WO1995008756A1 - Capteur de pression - Google Patents

Capteur de pression Download PDF

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Publication number
WO1995008756A1
WO1995008756A1 PCT/JP1993/001344 JP9301344W WO9508756A1 WO 1995008756 A1 WO1995008756 A1 WO 1995008756A1 JP 9301344 W JP9301344 W JP 9301344W WO 9508756 A1 WO9508756 A1 WO 9508756A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
diaphragm
sensor
receiving surface
pattern
Prior art date
Application number
PCT/JP1993/001344
Other languages
English (en)
Japanese (ja)
Inventor
Aki Tabata
Natsushi Suzuki
Noritake Suzuki
Yasuhiko Hata
Original Assignee
Kabushiki Kaisha Komatsu Seisakusho
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Komatsu Seisakusho filed Critical Kabushiki Kaisha Komatsu Seisakusho
Priority to PCT/JP1993/001344 priority Critical patent/WO1995008756A1/fr
Publication of WO1995008756A1 publication Critical patent/WO1995008756A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Definitions

  • the present invention relates to a pressure sensor for converting a pressure change of a fluid into an electric signal, and in particular, a sensor unit and a support member are integrated (hereinafter, referred to as a module).
  • the present invention relates to a pressure sensor in which a pressure sensor is mounted on a block by screwing a screw into a screw hole of a pressure sealing material wall (hereinafter referred to as a block).
  • a conventional pressure sensor having a configuration in which a diaphragm, a sensor unit, a support member with an outer thread, and the like are modularized (hereinafter referred to as a sensor module) will be described with reference to FIG.
  • a cylindrical case 81 includes an amplifier 82, a trimmer 83, a feedthrough capacitor 84, wiring, and the like. From one end of the cylindrical case 81, a harness 86 connected to an external processing circuit (not shown) is taken out from one end via a grommet 85. At the other end, a sensor module M is fitted.
  • the number of the through capacitors 84 is equal to the number of the harnesses 86 in the cylindrical case 81, and each of them is supported by a metal plate 87 fixed inside the cylindrical case 81. . Then, by fitting each of the harnesses 86 into the feedthrough capacitor 84, the AC component from each of the harnesses 86 escapes to the outside via the metal plate 87. This protects the output of the pressure sensor from the disturbance of the AC component.
  • This sensor module M is of a type in which electrical connection to the built-in circuit is made by the bonding wire 92, but due to the connection to the sensor section 2, the bonding wire 92 must be thin, and the bonding wire 92 must be thin. Connecting wire 92 to this internal circuit. Indirect bonding is not preferred from a manufacturing and reliability standpoint.
  • a terminal block 89 is provided between the sensor unit 2 and the built-in circuit, and a bonding wire 92 is connected from the sensor unit 2 to the terminal block 89, and a terminal rod is connected from the terminal block 89 to the built-in circuit.
  • a ring 91 is used around these parts. It is surrounded by a potting 92, the inside is further surrounded by an adapter 93, and the inside is molded 94.
  • FIG. 19 shows such a conventional electrical coupling process.
  • the sensor module M will be described with reference to FIG. 14 in which only the sensor module M is extracted from the configuration of the pressure sensor.
  • the sensor module M is provided at the diaphragm 1 which generates stress by receiving the pressure p on the pressure receiving surface 1a, and at the tension position T and the compression position C of the surface 1b of the diaphragm 1 opposite to the pressure receiving surface 1a.
  • Sensor part 2 consisting of a bridge pattern (not shown) connecting two resistance patterns R 1 to R 4 each, and one end face 3a integrally supporting the outer periphery of diaphragm 1 and the outer periphery of the intermediate part 3c has a screw fastening portion 31 and the other end 3b is composed of a support member 3 provided with a pressure introducing hole 33 reaching the pressure receiving surface 1a and an outer thread 32. I have.
  • the support member 3 By turning the support member 3, the outer peripheral screw 31 is screwed into the screw hole of the block 7 and tightened, and the sensor module M is mounted on the block 7.
  • Reference numeral 8 indicates a pressure fluid.
  • connection and support members are employed. Nevertheless, the above-mentioned problems have not yet been fundamentally solved. Rather, such additional configurations have increased the number of components of the pressure sensor, and have caused new problems such as an increase in causes of failure and an increase in manufacturing costs. Disclosure of the invention
  • the present invention has been made in view of the problems of the related art, and has a configuration in which only basic elements of a diaphragm, a sensor unit, and an outer peripheral threaded support member are modularized, but the number of other components is increased and a manufacturing process is complicated.
