WO2000000832A1 - Procede de detection d'informations de base et multi-detecteur d'informations de base et detecteur d'acceleration montes dans une automobile - Google Patents

Procede de detection d'informations de base et multi-detecteur d'informations de base et detecteur d'acceleration montes dans une automobile Download PDF

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Publication number
WO2000000832A1
WO2000000832A1 PCT/JP1999/003282 JP9903282W WO0000832A1 WO 2000000832 A1 WO2000000832 A1 WO 2000000832A1 JP 9903282 W JP9903282 W JP 9903282W WO 0000832 A1 WO0000832 A1 WO 0000832A1
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WO
WIPO (PCT)
Prior art keywords
sensor
angular velocity
weight
capacitance
acceleration
Prior art date
Application number
PCT/JP1999/003282
Other languages
English (en)
Japanese (ja)
Inventor
Jun Mizuno
Kay Nottmeyer
Masanori Amemori
Yoshitaka Kanai
Original Assignee
Zexel Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10196520A external-priority patent/JP2000019198A/ja
Priority claimed from JP11045706A external-priority patent/JP2000081448A/ja
Application filed by Zexel Corporation filed Critical Zexel Corporation
Publication of WO2000000832A1 publication Critical patent/WO2000000832A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Definitions

  • the present invention relates to a sensor for detecting acceleration or the like acting on a moving body such as a vehicle, and more particularly to a method for easily detecting acceleration, angular velocity, and angular acceleration of a moving body such as a vehicle, and a sensor therefor.
  • an occupant protection device is provided as a device for protecting an occupant from a collision of the moving object, and the occupant protection device is provided with a moving device for controlling its operation.
  • Body acceleration is required as one piece of information.
  • acceleration may be used as one important, so-called basic information in determining the operation control in the operation control of the vehicle itself.
  • a vehicle acceleration is configured to be used as one of important basic information in the operation control. Most were.
  • research has been conducted to detect the rolling of the vehicle in addition to the acceleration of the vehicle, and to take this into consideration in the operation control of the vehicle. This is because vehicle accidents are caused not only by vehicles but also by fatal occupants caused by rolling of vehicles, which account for 45% of all vehicle accidents. It is based on the survey results.
  • sensors for detecting acceleration and the like for example, those disclosed in Japanese Patent Application Laid-Open No. HEI 8-178952 and Japanese Patent Application Laid-Open No. H08-30445 are known. Has become.
  • a weight body made of silicon is provided rotatably and displaceably between two glass substrates.
  • the two glass substrates and the weight body have a so-called three-layer structure. They are common in that they are arranged so that The sensor having such a configuration is configured so that, for example, displacement of the weight due to the action of acceleration is output as a change in capacitance between the electrode and the weight disposed on the glass substrate. Is what it is.
  • the part supporting the weight on the two glass substrates is formed of the same silicon member as the weight, and the bonding with the two glass substrates is performed, for example, by the bonding In a state where the portion is heated to a predetermined high temperature (for example, about 400 ° C.), a publicly-known anodic bonding method is often used.
  • a predetermined high temperature for example, about 400 ° C.
  • FIGS. 22 and 23 show an example of a configuration of a conventional sensor having a so-called three-layer structure as described above.
  • Frames 104 and supporting columns 106 supporting the weights 103 ′ are joined to 101 and 102, respectively, and the toe extending from the supporting columns 106 is connected to the frame 104.
  • the weight body 103 ' is rotated by the chambers 107a and 107b. And displaceable.
  • the glass substrates 101, 102, the frame 104, and the support pillar 106 are separated. Due to the difference in the coefficient of thermal expansion from the silicon to be formed, the portions of the glass substrates 101 and 102 that are not bonded to the frame 104 and the support columns 106 are deformed outwardly convex. In some cases (see Fig. 23).
  • Such deformation of the glass substrates 101 and 102 is caused by the weight (not shown) between the weight body 103 'which should be kept constant and the electrodes (not shown) formed on the glass substrates 101 and 102. Changing the interval causes an output error and causes a problem that reliability is impaired.
  • An object of the present invention acceleration, another object of the can detect the angular velocity and angular acceleration.
  • An object of the present invention is to provide a method for detecting angular velocity and angular acceleration using a multi-sensor.
  • Another object of the present invention is to provide a highly reliable acceleration sensor having a simple configuration, capable of reliably maintaining a constant distance between the weight body and the electrode, and having stable output characteristics.
  • Another object of the present invention is to provide a robust acceleration sensor which can prevent breakage due to large deflection of the weight due to excessive impact, and another object of the present invention is to provide a viscous air. It is an object of the present invention to provide an acceleration sensor that suppresses damping due to vibration and has good responsiveness at a high frequency. Disclosure of the invention
  • a weight plate made of a semiconductor member is provided between two insulating substrates so as to be rotatable and displaceable about a torsion bar.
  • a first sensor and a second sensor configured to output capacitance between the electrodes disposed on the two insulating substrates and the weight,
  • the torsion bars of each of the first and second sensors are arranged along the vertical direction, and the torsion bars of each of the first and second sensors are arranged on a plane of a plate-shaped member with respect to a predetermined straight line.
  • a multi-sensor for basic information on a moving body which is arranged on the plane of the member formed in a plate shape so that each virtual line passing through the center of the sensor at right angles to the sensor forms the same angle.
  • the moving object basic information multi-sensor The moving object basic information multi-sensor
  • a through-hole is formed in the center of the weight body, and a support pillar formed in a pillar shape is provided inside the through-hole.
  • a member is extended and its end is joined to the inner wall of the through hole,
  • the support pillar has a thickness in the opposite direction of the two insulating substrates set to be larger than the weight plate, and both ends thereof are joined to the two insulating substrates.
  • a first acceleration detecting electrode, a first angular velocity detecting electrode, and a second angular velocity detecting electrode are provided on a surface of the first insulating substrate facing the weight plate.
  • the first acceleration detection electrode as a center, the first angular velocity detection electrode is disposed on the left side thereof, and the second angular velocity detection electrode is disposed on the right side thereof, respectively.
  • a second acceleration detecting electrode, a third angular velocity detecting electrode, and a fourth angular velocity detecting electrode are provided on a surface of the second insulating substrate opposed to the weight body.
  • the third angular velocity detecting electrode is located on the left side
  • the fourth angular velocity detecting electrode is located on the right side. Is arranged as
  • the capacitance between the second acceleration detection electrode and the weight in each of the first sensor and the second sensor and the capacitance between the first acceleration detection electrode and the weight In the case where the difference from the capacitance is the same value, it is determined that the acceleration acts in a direction parallel to a predetermined straight line on the plane of the plate-shaped member, and the electrostatic capacitance is determined.
  • the magnitude of the acceleration is determined by the magnitude of the difference in capacitance
  • the direction of acceleration is determined by the sign of the difference in capacitance
  • the second acceleration detecting electrode and the weight in the first sensor are determined.
  • a difference between the capacitance between the first acceleration detection electrode and the weight between the first acceleration detection electrode and the weight, and the difference between the second acceleration detection electrode and the weight in the second sensor A difference between the capacitance between the first acceleration detection electrode and the weight between the first acceleration detection electrode and the weight, and the difference between the second acceleration detection electrode and the weight in the second sensor.
  • the difference between the capacitance between the first acceleration detecting electrode and the weight between the first acceleration detection electrode and the weight Is the opposite sign and the absolute value is the same value, it is determined that the acceleration acts in a direction orthogonal to a predetermined straight line on the plane of the plate-shaped member,
  • the direction of acceleration is determined by a combination of the sign of the capacitance difference by the first sensor and the sign of the capacitance difference by the second sensor, and the direction of the acceleration is determined by the first sensor or the second sensor.
  • the magnitude of the acceleration is determined by the magnitude of the difference in the capacitance
  • the subtraction value from the above is the opposite sign, and the absolute value is the same value, it is determined that the angular velocity having the plane predetermined straight line of the plate-shaped member as the rotation center axis has acted.
  • the sign of the subtraction value of the first sensor and the sign of the subtraction value of the second sensor to determine the direction of angular velocity, wherein the subtraction value of the first sensor or the second sensor is determined.
  • the magnitude of the angular velocity is determined based on the magnitude of A value obtained by adding a capacitance between the third angular velocity detection electrode and the weight plate to a capacitance between the second angular velocity detection electrode and the weight plate, and the first sensor A subtraction value between a value obtained by adding a capacitance between the fourth angular velocity detection electrode and the weight plate to a capacitance between the first angular velocity detection electrode and the weight plate at ,
  • the capacitance between the fourth angular velocity detection electrode and the weight plate is added to the capacitance between the first angular velocity detection electrode and the weight plate in the second sensor.
  • an acceleration having basically the same configuration Capable of detecting degrees and angular velocities and outputting a capacitance value as a detection output
  • capacitance type two sensors are arranged in a predetermined arrangement, and the capacitance of each of the two sensors Acceleration, angular velocity and angular acceleration can be obtained by comparing the magnitude relationship of the output and the sign.
  • a weight plate made of a semiconductor member is provided between the two insulating substrates so as to be rotatable and displaceable about the torsion bar, and is disposed on the two insulating substrates.
  • the first sensor and the second sensor are connected to the respective torsion bars of the first and second sensors.
  • a multi-sensor for basic information on a moving body which is arranged on a plane of the member formed in a plate shape so as to form the same angle, wherein a through-hole is formed in a center of the weight, A support pillar formed in a pillar shape is provided inside the through hole.
  • a torsion bar extends from a pair of opposing side surfaces of the side surfaces of the support column, and ends thereof are joined to an inner wall of the through hole;
  • the support pillar has a thickness in the opposite direction of the two insulating substrates set to be larger than the weight plate, and both ends thereof are joined to the two insulating substrates.
  • a first acceleration detecting electrode, a first angular velocity detecting electrode, and a second angular velocity detecting electrode are provided on a surface of the first insulating substrate facing the weight plate.
  • the first acceleration detection electrode is disposed at the center
  • the first angular velocity detection electrode is disposed on the left side thereof
  • the second angular velocity detection electrode is disposed on the right side thereof, respectively.
  • a second acceleration detecting electrode is provided on a surface of the second insulating substrate facing the weight. Pole, a third angular velocity detecting electrode and a fourth angular velocity detecting electrode, with the second acceleration detecting electrode as a center, the third angular velocity detecting electrode on the left side thereof, and the third angular velocity detecting electrode on the right side thereof. 4 angular velocity detecting electrodes are arranged so as to be located respectively,
  • a capacitance between the first and second acceleration detecting electrodes and the weight plate; and a capacitance between the first to fourth angular velocity detecting electrodes and the weight. are provided so as to be able to output.
