WO1988000515A1 - Mecanisme de poignet pour robots utilises dans une atmosphere d'air pur - Google Patents

Mecanisme de poignet pour robots utilises dans une atmosphere d'air pur Download PDF

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Publication number
WO1988000515A1
WO1988000515A1 PCT/JP1987/000506 JP8700506W WO8800515A1 WO 1988000515 A1 WO1988000515 A1 WO 1988000515A1 JP 8700506 W JP8700506 W JP 8700506W WO 8800515 A1 WO8800515 A1 WO 8800515A1
Authority
WO
WIPO (PCT)
Prior art keywords
list
robot
housing
operating
wrist
Prior art date
Application number
PCT/JP1987/000506
Other languages
English (en)
Japanese (ja)
Inventor
Nobutoshi Torii
Susumu Ito
Hiroshi Wakio
Original Assignee
Fanuc Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Ltd filed Critical Fanuc Ltd
Publication of WO1988000515A1 publication Critical patent/WO1988000515A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0258—Two-dimensional joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025—Means for supplying energy to the end effector
    • B25J19/0029—Means for supplying energy to the end effector arranged within the different robot elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • B25J19/0079—Means for protecting the manipulator from its environment or vice versa using an internal pressure system

Definitions

  • the present invention relates to an improved structure of a robot list mechanism of an industrial robot, and particularly to an industrial robot (hereinafter, referred to as an industrial robot) suitable for use in a clean room maintained in a clean air atmosphere.
  • an industrial robot hereinafter, referred to as an industrial robot
  • This is a structure that prevents external leakage of dust and oil components in the list mechanism of a clean room robot.
  • a swivel or non-swivel robot vertical axis, robot arm, mouth bot list, etc., movable part of the mouth as an industrial robot used in a clean room that maintains a clean air atmosphere
  • the dust is prevented from being generated from the robot, and the wiring and piping around the robot movable parts are stored inside the robot body to remove dust sources from around the robot.
  • Robots with various structures are provided for room robots. These clean room robots are used for manufacturing and assembling precision products, such as integrated circuit components.Therefore, lubrication used not only for dust but also for the internal operation mechanism inside the ⁇ -bot machine. Leakage of oil and grease must be avoided.
  • the list mechanism and the robot hand and other working tools attached to the list mechanism must be precision products that are the target of the robot operation. It is necessary to provide a reliable dust-repellent structure and a structure to prevent oil from leaking, since there are many opportunities to approach the area.
  • the robot body is connected to and connected to a vacuum line having a negative pressure source to maintain the inside of the movable part in a negative pressure state, and the friction between the moving parts inside the robot.
  • a vacuum line having a negative pressure source to maintain the inside of the movable part in a negative pressure state, and the friction between the moving parts inside the robot.
  • the present invention solves the above-mentioned problems in the cleaning mechanism for a clean room robot in which a speed reducer in which lubricating oil is sealed is built in the robot list.
  • a robot having a pit pressure is provided in a robot list mechanism attached to the end of a robot arm of an industrial robot used in a clean air atmosphere.
  • a list housing that is connected in communication, a list operation unit provided at one end of the list housing, a motor provided in the list housing for operating the list operation unit, and a low-speed
  • a list operating means having a speed reducer, a boundary between the list housing and the list operating section is sealed with a labyrinth seal, and a reduction gear of the list operating means is provided in a robot list mechanism attached to the end of a robot arm of an industrial robot used in a clean air atmosphere.
  • a robot list mechanism for an industrial robot is provided.
  • a labyrinth seal is provided between the list housing that maintains the negative pressure state and the list operation section, fine dust can flow out from the inside of the list to the outside. It is possible to prevent the leakage of the oil component inside the list by the grease seal, and of course, the leakage of the lubricating oil component to the outside does not occur.
  • Fig. 2 is a side view of the list machine, as viewed from the arrow II-II line in Fig. 1.
  • FIG. 3 is a front view showing the entire structure of a clean room robot to which the list mechanism is attached.
  • FIG. 4 is a sectional view of a second embodiment of the robot list mechanism of the clean room robot according to the present invention.
  • FIG. 5 is a front view showing the entire structure of a clean room robot to which the list mechanism is attached.
  • the list mechanism 8 of the clean room robot has a list housing 10, and the list housing 1 Q includes a support 10 a and the support 10 a. It is composed of lids 10b and 10c tightly fitted to the part 10a, and a list operation part 20 is movably held at one end of the support 10a, that is, at the front end side. The other end, that is, the rear end side, is formed as a circumscribed end to a robot arm (not shown in FIG. 1), and in the center, this list machine 8 is vacuumed via a mouth body. An opening 12 for communicating with the line to obtain a negative pressure state is formed.
  • Reference numeral 14 denotes one of the connecting bolts to the robot arm.
  • the support 10a holds an electric motor 16 (generally composed of a DC servomotor) serving as one operation source of the list operation section 20.
  • the rolling force is transmitted from the pulley 18a attached to the power output 16a to the pulley 18c via the belt 18b.
  • the drive shaft 22 to which the pulley 18 c is attached forms the input of the depression suppressing operation of the list operation unit 20, and the surface rolling force transmitted to the drive shaft 22 is reduced by the reduction gear.
  • a configuration is adopted in which the signal is transmitted to the internal machine frame 2S of the list operation section 20 via the section 24. At this time, the inner machine frame 26 turns around the support 10a at a desired deceleration rate around the axis of the drive shaft 22.
  • the inner machine frame 26 itself is rotatably held on the support 10a by bearings 28 and 30.
  • the bearing 28 is formed by a well-known cross roller bearing. Since the bearing 30 is formed of grease-lubricated ball bearings, the seal 32 prevents leakage of the grease lubricant.