  • the purpose is to provide a pressure sensor that can prevent the occurrence of drift unique to modularization.
  • the sensor module M has a diaphragm 1 that generates stress by receiving a pressure p on the pressure receiving surface 1a, and a tension position and a compression position on the surface 1b of the diaphragm 1 opposite to the pressure receiving surface 1a.
  • C two sensor patterns R1 to R4, each of which has a sensor pattern 2 composed of the above-mentioned bridge pattern, and one end surface 3a integrally supporting the outer periphery of the diaphragm 1, and an intermediate portion.
  • the outer periphery 3 c has a screw tightening portion 31, and the other end 3 b has a pressure introducing hole 33 reaching the pressure receiving surface 1 a and a support member 3 having an outer thread 3 2. It is modularized.
  • each of the resistance patterns R1 to R4 of the sensor module M is divided into an even number of pairs, and each of the divided resistance butter pairs has the same pattern as each other.
  • Each divided resistor pattern pair is arranged at a position rotated by about 90 ° with respect to the center of the diaphragm, and each divided resistor pattern pair is connected in series for each of the originally belonging resistor patterns R1 to R4. Have been.
  • At least one of the four resistance patterns R 1 to R 4 may be arranged continuously in an arc within a range of a circumferential angle of about 180 ° or about 360 ° with respect to the center of the diaphragm.
  • At least one of the resistance patterns R 1 to R 4 is arranged continuously in a range of about 90 ° with respect to the center of the diaphragm,
  • the button may be formed into a button shape in which the whole is bent substantially at right angles within the same angle range, and this is the third invention.
  • all the resistance patterns R 1 to R 4 in the sensor module M are respectively arranged continuously in a range of about 90 ° with respect to the center of the diaphragm, and at the same time, the whole of the resistance pattern is substantially within the same angle range. It may be a button-shaped shape bent at a right angle, which is the fourth invention.
  • the step portion of the maximum stress concentration portion P has a curvature, and this is the sixth invention.
  • the seventh invention uses a so-called FPC flexible board 6 for wiring with a built-in pressure sensor from the sensor section 2 to the circuit board 4 and from the circuit board 4 to the external harness 5 in the sensor module M.
  • Fig. 12 to Fig. 17 show the test results, and the mechanism of drift generation will be described with reference to these figures.
  • the present inventors conducted a test in which the position of one side was intentionally changed. That is, the same tightening torque, the same pressure sensor, and the same block screw hole Force sensors were installed in order, and each drift was measured. As a result, as shown in Fig. 12, each drift differs depending on the direction in which the pressure sensor finally stopped, that is, the position of the one-sided contact. It was found that a cycle of 80 ° was formed.
  • the horizontal axis shows the clock scale [hour] with the center of the diaphragm as the center of the clock, and 12 o'clock corresponds to 360 °.
  • the vertical axis shows the drift [% FS].
  • the distribution of drift due to the resistance patterns R 2 and R 4 at the tension position T and the resistance patterns R 1 and R 3 at the compression position C in the sensor section 2 of the pressure sensor is calculated by the boundary element method. Analyzed and seen. As shown in Fig. 13, it was confirmed that the stress distribution corresponding to the drift had a period of 180 °.
  • the horizontal axis indicates the angle [°] from 0 ° of the one-side contact position to the rotation direction with respect to the center of the diaphragm, and the vertical axis indicates the stress corresponding to the drift amount.
  • Each symbol ⁇ in the characteristic graph 2 indicates the characteristics of the resistance patterns R 1 and R 3 at the compression position C, and each symbol ⁇ in the characteristic graph 3 indicates the resistance patterns R 2 and R 4 at the tension position T.
  • the characteristics of That is, since the drift due to one side has a period of 180 °, each of the resistance patterns R 1 to R 4 is divided into an even number so that each of them has the same pattern pair.
  • R 1 is divided into R11 and R12
  • R2 is divided into R21 and R22
  • R3 is divided into R31 and R32
  • R4 is divided into R41 and R42, and R11 and R12, R21 and R22, R31 and R32, and R41 and R42 are mutually divided. If they are arranged at a position rotated 90 ° with respect to the center of the diaphragm and they are connected in series, the drift of the resistance pattern will be canceled out.
