WO1999019688A1 - Gyroscope oscillant pourvu d'une couche mince au titanate zirconate de plomb (pzt) - Google Patents
Gyroscope oscillant pourvu d'une couche mince au titanate zirconate de plomb (pzt) Download PDFInfo
- Publication number
- WO1999019688A1 WO1999019688A1 PCT/JP1998/004498 JP9804498W WO9919688A1 WO 1999019688 A1 WO1999019688 A1 WO 1999019688A1 JP 9804498 W JP9804498 W JP 9804498W WO 9919688 A1 WO9919688 A1 WO 9919688A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vibrating gyroscope
- base material
- plate portion
- electrode
- thin film
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
Definitions
- the present invention relates to a vibrating gyroscope provided with a PZT (lead (Pb) Zinrconate Titanate) thin film.
- PZT lead (Pb) Zinrconate Titanate
- the tuning-fork type vibrating gyroscope 21 includes a pair of driving piezoelectric ceramic plates 23 provided at both ends of a connecting portion 22.
- the piezoelectric ceramic plates 23 are arranged in parallel with each other, and have a plane facing the X direction in the figure.
- a detection piezoelectric ceramic plate 24 is formed integrally with the ceramic plate 23 so as to extend upward.
- the ceramic plate 24 has a plane arranged so as to face the Y direction in the figure.
- the X direction and the Y direction are orthogonal to each other.
- the piezoelectric ceramic plate 23 When an alternating voltage is applied to the piezoelectric ceramic plate 23, the piezoelectric ceramic plate 23 vibrates in the X direction. When a rotational force about the Z axis is applied to the vibrating gyroscope 21 in this vibration state, the piezoelectric ceramics 24 is distorted, and generates a voltage corresponding to the distortion. By detecting the voltage, the force acting on the piezoelectric ceramics 24 is detected. The force is called the Coriolis force F c and is generally expressed by the following equation.
- m is the mass of the vibrating gyroscope
- V is the vibration speed of the vibrating gyroscope
- ⁇ is the angular velocity of the vibrating gyroscope 21 around the Z axis.
- the vibrating gyroscope 25 of the sound piece type is It has a prism-shaped vibrator 26.
- a pair of driving piezoelectric ceramic plates 27 is attached to the side surfaces of the vibrator 26 opposite to each other by 180 degrees (only one of them is shown in the drawing). Further, a pair of piezoelectric ceramic plates for detection 28 are adhered to the other side surfaces (only one of them is shown in the drawing).
- an alternating voltage is applied to the piezoelectric ceramics plate 27, the piezoelectric ceramics plate 27 vibrates the sound piece type vibrator 26 in the X direction.
- PZT zircon's lead titanate: ceramics consisting of a solid solution of lead titanate and lead zirconate
- PZT zircon's lead titanate: ceramics consisting of a solid solution of lead titanate and lead zirconate
- the vibrating jaw 31 is made of a quadrangular prism-shaped elastic metal, and has through holes 34, 3 extending at right angles to the lower end (fixed end) and the upper end (free end), respectively. With 5.
- the gyro 31 is provided with a first parallel flat plate portion 32 and a second parallel flat plate portion 33 so as to correspond to the through holes 34 and 35, respectively.
- a titanium film is formed on the surfaces of the first and second parallel plate portions 32 and 33, and a PZT thin film 36 is formed on the titanium film.
- a plurality of electrodes 37 are formed on each PZT thin film 36, and a lead wire (not shown) is directly connected to the electrodes 37.
- the first parallel flat plate part 32 constitutes a drive unit for applying vibration
- the second parallel flat plate part 33 constitutes a detection unit.
- An object of the present invention is to provide a vibrating gyroscope having a PZT thin film having uniform characteristics.
- a vibrating gyroscope according to the present invention includes a base material made of an elastic metal and having a substantially quadrangular prism shape, and the base material is sequentially arranged in a circumferential direction.
- the base material fixes the vibrating gyroscope.
- first parallel plate portion which is located on both sides of the first through hole, and is made up of a pair of side plates including second and fourth side surfaces; and Having a second through hole extending from the second side surface to the fourth side surface, and a second parallel flat plate portion comprising a pair of side plates located on both sides of the second through hole and including the first and third side surfaces.
- FIG. 1A is a perspective view showing a vibrating gyroscope according to one embodiment of the present invention.
- FIG. 1 (b) is a side view showing the vibrating gyroscope of FIG. 1 (a).
- FIG. 2 is a perspective view showing a base material of the vibrating gyroscope of FIG. 1 (a).
- FIG. 3 is a perspective view of a base material in which a through hole is formed.
- FIG. 4 is a perspective view showing a base material on which a titanium film is patterned.
- FIG. 5 is a perspective view showing a substrate on which a PZT thin film is formed.
- FIG. 6A is a perspective view showing a vibrating gyroscope on which an electrode film is formed.
- FIG. 6 (b) is a side view showing the vibrating gyroscope of FIG. 6 (a).
- FIG. 7 is a perspective view showing a conventional vibrating gyroscope.
- FIG. 8 is a perspective view of a conventional tuning-fork type vibrating gyroscope.
- Fig. 9 is a perspective view of a conventional vibrating gyroscope of the sound piece type.
- the vibrating gyroscope 1 has a rectangular column shape, and has parallel plate portions 2 and 3 below and above, respectively.
- the vibrating gyroscope 1 includes a quadrangular prism-shaped substrate 4, which is preferably made of an elastic metal material such as stainless steel.
- the cross-sectional shape of the base 4 is preferably square, but may be other shapes.
- the base material 4 has a first side surface 5 facing the X direction side, a second side surface 6 adjacent in the clockwise direction (circumferential direction), a third side surface, and a fourth side surface.
- the first side face 5 and the third side face are located 180 degrees opposite each other with respect to the Z axis, and the second side face 6 and the fourth side face are also with the same Z axis as the center. It is located 80 degrees opposite (only the first side 5 and the second side 6 are shown in the figure). Since the paired sides (first and third sides, second and fourth sides) have the same configuration, only the configuration of the first side 5 and the second side 6 will be described.
- the base material 4 has a through hole 7 at its lower portion extending from the first side surface 5 to the third side surface in the X-axis direction.
- the cross-sectional shape of the through hole 7 is substantially rectangular. Due to the through holes 7, a pair of side plates 8 and 9 having the second side surface 6 and the fourth side surface as outer surfaces are formed at the lower portion of the base material 4.
- Each side plate 8, 9 includes a thin portion 8a, 9a, preferably having a thickness of several -i ⁇ to several hundreds of m, respectively.
- Side plates 8 and 9 extending parallel to each other at the lower portion of the base material 4 constitute a parallel plate portion 2 having a parallel plate structure.
- the base material 4 is located on the upper side from the second side surface 6 to the fourth side surface in the Y direction. It has a through hole 10 extending.
- the cross-sectional shape of the through hole 10 is substantially rectangular. Due to the through holes 10, a pair of side plates 11 and 12 having the first side surface 5 and the third side surface as outer surfaces, respectively, are formed in the upper part of the base material 4.
- Each side plate ⁇ 1, 1 2 has the same thickness as the side plates 8, 9.
- the two side plates 11 and 12 extending in parallel with each other on the upper part of the base material 4 constitute a parallel plate portion 3 having a parallel plate structure.
- the parallel flat plate portions 2 and 3 are arranged such that the extending directions of the through holes 7 and 10 are perpendicular to each other.
- the second side surface 6 and the fourth side surface of the parallel plate portion 2 and the first side surface 5 and the third side surface of the parallel plate portions 2 and 3 are preferably formed by sputtering using a titanium film 13, that is, a base surface. Are formed (see Fig. 4). On the entire surface of the titanium film 13, a PZT thin film 14 (see FIG. 5) having a thickness of several tens of meters is formed. On the PZT thin film 14 on the second side surface 6 and the fourth side surface of the parallel plate portion 2, a pair of electrode films 15 made of aluminum are formed in a line up and down (FIG. 1 (a) and FIG. 6 (a), only the second side 6 is shown).
- Each of the electrode films 15 has a thickness of several / Xm and has substantially the same area.
- a pair of connecting portions 15a extending downward from the electrode 15 are formed integrally with the electrode film 15 respectively.
- a pair of pads 15b made of aluminum is formed integrally with the connecting portion 15a on the second side surface 6 and the fourth side surface ( 1 (a) and 6 (a) show only the second side surface 6).
- the pads 15b are arranged side by side in the horizontal direction, have a thickness of several ⁇ , and have substantially the same area as each other.
- a pair of electrode films 16 made of aluminum are formed on the thin film 14 on the first side surface 5 and the third side surface of the parallel plate portion 3 so as to be vertically arranged (FIGS. 1 and 6). , Only the first side 5 is shown).
- Each electrode film 16 has a thickness of several ⁇ and has substantially the same area as each other.
- both edges of the first side 5 and the third side extend downward from the electrode 16
- a pair of connecting portions 16a are formed integrally with the electrode film 16 respectively.
- the connecting portion 16a is arranged on the thin portions 8a, 9a of the side plates 8, 9 of the parallel flat plate portion 2.
- a pair of pads 16b made of aluminum is formed integrally with the connecting portion 16a on the first side surface 5 and the third side surface.
- Each of the pads 16b is arranged so as to be arranged in the horizontal direction, has a thickness of several ⁇ , and has substantially the same area as each other.
- the electrode films 15 and 16, the connection parts 15 a and 16 a, the nodes 15 b and 16 b are made of another conductive metal such as Au (gold) instead of aluminum. It may be formed.
- Lead wires 19 are soldered to the pads 15b and 16b, respectively.
- the lower end of the vibrating gyroscope 1 forms a fixed end, and the upper end forms a free end.
- the vibrating jaw 1 When the vibrating jaw 1 is used as described above, since the lead wire 19 is connected to the pad 15 b provided at the fixed end, the rigidity of the parallel plate portion 2 is established by connecting the lead wire 19. Does not change and its vibration characteristics are not affected. Similarly, since the lead wire 19 is connected to the pad 16 b provided at the fixed end, the rigidity of the parallel plate portion 3 is not changed by the connection of the lead wire 19, and the detection characteristics are not affected. Don't go out.
- a substrate 4 preferably made of stainless steel is prepared.
- the base material 4 has a quadrangular prism shape with a square cross section.
- through holes 7, 10 extending in directions perpendicular to each other are formed in both the upper and lower portions of the base material 4.
- cutting, etching or any other means may be employed.
- a pair of side plates 8 and 9 having a thickness of several tens to several hundreds ⁇ are formed below the base material 4.
- a parallel plate portion 2 having a parallel plate structure is formed by the side plates 8 and 9.
- a pair of side plates 11 and 12 having a thickness of several tens to several hundreds of ⁇ m are formed on the base material 4.
- a parallel plate portion 3 having a parallel plate structure is formed by the side plates 11 and 12.
- the substrate 4 is cleaned with a chemical such as an acid.
- a chemical such as an acid.
- the surface excluding the portion where the PZT thin film 14 is formed is covered with a mask (not shown) for coating with synthetic resin or a metal film other than titanium using a physical film forming method such as sputtering or vacuum evaporation. ) Is formed in advance.
- a PZT thin film 14 is formed on the titanium film 13 by a hydrothermal method.
- the hydrothermal method consists of two steps. (First step)
- Substrate 4 as a raw material Okishi aqueous solution of zirconium chloride (Z r OC l 2 ⁇ 8 H 2 O) and lead nitrate (P b (N0 3) 2), and ⁇ 8 ⁇ ) solution Teflon container (not shown) And stirred. Since the piezoelectricity of the thin film 14 is determined by the composition ratio of lead titanate and lead zirconate in the thin film 14, oxychlorination is performed later according to the piezoelectricity of the thin film 14. The molar ratio of zirconium to lead nitrate is determined.
- the C 1,) and K ⁇ H (4 N) solutions are charged into a Teflon bottle (not shown) and stirred.
- a Teflon bottle not shown
- a PZT thin film 14 having a predetermined thickness is formed on the outer surfaces of the two parallel flat plate portions 2 and 3 of the substrate 4 (FIG. 5).
- the substrate 4 is taken out of the pressure vessel, washed with water and dried. Thereafter, the mask is removed.
- an aluminum film is formed on the PZT thin film 14 preferably by a physical film forming method such as sputtering and vacuum evaporation using aluminum.
- a pair of electrode films 15 and 16, connecting portions 15 a and 16 a and pads 15 b and 16 b are formed.
- the manufacture of the vibrating gyroscope 1 is completed. Thereafter, the lead wire 19 is soldered to the nodes 15b and 16b.
- the vibrating gyro 1 of the present embodiment has the following effects.
- the rigidity of the parallel plate portion 2 is not changed by the connection of the lead wire 19.
- the vibration characteristics and detection characteristics of the vibration gyroscope 1 are not affected.
- the vibrating gyro 1 is reduced in size.
- the base member 4 since the base member 4 has a parallel plate structure at both upper and lower portions, the strength against torsion is improved. Therefore, the parallel flat plate portion 2 for vibration drive is accurately vibrated, and the parallel flat plate portion 3 for detection can be accurately displaced, so that noise resistance is improved and accurate detection becomes possible.
- the titanium film 13 and the PZT thin film 14 are formed by a hydrothermal method.
- the vibrating gyroscope 1 composed of the combination of the vibration driving parallel flat plate 2 and the detection parallel flat plate 3 obtained in the same process (process by the hydrothermal method) has quality such as detection sensitivity.
- the PZT thin film 14 for driving and the PZT thin film 14 for detection are formed at once by the hydrothermal method, so that the driving and detection Compared to the case where P ZT thin films are formed separately, Is reduced.
- a connecting portion connecting the upper portions of the side plates 11 and 12 of the parallel plate portion 3 for detection or a connection portion between the parallel plate portions 2 and 3 is connected.
- the joint is used as the mass m of the Coriolis force Fc in the above equation (1). Accordingly, by appropriately changing the mass of the connecting portion, the mass m of the vibrating gyro 1 is adjusted. Thereby, the detection sensitivity of the vibrating gyroscope 1 can be improved.
- Embodiments of the present invention may be modified as follows.
- the thickness of the electrode film 15, 16, the connection part 15 a, 16 a, the tip, the head 15 b, 16 b, the PZT thin film 14, and the thickness of the substrate 4 are limited to the above values It is not a thing and may be changed as appropriate.
- the nodes 15b and 16b in order to form the electrode films 15 and 16 and the connection portions 15a and 16a, the nodes 15b and 16b, physical components such as sputtering and vacuum deposition are used. Although a film method was used, a screen printing method using a conductive paste may be employed instead.
- the present invention has been embodied in the vibrating gyroscope 1 of the sound piece type, it may be embodied in a vibrating gyroscope of the tuning fork type in which the vibrating gyroscope 1 is fixed to both ends of a connecting plate.
- a tuning fork-type vibrating gyroscope is formed simply by erected the pair of vibrating gyroscopes 1 at both ends of the connecting plate.
- the pair of electrode films 15 and 16 are formed, but one electrode film may be formed on the surface of the PZT thin film 14.
- the lead wires 19 for the two parallel flat plate portions 2 and 3 are connected to the pads 15b and 16b located at the lower end, which is the fixed end.
- the lead wire 19 for the parallel plate portion 2 is connected to the pad 15b, and the lead wire 19 for the other parallel plate portion 3 is directly connected to the electrode film 16. Good. In this case, adverse effects due to the connection of the lead wire 19 on the drive characteristics are prevented.
- the lead wire 19 for the parallel plate portion 3 may be connected to the pad 16b, and the lead wire 19 for the parallel plate portion 2 may be directly connected to the electrode film 15. In this case, detect With respect to the characteristics, the adverse effects caused by the connection of the lead wire 19 are prevented.
- the lower end of the vibrating gyroscope 1 is used as a fixed end.
- the upper end of the vibrating gyroscope 1 may be a fixed end, and the lower end may be a free end.
- the upper end acts as the drive unit, and the lower end acts as the detector.
- the base material 4 is made of stainless steel, but the base material 4 may be formed of another metal instead.
