WO1987007024A1 - Method and apparatus for identifying particulate matter - Google Patents

Method and apparatus for identifying particulate matter Download PDF

Info

Publication number
WO1987007024A1
WO1987007024A1 PCT/US1987/000652 US8700652W WO8707024A1 WO 1987007024 A1 WO1987007024 A1 WO 1987007024A1 US 8700652 W US8700652 W US 8700652W WO 8707024 A1 WO8707024 A1 WO 8707024A1
Authority
WO
WIPO (PCT)
Prior art keywords
focal plane
particulate matter
plane array
focussing
array
Prior art date
Application number
PCT/US1987/000652
Other languages
English (en)
French (fr)
Inventor
Robert J. Champetier
Original Assignee
Hughes Aircraft Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Company filed Critical Hughes Aircraft Company
Publication of WO1987007024A1 publication Critical patent/WO1987007024A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0612—Optical scan of the deposits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N15/0227—Investigating particle size or size distribution by optical means using imaging; using holography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4704—Angular selective
    • G01N2021/4711—Multiangle measurement
    • G01N2021/4721—Multiangle measurement using a PSD

Definitions

  • the present invention overcomes and avoids these and other problems by providing a witness plate used to collect samples of contaminants within a chosen environment.
  • An optical imager focuses the illuminated contaminants onto a detector focal plane, such as a charge-coupled detector array.
  • the information detected is then processed by a computer, which is programmed to provide such identification as sizes and count of the contaminants.
  • an apparatus 10 for viewing particu- late contaminants is positioned to view a witness plate 12 onto which the contaminants are to be deposited.
  • Witness plate 12 is placed in and adja ⁇ cent to optical equipment where contamination is desired to be monitored.
  • a light source 14 is positioned to direct light 16 at a grazing angle with respect to the witness plate, so that the particles only are well illuminated.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
PCT/US1987/000652 1986-05-05 1987-03-27 Method and apparatus for identifying particulate matter WO1987007024A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US85956486A 1986-05-05 1986-05-05
US859,564 1986-05-05

Publications (1)

Publication Number Publication Date
WO1987007024A1 true WO1987007024A1 (en) 1987-11-19

Family

ID=25331216

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1987/000652 WO1987007024A1 (en) 1986-05-05 1987-03-27 Method and apparatus for identifying particulate matter

Country Status (4)

Country Link
EP (1) EP0264427A1 (de)
JP (1) JPS63503243A (de)
IL (1) IL82107A0 (de)
WO (1) WO1987007024A1 (de)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991014935A1 (en) * 1990-03-22 1991-10-03 Abk Bygge- Og Miljøteknik A/S A method and an apparatus for cleaning control
GB2249829A (en) * 1990-11-13 1992-05-20 Powergen Public Limited Compan Measurement of carbon in ash
FR2753531A1 (fr) * 1996-09-19 1998-03-20 Snecma Procede de reglage du niveau d'eclairement d'un echantillon dans un systeme de granulometrie par analyse d'images
WO1999010725A1 (en) * 1997-08-21 1999-03-04 Tioxide Group Services Limited Particle dispersion determination
FR2770296A1 (fr) * 1997-10-29 1999-04-30 Lorraine Laminage Procede d'analyse de particules atmospheriques et appareil d'analyse de particules atmospheriques pour la mise en oeuvre d'un tel procede
FR2795516A1 (fr) * 1999-06-28 2000-12-29 Univ Henri Poincare Nancy Dispositif d'analyse et de comptage automatique d'objets et procede de traitement des donnees
DE10016832A1 (de) * 2000-04-03 2001-10-18 Winfried Labuda Substrat zur Sichtbarmachung von daran angelagerten Partikeln und/oder Materialschichten
WO2002044693A1 (en) * 2000-11-28 2002-06-06 Imeco Automazioni S.R.L. Apparatus for analyzing ground products
EP1857806A2 (de) * 2006-05-15 2007-11-21 OMRON Corporation, a corporation of Japan Gerät, Verfahren und Programm zum Nachweis von Verunreinigungen in einem Fluid
GB2449312A (en) * 2007-05-18 2008-11-19 Malvern Instr Ltd Dispersing a sample of particulate material
FR2922019A1 (fr) * 2007-10-09 2009-04-10 Novacyt Soc Par Actions Simpli Procede d'ajustement automatise de la densite cellulaire pour la realisation d'une plaque d'analyse
CN109932292A (zh) * 2019-03-29 2019-06-25 苏州精濑光电有限公司 一种落尘检测方法
US10739241B2 (en) 2014-12-17 2020-08-11 Schlumberger Technology Corporation Test apparatus for estimating liquid droplet fallout