  • acceleration and angular velocity having basically the same configuration can be detected, and a capacitance value is output as a detection output. It is characterized in that two sensors are arranged on a flat member so that acceleration, angular velocity, and angular acceleration can be detected by comparing the capacitance outputs of the two sensors. It has.
  • the second and third angular velocity detecting electrodes of the first sensor, the first and fourth angular velocity detecting electrodes, and the weight are connected to the input stage,
  • a first capacitance which is a sum of a capacitance generated between the second angular velocity detection electrode and the weight and the capacitance generated between the third angular velocity detection electrode and the weight.
  • a second capacitance which is a sum of a capacitance generated between the first angular velocity detection electrode and the weight and the capacitance generated between the fourth angular velocity detection electrode and the weight.
  • a first control unit that calculates and outputs a difference from the angular velocity capacitance;
  • the first and second acceleration detecting electrodes of the first sensor and the body are connected to the input stage,
  • a second control unit that calculates and outputs a difference between a capacitance generated between the first acceleration detection electrode and the weight
  • the second and third angular velocity detecting electrodes of the second sensor, the first and fourth angular velocity detecting electrodes, and the weight are connected to the input stage,
  • the capacitance generated between the first angular velocity detecting electrode of the second sensor and the weight of the second sensor, the fourth angular velocity detecting electrode of the second sensor, and the second A third control unit that calculates and outputs a difference from a fourth angular velocity capacitance, which is the sum of the capacitance generated between the sensor and the weight, and
  • the first and second acceleration detecting electrodes of the second sensor and the weight are connected to the input stage,
  • a fourth control unit that calculates and outputs the difference between the capacitance generated between the sensor and the weight, and
  • a first subtractor that calculates and outputs a difference between a calculation output signal of the first control unit and a calculation output signal of the third control unit;
  • a first adder that calculates and outputs a sum of the operation output signal of the first control unit and the operation output signal of the third control unit;
  • An operation output signal of the second control unit and the fourth control unit A second subtractor for calculating and outputting a difference from a calculation output signal of the trolley unit;
  • a second adder that calculates and outputs a sum of a calculation output signal of the second control unit and a calculation output signal of the fourth control unit;
  • a low-pass filter connected to an output stage of the first subtractor and passing a signal of a predetermined low frequency band
  • a first buffer amplifier that is connected to the output stage of the one-pass filter and performs buffer amplification of an input signal
  • a second buffer amplifier connected to an output stage of the first adder and configured to perform buffer amplification of an input signal
  • a third buffer amplifier connected to an output stage of the second subtractor and configured to perform buffer amplification of an input signal
  • a fourth buffer amplifier connected to the output stage of the second adder and configured to perform buffer amplification of an input signal.
  • the second and third angular velocity detecting electrodes of the first sensor, the first and fourth angular velocity detecting electrodes, and the weight are connected to the input stage.
  • a first capacitance which is a sum of a capacitance generated between the second angular velocity detection electrode and the weight and the capacitance generated between the third angular velocity detection electrode and the weight.
  • a second capacitance which is a sum of a capacitance generated between the first angular velocity detection electrode and the weight and the capacitance generated between the fourth angular velocity detection electrode and the weight.
  • a first control unit for calculating and outputting a difference from the angular velocity capacitance;
  • the first and second acceleration detecting electrodes of the first sensor and the weight are connected to the input stage,
  • a second control unit calculates the difference between the capacitance generated between the second acceleration detection electrode and the weight and the capacitance generated between the first acceleration detection electrode and the weight.
  • the second and third angular velocity detecting electrodes of the second sensor, the first and fourth angular velocity detecting electrodes, and the weight are connected to the input stage,
  • the capacitance generated between the first angular velocity detecting electrode of the second sensor and the weight of the second sensor, the fourth angular velocity detecting electrode of the second sensor, and the second A third control unit that calculates and outputs a difference from a fourth angular velocity capacitance, which is a sum of the capacitance generated between the sensor and the weight, and
  • the first and second acceleration detecting electrodes of the second sensor and the weight are connected to the input stage,
  • a fourth control unit that calculates and outputs the difference between the capacitance generated between the sensor and the weight, and
  • a first low-pass filter that allows a signal of a predetermined low frequency band of the operation output signal of the first control unit to pass therethrough;
  • a second low-pass filter for passing a signal of a predetermined low frequency band of the operation output signal of the third control unit;
  • a first subtractor that calculates and outputs a difference between the output signal of the first mouth-to-pass filter and the output signal of the second mouth-to-pass filter;
  • a first adder for calculating and outputting the sum of the operation output signal of the first control unit and the operation output signal of the third control unit;
  • a second subtractor that calculates and outputs a difference between a calculation output signal of the second control unit and a calculation output signal of the fourth control unit;
  • a second adder that calculates and outputs a sum of a calculation output signal of the second control unit and a calculation output signal of the fourth control unit;
  • a first buffer amplifier connected to an output stage of the first subtractor and configured to perform buffer amplification of an input signal
  • a second buffer amplifier connected to an output stage of the first adder and configured to perform buffer amplification of an input signal
  • a third buffer amplifier connected to an output stage of the second subtractor and configured to perform buffer amplification of an input signal
  • a fourth buffer amplifier connected to the output stage of the second adder and configured to perform buffer amplification of an input signal.
  • a weight body made of a semiconductor member is provided between two insulating substrates having electrodes disposed on opposing flat surfaces in accordance with a force applied from the outside.
  • the acceleration sensor provided so that the interval of
  • a structure provided with a plurality of support pillars penetrating the weight body and having end faces joined to the two insulating substrates.
  • the area of the member joined to the two insulating substrates is increased as compared with the conventional case, so that the two The distortion of the insulating substrate is suppressed.
  • the weight body is provided with a plurality of through holes corresponding to the number of the plurality of support columns, and the plurality of support columns are made to pass through the plurality of through holes.
  • FIG. 1 is a plan view schematically showing a configuration of a multi-sensor for basic information on a moving object and an attached state to a vehicle according to an embodiment of the present invention.
  • FIG. 2 is an overall perspective view of a disassembled state showing a configuration example of a g- ⁇ sensor configuring a multi-sensor for mobile object basic information.
  • FIG. 3 is a plan view of a frame and a body disposed inside the frame.
  • FIG. 4 is a sectional view taken along line AA of FIG.
  • FIG. 5 is an explanatory diagram illustrating the principle of detecting acceleration by the g- ⁇ sensor alone.
  • FIG. 6 is an explanatory diagram for explaining the principle of detecting the angular velocity by the g- ⁇ sensor alone.
  • FIG. 7 is an explanatory diagram illustrating the principle of detecting angular acceleration by the g-t sensor alone.
  • FIG. 8 is an explanatory diagram for explaining the principle of detecting acceleration by the moving object basic information multi-sensor according to the embodiment of the present invention
  • FIG. 8 (A) shows that the acceleration along the longitudinal direction of the vehicle acts.
  • FIG. 8 (B) is an explanatory diagram for explaining a case where an acceleration is applied along the lateral direction of the vehicle.
  • FIG. 9 shows a multi-sensor for basic information of a moving object according to an embodiment of the present invention.
  • FIG. 4 is an explanatory diagram for explaining a principle of detecting an angular velocity according to FIG.
  • FIG. 10 is an explanatory diagram explaining the principle of detecting angular acceleration by the moving object basic / information multi-sensor according to the embodiment of the present invention.
  • FIG. 11 is a flowchart showing a procedure of detecting acceleration, angular velocity and angular acceleration by CPU.
  • FIG. 12 is a configuration diagram showing a configuration example of the arithmetic unit and a connection example with the first and second g- ⁇ sensors.
  • FIG. 13 is a configuration diagram showing another configuration example of the arithmetic and logic units together with the first and second g- ⁇ sensors.
  • FIG. 14 is a schematic diagram showing an example of mounting the first and second g- ⁇ sensors
  • FIG. 14 (A) is a schematic diagram showing a first mounting example
  • FIG. 14 (B) is a schematic diagram showing a second mounting example
  • FIG. 14 (C) is a schematic diagram showing a third mounting example.
  • FIG. 15 is a plan view of a second layer portion in the first configuration example of the acceleration sensor according to the embodiment of the present invention.
  • FIG. 16 is a longitudinal sectional view of the acceleration sensor according to the first configuration example shown in FIG. 15 taken along the line AA in FIG.
  • FIG. 17 is a plan view of a second layer portion of the acceleration sensor of the second configuration example.
  • FIG. 18 is a plan view of a second layer portion of the acceleration sensor of the third configuration example.
  • 9 is a plan view of a second layer portion of the acceleration sensor according to the fourth configuration example.
  • ⁇ FIG. 20 is a plan view of a second layer portion of the acceleration sensor according to the fifth configuration example.
  • FIG. 22 is a plan view of a second layer portion of the acceleration sensor according to the sixth configuration example.
  • FIG. 22 is a plan view of a second layer portion of the conventional acceleration sensor.
  • FIG. 23 is a vertical cross-sectional view of the conventional acceleration sensor taken along a line BB in FIG. BEST MODE FOR CARRYING OUT THE INVENTION
  • the multi-sensor S for mobile object basic information is provided, for example, at an appropriate position substantially at the center of the vehicle M, and its detection output is used for operation control of an airbag device or the like.
  • the moving object basic information multi-sensor s includes two sensors having basically the same configuration, that is, first and second g- ⁇ sensors 50 and 51. And the first glass substrate 1 ⁇ ⁇ ⁇ constituting the second g— ⁇ sensors 50, 51, etc. (details will be described later). Along the center of each g- ⁇ sensor 50, 51 in the direction perpendicular to the transfer chambers 12A, 13A (12B, 13B) described later.
  • the virtual straight lines (see dotted lines in FIG. 1) are provided at appropriate intervals on the substrate 52, which is a plate-shaped member, so that the virtual straight lines (see the dotted lines in FIG. See).
  • the arrangement of the first and second g- ⁇ sensors 50 and 51 on the substrate 52 is a straight line passing through the center on the substrate 52 (a straight line represented by a chain line in FIG. 1).