- the base material 4 is made of titanium, the formation of the titanium film 13 is omitted. In this case, the surface of the substrate 4 constitutes the base surface.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/367,894 US6378368B1 (en) | 1997-10-09 | 1998-10-06 | Oscillation gyro equipped with thin PZT film |
EP98945622A EP1020705A4 (en) | 1997-10-09 | 1998-10-06 | OSCILLATING GYROSCOPE WITH LEAD TITANATE ZIRCONATE (PZT) THIN FILM |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27718397A JP3825152B2 (ja) | 1997-10-09 | 1997-10-09 | Pzt薄膜を備えた振動ジャイロ |
JP9/277183 | 1997-10-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999019688A1 true WO1999019688A1 (fr) | 1999-04-22 |
Family
ID=17579971
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1998/004498 WO1999019688A1 (fr) | 1997-10-09 | 1998-10-06 | Gyroscope oscillant pourvu d'une couche mince au titanate zirconate de plomb (pzt) |
Country Status (4)
Country | Link |
---|---|
US (1) | US6378368B1 (ja) |
EP (1) | EP1020705A4 (ja) |
JP (1) | JP3825152B2 (ja) |
WO (1) | WO1999019688A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3825152B2 (ja) * | 1997-10-09 | 2006-09-20 | 株式会社東海理化電機製作所 | Pzt薄膜を備えた振動ジャイロ |
JP2003221229A (ja) * | 2002-01-29 | 2003-08-05 | Murata Mfg Co Ltd | 膜の製造方法および膜状素子の製造方法 |
JP3643116B2 (ja) | 2002-06-28 | 2005-04-27 | 住友精密工業株式会社 | 可動電気回路用導電膜および振動式ジャイロ |
JP5052136B2 (ja) * | 2004-10-26 | 2012-10-17 | 宏一 平間 | 複合共振回路及び同回路を使用した発振回路 |
US8040516B2 (en) * | 2006-11-10 | 2011-10-18 | Koninklijke Philips Electronics N.V. | Oscillator element for photo acoustic detector |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02218913A (ja) * | 1989-02-18 | 1990-08-31 | Nec Home Electron Ltd | 振動ジャイロ |
JPH0979860A (ja) * | 1995-09-12 | 1997-03-28 | Mitsubishi Cable Ind Ltd | 圧電振動子及びその製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE466817B (sv) * | 1989-02-27 | 1992-04-06 | Bofors Ab | Foer gyro avsett sensorelement |
JPH10206162A (ja) * | 1997-01-22 | 1998-08-07 | Citizen Watch Co Ltd | 振動ジャイロセンサー |
JPH112527A (ja) * | 1997-06-13 | 1999-01-06 | Toshio Fukuda | Pzt薄膜バイモルフ構造を備えた振動ジャイロ及びその製造方法 |
JPH1114370A (ja) | 1997-06-24 | 1999-01-22 | Toshio Fukuda | Pzt薄膜を備えた振動ジャイロ及びその製造方法 |
JP3825152B2 (ja) * | 1997-10-09 | 2006-09-20 | 株式会社東海理化電機製作所 | Pzt薄膜を備えた振動ジャイロ |
JPH11344341A (ja) * | 1998-05-29 | 1999-12-14 | Tokai Rika Co Ltd | 平行平板型振動ジャイロ及び平行平板型振動ジャイロ装置 |
JP2000002539A (ja) * | 1998-06-15 | 2000-01-07 | Tokai Rika Co Ltd | 平行平板型振動ジャイロ及び平行平板型振動ジャイロ装置 |
-
1997
- 1997-10-09 JP JP27718397A patent/JP3825152B2/ja not_active Expired - Lifetime
-
1998
- 1998-10-06 EP EP98945622A patent/EP1020705A4/en not_active Withdrawn
- 1998-10-06 WO PCT/JP1998/004498 patent/WO1999019688A1/ja not_active Application Discontinuation
- 1998-10-06 US US09/367,894 patent/US6378368B1/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02218913A (ja) * | 1989-02-18 | 1990-08-31 | Nec Home Electron Ltd | 振動ジャイロ |
JPH0979860A (ja) * | 1995-09-12 | 1997-03-28 | Mitsubishi Cable Ind Ltd | 圧電振動子及びその製造方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP1020705A4 * |
Also Published As
Publication number | Publication date |
---|---|
JP3825152B2 (ja) | 2006-09-20 |
EP1020705A1 (en) | 2000-07-19 |
JPH11118490A (ja) | 1999-04-30 |
EP1020705A4 (en) | 2003-09-10 |
US6378368B1 (en) | 2002-04-30 |
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