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1384115A (fr) * 1963-11-22 1965-01-04 Commissariat Energie Atomique Détecteur de particules liquides entraînées par un gaz en circulation
US3526461A (en) * 1966-04-27 1970-09-01 Saab Ab Determining cleanness of air in a controlled environment
US4075462A (en) * 1975-01-08 1978-02-21 William Guy Rowe Particle analyzer apparatus employing light-sensitive electronic detector array
JPS56162037A (en) * 1980-05-19 1981-12-12 Nec Corp Detection for foreign matter on surface
JPS5912342A (ja) * 1982-07-13 1984-01-23 Hitachi Ltd 異物検出装置
JPS59184840A (ja) * 1983-04-06 1984-10-20 Mitsubishi Chem Ind Ltd 液体中のダスト測定法及びその装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890590A (de) * 1972-03-03 1973-11-26
JPS5610580B2 (de) * 1974-03-14 1981-03-09
JPS5293380A (en) * 1976-02-02 1977-08-05 Teijin Ltd Image discriminator
JPS52156694A (en) * 1976-06-22 1977-12-27 Tetsuo Yoshida Apparatus for grain size measurements
JPS6023293B2 (ja) * 1979-04-12 1985-06-06 株式会社島津製作所 粒度分布自動測定方法
JPS5876740A (ja) * 1981-10-15 1983-05-09 インタ−ナシヨナル・リモ−ト・イメ−ジング・システムズ 希薄液体試料の粒子分析法
JPS5915807A (ja) * 1982-07-20 1984-01-26 Furukawa Electric Co Ltd:The 物体の表面計測方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1384115A (fr) * 1963-11-22 1965-01-04 Commissariat Energie Atomique Détecteur de particules liquides entraînées par un gaz en circulation
US3526461A (en) * 1966-04-27 1970-09-01 Saab Ab Determining cleanness of air in a controlled environment
US4075462A (en) * 1975-01-08 1978-02-21 William Guy Rowe Particle analyzer apparatus employing light-sensitive electronic detector array
JPS56162037A (en) * 1980-05-19 1981-12-12 Nec Corp Detection for foreign matter on surface
JPS5912342A (ja) * 1982-07-13 1984-01-23 Hitachi Ltd 異物検出装置
JPS59184840A (ja) * 1983-04-06 1984-10-20 Mitsubishi Chem Ind Ltd 液体中のダスト測定法及びその装置

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
IBM Technical Disclosure Bulletin, Volume 17, No. 9, February 1975 (US), N. SEEBE: "Double pass Grazing Incidence Scanner", pages 2628-2629, see the whole document *
PATENT ABSTRACTS OF JAPAN, Volume 6, No. 46, (P-107)(924) 24 March 1982, see the whole Abstract & JP, A, 56-162037 (Nippon Denki K.K.) 12 December 1981 *
PATENT ABSTRACTS OF JAPAN, Volume 8, No. 101 (P-273)(1538) 12 May 1984, see the whole Abstract & JP, A, 59-12342 (Hitachi Seisakusho K.K.) 23 January 1984 *
PATENT ABSTRACTS OF JAPAN, Volume 9, No. 44, (P-337)(1767) 23 February 1985, see the whole Abstract & JP, A, 59-184840 (Mitsubishi Kasei Kogyo) 20 October 1984 *