  • This is the basic concept of the first invention .. ::
  • the resistor patterns R 1 to R 4 are folded at 90 ° so as to be rotated 90 ° with respect to the center of the diaphragm. All the drifts will be canceled out even if they are arranged in a bent shape.
  • the third invention combines the fourth invention with the first or second invention.
  • FIG. 15A is a one-side sectional view of the diaphragm 1
  • FIG. 15B is a characteristic graph at a position corresponding to the position of FIG. 15A.
  • Vout ⁇ R 3 / (R 3 + R 4)-R 2 / (R 1 + R 2) ⁇ X V in
  • Vout 0 It is.
  • Vd ⁇ (A R c-A R t) / (2 R + A R c + A R t) ⁇ x V in
  • ⁇ Rc is the stress generated at the gauge (resistance pattern) R 1, R 3 at the compression position C
  • ⁇ Rt is the stress generated at the gauge (resistance pattern) R 2, R 4 at the tension position T It is.
  • the difference between the stress graphs 1 and P2 and P5 of the characteristic graphs P1 and P4 in FIGS. 15A, 15B and 16 is shown.
  • the stress difference ⁇ 2 the slope of the drift amount with respect to the tightening torque is larger in the steel 1 having the larger stress difference.
  • the diaphragm 1 must have a structure that does not transmit stress as much as possible, or a structure that has almost no stress difference.
  • the fifth and sixth inventions have a configuration that takes into account the effect of the tightening torque. That is, there is no difference in stress as in the characteristic curve 3 shown in FIG.
  • the support member 3 generally has a stepped structure between the diaphragm-side end surface of the screw tightening portion 31 and the diaphragm 1, and this step is the maximum stress concentration region ⁇ . Therefore, the ratio D of the outer diameter D of the maximum stress concentration area ⁇ to the distance L from the maximum stress concentration area ⁇ to the diaphragm 1 is changed, and the stress on the diaphragm 1 is changed The distribution was examined.
  • the distance from the maximum stress concentration site ⁇ to the diaphragm 1 When L is constant and the outer diameter D of the maximum stress concentration site P is reduced, the stress distribution changes from the characteristic graph P9 to the characteristic graph P8. Further, when the maximum stress concentration portion P and its shape are changed, the stress becomes tension stress as shown in the characteristic graph P6, or becomes the compression stress as shown in the characteristic graphs P8 and P9.
  • the size of the tightening torque is set aside, and the smaller the stress difference between the compression position C and the tension position T, the smaller the amount of drift.
  • the condition for this characteristic graph P 7 is that the ratio D: L between the outer diameter D of the maximum stress concentration site P and the distance L from the maximum stress concentration site P to the diaphragm 1 is within the range of 3: 1: 3: 2. I found something.
  • This configuration is the fifth invention.
  • the maximum stress concentration portion P is provided between the diaphragm 1 and the bearing surface within the above numerical range in order to make it difficult for the stress of the bearing surface to be transmitted to the diaphragm 1. It is not desirable that a part be formed. This is because at such a maximum stress concentration site P, the stress distribution is as shown in a characteristic graph P6 in FIG. 17, and drift in the opposite direction occurs. Therefore, in the sixth invention, the maximum stress concentration portion P is rounded during processing to reduce the stress concentration. In this way, the stress difference between the tension position T and the compression position C of the characteristic rug P6 is reduced.
  • the seventh invention modularizes the basic elements of the pressure sensor diaphragm 1, the sensor section 2, and the support member 3 with the outer peripheral thread, and reduces the number of components to facilitate manufacture.
  • FIG. 1 is a diagram illustrating a sensor unit according to an embodiment of the first invention
  • FIG. 2 is a bridge circuit diagram of FIG. 1
  • FIG. 3 is a diagram illustrating a sensor unit according to an embodiment of the second invention
  • FIG. 3 is a bridge circuit diagram
  • FIG. 5 is a diagram illustrating a sensor unit according to an embodiment of the third invention and an embodiment of the fourth invention
  • FIG. 6A is a schematic diagram of a resistance pattern at a compression position in FIG. 5
  • FIG. 6B is a schematic diagram of the resistance pattern at the tension position in FIG. 5
  • FIG. 7 is a sensor module according to the fifth embodiment of the present invention.
  • FIG. 8 is an enlarged view of a part P in FIG. 7, FIG.