  • a virtual straight line passing through the center of the first g— ⁇ sensor 50 in a direction orthogonal to the later-described torsion bar — 1 2 ⁇ , 13 ⁇ of the first g— ⁇ sensor 50 See the dotted line in Fig. 1) and the angle ⁇ , which is perpendicular to the second g- ⁇ sensor 51 1 In the direction, the second g - and the angle theta 2 which forms virtual straight line (see dotted lines in FIG.
  • U is the acceleration in the forward direction of vehicle U
  • U' is the acceleration in the backward direction of vehicle ⁇
  • V is the acceleration in the left direction of vehicle ⁇
  • V ' is the acceleration of vehicle ⁇ .
  • ⁇ is a roll (rol 1) generated in the vehicle ⁇ , that is, assuming a virtual axis along the front-rear direction of the vehicle M and passing through the center of the substrate 52, the center of this axis is This is an action that causes a rotational motion, in other words, an angular velocity.
  • ⁇ ′ is a force (y aw) generated in the vehicle ⁇ , that is, an effect generated by the rotation of the vehicle M, in other words, means an angular acceleration.
  • 2 to 4 show specific configuration examples of the first and second g— ⁇ sensors 50 and 51. The configuration and the like will be described below with reference to FIG.
  • the first configuration will be described in the following description.
  • g the sign of the component of the ⁇ sensor 50, followed by the parentheses to indicate the sign of the corresponding component of the second g — ⁇ sensor 51;
  • the description of the configuration of the second g — ⁇ sensor 51 is replaced with the following.
  • the horizontal axis of the first and second g— ⁇ sensors 50 and 51 (in the figure, the horizontal direction in the drawing) is the X axis.
  • the thickness direction of the second g- ⁇ sensors 50 and 51 (the vertical direction in the drawing) is defined as the ⁇ axis, and the axis perpendicular to the X ⁇ axis is defined as the ⁇ axis.
  • the first g- ⁇ sensor 50 (51) is generally called an electrostatic capacitance type, and an electrostatic capacitance is obtained as a detection output.
  • the frame 4A (4B) is formed by using silicon to form a shape that appears on the XY plane in a so-called frame shape.
  • the first and second glass substrates 1A and 2A (IB, 2B) are joined to the peripheral portions (see FIG. 4).
  • the weight 3 A (3 B) is disposed slightly biased to one side in the Y-axis direction, and the weight 3 A (3 B) )
  • first to sixth electrode connection columns 5A to 10A (5B to 10B) are arranged at appropriate intervals in the X-axis direction. (See Figures 2 and 3).
  • the weight 3A (3B) is formed entirely in a flat plate using silicon. As will be described later, a support column 11A (11B) and a toshiyo provided at the center thereof are provided. Between the first and second glass substrates 1A, 2A (IB, 2B) via the members 12A, 13A (12B, 13B). A, 13 A (12 B, 13 B) is provided so as to be able to rotate around the center (12 B, 13 B) (details will be described later).
  • the weight 3A (3B) has a thickness in the Z-axis direction set to be slightly smaller than that of the frame 4A (4B), and the first and second glass substrates 1 A, 2 A (IB, 2 B) and a gap is formed between them (see FIG. 4). At the center of the weight 3 A (3 B), there is a support column 11 A ( 1 1 B) and toe
  • the chambers 12A and 13A (12B, 13 ⁇ ) are provided integrally with the weight 3A (3 ⁇ ).
  • a through hole 14 A (14 B) of an appropriate size is formed, and a support pillar 11 A (1 B) formed in a column shape is provided substantially at the center of the through hole 14 A (14 B). 1 B) is provided (see FIGS. 2 to 4).
  • the support column 11A (11B) has the same thickness in the Z-axis direction as that of the frame 4A (4B), and both end surfaces in the Z-axis direction
  • the first and second glass substrates 1A and 2A (IB, 2B) are bonded to each other (see FIG. 4).
  • a torsion bar 12A.13A (12B, 13B) is extended from a pair of opposing side portions of the support column 11A (11B), and the end thereof is provided.
  • the part is joined so as to be integral with the weight 3 A (3 B) (see FIGS. 2 and 3). That is, in the embodiment of the present invention, among the four side surfaces of the support pillar 11A (11B), the tonsion chambers 12A, 12A, and 12A, from the center of a pair of side surfaces facing each other in the Y-axis direction. 13A (12B.13B) extends in the Y-axis direction (see Fig. 3).
  • the torsion bar 12A, 13A (12B, 13B) has a rectangular cross section in the XZ plane. More specifically, the torsion bar 1 2A and 13A (12B and 13B) have a narrower width in the X-axis direction than their length in the Z-axis direction.
  • the thickness of the weight 3A (3B) is the same as the thickness in the Z-axis direction (see Fig. 4).
  • Both ends of the torsion chambers 12A and 13A (12B, 13B) are connected to the inner wall of the through hole 14A (14B) so that the weight 3 It is formed integrally with A (3B) (see Fig. 2).
  • the weight 3A (3B) is rotatable about the torsion bars 12A and 13A (12B and 13B) as described later. It can be displaced in the Z-axis direction.
  • the first to sixth electrode connection columns 5A to 10A made of silicon are provided. (5B to 10B) (see Figs. 2 and 3).
  • the first to sixth electrode connection columns 5A to 10A are formed in a columnar shape, and the thickness in the Z-axis direction is It is set almost the same as that of (4B).
  • the first to sixth electrode connection pillars 5A to 10A (5B to 10B) have end faces in the Z-axis direction, the first to sixth lead pieces 20a to 20f described later. (21a to 21f), and provided on the first and second glass substrates 1A, 2A (IB, 2B) at substantially the center of the end face.
  • the corresponding first to sixth wiring connection holes 15 a to 15 f (16 a to 16 f) are arranged.
  • first and second glass substrates 1A and 2A (IB, 2B) have substantially the same outer shape and dimensions in the XY plane as those of the frame 4A (4B). Electrodes are formed on the surface facing the body 3A (3B) as described below.
  • the outer shape is made rectangular by using a conductive member (for example, IT ⁇ ) on the surface facing the weight 3A (3B).
  • the formed first acceleration detecting electrode 17 A (17 B) is disposed substantially at the center, and a suitable gap is provided on both sides thereof with the first acceleration detecting electrode 17 A (17 B).
  • the first and second angular velocity detecting electrodes 18 A, 19 A formed in a rectangular shape using a conductive member (for example, IT ⁇ ). (18 B, 19 ⁇ ) are provided (see Fig. 2 and Fig. 4).
  • known and well-known manufacturing techniques such as vacuum deposition can be applied.
  • the first acceleration detecting electrode 17 A (17 B) is larger than the first and second angular velocity detecting electrodes 18 A, 19 A (18 B, 19 B).
  • the central part is cut out in a rectangular shape so as to avoid contact with at least the end face of the support column 11A (11B). (See Figure 2).
  • the first acceleration detecting electrode 17 A (17 B) and the portion of the weight 3 A (3 B) facing the first acceleration detecting electrode 17 A (17 B) also has a first angular velocity detecting electrode 18 A (18 B) and a weight body opposed to the first angular acceleration detecting electrode 18 A (18 B).
  • a so-called parallel plate capacitor C la at the portion of 3 A (3 B) further includes a second angular velocity detecting electrode 19 A (19 B) and a second angular velocity detecting electrode 19 A
  • a so-called parallel plate capacitor C lb is formed between (19 B) and the opposing portion of the weight 3A (3B).
  • the first glass substrate 1A (IB) has first to sixth electrode connection columns 5A to 10A (5B to 10B) at positions facing the first to sixth electrode connection columns 5A to 10B, respectively.
  • Sixth wiring connection holes 15a to 15f (16a to 16f) are formed (see FIG. 2).
  • the first wiring member located at the fourth wiring connection hole 15 d (16 d) side is used. From the edge of the speed detection electrode 17 A (17 B), a fourth lead piece 20 d (2 I d) made of a conductive material is applied.Fourth wiring connection hole 15 d (16 d) It is formed up to the part of the opening (see Fig. 2).
  • a sixth member made of a conductive member is formed.
  • the lead piece 20 f (21 f) is formed up to the opening of the sixth wiring connection hole 15 f (16 f) (see FIG. 2).
  • the first glass substrate 1A (1B) has a seventh wiring connection hole 15g (16) at a position where the end surface of the support pillar 11A (11B) is joined. g) is drilled.
  • first to seventh wiring connection holes 15a to 15g (16a to 16g) are filled with a metal material, and the first to sixth electrode connection columns 5A to A so-called omic contact is generated between 10 A (5B to 10B) and the support column 11A (11B).
  • the first to seventh wiring connection holes 15a to 15g (16a to 16g) are inserted so that a lead wire (not shown) is partially exposed.
  • the first lead electrode 17A (17B) and the first and second angular velocity detection electrodes 18A, 19A (1 8B, 19B) can be connected to an external circuit.
  • a second acceleration detecting electrode 22A (22B), and third and fourth angular velocity detecting electrodes 23A and 24A of a second glass substrate 2A (2B) described later. (23B, 24B) can also be connected to external circuits.
  • the first acceleration detecting electrodes 17A (17B) and the first and second acceleration detecting electrodes 17A (17B) are provided on the surface facing the weight 3A (3B). Same shape as second angular velocity detection electrode 18 A, 19 A (18 B, 19 B) Electrodes 22 A (22 B) and third and fourth electrodes for angular velocity detection made of a conductive member (for example, ITO, etc.) having the same dimension.
  • a conductive member for example, ITO, etc.
  • 23A and 24A are provided (see Fig. 2).
  • a known or well-known manufacturing technique such as vacuum evaporation can be applied.
  • a so-called parallel plate capacitor C 2a is formed by 3 A (23 B) and the portion of the weight 3 A (3 B) opposed to the third angular velocity detecting electrode 23 A (23 B). , A fourth angular velocity detecting electrode 24 A (24 B), and a portion of the weight 3 A (3 B) facing the fourth angular velocity detecting electrode 24 A (24 B).
  • a so-called parallel plate capacitor C 2b is formed.
  • a first lead-out piece made of a conductive member is connected to an end of the third angular velocity detection electrode 23 A (23 B) located on the first electrode connection column 5 A (5 B) side.
  • the 20a (21a) force is formed up to a position facing the end face of the first electrode connection column 5A (5B) (see FIG. 2).
  • a third lead-out piece made of a conductive member extends from the edge of the second acceleration detecting electrode 22A (22B) located on the third electrode connecting column 7A (7B) side.