  • the bearings 24a of the reduction gear 24 and the bearings 22a of the drive shaft 22 are also greased, the outer end of the reduction gear holder 34 slides with the pulley 18c. Grease leakage is prevented by the seal 36 provided in the section.
  • the lubricating grease sealed in the reduction gear 24 and other rotary operation elements is formed so as not to leak inside the list mechanism 8, and the two seals 32, 3 are formed.
  • 6 is formed as a sealing member covered with a resin material (tetrafluoroethylene), so that these seals 32 and 36 do not generate fine dust due to wear. .
  • a labyrinth 54 is formed on the mutual sliding part in the downward movement of the inner machine frame 26 of the list operation part 20 and the support body 10a to maintain the negative pressure state. From outside the list toward the inside of the storage mechanism 8 Since only the clean air flows in a minute amount, fine dust and oil components do not leak out from the inside of the list mechanism 8 to the outside.
  • a labyrinth is formed in the same manner in the sliding portion between the outer end of the inner machine frame 26 and the inner surface of the rotary output member 40. In the part 20 as well, the fine air flow accompanying the erosion effect is formed from the outside of the surface transfer member 40 to the inside of the inner machine frame 26 through labyrinth, and conversely the inside The fine dust oil component is prevented from leaking from the outside.
  • the wires 60a and 60b for the motor 42 are formed so as to be connected via the connector 62, and the wire 60a extends to the robot body side through the mouth bot arm, and the wire 60a. 0b is fixedly wired to the motor 42. Therefore, when mechanically connecting the list machine 8 to the robot arm, the wires 62a and 60b can be connected by the connector 62, and the wires 60s and 60b can be connected. Both are stored in the list mechanism 8. It is. When connecting or detaching the list mechanism 8 and the robot arm, the lid 10 and the arm 10c are detached from the support 10a and mechanically connected. The tight fitting connection between the lids 10b, 10c and the support 10a is appropriately sealed by a sealing means.
  • reference numeral 64 denotes a list mechanism when a vacuum line is connected to, for example, a robot hand or the like connected to the rotation output member 40 of the list mechanism 8 to create a negative pressure state. This is a coupling stopper that allows the vacuum line to reach the robot hand from inside of Fig. 8.
  • Reference numeral 6 denotes a signal connector for transmitting an electric signal to the robot hand and obtaining an electric detection signal.
  • FIG. 2 shows a state in which the list operation unit 20 of the list mechanism shown in FIG. 1 is restrained from lowering with respect to the list housing 10.
  • An electric motor 16 for driving the suppression operation is shown.
  • FIG. 3 is a front view showing the overall shape of a clean room robot to which the list mechanism 8 according to the first embodiment is mounted.
  • the list mechanism 8 is attached to the tip of a robot arm (the tip is slightly shown) that is retractably accommodated inside the robot arm section 6.
  • the arm 6 is attached to the upper end of a vertical shaft (slightly indicated at the tip) housed inside the robot body 4.
  • the vertical axis is configured to be capable of vertical movement and to be capable of turning around the vertical axis.
  • the robot body 4 is fixedly fixed to the floor in the clean room.
  • List operation part 20 of list mechanism 8 A suitable mouth bot work means, for example, a ⁇ -bot hand is attached to the rotary output member 40 in the above-mentioned manner, and the desired mouth bot work is achieved in a three-dimensional space.
  • FIG. 4 is a cross-sectional view showing another embodiment of a clean room robot list mechanism according to the present invention. In this embodiment, a single list operation section is provided. I have.
  • This list mechanism 8a has a hermetically sealed list housing 90 as in the previous embodiment, and this list housing 90 is
  • An electric motor 96 for driving the list operation unit 100 is formed on the support 92 and is formed of a cover 92 and a cover 94.
  • the list operation section 100 is provided on the front end side of the list housing 90, and the rear end side is formed at the coupling end to the robot arm, as in the above-described embodiment. is there.
  • the rotation output of the motor 96 is transmitted to the input bevel gear 102 at a desired reduction rate via the speed reducer 98, and the input operation bevel gear 102 has a restarting unit 100 from the input bevel gear 102.
  • the direction of rotation is converted by the output level gear 104, and the list operation unit
  • reference numeral 108 denotes a grease-lubricated bearing provided in the speed reducer 98
  • 110 denotes an input bevel gear
  • the small holes 122 formed in the rotary output member 106 by the diameter of the labyrinth structure portion and the rotary output member are formed.
  • a clean air flow from the outside of the list to the inside of the list housing 90 is formed through the center hole 1 24 of 106 and the inside of the list housing 90, and fine dust and dust from the inside of the list housing 90 to the outside are formed. Leakage of lubrication dust is prevented.
  • the center hole 1 of the rotary output member 106 is not used. 24 receives clean air flow from the outside only through the small holes 1 2 2.
  • FIG. 5 shows the appearance of a clean room robot to which the above-described list mechanism 8a of the second embodiment of the present invention is attached, similar to the case of FIG. 3 described above. The details are omitted here because of the configuration.
  • the wrist mechanism which maintains the negative pressure as before, has a lapiling structure to allow a small amount of clean air to flow inward from the outside. It provides a robot list mechanism that is configured to prevent leakage of substances to the outside even if this is used, and that has a structure in which wiring and piping are housed inside. Clean room held in The result is a listing mechanism that is extremely suitable for use within a device.
  • the reduction gear used for the list mechanism according to the present invention is the first reduction gear.
  • Both the first and second embodiments show an example in which a well-known harmonic drive device (trade name) is used, which is provided in a narrow space by being connected to a motor, and has a relatively small size. This is because it is suitable for obtaining a high deceleration rate.
  • a well-known harmonic drive device (trade name) is used, which is provided in a narrow space by being connected to a motor, and has a relatively small size. This is because it is suitable for obtaining a high deceleration rate.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)