  • FIG. 9 is a longitudinal sectional view of an embodiment of the seventh invention
  • FIG. 10 is an enlarged sectional view of the FPC and the sensor part in FIG. 1 is a process diagram of the electrical connection by FPC in FIG. 9
  • FIG. 12 is a characteristic graph for comparing and explaining the effects of the first to fourth inventions
  • FIG. 13 is a characteristic graph for explaining the effects of the first to fourth inventions
  • Fig. 14 is a vertical cross-sectional view of the sensor module illustrating the operation of the fifth to sixth inventions
  • Fig. 158 is an enlarged view of the sensor part of Fig. 14, and
  • Fig. 15B is Fig. 15A.
  • FIG. 16 is a characteristic graph illustrating the operation of the fifth to sixth inventions
  • FIG. 16 is a characteristic graph illustrating the operation of the fifth to sixth inventions
  • FIG. 17 is a characteristic graph illustrating the operation of the fifth to sixth inventions
  • FIG. FIG. 19 is a longitudinal sectional view of the pressure sensor
  • FIG. 19 is a process diagram of conventional wire bonding and electrical connection by the same.
  • the sensor module M that forms the basic configuration of the present invention will be described with reference to FIG.
  • the sensor module M has a diaphragm 1 that generates stress by receiving a pressure p on the pressure receiving surface 1a, and a tension position T on a surface 1b opposite to the pressure receiving surface 1a of the diaphragm 1.
  • a sensor part 2 composed of a bridge pattern formed by two resistance patterns R 1 to R 4 provided at the respective compression positions, and one end face 3 a integrally supports the outer periphery of the diaphragm 1,
  • a support member 3 having a screw fastening portion 31 on the outer periphery of the intermediate portion 3 and a pressure introducing hole 33 reaching the pressure receiving surface 1 a and a screw portion 32 on the outer periphery at the other end 3 b.
  • FIG. 1 is a front view of the sensor unit 2, and a broken-line circle indicates a pressure-receiving surface ⁇ a on the back side.
  • the center of the broken circle is the tension position T, and the outer edge of the broken circle is the compression position C.
  • the resistors R 1 to R 4, the connection between the resistors C 1 to C 4, and the electrodes E 1 to E 6 are formed by patterning. This patterning includes various types such as a type in which each thin film is attached with an adhesive, a type in which impurities are doped, and a type in which lithography is performed after vapor deposition.
  • R1 is R11 and R12
  • R2 is R21 and R22
  • R3 is R31 and R32
  • R4 is R41 and R42
  • each is divided into two patterns. I have.
  • These two divided resistors R11 and R12, R21 and R22, R31 and R32, R41 and R42 are the same linear patterns, respectively.
  • the divided resistance patterns Rll and R12 are rotated 90 ° around the center of the diaphragm. And are connected to each other in series by a resistance connection pattern C 1. The same applies to the other resistors R21 and R22, R31 and R32, and R41 and R42.
  • FIG. 2 shows the connection state of the resistance patterns R 1 to R 4, the connection patterns C 1 to C 4 between the resistances, and the electrode patterns E 1 to E 6, forming a bridge circuit.
  • the split resistor patterns R11 and R12, R31 and R32 are arranged on the same circumference at the compression position C, and the split resistor patterns R21 and R22, and R41 and R42 are in the tension position T. Are arranged on the same circumference. Since the radial extension lines of the divided resistance patterns Rll and R12 constituting the resistance pattern R1 are substantially orthogonal to each other at the center of the diaphragm, the drift generated in both resistances has a phase difference of about 90 °. Therefore, the drifts in the opposite directions are offset by each other.
  • each resistance pattern is not limited to two as in the present embodiment, if it is an even number of pairs, it is appropriately changed.
  • the embodiment of the second invention has a configuration shown in FIGS.
  • the positions and connections of the resistance patterns R1 and R3 at the compression position C are the same as the configuration of the first invention, but the resistance patterns R2 and R4 at the tension position T are respectively They are arranged continuously over a range of 180 ° of the circumferential angle around the center of the diaphragm.
  • the resistance patterns R 2 and R 4 at the tension position T are continuous patterning over 180 °, which is equivalent to one cycle of the drift, so that the drift is self-cancelling. It takes shape. Therefore, the pressure sensor according to the present embodiment As a result, at least all drifts caused by one side of the seating surface are eliminated.
  • the second invention it is not necessary to limit the patterning over 180 ° corresponding to one cycle to the resistance patterns R 2 and R 4 at the tension position T. And the resistance pattern R1 or R3 of any one of the compression patterns. The same effect can be obtained even if 180 ° is 360 °. Incidentally, all the resistance patterns R1 to R4 may be subjected to patterning over 180 ° corresponding to one cycle.