  • 20 c (21 c) is formed up to a position facing the end face of the third electrode connection pillar 7 A (7 B) (see FIG. 2).
  • a fifth pulling electrode made of a conductive member is connected to an end of the fourth electrode for detecting angular velocity 24 A (24 B) located on the side of the fifth electrode connecting pole 9 A (9 B).
  • the extension piece 20 e (21 e) is formed up to a position facing the end face of the fifth electrode connection pillar 9 A (9 B) (see FIG. 2).
  • the first and second g- ⁇ sensors 50.5 1 are such that each of the torsions 12 1, 13A (12B, 13B) is perpendicular to the substrate 52. And a virtual line that passes through the center of the first g- ⁇ sensor 50 and is orthogonal to the torsion bar 12 2.
  • the first and second g- ⁇ sensors 50 and 51 having the above-described configuration are preferably manufactured by a so-called well-known and well-known micromachining manufacturing technique.
  • the first acceleration detection is performed through a lead wire (not shown) provided in the fourth wiring connection hole 15d (16d).
  • the second electrode 17A (17B) is connected to the second acceleration detecting electrode 2 via a lead wire (not shown) provided in the third wiring connection hole 15c (16c).
  • 2 A (22 B) is connected to an arithmetic unit 30 provided outside, respectively, while a lead wire (not shown) provided in a seventh wiring connection hole 15 g (16 g) is provided.
  • the capacitance of the parallel plate capacitor C1 and the capacitance of the parallel plate capacitor C2 are input to the arithmetic unit 30.
  • the arithmetic unit 30 performs an operation as described later based on the capacitance of each of the parallel plate capacitors CI and C2, and outputs a voltage signal according to the operation result.
  • the arithmetic unit 30 having such a function is easily realized by using, for example, a so-called CPU, and is a publicly-known or well-known one.
  • the distance between the first acceleration detecting electrode 17 A (17 B) on the first glass substrate 1 A (IB) and the weight 3 A (3 B) is equal to (See Figure 5).
  • 1 is the length of the receivers 12A and 13A (12B.13B) (see Fig. 3)
  • E Young's modulus
  • I is Toshiyo
  • 13A (12B, 13B) is the second moment of area
  • b is the width of the torsion bar 1A, 13A (12B, 13B).
  • d is the height (thickness in the Z-axis direction) of the total chambers 12A, 13A (12B, 13B) (see Fig. 4)
  • F is The force applied to an object weighing m when the acceleration g acts on the object.
  • this arithmetic expression is a well-known and well-known formula used when calculating the deflection of a so-called “beam”. It is.
  • the acceleration g acts on the so-called parallel plate capacitors C1 and C2, so-called electrode interval, that is, the first acceleration detecting electrode 17A (17B) and the weight 3A (3B) And the capacitance when the distance between the second acceleration detecting electrode 22A (22B) and the weight 3A (3B) is changed can be obtained based on the following basic formula.
  • the acceleration g acts as shown in FIG. 5
  • the so-called electrode spacing in the parallel plate capacitor C1 is small, so that the capacitance is set to C lg.
  • the capacitance is set to C lg.
  • the formulas of C lg and C 2g are as follows: The initial capacitance C Bitcoin, the change in capacitance corresponding to the change in the so-called electrode spacing ⁇ m ′ l 3 ′ g Z (2E′b′d 3 ′ d.) ⁇ C. is added when the so-called electrode spacing is reduced, and is subtracted when the so-called electrode spacing is increased.
  • the capacitance change is proportional to the acceleration g. Also, as described in the equation for the amount of displacement ⁇ , since the amount of displacement ⁇ is proportional to the acceleration g, it can be said that the change in capacitance is proportional to the amount of displacement ⁇ . .
  • the magnitude of the acceleration g can be known by knowing the capacitance change.
  • the arithmetic unit 30 calculates the difference (C2g-Clg) between the capacitance changes of the capacitors C1 and C2.
  • the arithmetic unit 30 outputs a voltage signal Vout having a magnitude corresponding to the arithmetic value of (C 2g -C lg). That is, this voltage signal V out also takes into account the sign of (C2g-C lg). Even if the absolute value of (C 2g-C lg) is the same, (C2g-C lg) Different voltage values are set in advance when the operation value of is a positive sign and when the operation value is a negative sign, and are output. Therefore, the voltage signal Vout indicates the magnitude and direction of the acceleration g.
  • the first angular velocity detecting electrode 18A (18B) is centered on the receiver 12A, 13A (12B, 13B). And the distance between the weight 3A (3B) and the fourth angular velocity detecting electrode 24A (24B) and the weight 3A (3B) are reduced, and the second angular velocity The distance between the electrode 19A (19B) and the weight 3A (3B) and the distance between the third angular velocity detecting electrode 23A (23B) and the weight 3A (3B) Assuming that an expanding angular acceleration wZdt) acts, let ⁇ be the tilt angle of the weight 3A (3B) from the horizontal state in this case.
  • the angular acceleration can be obtained by knowing the amount of change in the capacitance of the parallel plate capacitors C la, C lb, C 2a, and C 2b.
  • J is the moment of inertia of the weight 3 A (3 B)
  • ⁇ is the angular velocity
  • m is the weight of the weight 3 A (3 B)
  • L is the weight 3A (3B) is the horizontal length (see Fig. 3)
  • D is the vertical length of the weight 3A (3B) (see Fig. 3).
  • the weight 3A (3B) is rotated around the torsion angle ⁇ around the toys bar 12 A, 13 A (12 B, 13 B), and the torsion bar
  • the torsional moment Mt generated at 12 A, 13 A (12 B, 13 ⁇ ) is expressed by the following equation (6).
  • G is the shear modulus of the toy bar 12 A, 13 A (12 B, 13 B)
  • IP is the torsion bar 12 A, 13 A (12 B,
  • 13 B is the cross-sectional secondary moment of moment
  • b is the width of the torsion bar 12 A, 13 A (12 B, 13 B)
  • d is the width of the torsion bar 1 2 A
  • r means 1 of the lateral length L of the cone 3 A (3 B).
  • Equation 11 rearranging using Equation 8 for a shown earlier gives Equation 11 as follows.
  • This equation is the initial capacity C.
  • capacity variation that corresponds to the change in the so-called electrode interval [ ⁇ m 'l (L - - D') (dco / dt) ⁇ Z ⁇ G ⁇ b ⁇ d (b 2 + d 2) d. ⁇ ] C , is added when the so-called electrode spacing is reduced, and is subtracted when the so-called electrode spacing is increased.
  • the capacitance change is proportional to the angular acceleration (d Zdt). Also, as described in the equation for the torsion angle, the torsion angle is proportional to the angular acceleration (dco / dt), so the capacitance change is proportional to the torsion angle a. It can be said that there is.
  • the first angular velocity detecting electrode 18A (18B) is connected to the fourth angular velocity detecting electrode 24A (24B).
  • the parallel plate capacitor C lb and the parallel plate capacitor C 2a are connected in parallel, and the total capacity of these two capacitors is input to the arithmetic unit 30.
  • C is the sum of the capacitance of the parallel plate capacitor C la and the capacitance of the parallel plate capacitor C 2b when the angular acceleration is applied, and the capacitance of the parallel plate capacitor C lb and the parallel plate capacitor C Assuming that the sum of the capacitances of 2a is C 2 , the arithmetic unit 30 calculates (C no — C,).
  • ⁇ Cno ⁇ m ⁇ 1 (L 2 -D 2 ) (dco / dt) ⁇ / ⁇ G ⁇ b ⁇ d (b 2 + d 2) d. ⁇ C. It is expressed as
  • the weight 3 A (3 B) rotates in the opposite direction to that shown in FIG.
  • the capacitance of the parallel plate capacitors C lb and C 2 a increases, and the capacitance of the parallel plate capacitors C la and C 2 b is increased.
  • the capacity will be reduced. Therefore, the calculated value of ( C2l -C, ⁇ ') is 4 ⁇ C, and the sign is different from the previous case.
  • the magnitude of the angular acceleration can be known from the magnitude of the calculated value of (C 2 ⁇ '- C,), and the direction of the angular acceleration can be known from the sign.
  • (C,gue) is determined according to the correspondence between the predetermined magnitude and sign of (C 2 , - ⁇ C, profession ′) and the magnitude of the voltage signal V ou ′. , '-C,,), the voltage signal V om is output in accordance with the result of the operation.
  • FIG. 7 shows a model obtained by further modeling the first g- ⁇ sensor 50 in a state where it is arranged as shown in FIG. 1. Referring to FIG. I will explain it.
  • the virtual g axis is centered on the virtual rotation axis (the two-dot chain line in FIG. 7).
  • the angular velocity ⁇ acts in a so-called clockwise direction when the axis is viewed from the near side of the axis of rotation (the side opposite to the end with the arrow of the axis of rotation).
  • the direction is orthogonal to the virtual rotation axis and the virtual centrifugal force F 2 acts in a direction away from the rotation axis (see FIG. 7).
  • ⁇ 2 ⁇ -(R-r -sin0)
  • m is the weight of the weight 3 A (3 B)
  • ⁇ is the angular velocity.r is the length of 1/2 of the horizontal length L of the weight 3 A (3 B).
  • ⁇ is a virtual center line (indicated by a dashed line in FIG. 7) and a weight 3 A which are parallel to the virtual rotation axis and pass through the center point 0 of the weight 3 A (3 B). This is the angle made with the horizontal axis of (3B) (see Fig. 7).
  • F 2 ′ are the components of the centrifugal force F or F 2 in the direction orthogonal to the horizontal axis of the weight 3 A (3 B) (see FIG. 7).
  • the weight 3A (3B) stops when the torsional moment Mt and the preceding rotational moment M are balanced, and rotates by the angle ⁇ with respect to the position before the angular velocity acts. Become.
  • Equation 14 Equation 6
  • This equation is the initial capacity C.
  • the capacitance change corresponding to the change in the electrode spacing ⁇ (1 2 ⁇ ⁇ 1 ⁇ ⁇ 3 ⁇ ⁇ 2 ) / (G-b-d (b 2 + d 2 ) d o) ⁇ C is added when the electrode spacing is reduced, and is subtracted when the electrode spacing is increased c.
  • the change in capacitance is proportional to the angular velocity ⁇ .
  • the torsion angle ⁇ is proportional to the angular velocity ⁇ , so the change in capacitance is proportional to the torsion angle ⁇ . You can also.
