JPS63503243A - 粒子状物質を識別する方法および装置 - Google Patents

粒子状物質を識別する方法および装置

Info

Publication number
JPS63503243A
JPS63503243A JP62502313A JP50231387A JPS63503243A JP S63503243 A JPS63503243 A JP S63503243A JP 62502313 A JP62502313 A JP 62502313A JP 50231387 A JP50231387 A JP 50231387A JP S63503243 A JPS63503243 A JP S63503243A
Authority
JP
Japan
Prior art keywords
focal plane
particulate matter
plane array
focusing
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62502313A
Other languages
English (en)
Japanese (ja)
Inventor
チヤンピテイアー，ロバート・ジエイ
Original Assignee
ヒユーズ・エアクラフト・カンパニー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヒユーズ・エアクラフト・カンパニー filed Critical ヒユーズ・エアクラフト・カンパニー
Publication of JPS63503243A publication Critical patent/JPS63503243A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0612—Optical scan of the deposits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G01N15/0227—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging using imaging, e.g. a projected image of suspension; using holography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4704—Angular selective
    • G01N2021/4711—Multiangle measurement
    • G01N2021/4721—Multiangle measurement using a PSD

Landscapes

  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP62502313A 1986-05-05 1987-03-27 粒子状物質を識別する方法および装置 Pending JPS63503243A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US85956486A 1986-05-05 1986-05-05
US859,564 1986-05-05

Publications (1)

Publication Number Publication Date
JPS63503243A true JPS63503243A (ja) 1988-11-24

Family

ID=25331216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62502313A Pending JPS63503243A (ja) 1986-05-05 1987-03-27 粒子状物質を識別する方法および装置

Country Status (4)

Country Link
EP (1) EP0264427A1 (de)
JP (1) JPS63503243A (de)
IL (1) IL82107A0 (de)
WO (1) WO1987007024A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK163538C (da) * 1990-03-22 1992-08-03 Abk Bygge & Miljoeteknik Fremgangsmaade og maaleapparat til rengoeringskontrol
GB2249829A (en) * 1990-11-13 1992-05-20 Powergen Public Limited Compan Measurement of carbon in ash
FR2753531B1 (fr) * 1996-09-19 1998-10-16 Snecma Procede de reglage du niveau d'eclairement d'un echantillon dans un systeme de granulometrie par analyse d'images
GB9717658D0 (en) * 1997-08-21 1997-10-22 Tioxide Group Services Ltd Particle dispersion determination
FR2770296B1 (fr) * 1997-10-29 2000-01-07 Lorraine Laminage Procede d'analyse de particules atmospheriques et appareil d'analyse de particules atmospheriques pour la mise en oeuvre d'un tel procede
FR2795516B1 (fr) * 1999-06-28 2003-08-08 Univ Henri Poincare Nancy I Dispositif d'analyse et de comptage automatique d'objets et procede de traitement des donnees
DE10016832C2 (de) * 2000-04-03 2002-06-20 Winfried Labuda Substrat zur Sichtbarmachung von daran angelagerten Partikeln und/oder Materialschichten
EP1337834A1 (de) * 2000-11-28 2003-08-27 Imeco Automazioni S.R.L. Vorrichtung zur analyse gemahlener produkte
JP2007304065A (ja) * 2006-05-15 2007-11-22 Omron Corp 異物検出装置、異物検出方法、異物検出プログラム、および該プログラムが記録された記録媒体
GB2449312B (en) 2007-05-18 2012-03-14 Malvern Instr Ltd Method and apparatus for dispersing a sample of particulate material
FR2922019B1 (fr) 2007-10-09 2009-11-27 Novacyt Procede d'ajustement automatise de la densite cellulaire pour la realisation d'une plaque d'analyse
WO2016097785A1 (en) 2014-12-17 2016-06-23 Schlumberger Canada Limited Test apparatus for estimating liquid droplet
CN109932292A (zh) * 2019-03-29 2019-06-25 苏州精濑光电有限公司 一种落尘检测方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890590A (de) * 1972-03-03 1973-11-26
JPS50123395A (de) * 1974-03-14 1975-09-27
JPS5293380A (en) * 1976-02-02 1977-08-05 Teijin Ltd Image discriminator
JPS52156694A (en) * 1976-06-22 1977-12-27 Tetsuo Yoshida Apparatus for grain size measurements
JPS55136936A (en) * 1979-04-12 1980-10-25 Shimadzu Corp Method for automatic measurement of grain-size distribution
JPS5876740A (ja) * 1981-10-15 1983-05-09 インタ−ナシヨナル・リモ−ト・イメ−ジング・システムズ 希薄液体試料の粒子分析法
JPS5915807A (ja) * 1982-07-20 1984-01-26 Furukawa Electric Co Ltd:The 物体の表面計測方法
JPS59184840A (ja) * 1983-04-06 1984-10-20 Mitsubishi Chem Ind Ltd 液体中のダスト測定法及びその装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1384115A (fr) * 1963-11-22 1965-01-04 Commissariat Energie Atomique Détecteur de particules liquides entraînées par un gaz en circulation
SE315760B (de) * 1966-04-27 1969-10-06 Saab Ab
US4075462A (en) * 1975-01-08 1978-02-21 William Guy Rowe Particle analyzer apparatus employing light-sensitive electronic detector array
JPS56162037A (en) * 1980-05-19 1981-12-12 Nec Corp Detection for foreign matter on surface
JPS5912342A (ja) * 1982-07-13 1984-01-23 Hitachi Ltd 異物検出装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890590A (de) * 1972-03-03 1973-11-26
JPS50123395A (de) * 1974-03-14 1975-09-27
JPS5293380A (en) * 1976-02-02 1977-08-05 Teijin Ltd Image discriminator
JPS52156694A (en) * 1976-06-22 1977-12-27 Tetsuo Yoshida Apparatus for grain size measurements
JPS55136936A (en) * 1979-04-12 1980-10-25 Shimadzu Corp Method for automatic measurement of grain-size distribution
JPS5876740A (ja) * 1981-10-15 1983-05-09 インタ−ナシヨナル・リモ−ト・イメ−ジング・システムズ 希薄液体試料の粒子分析法
JPS5915807A (ja) * 1982-07-20 1984-01-26 Furukawa Electric Co Ltd:The 物体の表面計測方法
JPS59184840A (ja) * 1983-04-06 1984-10-20 Mitsubishi Chem Ind Ltd 液体中のダスト測定法及びその装置

Also Published As

Publication number Publication date
EP0264427A1 (de) 1988-04-27
IL82107A0 (en) 1987-10-30
WO1987007024A1 (en) 1987-11-19

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