Abstract

Des mécanismes de poignet (8, 8a) de robots montés sur l'extrémité du bras (6) d'un robot (4) utilisé dans une atmosphère d'air pur comprennent des logements de poignets (10, 90) reliés à une conduite d'aspiration ayant une source de dépression, des unités d'actionnement des poignets (20, 100) agencées aux extrémités des logements de poignets (10, 90), des moteurs (16, 96) agencés dans les logements de poignets (10, 90) afin d'actionner les unités d'actionnement des poignets (20, 100) et des engrenages réducteurs (24, 98). Les limites entre les logements de poignets (10, 90) et les unités d'actionnement des poignets (20, 100) sont hermétiquement fermées par un dispositif d'étanchéité à labyrinthe (54), et les extrémités de sortie des moteurs électriques (16, 96) et des engrenages réducteurs (24, 98) sont hermétiquement fermées par des dispositifs d'étanchéité (32, 36, 50, 52, 114) afin d'éviter des fuites de graisse.
PCT/JP1987/000506 1986-07-15 1987-07-14 Mecanisme de poignet pour robots utilises dans une atmosphere d'air pur WO1988000515A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16479186A JPS6322290A (ja) 1986-07-15 1986-07-15 クリ−ンル−ム用ロボツトの手首機構
JP61/164791 1986-07-15

Publications (1)

Publication Number Publication Date
WO1988000515A1 true WO1988000515A1 (fr) 1988-01-28