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991014935A1 (en) * 1990-03-22 1991-10-03 Abk Bygge- Og Miljøteknik A/S A method and an apparatus for cleaning control
GB2249829A (en) * 1990-11-13 1992-05-20 Powergen Public Limited Compan Measurement of carbon in ash
FR2753531A1 (fr) * 1996-09-19 1998-03-20 Snecma Procede de reglage du niveau d'eclairement d'un echantillon dans un systeme de granulometrie par analyse d'images
WO1999010725A1 (en) * 1997-08-21 1999-03-04 Tioxide Group Services Limited Particle dispersion determination
FR2770296A1 (fr) * 1997-10-29 1999-04-30 Lorraine Laminage Procede d'analyse de particules atmospheriques et appareil d'analyse de particules atmospheriques pour la mise en oeuvre d'un tel procede
FR2795516A1 (fr) * 1999-06-28 2000-12-29 Univ Henri Poincare Nancy Dispositif d'analyse et de comptage automatique d'objets et procede de traitement des donnees
WO2001001109A1 (fr) * 1999-06-28 2001-01-04 Centre Alexis Vautrin (Etablissement Prive) Dispositif d'analyse et de comptage automatique d'objets et procede de traitement des donnees
DE10016832A1 (de) * 2000-04-03 2001-10-18 Winfried Labuda Substrat zur Sichtbarmachung von daran angelagerten Partikeln und/oder Materialschichten
DE10016832C2 (de) * 2000-04-03 2002-06-20 Winfried Labuda Substrat zur Sichtbarmachung von daran angelagerten Partikeln und/oder Materialschichten
WO2002044693A1 (en) * 2000-11-28 2002-06-06 Imeco Automazioni S.R.L. Apparatus for analyzing ground products
EP1857806A2 (de) * 2006-05-15 2007-11-21 OMRON Corporation, a corporation of Japan Gerät, Verfahren und Programm zum Nachweis von Verunreinigungen in einem Fluid
EP1857806A3 (de) * 2006-05-15 2008-02-27 OMRON Corporation, a corporation of Japan Gerät, Verfahren und Programm zum Nachweis von Verunreinigungen in einem Fluid
GB2449312A (en) * 2007-05-18 2008-11-19 Malvern Instr Ltd Dispersing a sample of particulate material
GB2449312B (en) * 2007-05-18 2012-03-14 Malvern Instr Ltd Method and apparatus for dispersing a sample of particulate material
US8448534B2 (en) 2007-05-18 2013-05-28 Malvern Instruments Incorporated Method and apparatus for dispersing a sample of particulate material
FR2922019A1 (fr) * 2007-10-09 2009-04-10 Novacyt Soc Par Actions Simpli Procede d'ajustement automatise de la densite cellulaire pour la realisation d'une plaque d'analyse
WO2009053602A2 (fr) * 2007-10-09 2009-04-30 Novacyt Procede d'ajustement automatise de la densite cellulaire pour la realisation d'une plaque d'analyse
WO2009053602A3 (fr) * 2007-10-09 2009-06-25 Novacyt Procede d'ajustement automatise de la densite cellulaire pour la realisation d'une plaque d'analyse
US8969031B2 (en) 2007-10-09 2015-03-03 Novacyt Automated cell density adjustment method for producing an analysis plate
US10739241B2 (en) 2014-12-17 2020-08-11 Schlumberger Technology Corporation Test apparatus for estimating liquid droplet fallout
CN109932292A (zh) * 2019-03-29 2019-06-25 苏州精濑光电有限公司 一种落尘检测方法

Also Published As

Publication number Publication date
EP0264427A1 (de) 1988-04-27
JPS63503243A (ja) 1988-11-24
IL82107A0 (en) 1987-10-30

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