WO2000041220A1 - Transportvorrichtung - Google Patents
Transportvorrichtung Download PDFInfo
- Publication number
- WO2000041220A1 WO2000041220A1 PCT/DE2000/000044 DE0000044W WO0041220A1 WO 2000041220 A1 WO2000041220 A1 WO 2000041220A1 DE 0000044 W DE0000044 W DE 0000044W WO 0041220 A1 WO0041220 A1 WO 0041220A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- drive
- rollers
- drive rollers
- transport device
- webs
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
- B65G13/04—Roller-ways having driven rollers all rollers driven
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
- B65G13/06—Roller driving means
- B65G13/071—Roller driving means with frictional engagement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
Definitions
- Such a transport device known in the prior art is to be described below with an example relating to the transport of wafer carriers.
- transport devices can also be used for other containers if a corresponding question arises.
- the transport containers for semiconductor wafers are equipped on the side and bottom with two parallel webs that are used for transport in the transport device. These transport containers still protrude downwards between the webs.
- the known transport device takes this into account in that the webs are guided on short rollers which are mounted on side walls spaced apart from one another in parallel.
- the side panels are connected to one unit by means of spacer bolts. A free space is provided between the side walls into which the transport container protrudes. For this reason, the rollers are not continuous from one side wall to the other, but as flat ones Executed panes that protrude only slightly into the space between the side cheeks (see Fig. 1).
- a drive roller follows on one of the side walls after a number of rollers. It is typical, for example, that a drive roller is incorporated after every four rollers.
- the drive rollers are rotated by means of motors.
- the drive rollers can exert a driving force on the transport containers for further transport, they must protrude beyond an imaginary line which the rollers form on their circumference on the side facing the webs of the transport container, that is to say upwards.
- the invention is directed to a transport device in which a second drive roller is also driven.
- the invention is directed to a transport device in which two drive rollers coupled to one another face each other, both of which exert a uniform driving force on the webs of a container, so that the latter is transported linearly and smoothly.
- the invention is directed to a transport device in which a force coupling of two mutually opposite drive rollers takes place in such a way that a free space remains between them into which the transport container can protrude.
- the invention is directed to a transport device for containers with at least two parallel webs, which comprises at least two parallel rows of rollers on which the webs can run.
- the transport device is characterized by at least one group of drive rollers for transmitting a drive force to the webs, which comprises a primary drive roller and at least one secondary drive roller, each of the drive rollers being incorporated in a row of rollers, the primary drive roller being drivable or driven by means of a motor, and the drive rollers of the at least one group of drive rollers are coupled to one another in such a way that the primary drive roller drives or can drive the at least one secondary drive roller.
- the drive rollers of the at least one group of drive rollers are preferably coupled to one another via a power transmission shaft.
- a power transmission shaft For example, spaced-apart side cheeks are provided, on which the rows of rollers and the drive rollers are arranged.
- the drive rollers of the at least one group of drive rollers can be mounted opposite one another in the side cheeks.
- the rollers preferably form an imaginary line with respect to the webs of the containers that can be transported on their circumference facing the container, the drive rollers projecting over this imaginary line in order to be able to transmit the driving force to the webs.
- Additional drive wheels for transmitting the drive force to the webs can be arranged on the drive rollers.
- the drive wheels or the drive rollers directly can be coated with rubber coverings or otherwise provided in order to improve the friction between them and the webs.
- the power transmission between the drive rollers can be effected in that at least two transmission wheels are arranged on the power transmission shaft, one of the transmission wheels being in contact with the primary drive roller and transmitting its rotation to the power transmission shaft, and the at least second transmission wheel rotating the power transmission shaft to the at least one transmits a secondary drive roller.
- the power transmission can again be supported by rubber pads that are attached to the drive rollers / wheels and the transmission wheels.
- FIG. 1 shows a side view of the transport device according to the invention with a cross section through the side cheeks.
- 2 shows the perspective view of an embodiment of the invention, in which a side cheek is shown.
- the generic transport device typically consists of two lateral guides in which the different rollers are mounted.
- Fig. 1 two side cheeks 1, 2 are shown, which serve this purpose and at the same time distance the device from the base 3 to such an extent that the transport container 4, here a wafer carrier, can run on the rollers without problems, without its projecting area on Get stuck underground 3 or other parts of the device.
- the side cheeks can be connected to the ground or can be spaced apart from one another in a defined manner by means of spacer bolts.
- rollers 5, 6 are arranged, which e.g. are supported with ball bearings in the side cheeks 1, 2.
- the rollers rotate freely in their bearings when the web of a transport container 4 runs over them.