  • each electrode is performed as in the case of the angular acceleration. That is, as shown in FIG. 6, the first angular velocity detecting electrode 18 A (18 B) is connected to the fourth angular velocity detecting electrode 24 A (24 B), and the arithmetic unit is connected. 30 is connected to one input terminal, and the second angular velocity detecting electrode 19 A (19 B) and the third angular velocity detecting electrode 23 A (23 B) are connected. 0 Connect to the other input terminal and connect the weight 3 A (3 B) to the ground ⁇ In other words, the rotation of the weight 3 A (3 B) causes the same change in capacitance as the parallel plate The capacitors are connected in parallel. That is, the parallel plate capacitor C la and the parallel plate capacitor C 2b are connected in parallel, and the total capacitance of these two capacitors is input to the arithmetic unit 30.
  • the parallel plate capacitor C lb and the parallel plate capacitor C 2a are connected in parallel, and the total capacity of these two capacitors is input to the arithmetic unit 30.
  • C and ⁇ are the sum of the capacitance of the parallel plate capacitor C la and the capacitance of the parallel plate capacitor C 2b when the angular velocity acts, and the capacitance of the parallel plate capacitor C lb and the parallel plate capacitor
  • the sum of the capacitances of C 2a is C 2 ( Then, in the arithmetic unit 30, (C 2 ⁇ —C, ⁇ ) is calculated.
  • the magnitude of the angular velocity can be known from the magnitude of the calculated value of (C ⁇ — c 1 ( ware), and the direction of the angular velocity can be known from the sign thereof.
  • FIG. 8 to 10 when the first and second g- ⁇ sensors 50 and 51 are arranged as shown in FIG. 1, in particular, as in FIG.
  • the model of the weight 3A (3B) is indicated by a solid line or a dotted line as described below.
  • acceleration detection will be described with reference to FIGS. 8 (A) and 8 (B).
  • Fig. 8 (A) when the forward direction of the vehicle (not shown) is set to the direction shown by the solid line arrow, the acceleration in the opposite direction to the forward direction (in Fig. 8 (A)).
  • both the weights 3 3 and 3 ⁇ ⁇ ⁇ ⁇ are in the equilibrium state before the acceleration is applied.
  • the vehicle is displaced by the same amount of displacement in the forward direction of the vehicle, in other words, in the direction opposite to the direction in which the acceleration acts (Fig.
  • the arithmetic unit 30 outputs the output as described above with reference to FIG. With the voltage signal Vout, the magnitude and direction of the acceleration can be known.
  • FIG. 8 (B) when the right direction of the vehicle (not shown) is the direction indicated by the solid arrow, the direction is opposite to the right direction, that is, the left direction.
  • an acceleration indicated by a two-dot chain line arrow in FIG. 8 (B) acts, the weights 3 ⁇ and 3 ⁇ of the first and second g— ⁇ sensors 50 and 51 both
  • the weight 3 in the first g- ⁇ sensor 50 is different from the case shown in Fig. 8 ( ⁇ ).
  • the weight 3 ⁇ of the first g- ⁇ sensor 50 is displaced toward the first glass substrate 1 A, and the capacitance of the parallel plate capacitor C 1 is increased. This state is indicated by a + sign), whereas the weight 3 of the second g— ⁇ sensor 51 is displaced toward the second glass substrate 2 ⁇ and parallelized.
  • the capacitance of the plate capacitor C1 decreases (in FIG. 8 ((), such a state is represented by one symbol).
  • the magnitude and direction of the acceleration can be obtained by obtaining the voltage signal Vout from the arithmetic unit 30 for the first and second g ⁇ sensors 50 and ⁇ 1. be able to. That is, for example, the voltage signal by the arithmetic unit 30 based on the output of the first g— ⁇ sensor 50 when the acceleration as shown in FIG.
  • the voltage is a predetermined voltage corresponding to the state of being displaced to the ⁇ ⁇ side by a predetermined amount of displacement, it can be determined that acceleration has acted in the direction shown in Fig. 8 ( ⁇ ). Moreover, the magnitude of the acceleration can be known from the magnitude of the voltage signal Vout or Vout2 '.
  • the voltage signal obtained by the arithmetic unit 30 based on the output of the first g— ⁇ sensor 50 is obtained by VoiH
  • the voltage signal obtained by the arithmetic unit 30 based on the output of the second g— ⁇ sensor 51 is obtained by VoiH
  • the voltage signal obtained by the arithmetic unit 30 based on the output of the second g— ⁇ sensor 51 is obtained by VoiH
  • a virtual rotation center axis represented by a two-dot chain line in Fig. 9 is the center, and this rotation center axis is a so-called clock when viewed from the near side of the rotation center axis (the tip side with the arrow and the opposite side). It is assumed that angular velocity acts in the circumferential direction.
  • the weights 3 ⁇ , 3 ⁇ of the first and second g— ⁇ sensors 50, 51 are in the equilibrium state before the angular velocity acts (the position indicated by the dotted line in FIG. 9). ), The position shifts to the position indicated by the solid line in FIG. That is, while the weight 3 ⁇ of the first g— ⁇ sensor 50 is displaced toward the first glass substrate 1 A side with respect to the center point 0 with respect to the center point 0, The right part is displaced toward the second glass substrate 2A.
  • the weight 3 B of the second g— ⁇ sensor 51 is centered on the center point ⁇ , and the left part in FIG. The portion on the right side of the center point ⁇ is displaced toward the first glass substrate 1B while being displaced toward the plate 2B.
  • the sum of the capacitance of the parallel plate capacitor C la and the capacitance of the parallel plate capacitor C 2b, and the capacitance of the parallel plate capacitor C lb the magnitude relation between C 2 omega is the sum of the capacitance of the parallel plate capacitor C 2a, C lw> C 2 w , and the is computed by the computing equipment 3 0 described previously (C 2 ⁇ - C, The value of 1U ) is negative. In Fig. 9, such a state is represented by a symbol.
  • the magnitude relationship between the voltage signals Vou respectively obtained by the arithmetic unit 30 is also determined by the weight 3A > 3B as described above. Since it depends on the displacement, in other words, on the magnitude and direction of the angular velocity, the direction of the angular velocity can be known from the magnitude relation, and the angular velocity can be known from the magnitude.
  • the Rukoto Since it depends on the displacement, in other words, on the magnitude and direction of the angular velocity, the direction of the angular velocity can be known from the magnitude relation, and the angular velocity can be known from the magnitude.
  • a so-called counterclockwise direction is set around a virtual center point ⁇ ′ at an equal distance from the first and second g ⁇ sensors 50 and 51.
  • angular acceleration (dco / dt) acts on.
  • the weights 3 A, 3 ⁇ of the first and second g ⁇ sensors 50, 51 are positioned in an equilibrium state before the angular acceleration acts (shown by a dotted line in FIG. 10). From the position shown in the figure) to the position shown by the solid line in FIG. In other words, the weight 3 A of the first g— ⁇ sensor 50 has its left portion displaced toward the second glass substrate 2 A side in FIG. The portion on the right side of the point O is displaced toward the first glass substrate 1A.
  • the weight 3 ⁇ of the second g— ⁇ sensor 51 has a center point ⁇ as a center, and the left portion in FIG. 10 is displaced toward the second glass substrate 2 ⁇ , while the center point ⁇ The portion on the right side of ⁇ ⁇ is displaced to the first glass substrate 1 ⁇ side.
  • C lw ′ which is the sum of the capacitance of the parallel plate capacitor C la and the capacitance of the parallel plate capacitor C2b, and the capacitance of the parallel plate capacitor C lb the magnitude relation between C 2 Bruno is the sum of the capacitance of the capacitor and the parallel plate capacitor C 2a, C, is computed by the computing unit 3 0 as described in FIG. 6 ⁇ C Bruno, and the first (C '-The value of C,,) is positive. In FIG. 10, such a state is indicated by a + sign.
  • the multi-sensor for mobile object basic information includes a voltage signal of each of the arithmetic devices 30 based on the outputs of the first and second g- ⁇ sensors 50 and 51.
  • the magnitude and direction of each of the acceleration, angular velocity, and angular acceleration can be known from the magnitude relation of, but the magnitude relation of each voltage signal is determined using, for example, a so-called CPU. It is preferable that the control is performed by a control device (not shown) provided in the vehicle and performing various so-called electronic controls in the vehicle.
  • the CPU configuring the arithmetic unit 30 and the CPU configuring the control device described above are shared, and a series of processing is performed by the CPU. May be performed.
  • FIG. 11 shows an example of a basic processing procedure when a series of processing is performed using the CPU in such a manner.
  • the processing procedure will be described below with reference to FIG. .
  • This series of processes for example, This is executed as a subroutine process in the so-called main routine process.
  • the capacitances of the first and second g- ⁇ sensors 50 and 51 are input (see step 100 in FIG. 11). That is, as described earlier with reference to FIGS. 5 and 6, the parallel plate capacitors C l, C 2, C 1 a, C lb, of the first and second g- ⁇ sensors 50, 51 respectively.
  • the capacitance values for C 2a and C 2b will be read into the CPU (not shown).
  • the difference in the capacitance change is calculated based on the capacitance value input as described above (see step 102 in FIG. 11). That is, previously mentioned as first and second g- omega sensor 5 0, 5 1 of each marked with a (C 2g- C lg), ( C 2 ⁇ - C, ⁇ ) and (C 2 l ,, '— C, ⁇ ) will be calculated respectively.
  • the value of sin ⁇ cos® in Equation 14 is no longer “1 Z 2”, and the constant “1 2” in Equation 15 is different from that of the other angles corresponding to the angle at that time. It is a numerical value.
  • FIGS. 12 to 14 a configuration of an arithmetic unit to which the first and second g- ⁇ sensors 50 and 51 having the above-described configuration are connected to calculate and output a value such as an angular velocity based on an input signal Examples will be described with reference to FIGS. 12 to 14.
  • a value such as an angular velocity based on an input signal Examples
  • FIGS. 12 and 13 three-dimensional X, ⁇ , ⁇ by three axes orthogonal to each other. The coordinates will be defined.
  • the ⁇ axis runs along the vertical direction.
  • the arithmetic unit 30 # in this configuration example includes first to fourth control units (in FIG. 12, "CZU (1)”, “CZU (2)”, “CZU (3)”, 3 1 to 3 4, first and second subtracters 35 and 36, first and second adders 37 and 38, and low-pass fill It is configured to include a receiver 39 and first to fourth buffer amplifiers 40 to 43.
