer oberfläche WO2003052347A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2002366374A AU2002366374A1 (en) 2001-12-19 2002-12-19 Method for the three-dimensional measurement of a surface
EP02804921A EP1459033A2 (de) 2001-12-19 2002-12-19 Verfahren zur dreidimensionalen messung einer oberfläche

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE10162663.0 2001-12-19
DE10162663 2001-12-19
DE10219491 2002-04-30
DE10219491.2 2002-04-30

Publications (2)

Publication Number Publication Date
WO2003052347A2 WO2003052347A2 (de) 2003-06-26
WO2003052347A3 true WO2003052347A3 (de) 2004-03-25

Family

ID=26010811

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/014915 WO2003052347A2 (de) 2001-12-19 2002-12-19 Verfahren zur dreidimensionalen messung einer oberfläche

Country Status (3)

Country Link
EP (1) EP1459033A2 (de)
AU (1) AU2002366374A1 (de)
WO (1) WO2003052347A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE383817T1 (de) 2004-06-17 2008-02-15 Cadent Ltd Verfahren zum bereitstellen von daten im zusammenhang mit der mundhöhle
WO2008135530A1 (de) * 2007-05-02 2008-11-13 Werth Messtechnik Gmbh Verfahren für koordinatenmessgeräte mit bildverarbeitunssensor
DE102011114932A1 (de) * 2011-10-06 2013-04-11 Hommel-Etamic Gmbh Verfahren zur Ermittlung einer Kontur einer Oberfläche
DE102012109726A1 (de) 2012-09-04 2014-04-03 Werth Messtechnik Gmbh Verfahren und Vorrichtung zur Bestimmung der Geometrie eines Objektes mit einer Zoomoptik
DE102013105102A1 (de) 2013-03-28 2014-10-02 Werth Messtechnik Gmbh Verfahren und Vorrichtung zur Bestimmung von Merkmalen an Messobjekten
US9675430B2 (en) 2014-08-15 2017-06-13 Align Technology, Inc. Confocal imaging apparatus with curved focal surface
DE102015110289A1 (de) 2015-06-26 2016-12-29 Werth Messtechnik Gmbh Verfahren zur Bestimmung von Messpunkten auf der Oberfläche eines Werkzeugstücks mit einem optischen Sensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5151609A (en) * 1989-08-02 1992-09-29 Hitachi, Ltd. Method of detecting solid shape of object with autofocusing and image detection at each focus level
JPH1068608A (ja) * 1996-08-28 1998-03-10 Nikon Corp 高さ測定装置
WO2001033166A1 (de) * 1999-11-03 2001-05-10 Werth Messtechnik Gmbh Kontrastautofokus mit drei optischen wegen
US20010043335A1 (en) * 1993-12-20 2001-11-22 Toshio Norita Measuring system with improved method of reading image data of an object

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5151609A (en) * 1989-08-02 1992-09-29 Hitachi, Ltd. Method of detecting solid shape of object with autofocusing and image detection at each focus level
US20010043335A1 (en) * 1993-12-20 2001-11-22 Toshio Norita Measuring system with improved method of reading image data of an object
JPH1068608A (ja) * 1996-08-28 1998-03-10 Nikon Corp 高さ測定装置
WO2001033166A1 (de) * 1999-11-03 2001-05-10 Werth Messtechnik Gmbh Kontrastautofokus mit drei optischen wegen

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 08 30 June 1998 (1998-06-30) *

Also Published As

Publication number Publication date
AU2002366374A8 (en) 2003-06-30
EP1459033A2 (de) 2004-09-22
AU2002366374A1 (en) 2003-06-30
WO2003052347A2 (de) 2003-06-26

Similar Documents

Publication Publication Date Title
WO2003058158A3 (en) Stereoscopic three-dimensional metrology system and method
AU8336698A (en) Coordinate measuring instrument with feeler and optic sensor for measuring the position of the feeler
WO2002097869A8 (en) Method and apparatus to correct wafer drift
ATE314628T1 (de) Verfahren zur messung von oberflächeneigenschaften sowie koordinatenmessgerät
EP1254631A4 (de) Sonde zur aufnahme biologischer informationen, vorrichtung zur messung biologischer informationen, verfahren zur herstellung einer sonde zur aufnahme biologischer informationen und verfahren zur messung biologischer informationen
AU2002213943A1 (en) Method for measuring the geometry of an object by means of co-ordination measuring device
EP1260789A3 (de) Kalibrierungsverfahren für Messmaschinen
AU2003216997A1 (en) Dynamic artefact comparison
WO2002013140A3 (en) Camera calibration for three-dimensional reconstruction of objects
WO2003001143A3 (en) Apparatus and method for measuring aspherical optical surfaces and wavefronts
WO2003009070A3 (de) Verfahren zum messen eines objektes mit einem koordinatenmessgerät mit bildverarbeitungssensor
EP0911001A3 (de) Einrichtung zum Messen eines optischen, kennzeichnenden Parameters
SG147288A1 (en) Lithographic apparatus, device manufacturing method and angular encoder
WO1999006788A3 (de) Abstandsmessvorrichtung und verfahren zur bestimmung eines abstands
WO2002035177A3 (en) Dynamic angle measuring interferometer
WO2003052347A3 (de) Verfahren zur dreidimensionalen messung einer oberfläche
EP1650787A4 (de) Untersuchungsverfahren und untersuchungseinrichtung für ein optisches projektionssystem und herstellungsverfahren für ein optisches projektionssystem
WO2005067663A3 (en) Devices and methods for optical endpoint detection during semiconductor wafer polishing
AU2001242969A1 (en) Apparatus and method for determining spatial orientation
DE69927597D1 (de) Verfahren und Vorrichtung zur Falzwinkelmessung eines Blattes in einer Falzmaschine
WO2002010679A1 (fr) Systeme servant a mesurer la forme d'une surface
WO2003090172A8 (en) Calibration software for surface reconstruction of small objects
WO2005064410A8 (en) Lithographic apparatus and method of calibration
SE9301749D0 (sv) Metod och anordning foer att skapa en modell av en tandrestauration
WO2003044457A3 (en) Method and device for enlarging the measurement volume of an optical measurement system

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SK SL TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LU MC NL PT SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
WWE Wipo information: entry into national phase

Ref document number: 2002804921

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 2002804921

Country of ref document: EP

REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

WWW Wipo information: withdrawn in national office

Ref document number: 2002804921

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP