WO1999001901A1 - Structure plan parallele avec elements dimorphes a couche mince de pzt et son procede de fabrication - Google Patents
Structure plan parallele avec elements dimorphes a couche mince de pzt et son procede de fabrication Download PDFInfo
- Publication number
- WO1999001901A1 WO1999001901A1 PCT/JP1998/002991 JP9802991W WO9901901A1 WO 1999001901 A1 WO1999001901 A1 WO 1999001901A1 JP 9802991 W JP9802991 W JP 9802991W WO 9901901 A1 WO9901901 A1 WO 9901901A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- thin film
- pzt thin
- parallel plate
- plate structure
- bimorph
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/380,014 US6262516B1 (en) | 1997-07-04 | 1998-07-01 | Parallel plate structure provided with PZT thin-film bimorph and method of fabrication thereof |
EP98929811A EP1020937A4 (en) | 1997-07-04 | 1998-07-02 | PARALLEL PLANAR STRUCTURE WITH DIMENPHIC THIN-FILM ELEMENTS OF PZT AND METHOD FOR THE PRODUCTION THEREOF |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17959997A JPH1126834A (ja) | 1997-07-04 | 1997-07-04 | Pzt薄膜バイモルフ形の平行平板構造体、及びその製造方法 |
JP9/179599 | 1997-07-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999001901A1 true WO1999001901A1 (fr) | 1999-01-14 |
Family
ID=16068564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1998/002991 WO1999001901A1 (fr) | 1997-07-04 | 1998-07-02 | Structure plan parallele avec elements dimorphes a couche mince de pzt et son procede de fabrication |
Country Status (4)
Country | Link |
---|---|
US (1) | US6262516B1 (ja) |
EP (1) | EP1020937A4 (ja) |
JP (1) | JPH1126834A (ja) |
WO (1) | WO1999001901A1 (ja) |
Cited By (18)
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EP1089350A2 (en) | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089354A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089352A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1089351A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089357A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1089355A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089359A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method for producing the same |
EP1089353A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089349A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1091424A2 (en) * | 1999-10-01 | 2001-04-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US6262516B1 (en) | 1997-07-04 | 2001-07-17 | Kabushiki Kaisha Tokai Rika Denki Seisakusho | Parallel plate structure provided with PZT thin-film bimorph and method of fabrication thereof |
EP1139451A1 (en) * | 1999-10-01 | 2001-10-04 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device and method of manufacture thereof |
SG106598A1 (en) * | 2000-02-01 | 2004-10-29 | Matsushita Electric Ind Co Ltd | Head support mechanism and thin film piezoelectric actuator |
US6883215B2 (en) | 1999-10-01 | 2005-04-26 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US6915547B2 (en) | 1999-10-01 | 2005-07-12 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US6968603B2 (en) | 1999-10-01 | 2005-11-29 | Ngk Insulators, Ltd. | Method of producing a piezoelectric/electrostrictive device |
US7138749B2 (en) | 1999-10-01 | 2006-11-21 | Ngk Insulators, Ltd. | Piezo-electric/electrostrictive device and method of manufacturing same |
US7164221B1 (en) | 1999-10-01 | 2007-01-16 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
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US6545384B1 (en) * | 1997-02-07 | 2003-04-08 | Sri International | Electroactive polymer devices |
US6376971B1 (en) * | 1997-02-07 | 2002-04-23 | Sri International | Electroactive polymer electrodes |
US6335586B1 (en) | 1998-12-28 | 2002-01-01 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and production method thereof |
US6715192B2 (en) | 1998-12-28 | 2004-04-06 | Ngk Insulators, Ltd. | Method for manufacturing a piezoelectric/electrostrictive device |
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US6452309B1 (en) * | 1999-10-01 | 2002-09-17 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
US6525448B1 (en) | 1999-10-01 | 2003-02-25 | Ngk Insulators Ltd | Piezoelectric/electrostrictive device |
US6351056B1 (en) * | 1999-10-01 | 2002-02-26 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device having mutually opposing thin plate portions |
WO2001097296A1 (fr) | 2000-06-16 | 2001-12-20 | Ngk Insulators, Ltd. | Dispositif piezoelectrique/electrostrictif et son procede de fabrication |
JP4007767B2 (ja) | 2001-01-18 | 2007-11-14 | 日本碍子株式会社 | 圧電/電歪デバイスおよびその製造方法 |
US7345406B2 (en) | 2001-01-18 | 2008-03-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
JP4033643B2 (ja) * | 2001-06-18 | 2008-01-16 | 日本碍子株式会社 | 圧電/電歪デバイスおよびその製造方法 |
CN1288631C (zh) * | 2002-06-05 | 2006-12-06 | 新科实业有限公司 | 防止压电微致动器中的操作和制造缺陷的系统和方法 |
US6895645B2 (en) * | 2003-02-25 | 2005-05-24 | Palo Alto Research Center Incorporated | Methods to make bimorph MEMS devices |
US7089635B2 (en) * | 2003-02-25 | 2006-08-15 | Palo Alto Research Center, Incorporated | Methods to make piezoelectric ceramic thick film arrays and elements |
US6964201B2 (en) * | 2003-02-25 | 2005-11-15 | Palo Alto Research Center Incorporated | Large dimension, flexible piezoelectric ceramic tapes |
US7239064B1 (en) | 2004-10-15 | 2007-07-03 | Morgan Research Corporation | Resettable latching MEMS temperature sensor apparatus and method |
US7893784B2 (en) * | 2004-10-26 | 2011-02-22 | Koichi Hirama | Composite resonance circuit and oscillation circuit using the circuit |
KR100747459B1 (ko) * | 2005-10-21 | 2007-08-09 | 엘지전자 주식회사 | 모듈의 충돌 방지가 보장되는 멀티태스킹 방법 및 이동단말기 |
JP2007158276A (ja) * | 2005-12-08 | 2007-06-21 | Ngk Insulators Ltd | 圧電/電歪デバイス及び圧電/電歪デバイスの駆動方法 |
WO2009006318A1 (en) | 2007-06-29 | 2009-01-08 | Artificial Muscle, Inc. | Electroactive polymer transducers for sensory feedback applications |
EP2239793A1 (de) | 2009-04-11 | 2010-10-13 | Bayer MaterialScience AG | Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung |
KR20140008416A (ko) | 2011-03-01 | 2014-01-21 | 바이엘 인텔렉쳐 프로퍼티 게엠베하 | 변형가능한 중합체 장치 및 필름을 제조하기 위한 자동화 제조 방법 |
CN103703404A (zh) | 2011-03-22 | 2014-04-02 | 拜耳知识产权有限责任公司 | 电活化聚合物致动器双凸透镜系统 |
WO2013088866A1 (ja) * | 2011-12-13 | 2013-06-20 | 株式会社村田製作所 | 積層型アクチュエータ |
EP2828901B1 (en) | 2012-03-21 | 2017-01-04 | Parker Hannifin Corporation | Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices |
KR20150031285A (ko) | 2012-06-18 | 2015-03-23 | 바이엘 인텔렉쳐 프로퍼티 게엠베하 | 연신 공정을 위한 연신 프레임 |
WO2014066576A1 (en) | 2012-10-24 | 2014-05-01 | Bayer Intellectual Property Gmbh | Polymer diode |
WO2017139891A1 (en) * | 2016-02-17 | 2017-08-24 | Dalhousie University | Piezoelectric inertial actuator |
DE102016216215A1 (de) * | 2016-08-29 | 2018-03-01 | Robert Bosch Gmbh | Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59229733A (ja) * | 1983-06-10 | 1984-12-24 | Sharp Corp | 回転磁気ヘツド装置 |
JPS62146426A (ja) * | 1985-12-20 | 1987-06-30 | Asahi Optical Co Ltd | 磁気ヘツド変位装置 |
JPH0465470A (ja) * | 1990-07-06 | 1992-03-02 | Nitto Chem Ind Co Ltd | ゴムアスファルト系防水用組成物 |
JPH05259525A (ja) * | 1991-10-25 | 1993-10-08 | Ube Ind Ltd | 圧電素子 |
JPH08293631A (ja) * | 1995-04-24 | 1996-11-05 | Tokin Corp | 圧電バイモルフ |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59111060A (ja) | 1982-12-08 | 1984-06-27 | インペリアル・ケミカル・インダストリ−ズ・ピ−エルシ− | 沈降力場流動分別装置 |
JPS6364640A (ja) * | 1986-09-06 | 1988-03-23 | Olympus Optical Co Ltd | アクチユエ−タ |
US5166571A (en) * | 1987-08-28 | 1992-11-24 | Nec Home Electronics, Ltd. | Vibration gyro having an H-shaped vibrator |
US5408376A (en) * | 1992-10-06 | 1995-04-18 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric head actuator |
US5708320A (en) * | 1994-10-28 | 1998-01-13 | Alps Electric Co., Ltd | Vibratory gyroscope |
JP3407515B2 (ja) * | 1995-11-22 | 2003-05-19 | 東海ゴム工業株式会社 | 圧電素子の製造方法 |
JPH111387A (ja) * | 1997-06-12 | 1999-01-06 | Toshio Fukuda | Pzt薄膜バイモルフ構造体、pzt薄膜バイモルフ形の平行平板構造体、及びその製造方法 |
JPH1126834A (ja) | 1997-07-04 | 1999-01-29 | Toshio Fukuda | Pzt薄膜バイモルフ形の平行平板構造体、及びその製造方法 |
-
1997
- 1997-07-04 JP JP17959997A patent/JPH1126834A/ja active Pending
-
1998
- 1998-07-01 US US09/380,014 patent/US6262516B1/en not_active Expired - Fee Related
- 1998-07-02 EP EP98929811A patent/EP1020937A4/en not_active Withdrawn
- 1998-07-02 WO PCT/JP1998/002991 patent/WO1999001901A1/ja not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59229733A (ja) * | 1983-06-10 | 1984-12-24 | Sharp Corp | 回転磁気ヘツド装置 |
JPS62146426A (ja) * | 1985-12-20 | 1987-06-30 | Asahi Optical Co Ltd | 磁気ヘツド変位装置 |
JPH0465470A (ja) * | 1990-07-06 | 1992-03-02 | Nitto Chem Ind Co Ltd | ゴムアスファルト系防水用組成物 |
JPH05259525A (ja) * | 1991-10-25 | 1993-10-08 | Ube Ind Ltd | 圧電素子 |
JPH08293631A (ja) * | 1995-04-24 | 1996-11-05 | Tokin Corp | 圧電バイモルフ |
Non-Patent Citations (1)
Title |
---|
See also references of EP1020937A4 * |
Cited By (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6262516B1 (en) | 1997-07-04 | 2001-07-17 | Kabushiki Kaisha Tokai Rika Denki Seisakusho | Parallel plate structure provided with PZT thin-film bimorph and method of fabrication thereof |
EP1089355A3 (en) * | 1999-10-01 | 2004-10-06 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
US7345405B2 (en) | 1999-10-01 | 2008-03-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1089351A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089357A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1089355A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089359A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method for producing the same |
EP1089353A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089349A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1089352A3 (en) * | 1999-10-01 | 2004-10-06 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1089354A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1139451A1 (en) * | 1999-10-01 | 2001-10-04 | Ngk Insulators, Ltd. | Piezoelectric / electrostrictive device and method of manufacture thereof |
EP1089350A3 (en) * | 1999-10-01 | 2004-01-02 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089354A3 (en) * | 1999-10-01 | 2004-01-07 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089351A3 (en) * | 1999-10-01 | 2004-01-07 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089353A3 (en) * | 1999-10-01 | 2004-01-07 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1089349A3 (en) * | 1999-10-01 | 2004-09-29 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1089359A3 (en) * | 1999-10-01 | 2004-09-29 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method for producing the same |
EP1089350A2 (en) | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1091424A2 (en) * | 1999-10-01 | 2001-04-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1089352A2 (en) * | 1999-10-01 | 2001-04-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US6915547B2 (en) | 1999-10-01 | 2005-07-12 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1091424A3 (en) * | 1999-10-01 | 2004-10-06 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
EP1089357A3 (en) * | 1999-10-01 | 2005-03-09 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US6883215B2 (en) | 1999-10-01 | 2005-04-26 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US7336021B2 (en) | 1999-10-01 | 2008-02-26 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US7321180B2 (en) | 1999-10-01 | 2008-01-22 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
US6968603B2 (en) | 1999-10-01 | 2005-11-29 | Ngk Insulators, Ltd. | Method of producing a piezoelectric/electrostrictive device |
EP1139451A4 (en) * | 1999-10-01 | 2007-03-28 | Ngk Insulators Ltd | PIEZOELECTRIC / ELECTROSTRICTIVE DEVICE AND METHOD FOR MANUFACTURING THE SAME |
US7164221B1 (en) | 1999-10-01 | 2007-01-16 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US7138749B2 (en) | 1999-10-01 | 2006-11-21 | Ngk Insulators, Ltd. | Piezo-electric/electrostrictive device and method of manufacturing same |
US7072150B2 (en) | 2000-02-01 | 2006-07-04 | Matsushita Electric Industrial Co., Ltd. | Head support mechanism and thin film piezoelectric actuator |
US7072149B2 (en) | 2000-02-01 | 2006-07-04 | Matsushita Electric Industrial Co. Ltd. | Head support mechanism and thin film piezoelectric actuator |
US7027267B2 (en) | 2000-02-01 | 2006-04-11 | Matsushita Electric Industrial Co. Ltd. | Head support mechanism and thin film piezoelectric actuator |
US7006335B2 (en) | 2000-02-01 | 2006-02-28 | Matsushita Electric Industrial Co., Ltd. | Head support mechanism and thin film piezoelectric actuator |
SG106598A1 (en) * | 2000-02-01 | 2004-10-29 | Matsushita Electric Ind Co Ltd | Head support mechanism and thin film piezoelectric actuator |
US6917498B2 (en) | 2000-02-01 | 2005-07-12 | Matsushita Electric Industrial Co., Ltd. | Head support mechanism and thin film piezoelectric actuator |
US6831889B2 (en) | 2000-02-01 | 2004-12-14 | Matsushita Electric Industrial Co., Ltd. | Head support mechanism and thin film piezoelectric actuator |
SG147277A1 (en) * | 2000-02-01 | 2008-11-28 | Matsushita Electric Ind Co Ltd | Head support mechanism and thin film piezoelectric actuator |
Also Published As
Publication number | Publication date |
---|---|
EP1020937A1 (en) | 2000-07-19 |
US6262516B1 (en) | 2001-07-17 |
EP1020937A4 (en) | 2002-07-17 |
JPH1126834A (ja) | 1999-01-29 |
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