  • the embodiment of the third invention adopts the configuration shown in FIGS. 5 and 6, and the positions of the resistance patterns R1, R3 arranged at the compression position C and the connections C1, C3 are This is the same as the configuration of the first invention.
  • each of the divided resistor patterns R11 and R12 and R31 and R32 are, for example, as shown in an enlarged view of the divided resistor patterns R11 and R12 in FIG. bl, cl, dl, e1, and the other divided resistance pattern R12 is composed of a set of polygonal lines that are sequentially bent at right angles to the fine resistance patterns a2, b2, c2, d2, and e2. I have.
  • each micro-resistor pattern al and a2, bl and b2, c1 and c2, d1 and d2, and e1 and e2 rotated 90 ° with respect to the center of the diaphragm. Because of the configuration, each micro-resistor pattern al and a2, bl and b2, cl and c2, dl and d2, el and e2 form a pair, and the drift is offset. ing. This means that the drift is similarly canceled out for the other resistance patterns R31 and R32.
  • these resistance patterns R 2 and R 4 are each a continuous pattern, and the respective resistance patterns R 2 and R 4
  • the overall shape of this is a collection of button-shaped bending lines that are bent at about 90 ° to the center of the diaphragm. This will be described with reference to the resistance pattern R2 shown in FIG. 6B.
  • the resistance pattern R 2 is obtained by bending a straight line
  • the micro-resistor patterns f1, gl, hl, i1, which are all button-shaped, and the micro-resistor patterns f2, g2, h2, for these micro-resistor patterns f1, gl, hl, i1 i 2 is 90 with respect to the center of the diaphragm. It is formed to be in a rotated position. For this reason, the fine resistance patterns il and f2, gl and g2, hi and h2, and i1 and i2 are paired to offset each other. This also offsets the drift in the resistance pattern R4. Therefore, the pressure sensor eliminates at least all the drifts caused by the contact of the seating surface.
  • the third invention there is one in which the number of bending of the resistance patterns R2 and R4 is changed. Further, in the present embodiment, the positions and connection of the resistance patterns R1, R3 at the compression position C may not be in the form of the first invention, but may be in the form of the third invention.
  • the form of the resistance patterns R2 and R4 of the present embodiment is applied to the resistance patterns R1 and R3 at the compression position C, that is, all the resistance patterns R1 to R4 are used.
  • the fourth invention is provided when the resistance patterns R2 and R4 of the embodiment are used.
  • the elimination status of all drifts due to one-sided collision in the first to fourth inventions is indicated by the symbol ⁇ in FIG. It can be seen that the drifts according to the first to fourth inventions hardly occur at all positions in the circumferential direction, and that the characteristic graph ⁇ ⁇ indicated by the symbol ⁇ in the prior art is well resolved.
  • 90 °, 180 °, and 360 ° are described as strict angle ranges for explanation, but there are differences in the structure of the drift to be suppressed and the structure of the sensor. Actually, various restrictions occur depending on the patterning position of the pile. Therefore, it must be considered about 90 °, about 180 ° or about 360 °, for example, this “about” should be allowed in the angle range of 5 to 10 °.
  • FIG. 7 shows an embodiment of the fifth invention.
  • the maximum stress concentration site P of the support member 3 in the sensor module M corresponds to the starting point of the cylindrical portion 3d toward the diaphragm.
  • the actual outer diameter D of the maximum stress concentration portion P is 12 mm
  • the actual length L of the cylindrical portion 3d is 6 mm
  • the maximum stress concentration site P of the fifth invention is rounded.
  • a roundness R of 0.3 mm is provided at the time of cutting. This makes it possible to more reliably suppress the occurrence of drift due to the tightening torque.
  • FIG. 9 is an overall vertical sectional view of the pressure sensor of the present embodiment.
  • the cylindrical case 81 contains an amplifier 82, a trimmer 83, a feedthrough capacitor 84, wiring, and the like.
  • a harness 5 connected to an external processing circuit (not shown) is taken out from one end of the cylindrical case 81 through a grommet 85.
  • a sensor module M is fitted inside the other end of the cylindrical case 81.
  • the electrical connection of the sensor module M to the built-in circuit is made by directly soldering the flexible board 6 of FPC 6 to the electrode En of the sensor unit 2 6 as shown in Fig. 10, and removing moisture, impurities, etc.
