WO1999031291A3 - Plasmaborierung - Google Patents

Plasmaborierung Download PDF

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Publication number
WO1999031291A3
WO1999031291A3 PCT/EP1998/008079 EP9808079W WO9931291A3 WO 1999031291 A3 WO1999031291 A3 WO 1999031291A3 EP 9808079 W EP9808079 W EP 9808079W WO 9931291 A3 WO9931291 A3 WO 9931291A3
Authority
WO
WIPO (PCT)
Prior art keywords
reactor
plasma
boron
components
medium
Prior art date
Application number
PCT/EP1998/008079
Other languages
English (en)
French (fr)
Other versions
WO1999031291A2 (de
Inventor
Cabeo Emilio Rodriguez
Guenther Laudien
Kyong-Tschong Rie
Swen Biemer
Original Assignee
Volkswagen Ag
Cabeo Emilio Rodriguez
Guenther Laudien
Rie Kyong Tschong
Swen Biemer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Volkswagen Ag, Cabeo Emilio Rodriguez, Guenther Laudien, Rie Kyong Tschong, Swen Biemer filed Critical Volkswagen Ag
Priority to EP98965249A priority Critical patent/EP1044289B1/de
Priority to DE59803574T priority patent/DE59803574D1/de
Priority to KR1020007006436A priority patent/KR100583262B1/ko
Priority to JP2000539186A priority patent/JP4588213B2/ja
Priority to AT98965249T priority patent/ATE215132T1/de
Publication of WO1999031291A2 publication Critical patent/WO1999031291A2/de
Publication of WO1999031291A3 publication Critical patent/WO1999031291A3/de
Priority to US09/594,905 priority patent/US6783794B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C23C8/38—Treatment of ferrous surfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Primary Cells (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Plasma Technology (AREA)

Abstract

Die vorliegende Erfindung betrifft ein Verfahren zur Erzeugung einer Boridschicht auf einer Oberfläche durch Plasmaborieren, bei dem man einem Reaktor (10) ein ein Borspendermedium enthaltendes Gasmedium zuführt und in dem Reaktor (10) eine Glimmentladung erzeugt sowie eine Vorrichtung, die insbesondere zur Durchführung des genannten Verfahrens geeignet ist. Mit dem Verfahren wird porenfreien Boridschicten gelangt, wenn man die Parameter der Erzeugung des in einem Behandlungsraum des Reaktors (10) erzeugten Plasmas so wählt, daß man einen erhöhten Anteil an angeregten Borpartikeln im Plasma erhält. Des erfindungsgemässe Verfahren eignet sich z.B. zur Beschichtung von Bauteilen, die eine Oberfläche mit hoher Verschleissfestigkeit aufweisen müssen, da sie einer erhöhten Beanspruchung ausgesetzt sind, z.B. Zahnräder und Nockenwellen und dergleichen. Verfahrensparameter, die die bildung der Boridschicht beeinflussen kann, sind z.B. Spannung, Tastverhältnis, Frequenz, Temperatur, Druck sowie der Gehalt des Borspendermediums und der übrigen Komponenten in dem dem Reaktor zugeführten Gasmedium.
PCT/EP1998/008079 1997-12-15 1998-12-11 Plasmaborierung WO1999031291A2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
EP98965249A EP1044289B1 (de) 1997-12-15 1998-12-11 Plasmaborierung
DE59803574T DE59803574D1 (de) 1997-12-15 1998-12-11 Plasmaborierung
KR1020007006436A KR100583262B1 (ko) 1997-12-15 1998-12-11 플라즈마 붕화 처리 방법 및 장치
JP2000539186A JP4588213B2 (ja) 1997-12-15 1998-12-11 プラズマ硼化処理
AT98965249T ATE215132T1 (de) 1997-12-15 1998-12-11 Plasmaborierung
US09/594,905 US6783794B1 (en) 1997-12-15 2000-06-15 Method and arrangement for plasma boronizing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19755595 1997-12-15
DE19755595.0 1997-12-15

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US09/594,905 Continuation US6783794B1 (en) 1997-12-15 2000-06-15 Method and arrangement for plasma boronizing

Publications (2)

Publication Number Publication Date
WO1999031291A2 WO1999031291A2 (de) 1999-06-24
WO1999031291A3 true WO1999031291A3 (de) 1999-09-10

Family

ID=7851902

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1998/008079 WO1999031291A2 (de) 1997-12-15 1998-12-11 Plasmaborierung

Country Status (8)

Country Link
US (1) US6783794B1 (de)
EP (2) EP1044289B1 (de)
JP (1) JP4588213B2 (de)
KR (1) KR100583262B1 (de)
CN (1) CN1198953C (de)
AT (1) ATE215132T1 (de)
DE (1) DE59803574D1 (de)
WO (1) WO1999031291A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE524493C2 (sv) * 2002-02-25 2004-08-17 Telia Ab Uppskattningsenhet och metod för att bestämma positionen för en mobil station i ett mobilt kommunikationssystem
RU2415965C2 (ru) * 2005-09-22 2011-04-10 Скэффко Инджиниринг Энд Мэньюфэкчуринг, Инк. Способ плазменного борирования
WO2007124018A2 (en) * 2006-04-20 2007-11-01 Skaff Corporation Of America, Inc. Mechanical parts having increased wear resistance
US8012274B2 (en) * 2007-03-22 2011-09-06 Skaff Corporation Of America, Inc. Mechanical parts having increased wear-resistance
US8338317B2 (en) * 2011-04-06 2012-12-25 Infineon Technologies Ag Method for processing a semiconductor wafer or die, and particle deposition device
CN104233425B (zh) * 2014-09-29 2017-01-25 河海大学常州校区 微弧渗硼催化溶液和微弧渗硼溶液以及微弧渗硼方法
KR102084296B1 (ko) * 2016-12-15 2020-03-03 도쿄엘렉트론가부시키가이샤 성막 방법, 붕소 막 및 성막 장치