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ID=15800008

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1987/000506 WO1988000515A1 (fr) 1986-07-15 1987-07-14 Mecanisme de poignet pour robots utilises dans une atmosphere d'air pur

Country Status (2)

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JP (1) JPS6322290A (fr)
WO (1) WO1988000515A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0502832A1 (fr) * 1991-03-04 1992-09-09 COMAU S.p.A. Poignet pour robot industriel
EP1894684A1 (fr) * 2006-08-31 2008-03-05 Fanuc Ltd Dispositif d'étanchéité pour section de joint de robot et robot articulé l'utilisant
CN102049783A (zh) * 2009-11-10 2011-05-11 鸿富锦精密工业（深圳）有限公司 机器人结构
ITTO20110156A1 (it) * 2011-02-24 2012-08-25 Comau Spa Polso di robot articolato
CN103659830A (zh) * 2012-08-31 2014-03-26 发那科株式会社 具有安装于末端执行器安装部的盖的多关节机械人
CN108127687A (zh) * 2018-01-29 2018-06-08 埃夫特智能装备股份有限公司 一种工业用机器人手腕

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2576268B2 (ja) * 1990-06-19 1997-01-29 富士通株式会社 ロボットの関節機構
JP5310342B2 (ja) * 2009-07-16 2013-10-09 株式会社デンソーウェーブ ロボットの手首装置
JP5359640B2 (ja) * 2009-07-21 2013-12-04 株式会社デンソーウェーブ ロボットの手首装置
CN106182068A (zh) * 2016-07-28 2016-12-07 苏州优银机械有限公司 一种工业悬臂连接组件
CN106217404A (zh) * 2016-07-28 2016-12-14 苏州优银机械有限公司 一种悬臂回转连接组件
CN106217408A (zh) * 2016-07-28 2016-12-14 苏州优银机械有限公司 一种工业悬臂固定组件
CN106182069A (zh) * 2016-07-28 2016-12-07 苏州优银机械有限公司 一种工业悬臂偏心定位连接组件

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5276070U (fr) * 1975-12-04 1977-06-07
JPS571692A (en) * 1980-06-03 1982-01-06 Matsushita Electric Ind Co Ltd Wrist section for industrial robot
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構
JPS60127996A (ja) * 1983-12-15 1985-07-08 松下電器産業株式会社 工業用ロボツトの塵埃飛散防止装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6133890A (ja) * 1984-07-26 1986-02-17 松下電器産業株式会社 工業用ロボツト

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5276070U (fr) * 1975-12-04 1977-06-07
JPS571692A (en) * 1980-06-03 1982-01-06 Matsushita Electric Ind Co Ltd Wrist section for industrial robot
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構
JPS60127996A (ja) * 1983-12-15 1985-07-08 松下電器産業株式会社 工業用ロボツトの塵埃飛散防止装置

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0502832A1 (fr) * 1991-03-04 1992-09-09 COMAU S.p.A. Poignet pour robot industriel
US5178031A (en) * 1991-03-04 1993-01-12 Comau S.P.A. Wrist for an industrial robot
EP1894684A1 (fr) * 2006-08-31 2008-03-05 Fanuc Ltd Dispositif d'étanchéité pour section de joint de robot et robot articulé l'utilisant
US7878088B2 (en) 2006-08-31 2011-02-01 Fanuc Ltd Sealing device for joint section of robot and articulated robot having the same
CN102049783A (zh) * 2009-11-10 2011-05-11 鸿富锦精密工业（深圳）有限公司 机器人结构
US20110112687A1 (en) * 2009-11-10 2011-05-12 Hong Fu Jin Precision Industry (Shenzhen) Co. Ltd. Robot arm
ITTO20110156A1 (it) * 2011-02-24 2012-08-25 Comau Spa Polso di robot articolato
EP2492060A1 (fr) * 2011-02-24 2012-08-29 COMAU S.p.A. Poignet de robot articulé
US8820189B2 (en) 2011-02-24 2014-09-02 Comau S.P.A. Articulated robot wrist
CN103659830A (zh) * 2012-08-31 2014-03-26 发那科株式会社 具有安装于末端执行器安装部的盖的多关节机械人
CN108127687A (zh) * 2018-01-29 2018-06-08 埃夫特智能装备股份有限公司 一种工业用机器人手腕

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Publication number Publication date
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