  • the flexible board 6 does not need to be used only for the sensor section 2, but is used for connection between the amplifier circuits 82, 83 and the feedthrough capacitor 84, as shown in Fig. 9, and between other circuit elements. May be. Further, as shown in a dotted frame in FIG. 11, the cap 9 may be covered with the flexible substrate 6 and the mold 9 may be applied. As described above, since the electrical connection is made by the flexible board 6, it is not necessary to separately provide the terminal block 89 in consideration of earthquake resistance unlike the related art.
  • the sensor module M has the simplest configuration including the diaphragm 1, the sensor unit 2, and the support member 3 with the outer peripheral thread, the number of components is small, and the manufacture is easy.
  • INDUSTRIAL APPLICABILITY The present invention is a module in which only the basic elements of the diaphragm, the sensor unit, and the support member with the outer peripheral thread are modularized, but is modularized without increasing the number of other parts and complicating the manufacturing process. It is useful as a pressure sensor that can also prevent the generation of drifts specific to the pressure.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

On peut produire facilement un capteur de pression dans lequel aucune dérive n'est générée, à partir d'un petit nombre de composants, et dont la membrane, l'unité capteur et l'élément de support présentant un bord fileté sont intégrés en un module. Le capteur comprend un module de capteur (M) doté d'une membrane (1) dans laquelle une contrainte est générée lorsqu'une pression p est exercée sur la surface (1a) recevant la pression, une unité capteur (2) présentant un motif en pont constitué de motifs (R1 à R4) présentant chacun deux résistances agencées dans la partie de tensionnage T et la partie de compression, respectivement, sur l'envers (1b) de la surface (1a) recevant la pression; ainsi qu'un élément de support (3) dont une extrémité (3a) porte la circonférence de la membrane (1) de manière solidaire, lequel présente une partie filetée (31) sur la circonférence intermédiaire, et présente un trou (33) d'introduction à pression menant à la surface (1a) recevant la pression, ainsi qu'un filet circonférentiel (32) au niveau de l'autre extrémité. Les deux résistances de chaque motif de résistance (R1 à R4) sont appariées et connectées l'une à l'autre en série. Les motifs de résistance (R1 à R4) présentent le même motif, et sont décalés l'un de l'autre d'un angle d'approximativement 90° autour de la membrane.
PCT/JP1993/001344 1993-09-20 1993-09-20 Capteur de pression WO1995008756A1 (fr)

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PCT/JP1993/001344 WO1995008756A1 (fr) 1993-09-20 1993-09-20 Capteur de pression

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PCT/JP1993/001344 WO1995008756A1 (fr) 1993-09-20 1993-09-20 Capteur de pression

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2820201A1 (fr) * 2001-01-31 2002-08-02 Denso Corp Capteur de quantite dynamique a semiconducteur

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222137A (ja) * 1986-03-24 1987-09-30 Aisin Seiki Co Ltd 圧力センサ用ダイヤフラム
JPS6381238A (ja) * 1986-09-24 1988-04-12 Aisin Seiki Co Ltd 圧力検出器
JPH0239574A (ja) * 1988-07-29 1990-02-08 Nippon Denso Co Ltd 半導体圧力センサ
JPH0262928A (ja) * 1988-03-24 1990-03-02 Komatsu Ltd 薄膜圧力センサ
JPH04247667A (ja) * 1991-02-01 1992-09-03 Mitsubishi Electric Corp 半導体圧力センサ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222137A (ja) * 1986-03-24 1987-09-30 Aisin Seiki Co Ltd 圧力センサ用ダイヤフラム
JPS6381238A (ja) * 1986-09-24 1988-04-12 Aisin Seiki Co Ltd 圧力検出器
JPH0262928A (ja) * 1988-03-24 1990-03-02 Komatsu Ltd 薄膜圧力センサ
JPH0239574A (ja) * 1988-07-29 1990-02-08 Nippon Denso Co Ltd 半導体圧力センサ
JPH04247667A (ja) * 1991-02-01 1992-09-03 Mitsubishi Electric Corp 半導体圧力センサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2820201A1 (fr) * 2001-01-31 2002-08-02 Denso Corp Capteur de quantite dynamique a semiconducteur
JP2002373991A (ja) * 2001-01-31 2002-12-26 Denso Corp 半導体力学量センサ
DE10203631B4 (de) * 2001-01-31 2009-11-19 DENSO CORPORATION, Kariya-shi Halbleitersensor für eine dynamische Grösse

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