- the rollers 5, 6 in Fig. 1 have a rubber covering that the adhesion between the rollers 5,
- a secondary drive roller 9 is arranged, which according to the invention with the primary drive roller
- a power transmission shaft 17 which the force of the primary drive roller 7 by means of a Power transmission shaft 17 attached transmission wheel 16 receives and forwards via a further transmission wheel 15 to the secondary drive roller 9.
- the transmission wheels 15, 16 are placed on shaft holders 18, 19, which serve to connect the transmission wheels 15, 16 to the shaft 17.
- the power transmission shaft 17 is supported with its end regions, the two bearing shafts 22 and 23, in two bearings 21, 22 which are arranged in the side cheeks 1, 2.
- the coupling shown in Fig. 1 is a mechanical one. It ensures the same sizes for the drive rollers 7, 9 and the transmission wheels 15, 16 provided that the at least two drive rollers 7, 9 move at the same peripheral speed and thus a more uniform transport of the transport containers 4 is possible than in the prior art.
- a sensor can be attached to the primary drive roller 7, which determines its speed and forwards this information to a controller which, by means of a second motor, always keeps the speed of the secondary drive roller 9 at the same value as the speed of the first drive roller 7 sets.
- the two drive rollers 7, 9 are provided with drive wheels 13, 14, which enlarge the circumference of the central rollers of the drive rollers 7, 9 and represent the actual contact surface with the transmission wheels 15, 16.
- All contact surfaces of the drive rollers, drive wheels and transmission wheels can be provided with a rubber surface in order to improve the friction with one another or with the webs of the transport containers.
- the power transmission from / to the drive rollers / transmission wheels is carried out by gears, for this purpose on the drive rollers in addition to the drive wheels 13, 14, on which the webs of the transport containers 4 run, gears arranged on the central roller are, which come into engagement with the transmission wheels 15, 16 designed as gear wheels.
- At least one group of drive rollers is provided, which consists of at least two drive rollers, a primary drive roller 7 driven by the motor and a secondary drive roller 9 coupled to this.
- Such an arrangement enables, for example, the transport of wider transport containers 4, for which it is desirable for structural reasons to additionally support them in the middle.
- a plurality of primary drive rollers 7, which belong to different groups of drive rollers (7, 9), can also be driven by a common motor 8.
- This embodiment is particularly suitable for lighter transport containers in order to reduce the system costs.
- Such a drive can be accomplished, for example, by means of gears instead of the motors 8 and a toothed chain leading around all the gears and the common drive motor.
- Fig. 2 shows a perspective view of a side cheek with rollers and drive rollers.
- the side cheek 1 is shown as an example, on which the secondary drive rollers 9 are arranged.
- the same reference numerals designate the same elements as in FIG. 1.
- a drive roller 9 follows here on three rollers 5. It is, however, also possible to place more or fewer rollers between the individual drive rollers 7, 9.
- the distance between see the drive rollers 7, 9 must in any case be such that a group of drive rollers 7, 9 can transport a transport container 4 to a safe contact with the next group of drive rollers 7, 9.
- the distance is preferably selected so that at any one time at least one group of drive rollers (7, 9) can drive the webs on the containers 4.
- rollers 5, 6 are shown in FIG. 2 at a close distance from one another and from the drive rollers 7, 9. However, it is also possible to increase the distance, provided that the safe transport of containers 4 remains guaranteed.
- the side walls and rollers in such a way that cornering is possible.
- the corresponding elements must be arranged so that a container 4 does not e.g. can get stuck on the side walls. Since the outside of a container must move faster than the inside when driving through curves, it is still necessary to run the drive wheels at different speeds. This can be achieved, for example, by designing the two transmission wheels to be of different sizes in order to achieve a translation.
- the present invention solves the problem more unevenly
- Transport movements that occurred with previous transport devices achieves an exact, linear linear movement of the transport container.