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3677799A (en) * 1970-11-10 1972-07-18 Celanese Corp Vapor phase boron deposition by pulse discharge
US4406765A (en) * 1980-01-28 1983-09-27 Fuji Photo Film Co., Ltd. Apparatus and process for production of amorphous semiconductor
DE3322341C2 (de) * 1983-06-22 1991-03-21 Siegfried Dr.-Ing. 5135 Selfkant De Straemke
DE4003623A1 (de) * 1990-02-07 1991-08-08 Kloeckner Ionon Verfahren zur steuerung einer anlage zur plasmabehandlung von werkstuecken
EP0603864A2 (de) * 1992-12-23 1994-06-29 Hughes Aircraft Company Reglung des Oberflächenpotentials bei der Plasma-Bearbeitung von Werkstoffen
FR2708624A1 (fr) * 1993-07-30 1995-02-10 Neuville Stephane Procédé de dépôt d'un revêtement protecteur à base de pseudo carbone diamant amorphe ou de carbure de silicium modifié.
EP0695813A2 (de) * 1994-08-06 1996-02-07 ALD Vacuum Technologies GmbH Verfahren zum Aufkohlen von Bauteilen aus kohlungsfähigen Werkstoffen mittels einer impulsförmig betriebenen Plasma-entladung
WO1997027345A1 (de) * 1996-01-25 1997-07-31 Elektroschmelzwerk Kempten Gmbh Verfahren zur herstellung von verschleissfesten boridschichten auf metallischen werkstoffoberflächen

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118944A (ja) * 1974-08-07 1976-02-14 Suwa Seikosha Kk Kisohokaho
DE3908200C1 (de) * 1989-03-14 1989-09-07 Degussa Ag, 6000 Frankfurt, De
US5286534A (en) * 1991-12-23 1994-02-15 Minnesota Mining And Manufacturing Company Process for plasma deposition of a carbon rich coating
US5354381A (en) * 1993-05-07 1994-10-11 Varian Associates, Inc. Plasma immersion ion implantation (PI3) apparatus
JPH07286254A (ja) * 1994-04-21 1995-10-31 Sumitomo Metal Ind Ltd 耐二次加工脆性に優れた鋼板およびその製造方法
JP3050361B2 (ja) * 1994-07-19 2000-06-12 株式会社ライムズ 金属部材のイオン窒化方法
US5578725A (en) 1995-01-30 1996-11-26 Regents Of The University Of Minnesota Delta opioid receptor antagonists
JPH0982495A (ja) * 1995-09-18 1997-03-28 Toshiba Corp プラズマ生成装置およびプラズマ生成方法
US6306225B1 (en) * 1996-01-25 2001-10-23 Bor Tec Gmbh Process for producing wear-resistant boride layers on metallic material surfaces
DE19629877C1 (de) * 1996-07-24 1997-03-27 Schott Glaswerke CVD-Verfahren und Vorrichtung zur Innenbeschichtung von Hohlkörpern
US5654043A (en) * 1996-10-10 1997-08-05 Eaton Corporation Pulsed plate plasma implantation system and method
US6101971A (en) * 1998-05-13 2000-08-15 Axcelis Technologies, Inc. Ion implantation control using charge collection, optical emission spectroscopy and mass analysis
US20040016402A1 (en) * 2002-07-26 2004-01-29 Walther Steven R. Methods and apparatus for monitoring plasma parameters in plasma doping systems

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3677799A (en) * 1970-11-10 1972-07-18 Celanese Corp Vapor phase boron deposition by pulse discharge
US4406765A (en) * 1980-01-28 1983-09-27 Fuji Photo Film Co., Ltd. Apparatus and process for production of amorphous semiconductor
DE3322341C2 (de) * 1983-06-22 1991-03-21 Siegfried Dr.-Ing. 5135 Selfkant De Straemke
DE4003623A1 (de) * 1990-02-07 1991-08-08 Kloeckner Ionon Verfahren zur steuerung einer anlage zur plasmabehandlung von werkstuecken
EP0603864A2 (de) * 1992-12-23 1994-06-29 Hughes Aircraft Company Reglung des Oberflächenpotentials bei der Plasma-Bearbeitung von Werkstoffen
FR2708624A1 (fr) * 1993-07-30 1995-02-10 Neuville Stephane Procédé de dépôt d'un revêtement protecteur à base de pseudo carbone diamant amorphe ou de carbure de silicium modifié.
EP0695813A2 (de) * 1994-08-06 1996-02-07 ALD Vacuum Technologies GmbH Verfahren zum Aufkohlen von Bauteilen aus kohlungsfähigen Werkstoffen mittels einer impulsförmig betriebenen Plasma-entladung
WO1997027345A1 (de) * 1996-01-25 1997-07-31 Elektroschmelzwerk Kempten Gmbh Verfahren zur herstellung von verschleissfesten boridschichten auf metallischen werkstoffoberflächen

Also Published As

Publication number Publication date
KR100583262B1 (ko) 2006-05-25
US6783794B1 (en) 2004-08-31
CN1282383A (zh) 2001-01-31
EP1044289B1 (de) 2002-03-27
EP1143031A3 (de) 2004-04-28
EP1143031A2 (de) 2001-10-10
KR20010033075A (ko) 2001-04-25
JP4588213B2 (ja) 2010-11-24
WO1999031291A2 (de) 1999-06-24
ATE215132T1 (de) 2002-04-15
DE59803574D1 (de) 2002-05-02
JP2002508448A (ja) 2002-03-19
EP1044289A2 (de) 2000-10-18
CN1198953C (zh) 2005-04-27

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