  • the first control unit 31 has first and second input terminals 44 a and 44 b for the first C / U, and a first common terminal 44 c.
  • the second angular velocity detecting electrode 19 ⁇ of the first g— ⁇ sensor 50 and the third angular velocity detecting electrode 23 A are connected, A first angular velocity detecting electrode 18A and a fourth angular velocity detecting electrode 24A are connected to the first CZU second input terminal 44b.
  • first common terminal 44 c is used in common with the second control unit 32 described below, and the support column 11 A of the first g—Co sensor 50 is used.
  • the connection is made via the conductive material filled in the seventh wiring connection hole 15 g (see FIG. 2).
  • the weight 3A is connected to the first common terminal 44c.
  • the second angular velocity detecting electrode 1 is connected between the first C terminal U first input terminal 44 a and the first common terminal 44 c.
  • Parallel plate capacitor formed between 9 A and weight 3 A Capacitance of C lb and third plate for angular velocity detection 23
  • Parallel plate capacitor formed between weight 3 A and weight 3 A The sum of the capacitances of C 2a C ⁇ '(first angular velocity capacitance) is obtained.
  • the first control unit 31 calculates and outputs the difference (C 2 , NO ⁇ C) between the above-mentioned capacitance C 2 and capacitance C, and outputs the result.
  • the output signal of the first control unit 31 is supplied to the first subtractor 3 5 and the first adder 37, respectively (see Fig. 12).
  • the second control unit 32 has first and second input terminals 45 a and 45 b for the second C / U, and a first common terminal 44 c.
  • the first g- ⁇ sensor 50 first acceleration detecting electrode 17 ⁇ is connected to the CZU first input terminal 45 a of the second CZU, and the second CZU second input terminal
  • the second acceleration detecting electrode 22 A is connected to 45 b.
  • the first acceleration detection electrode 1 is connected between the second CZU first input terminal 45a and the first common terminal 44c.
  • the capacitance C lg of the parallel plate capacitor C 1 formed between 7 A and the weight 3 A is obtained, while the second CZU second input terminal 45 b and the first common
  • the capacitance C 2g of the parallel plate capacitor C2 formed between the second acceleration detecting electrode 22A and the weight 3A is obtained between the terminal 44c and the terminal 44c.
  • the second control unit 32 calculates and outputs the difference between the above-mentioned capacitances C 2g and C lg (C 2g ⁇ C lg), and the output signal is It is configured to be input to the second subtractor 36 and the second adder 38, respectively (see FIG. 12).
  • the third and fourth control units 33, 34 are for the second g- ⁇ sensor 51, and the third control unit 33 is for the first control unit.
  • the fourth control unit 34 has the same configuration and function as the first control unit 32, and the fourth control unit 34 has the same configuration and function as the second control unit 32.
  • the third input terminal 46 a for C / U is connected to the second angular velocity detecting electrode 19 ⁇ of the second g— ⁇ sensor 51 and the third angular velocity detecting electrode 23 ⁇ ⁇ is connected, and the third C ZU second input terminal 46 b is connected to the first C ZU.
  • the angular velocity detecting electrode 18 B and the fourth angular velocity detecting electrode 24 B are connected.
  • the second common terminal 46 c is used in common with the fourth control unit 34 described below, and the support column 11 ⁇ of the second g— ⁇ sensor 51 The connection is made via the conductive material filled in the wiring connection hole 16 g (see Fig. 2). In other words, the weight 3B is connected to the second common terminal 46c.
  • the second angular velocity detecting electrode 1 is connected between the third C / U first input terminal 46a and the second common terminal 46c.
  • Parallel plate capacitor formed between 9 B and weight 3 B Capacitance of C lb and third plate for angular velocity detection 23
  • Parallel plate capacitor formed between weight 3 B and weight 3 B The sum of the capacitances of C 2a, C 2 ( , ⁇ (third angular velocity capacitance), is obtained.
  • the third control unit 33 calculates and outputs the difference (C no -C, mecanic) between the above-mentioned capacitance C 2 and the capacitance C lw ′.
  • the output signal of the third control unit 33 is input to the first subtractor 35 and the first adder 37 (see FIG. 12).
  • the fourth control unit 34 has first and second input terminals 47a and 47b for the fourth CZU and a second common terminal 46c.
  • the first acceleration detection electrode 17 ⁇ of the second g— ⁇ sensor 51 is connected to the first input terminal 47 a for ZU, and the second input terminal for C / U is connected to the fourth g— ⁇ sensor 51.
  • the second acceleration detecting electrode 22B is connected to 47b.
  • the first acceleration detection electrode is provided between the fourth C / U first input terminal 47a and the second common terminal 46c. While the capacitance C lg of the parallel plate capacitor C 1 formed between 17 B and the weight 3 B is obtained, the fourth C ZU second input terminal 47 b and the second Between the second acceleration detecting electrode 22B and the weight 3B between the common terminal 46c and the common terminal 46c of the parallel plate capacitor C2. Become.
  • the fourth control unit 34 calculates and outputs the difference between the above-mentioned capacitances C 2g and C lg (C 2g-C lg), and the output signal is It is configured to be input to the second subtractor 36 and the second adder 38, respectively (see FIG. 12).
  • the second g— ⁇ sensor 51 obtained in the fourth control unit 34 (C 2g—C lg) is hereinafter referred to as (C 2g—C lg) for convenience. ) I will express it as two.
  • the first subtractor 35 is configured to output the calculated force signal (C 2 (—Ch no)) of the first control unit 31 described above and the calculated output signal (C C of the third control unit 33). 2 , no -C, ( ) 2 is input, and the difference between the input signals, that is, ⁇ (C 2 no-C, no) 1 (C 2 no-C, ⁇ ') ⁇ is The operation output signal of the first subtractor 35 is input to the one-pass filter 39. It has become to be.
  • the low-pass filter 39 is provided to pass only a signal in a predetermined low frequency band among the frequency components of the operation output signal from the first subtractor 35.
  • the filter is set so as to pass a signal having a frequency of 5 to 10 Hz or less.
  • the operation output signal of the first subtractor 35 represents the magnitude of the angular velocity.
  • the speed of the movement is generally about 500 It is about msec.
  • the optimal frequency component of the signal measured by the moving object basic information multi-sensor S according to the present invention is approximately 5 Hz or less.
  • a first pass filter 35 is provided at the output side of the first subtractor 35. Have been. As a result, the signal-to-noise ratio is improved.
  • the second subtractor 36 is used to calculate the above-described calculated force signal (C 2 g—C lg) of the second control unit 32 and to calculate the fourth control unit 34.
  • the output signal (C2g-Clg) is input, and the difference between the input signals, that is, ((C2g-Clg)-(C2g-Clg), ⁇ is calculated. , Is output.
  • the operation output signal is output to the outside via the third buffer amplifier 42.
  • the second adder 38 outputs the above-described calculated force signal (C 2g—C lg) of the second control unit 32 and the operation output signal (C 2g—C of the fourth control unit 34).
  • C lg) 2 and the sum of the input signals, that is, ⁇ (C 2g ⁇ C lg) tens (C 2g—C lg) ⁇ is calculated and output. Has become.
  • the operation output signal is output to the outside via the fourth buffer amplifier 43.
  • the first and second g- ⁇ sensors 50 and 51 are fixed to a mounting jig 45 having orthogonal plane portions, and first, referring to FIG. As described above, it is assumed that virtual straight lines passing through the centers of the respective g — ⁇ sensors 50 and 51 are arranged at appropriate positions on the vehicle so as to be orthogonal to each other.
  • the angle ⁇ 2 between the imaginary straight line passing through the center of the second g — ⁇ sensor 5 1 and the ⁇ axis is set to 45 degrees in the direction orthogonal to It has become something.
  • the first and second g- ⁇ sensors 50 and 51 are arranged as shown in FIG. 12 and acceleration acts in the X-axis direction.
  • the first g— ⁇ sensor 50 has a direction perpendicular to the weight 3 ⁇ according to the magnitude of the acceleration in the X-axis direction.
  • a force acts in the direction of X 1 (see FIG. 12), and in the second g— ⁇ sensor 51, the direction of X 2 that is perpendicular to the weight 3 ((see FIG. 12) The force acts on.
  • the second control unit 32 sends a signal (C2g—Clg) according to the force acting in the X1 direction (see FIG. 12) via the second control unit 32.
  • (C2g-Clg) is obtained according to the force acting in the X2 direction (see FIG. 12) via the fourth control unit 34.
  • the second control unit 32 (C 2g—C lg) and the fourth control unit 34 (C 2 2g—C lg)
  • the sum of the two is output from the fourth buffer amplifier 43 as the value of the acceleration in the X-axis direction. That is, in the arithmetic unit 3OA, the output characteristics of the first g—sensor 50 and the second g— ⁇ sensor 51 are taken into account, and so on. From the viewpoint of obtaining a high measured value, the sum of (C2g-Clg) and (C2g-Clg) 2 is made to correspond to the acceleration value in the X-axis direction.
  • the operation is basically the same as when the acceleration in the X-axis direction is applied.
  • the first g— ⁇ sensor 50 obtained C 2 Bruno - C l (, Roh) or second g- omega obtained by the sensor 5 1 (C 2 Bruno - C,,) one of the 2 only needs to be obtained.
  • the first subtractor 35 (C 2 'Bruno - C, omega') and (C 2 Bruno - C, () 2 sum is computed of the angular velocity of the values via the mouth one Pasufiru evening 3 9 and the first buffer amplifier 4 0 and is output as Note that, (C 2 Roh one C, Bruno) and.
  • the position of the low-pass filter is not necessarily required to be on the output side of the first subtractor 35, but on the two input sides of the first subtractor 35.
  • the first low-pass filter (not shown) and the second mouth-pass filter (not shown) may be provided.
  • the first g— ⁇ Either (C 2 physically—C,) obtained by the sensor 50 or (C - ⁇ C, distract) 2 obtained by the second g— ⁇ sensor 51 may be obtained.
  • the first adder 37 is used from the viewpoint of improving the measurement accuracy.
  • the sum of (C, no-C,, ') and (C 2 ( no C, deliberately) 2 is calculated and output as the value of the angular acceleration through the second buffer amplifier 41. It has become so.
  • the arithmetic unit 30A has no difference from that shown in FIG. 12, and a detailed description thereof will be omitted.
  • the configurations of the first and second g— ⁇ sensors 50 A and 51 A are slightly different as described below. This point is different from the configuration example shown in FIG.