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020017008601A KR20010089784A (ko) | 1999-01-08 | 2000-01-05 | 수송 장치 |
JP2000592864A JP2002534800A (ja) | 1999-01-08 | 2000-01-05 | 搬送装置 |
EP00904837A EP1142000A1 (de) | 1999-01-08 | 2000-01-05 | Transportvorrichtung |
US09/901,542 US20020032496A1 (en) | 1999-01-08 | 2001-07-09 | Transport device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19900461.7 | 1999-01-08 | ||
DE19900461A DE19900461C2 (de) | 1999-01-08 | 1999-01-08 | Transportvorrichtung |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/901,542 Continuation US20020032496A1 (en) | 1999-01-08 | 2001-07-09 | Transport device |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000041220A1 true WO2000041220A1 (de) | 2000-07-13 |
Family
ID=7893786
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2000/000044 WO2000041220A1 (de) | 1999-01-08 | 2000-01-05 | Transportvorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US20020032496A1 (de) |
EP (1) | EP1142000A1 (de) |
JP (1) | JP2002534800A (de) |
KR (1) | KR20010089784A (de) |
DE (1) | DE19900461C2 (de) |
WO (1) | WO2000041220A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10303195A1 (de) * | 2003-01-24 | 2004-08-05 | HAP Handhabungs-, Automatisierungs- und Präzisionstechnik GmbH | Fördervorrichtung für einen Transport von Wafer aufnehmenden Behältnissen in Reinräumen |
US7077264B2 (en) * | 2003-01-27 | 2006-07-18 | Applied Material, Inc. | Methods and apparatus for transporting substrate carriers |
DE10315505B4 (de) * | 2003-04-04 | 2005-07-28 | Siemens Ag | Fördersystem mit Kurve für Behälter, insbesondere eine Flughafen-Gepäckförderanlage |
EP1452464A1 (de) | 2003-02-27 | 2004-09-01 | Siemens Aktiengesellschaft | Kurve eines Fördersystems für Behälter insbesondere eine Flughafen-Gepäckförderanlage |
EP1510477A1 (de) * | 2003-09-01 | 2005-03-02 | Siemens Aktiengesellschaft | Reibrollentrieb für auf Tragrollen verfahrbare Skids |
CN1976851B (zh) * | 2004-07-22 | 2011-06-15 | 平田机工株式会社 | 搬送装置 |
TWI317722B (en) | 2006-10-30 | 2009-12-01 | Au Optronics Corp | Conveyer |
DE102019128780A1 (de) * | 2019-10-24 | 2021-04-29 | Ersa Gmbh | Transporteinheit zum Transportieren von Leiterplatten und Lötanlage |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3768416A (en) * | 1971-05-18 | 1973-10-30 | Interlake Inc | Metal runners for pallet |
GB2004243A (en) * | 1977-09-15 | 1979-03-28 | Hammond T | Powered conveyors |
FR2499032A1 (fr) * | 1981-01-30 | 1982-08-06 | Ceraver | Dispositif d'orientation sur une aire plane d'un objet presentant une base d'appui et un code d'orientation |
FR2624837A1 (fr) * | 1987-12-21 | 1989-06-23 | App Mat Servitudes | Systeme de convoyage pour atelier d'usinage a plusieurs postes de travail |
US5038922A (en) * | 1990-09-05 | 1991-08-13 | The Interlake Companies, Inc. | High speed line shaft conveyor |
FR2700526A1 (fr) * | 1993-01-15 | 1994-07-22 | Hobart Sa Cie | Machine pour le transfert de plateaux. |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3936842A1 (de) * | 1989-11-06 | 1991-05-08 | Hls Halbleiter Produktionstech | Foerdervorrichtung fuer traeger von waferscheiben |
JPH06156723A (ja) * | 1992-11-18 | 1994-06-03 | Sony Corp | マガジン搬送機構 |
JPH09235010A (ja) * | 1996-02-28 | 1997-09-09 | Dainippon Screen Mfg Co Ltd | 基板搬送装置 |
-
1999
- 1999-01-08 DE DE19900461A patent/DE19900461C2/de not_active Expired - Fee Related
-
2000
- 2000-01-05 KR KR1020017008601A patent/KR20010089784A/ko active IP Right Grant
- 2000-01-05 WO PCT/DE2000/000044 patent/WO2000041220A1/de active IP Right Grant
- 2000-01-05 EP EP00904837A patent/EP1142000A1/de not_active Withdrawn
- 2000-01-05 JP JP2000592864A patent/JP2002534800A/ja active Pending
-
2001
- 2001-07-09 US US09/901,542 patent/US20020032496A1/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3768416A (en) * | 1971-05-18 | 1973-10-30 | Interlake Inc | Metal runners for pallet |
GB2004243A (en) * | 1977-09-15 | 1979-03-28 | Hammond T | Powered conveyors |
FR2499032A1 (fr) * | 1981-01-30 | 1982-08-06 | Ceraver | Dispositif d'orientation sur une aire plane d'un objet presentant une base d'appui et un code d'orientation |
FR2624837A1 (fr) * | 1987-12-21 | 1989-06-23 | App Mat Servitudes | Systeme de convoyage pour atelier d'usinage a plusieurs postes de travail |
US5038922A (en) * | 1990-09-05 | 1991-08-13 | The Interlake Companies, Inc. | High speed line shaft conveyor |
FR2700526A1 (fr) * | 1993-01-15 | 1994-07-22 | Hobart Sa Cie | Machine pour le transfert de plateaux. |
Also Published As
Publication number | Publication date |
---|---|
EP1142000A1 (de) | 2001-10-10 |
DE19900461C2 (de) | 2002-10-31 |
DE19900461A1 (de) | 2000-07-13 |
US20020032496A1 (en) | 2002-03-14 |
JP2002534800A (ja) | 2002-10-15 |
KR20010089784A (ko) | 2001-10-08 |
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