JP7078067B2 - 静電容量型微小機械加速度計 - Google Patents
静電容量型微小機械加速度計 Download PDFInfo
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- JP7078067B2 JP7078067B2 JP2020101899A JP2020101899A JP7078067B2 JP 7078067 B2 JP7078067 B2 JP 7078067B2 JP 2020101899 A JP2020101899 A JP 2020101899A JP 2020101899 A JP2020101899 A JP 2020101899A JP 7078067 B2 JP7078067 B2 JP 7078067B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/003—Details of instruments used for damping
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations
Description
Claims (12)
- 静電容量型微小機械加速度計であって、
基板平面を規定する基板と、
ロータであり、ロータ回転軸を中心とした前記基板平面に対する前記ロータの回転を可能にする1つまたは複数のねじりばねを介して前記基板に取り付けられている、ロータと、
前記基板平面に対して固定されたステータと
を備え、
前記ロータは1つまたは複数のロータ電極を含み、前記ステータは1つまたは複数のステータ電極を含み、前記ロータ電極および前記ステータ電極は、前記ロータの回転が前記ロータ電極および前記ステータ電極の有効面積ならびに/または前記ロータ電極と前記ステータ電極との間の距離の変化を引き起こすように構成されており、
前記静電容量型微小機械加速度計は、前記ロータを前記基板に接続する1つまたは複数の減衰ばねをさらに備え、各減衰ばねは、前記1つまたは複数のねじりばねの前記基板平面に垂直な高さよりも小さい、前記基板平面に垂直な高さを有すること、および
前記減衰ばねは、前記ロータから前記静電容量型微小機械加速度計の内部に向かって延伸し、
前記ロータは、前記1つまたは複数のねじりばねおよびロータサスペンダを介して前記基板に接続され、前記ステータおよびロータサスペンダは前記基板上の共通のアンカー点に固定され、前記1つまたは複数の減衰ばねは、前記共通のアンカー点に接続される、または、前記ロータサスペンダを介して、前記共通のアンカー点に接続されることを特徴とする、静電容量型微小機械加速度計。 - 1つまたは複数のさらなる減衰ばねが、前記ロータから前記静電容量型微小機械加速度計の外部まで延伸する、請求項1に記載の静電容量型微小機械加速度計。
- 前記加速度計が、外部に延伸する2つの減衰ばねを備える、請求項2に記載の静電容量型微小機械加速度計。
- 前記減衰ばねは、前記ロータ回転軸に平行に向けられる、請求項3に記載の静電容量型微小機械加速度計。
- 前記減衰ばねは、前記ロータ回転軸に垂直に向けられる、請求項3に記載の静電容量型微小機械加速度計。
- 前記微小機械加速度計は、外部に延伸する4つの減衰ばねを備え、前記減衰ばねのうちの2つが、前記ロータ回転軸に平行に向けられ、前記減衰ばねのうちの2つが、前記ロータ回転軸に垂直に向けられる、請求項2に記載の静電容量型微小機械加速度計。
- 前記外部に延伸する1つまたは複数の減衰ばねが、前記ロータの遠位端から前記ロータ回転軸に接続されている、請求項2~6のいずれか一項に記載の静電容量型微小機械加速度計。
- 前記ロータは、2つの長手方向ロータバーと1つの交差方向ロータバーとを備え、前記2つの長手方向ロータバーは前記ロータ回転軸から垂直方向外方に延伸し、前記交差方向ロータバーは前記ロータ回転軸に平行に、前記長手方向ロータバーの遠位端に配置され、前記1つまたは複数のロータ電極は、前記交差方向ロータバー上に配置される、請求項1~7のいずれか一項に記載の静電容量型微小機械加速度計。
- 前記減衰ばねは、前記ロータ回転軸に平行な方向に、前記ロータから前記加速度計の内部に向かって延伸する、請求項1に記載の静電容量型微小機械加速度計。
- 前記減衰ばねは、前記ロータ回転軸に垂直な方向に、前記ロータから前記加速度計の内部に向かって延伸する、請求項1に記載の静電容量型微小機械加速度計。
- 前記加速度計は、4つの減衰ばねを備え、前記減衰ばねの第1の対が、前記ロータから内向きに延伸し、第2の対が、前記ロータから外部に延伸し、前記減衰ばねの前記第1の対および前記第2の対の一方は、前記ロータ回転軸に平行に向けられ、前記減衰ばねの前記第1の対および前記第2の対の他方は、前記ロータ回転軸に垂直に向けられる、請求項8~10のいずれか一項に記載の静電容量型微小機械加速度計。
- 前記1つまたは複数のロータ電極および前記1つまたは複数のステータ電極が、交互配置されたコームまたは平行板を形成する、請求項1~11のいずれか一項に記載の静電容量型微小機械加速度計。
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US11525662B2 (en) * | 2020-08-13 | 2022-12-13 | Meta Platforms Technologies, Llc | Electromechanical displacement sensor |
EP4047375A1 (en) | 2021-02-22 | 2022-08-24 | Murata Manufacturing Co., Ltd. | Anchor structure for reducing temperature-based error |
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JP2016525212A (ja) | 2013-06-28 | 2016-08-22 | 株式会社村田製作所 | 容量型マイクロメカニカル加速度センサ |
US20190135612A1 (en) | 2017-11-09 | 2019-05-09 | Robert Bosch Gmbh | Micromechanical z-inertial sensor |
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US6860151B2 (en) | 2003-02-07 | 2005-03-01 | Honeywell International Inc. | Methods and systems for controlling movement within MEMS structures |
DE102010039069B4 (de) * | 2010-08-09 | 2023-08-24 | Robert Bosch Gmbh | Beschleunigungssensor mit einer Dämpfungseinrichtung |
US8833162B2 (en) * | 2011-09-16 | 2014-09-16 | Invensense, Inc. | Micromachined gyroscope including a guided mass system |
DE102013208824A1 (de) * | 2013-05-14 | 2014-11-20 | Robert Bosch Gmbh | Beschleunigungssensor |
DE102014202819A1 (de) * | 2014-02-17 | 2015-08-20 | Robert Bosch Gmbh | Mikromechanische Struktur für einen Beschleunigungssensor |
US20170023606A1 (en) | 2015-07-23 | 2017-01-26 | Freescale Semiconductor, Inc. | Mems device with flexible travel stops and method of fabrication |
TWI668412B (zh) * | 2017-05-08 | 2019-08-11 | 日商村田製作所股份有限公司 | 電容式微機電加速度計及相關方法 |
JP6677269B2 (ja) * | 2017-05-08 | 2020-04-08 | 株式会社村田製作所 | 容量性微小電気機械加速度計 |
US10807863B2 (en) | 2017-05-30 | 2020-10-20 | Murata Manufacturing Co., Ltd. | Method for manufacturing micromechanical structures in a device wafer |
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JP2016525212A (ja) | 2013-06-28 | 2016-08-22 | 株式会社村田製作所 | 容量型マイクロメカニカル加速度センサ |
US20190135612A1 (en) | 2017-11-09 | 2019-05-09 | Robert Bosch Gmbh | Micromechanical z-inertial sensor |
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EP3757579B1 (en) | 2023-07-26 |
US11442077B2 (en) | 2022-09-13 |
CN112230018B (zh) | 2022-10-11 |
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CN112230018A (zh) | 2021-01-15 |
EP3757579A1 (en) | 2020-12-30 |
US11796561B2 (en) | 2023-10-24 |
US20200408803A1 (en) | 2020-12-31 |
JP2021004875A (ja) | 2021-01-14 |
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