  • the first and second g- ⁇ sensors 50 A and 51 A are the same as the first and second g- ⁇ sensors 50 and 51 shown in FIGS.
  • the first and second g— ⁇ sensors 50 and 51 have a structure in which the first glass substrate 1 A (IB) and the frame 4 A (4 B) are integrally formed. Is different from the above configuration example.
  • the lid 55A is just the first glass substrate 1A and the frame 4A shown in FIGS. It has a shape and dimensions corresponding to those integrally formed.
  • the cover 55 is formed with the first glass substrate 1 ⁇ and the frame 4 ⁇ ⁇ shown in FIGS. It has a shape and dimensions corresponding to those that have been set.
  • the mounting jig 48 (see FIG. 12) and the second glass substrates 2 ⁇ and 2 ⁇ (see FIG. 12) are integrally formed.
  • the common substrate 56 is made of an insulating member, for example, a glass member, and is formed in substantially the same shape and dimensions as the mounting jig 48 shown in FIG.
  • the first and second g— ⁇ sensors 50 and 51 also serve as the second substrates 2 ⁇ and 2 ⁇ .
  • the arrangement positions of the first and second g- ⁇ sensors 50 A, 51 ⁇ ⁇ ⁇ ⁇ with respect to the common substrate 56 are, as shown by the dotted line in FIG.
  • the opposite surface side may be used.
  • FIG. 14 (A) shows a case where the fixture (or common board) 57 is arranged in the reverse of the arrangement shown in FIG. That is, the arrangement of the mounting jig (or the common board) 57 in FIG. 14 (A) is the same as that of the mounting jig 48 shown in FIG.
  • the first and second g- ⁇ sensors 50, 51 (or the first and second g- ⁇ sensors 50A, 50A, 5 1 A) are provided.
  • FIG. 14 (B) a mounting tool (or common board) 58 having plane portions 58a and 58b orthogonal to each other just like a T is used.
  • the first mounting jig 59a has a first g— ⁇ sensor 50 (or 50 °) force.
  • the second mounting jig 59b has a second g— An example is shown in which each of the ⁇ sensors 51 (or 51 A) is attached.
  • the first mounting jig 59a and the second mounting jig 59b are different from the previous examples, and are arranged so that separate forces are orthogonal to each other. In that it has been done.
  • two identical sensors each having a relatively simple configuration capable of detecting acceleration and angular velocity by themselves are combined so as to have a predetermined arrangement.
  • By judging the magnitude relationship between the output signals of the sensors it is possible to know not only acceleration and angular velocity but also angular acceleration without using a sensor having a complicated structure.
  • a simple With a simple configuration it is possible to provide a new multi-sensor for basic information on a moving object, which can know not only acceleration and angular velocity but also angular acceleration.
  • the individual sensors that make up the multi-sensor for basic information on moving objects are made mainly of silicon, they are so-called semiconductor manufacturing technologies. In particular, mass production using so-called micromachining technology is possible. It is possible to provide a multi-sensor for basic information on a moving object, which has an inexpensive and relatively simple configuration and can detect acceleration, angular velocity and angular acceleration.
  • acceleration, angular velocity, and angular acceleration can be detected at one location, dedicated sensors are used for each of acceleration, angular velocity, and angular acceleration, especially in vehicles where the setting space is small and limited. This eliminates the need to provide a vehicle, which not only saves installation space, but also provides not only vehicle acceleration but also angular velocity and angular acceleration for various vehicle controls. ⁇ Next, an acceleration sensor with improved reliability will be described with reference to FIGS. 15 to 21.
  • FIG. 15 to 21 an acceleration sensor with improved reliability will be described with reference to FIGS. 15 to 21.
  • the horizontal direction of the acceleration sensor (the horizontal direction in the figure) is the X axis
  • the vertical direction of the acceleration sensor (the vertical direction in the figure) is the vertical direction of the acceleration sensor.
  • the Y axis is defined, and the axis in a direction orthogonal to the XY axis is defined as the Z axis, and the same applies to other figures.
  • the same components as those of the conventional sensor shown in FIGS. 22 and 23 are denoted by the same reference numerals.
  • This acceleration sensor has a semiconductor member, for example, silicon, between two first and second glass substrates 101 and 102 as two insulating substrates. Weight consisting of 103, frame 104 and the like are provided so as to be sandwiched therebetween, so to say, a three-layer structure is formed (see FIG. 16).
  • This acceleration sensor is generally called an electrostatic capacitance type, and can obtain an electrostatic capacitance as a detection output.
  • the frame 104 is formed by using a semiconductor member, for example, silicon, and its shape that appears on the XY plane is formed in a substantially frame shape.
  • the first and second glass substrates 101 and 102 are bonded to the peripheral portions (see FIG. 16).
  • the weight 103 is displaced slightly to one side in the Y-axis direction, and the weight 103 and the frame 104. Between them, the first to third electrode connection columns 105a to 105c are arranged at appropriate intervals in the X-axis direction (see FIG. 15).
  • the weight body 103 is formed entirely in a flat plate shape using a semiconductor member, for example, silicon. As will be described later, a central support column 106 and a torsion bar 107 a provided at the center thereof are provided. Between the first and second glass substrates 101 and 102 via the first and second glass substrates 107 and 107b via the first and second glass substrates 107b and 107b, respectively. It is provided as follows.
  • the weight body 103 has a thickness in the Z-axis direction set slightly smaller than that of the frame body 104, and the first and second glass substrates 101, 1 There is a predetermined gap between the gap and the gap 0 2 (see Fig. 16).
  • a central support column 106 and torsion bars 107a and 107b are provided integrally with the weight body 103.
  • a central through-hole 108 having an appropriate size is formed in order to provide the center support column 106 and the torsion bars 107a and 107b.
  • a central support column is provided at approximately the center of the central through hole 108.
  • 106 is provided (see FIGS. 15 and 16).
  • the thickness of the center support column 106 in the Z-axis direction is set to be the same as that of the frame body 104, and both end surfaces in the Z-axis direction are the first and second ends, respectively.
  • the glass substrates 101 and 102 are bonded by, for example, a so-called anodic bonding method (see FIG. 16).
  • the center support column 106 has a roughly cruciform shape in the XY plane, and in particular, the Y-axis direction is set longer than the X-axis direction (see Fig. 15) .
  • the torsion bars 107 a and 107 b extend from a pair of side surfaces of the central support column 106 facing each other in the Y-axis direction, and the ends thereof are joined to the weight body 103. (See Fig. 15), and the central support column 106 and the torsion bars 107 a and 107 b are formed integrally with the weight 103. is there.
  • Each of the transmission bars 107 a and 107 b has a rectangular cross-section on the XZ plane. More specifically, the transmission bars 107 a , 107 b have a smaller width in the X-axis direction than the length in the Z-axis direction. The length of the torsion bars 107a and 107b in the Z-axis direction is the same as the thickness of the weight body 103 in the Z-axis direction (see FIG. 16).
  • both ends of the torsion bars 107a and 107b are integrated with the weight body 103 so as to be joined to the inner wall of the central through hole 108. Due to the structure, the weight 103 can rotate around the torsion bars 107a and 107b and can be displaced in the Z-axis direction.
  • the weight body 103 four sub-through holes 1109a to 1109d whose XY plane shape is rectangular are formed around the center through hole 1108. . That is, in the first configuration example, one of the central through holes 108 The two sub-through holes 1109a and 109b are provided at appropriate intervals in the Y-axis direction beside the center through hole. Holes 109c and 109d are similarly provided at appropriate intervals in the Y-axis direction (see FIG. 15).
  • a semiconductor member for example, a sub support column 110 a to 110 d formed in a prismatic shape using silicon, It is arranged with an appropriate gap between the inner walls of the sub through holes 109 a to 109 d (see FIGS. 15 and 16). That is, the sub-support columns 110a to 110d are loosely penetrated into the sub-through holes 109a to 109d.
  • the sub-support columns 110 a to 110 d have the same length in the Z-axis direction as that of the frame 104, and both end faces in the Z-axis direction are These are joined to the first and second glass substrates 101 and 102, respectively.
  • the first to third electrode connection pillars 105 a to 105 c are connected to electrodes (not shown) disposed on the first and second glass substrates 101 and 102 and to the outside. This is provided for connection of the semiconductor device, and is formed in a columnar shape using a semiconductor member, for example, silicon.
  • the length of the first to third electrode connection columns 105 a to 105 c in the Z-axis direction is set to be the same as that of the frame 104 described above.
  • the first and second glass substrates 101 and 102 each have at least one electrode (not shown) of an appropriate size facing the flat portion of the weight body 103.
  • the so-called parallel plate capacitors are formed between each of them and the weight 103.
  • the portion facing the sub-through-holes 109a to 109d was cut into a shape similar to the XY plane shape of the sub-through-holes 109a to 109d. Lack Is preferred.
  • Electrodes are connected to, for example, the end faces of the first and second electrode connection columns 105a and 105b. Then, for example, on the first glass substrate 101, at the position facing the end face of the first to third electrode connection columns 105a to 105c,? (Not shown) are drilled, and the holes are filled with a metal material, and are electrically connected to the first to third electrode connection columns 105a to 105c, respectively. It has become. At the time of filling the metal material, lead wires (not shown) are embedded so as to be partially exposed to the outside, and the first and second glass substrates 101 are inserted through the lead wires. , 102 can be connected to an external circuit, and the capacitance with the weight 103 can be output.
  • the three electrode connection pillars 105 a to 105 c and the first and second glass substrates 101 and 102 are joined by, for example, a known / well-known anodic bonding method. It is suitable.
  • the formation of the central through hole 108 and the sub through holes 109 a to 109 d, the central support column 106 and the torsion bar 107 a and 107 b, and the sub support column For example, dry etching is suitable for forming 110a to 110d and the like.
  • a vertical side wall can be formed by using a silicon wafer having a (110) plane. You can get a pillar with The cross section in the short axis direction (for example, the shape in the XY plane in Fig. 15) is a rhombus.
  • acceleration acts in the Z-axis direction.
  • the weight 103 is displaced by the inertial force in a direction opposite to the direction in which the acceleration was applied, and the first or second glass substrate 101, 1 located on the side where the weight 103 is located close to.
  • the capacitance between the electrode 102 (not shown) and the weight 103 is increased in accordance with the displacement of the weight 103, that is, the magnitude of the acceleration, while the capacitance is located on the opposite side.
  • the capacitance between the rotating electrode (not shown) and the weight 103 decreases in accordance with the amount of displacement of the weight 103, that is, the magnitude of the acceleration. Therefore, each capacitance is detected by an external circuit (not shown), and the magnitude of the acceleration can be obtained by obtaining the difference between the capacitances. It is possible to determine in which direction has been applied.
  • the distance between the weight body 103 and the first and second glass substrates 101 and 102 on which the electrodes are arranged is kept as constant as possible.
  • the frame body 104 is bonded to the first and second glass substrates 101 and 102. And only the center support column 106 and the first to third electrode connection columns 105 a to 105 c.
  • the frame 104, the central support column 106, the first to third electrode connection columns 105 a to 105 c, and the first and second glass substrates 101, 100 After joining by well-known anodic bonding, when the temperature is returned from the high temperature state at the time of joining to room temperature, the first and the second are caused by the difference in the coefficient of thermal expansion between glass and silicon.
  • the second glass substrates 101, 102 are deformed outwardly convexly, and the distance between the first and second glass substrates 101, 102 and the solid body 103, and thus the electrodes There was a problem that the distance from the weight 103 was not the desired value.
  • the acceleration sensor according to the embodiment of the present invention. Since the sub-support columns 110a to 110d are provided, the bonding process by the so-called anodic bonding method is completed. The part exposed to high temperature during processing returns to room temperature, and the first and second glass substrates 101 and 102 are deformed due to the difference in the thermal expansion coefficient between glass and silicon. Such deformation is suppressed as much as possible by the auxiliary support pillars 110a to 110d, and the distance between the first and second glass substrates 101 and 102 and the weight body 103 is substantially desired. It will be kept at the size of.
  • the second configuration example includes the sub through-holes 109 a to 109 d and the sub support columns 110 a to 110 d in the first configuration example previously shown in FIGS. 15 and 16.
  • the shape of 0d is different, and its arrangement is basically the same as that of the first configuration example.
  • the sub through holes 11 1 a to 11 d in the second configuration example are Are drilled in the weight body 103A so that the inner wall surface of the body is cylindrical, and each of the sub-through holes 1 1 1a-; 1 2 d is provided.
  • the sub-support columns 112 a to 112 d are formed in a cylindrical shape using a semiconductor member, for example, silicon, and each end face is formed of a first and a second glass substrate 110 1, respectively. , 102. Note that the functions of the sub-support columns 112a to 112d are the same as those of the first configuration example described above, and thus detailed description thereof is omitted. Next, a third configuration example will be described with reference to FIG.
  • the third configuration example is different from the first configuration example shown in FIGS. 15 and 16 in that the sub through holes 109 a to 109 d and the sub support columns 110 a to 110 d 0d is a different number.
  • These six sub-through holes 1 13 a to l 13 f have three sub-through holes 1 13 a to 1 13 c at the side of the central through hole 108, which is appropriate in the Y-axis direction. Three sub-through holes 1 1 are provided at an interval, and are located on the other side of the center through hole 108.
  • the basic functions of the sub-support columns 1 14 a to 1 14 f are as follows: There is basically no difference from the first configuration example, but the sub-support columns 1 1 4 a to 1
  • the deformation of the first and second glass substrates 101 and 102 is suppressed more than in the first configuration example. It will be.
  • the fourth configuration example includes the sub-through holes 109 a to 109 d and the sub-support columns 110 a to 110 in the first configuration example previously shown in FIGS. 15 and 16.
  • the shape of 0 d is different.
  • the sub through-holes 115a to 115d in the fourth configuration example have a so-called L-shape in the XY plane, and are formed in the weight 103C. Have been.
  • the sub-support columns 1 16 a to l 16 d are also formed in the so-called L-shape in the XY plane in the same manner as the sub-through holes 1 15 a to 1 15 d.
  • the basic functions of the sub-support columns 1 16 a to l 16 d in the fourth configuration example are the same as those in the first configuration example, but the first and second glass substrates 10 16 By making the shape of the end face to be joined to the first and second substrates into a so-called L-shape, the area to be joined to the first and second glass substrates 101 and 102 becomes smaller than that of the first configuration example.
  • Sub support pillars 1 16 a to 1 16 d Larger than that, so that the deformation of the first and second glass substrates 101 and 102 is more effectively suppressed It is.
  • the fifth configuration example is different from the first embodiment shown in FIGS. 15 and 16 in that the sub through-holes 109 a to 109 d and the sub support columns 110 a to 110 d are provided.
  • the shape of 0 d is different.
  • the sub through-holes 117 a to 117 d in the fifth configuration example are formed in an arc shape on the XY plane, and are provided on one side of the central through hole 108.
  • the sub through holes 1 17 a and 1 17 b are provided at appropriate intervals in the Y-axis direction, and the sub through holes 1 17 c and 1 17 are provided on the other side of the central through hole 108.
  • d are provided at appropriate intervals in the Y-axis direction.
  • the sub-support column 1 1 8 ⁇ 1 to 1 1 8 (1 has a shape in the XY plane whose end faces in the two axial directions are the same as the above-described sub-through holes 1 17 a to 1 17 d. It is formed in an arc shape, and is provided at an appropriate distance from the inner wall of the sub through-holes 117a to 117d.
  • the area of the end surface in the Z-axis direction of each of the sub-support columns 1 18 a to 1 18 d is different from that of the first configuration example. Since it is set to be relatively large, the deformation of the first and second glass substrates 101 and 102 is more effectively suppressed.
  • the sixth configuration example is the same as the sub-through-holes 109 a to 109 d and the sub-support columns 110 a to 110 in the first configuration example previously shown in FIGS.
  • the shape of 0 d is different.
  • the sub through holes 1 19 a to 1 19 d in this sixth configuration example If the shape in the XY plane is formed in a rectangular shape, and its longitudinal axis is supposed to be a radial straight line extending outward from the center of the weight 103 mm, it will follow this straight line. Then, two each are provided on both sides of the central through hole 108.
  • the sub-supporting columns 120a to 120d have a rectangular shape in the XY plane at both end surfaces in the Z-axis direction in the same manner as the above-described sub-through holes 1 19a to 119d. And provided at an appropriate distance from the inner walls of the sub through-holes 119 a to 119 d.
  • the area of the end surface in the Z-axis direction of each of the sub-support columns 120a to 120d is the same as that of the first configuration example. Since it is set to be relatively large, the deformation of the first and second glass substrates 101 and 102 is more effectively suppressed.
  • the torsion chambers 107 a and 107 b are assumed to support the weight body 103 as a support beam at both ends. In other words, the weight body 103 is not supported. However, it is not necessary to be limited to such a both-end supporting beam, and for example, a cantilever beam may be used.
  • the weights 103, 103 A, 103 B, 103 due to the viscosity of air are provided.
  • C The damping (squeezing effect) for 103D and 103E is reduced, and the response at high frequencies is improved. That is, this corresponds to the weights 103, 103A, 103B, 103C, 103D, 103E and the first and second glass substrates 101, 102.
  • the sub-through holes 109a to 109d, llla to llld, and 113a to 113d, 1 This is because air flow is generated due to the provision of 15a to 115d, 117a to 117d, and 119a to 119d.
  • the structure in which the sub support column 110a and the sub through hole 109a as described with reference to FIGS. 15 to 21 are provided is similar to the structure shown in FIGS.
  • the present invention may be applied to a multi-sensor for basic information of a moving object, and has improved reliability as a sensor used for a moving object.
  • a plurality of support pillars joined to both insulating substrates are provided between two insulating substrates. Since the substrates face each other via a plurality of support pillars bonded to each other, unlike conventional products, the distortion that the two insulating substrates bend after production is suppressed, and the distance between the two insulating substrates does not change Therefore, the distance between the weight and the electrodes provided on the two insulating substrates is also kept constant, and desired output characteristics can be obtained, and a highly reliable acceleration sensor can be provided.
  • the multi-sensor for mobile object basic information is used as a sensor for acquiring information such as acceleration, angular velocity, and the like when the information such as acceleration or angular velocity is required for operation control or the like in a mobile object such as a vehicle.
  • the acceleration sensor is more suitable for use in a vehicle or the like, because the acceleration sensor is designed to improve the reliability of the structure.

Abstract

Multi-détecteur (S) d'informations de base monté sur une automobile, qui est doté de premier et second détecteurs g-φ (50, 51) ayant fondamentalement la même structure, les premier et second détecteurs g-φ (50, 51) étant disposés sur un substrat (52) si bien que des barres de torsion relatives sont orientées dans le sens vertical et que des lignes virtuelles (lignes en pointillés de la figure) passant par le centre des détecteurs g-φ respectifs (50, 51) se croisent perpendiculairement dans un sens perpendiculaire aux barres de torsion, ce qui permet de déterminer le sens et l'ampleur de l'accélération, la vitesse angulaire et l'accélération angulaire agissant sur le véhicule (M) par comparaison des sorties de capacitance des détecteurs respectifs (50, 51) entre elles.
PCT/JP1999/003282 1998-06-29 1999-06-21 Procede de detection d'informations de base et multi-detecteur d'informations de base et detecteur d'acceleration montes dans une automobile WO2000000832A1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP10/196520 1998-06-29
JP19651998 1998-06-29
JP10/196519 1998-06-29
JP10196520A JP2000019198A (ja) 1998-06-29 1998-06-29 加速度センサ
JP11/45706 1999-02-24
JP11045706A JP2000081448A (ja) 1998-06-29 1999-02-24 移動体基礎情報検出方法及び移動体基礎情報用マルチセンサ

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9970956B2 (en) 2012-07-06 2018-05-15 Hitachi Automotive Systems, Ltd. Inertial sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04252961A (ja) * 1991-01-29 1992-09-08 Canon Inc 角加速度センサ
JPH1048247A (ja) * 1996-04-30 1998-02-20 Motorola Inc 加速度検出素子
JPH1096744A (ja) * 1996-09-20 1998-04-14 Zexel Corp 容量型加速度センサの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04252961A (ja) * 1991-01-29 1992-09-08 Canon Inc 角加速度センサ
JPH1048247A (ja) * 1996-04-30 1998-02-20 Motorola Inc 加速度検出素子
JPH1096744A (ja) * 1996-09-20 1998-04-14 Zexel Corp 容量型加速度センサの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9970956B2 (en) 2012-07-06 2018-05-15 Hitachi Automotive Systems, Ltd. Inertial sensor

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