JPS63503243A - Method and apparatus for identifying particulate matter - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] The present invention relates to a method and apparatus for identifying particulate contaminants on surfaces, and more particularly to: Concerning the simultaneous identification and verification of particulate contaminants on such surfaces.

The absence or cleanliness of contamination in optical systems is detected and detected. It is proportional to the quality of the product. Prior to assembly, components and parts are typically Cleaning is carried out in special spray equipment arranged to collect the outflow solvent.

The solvent is then filtered to collect and optically count residual particles.

Small-configuration devices are easier to clean than complex assemblies, but complex devices such as blade structures There are other options for rough assemblies, including witness plates. For example, one square foot of Kapt on is used to attach the optical element.

The cleaning method described above is applied to this witness sample. 1-inch or so Witness plate method using a smaller optical mirror or black glass According to the law, dust can be counted optically using a 5aab photometer etc. Accumulation generally proportional to the community area covered by the dust Target scattering is obtained. In experimental equipment, special grazing incident light is used to Using a high-resolution photo witness plate taken by a camera.

In the case of the 5aab photometer, only one electrical reading is obtained and the dust particles No information is available regarding offspring size distribution.

One of the biggest drawbacks of other methods is that they are slow.

If you want to completely read the dust on the witness mirror or witness sheet, Even if a direct optical device is used or the washed product is analyzed after washing, it takes a considerable amount of time.

The final count is done manually on a photographic negative or on special filter paper.

Therefore, none of the methods allows instantaneous monitoring on the spot, and contamination due to size. The type of object cannot be completely detected.

Additionally, traditional equipment uses moving parts, making it complex and difficult to design, assemble, and It is difficult to use and operate. In some devices, the witness plate can be moved in one direction. the laser beam sweeps the sample in the rask back and forth along the other direction. Ru. The light is then captured and detected by an optical system and an integrating sphere. other equipment , a circular witness plate similar to a record on a record player are using.

The plate rotates within the device and a focused beam illuminates a small spot on the plate.

In other words, the beam follows the grooves of a record in the same way that a record stylus follows the grooves of a record. Track your goals. Such devices are formed from several moving parts, are complex and , cumbersome in design, assembly, and operation. Additionally, small parts and complexity make them difficult to use. They are prone to malfunctions and are relatively expensive.

We support these customers by providing witness plates that are used to and other problems can be overcome and avoided. Contamination exposed to optical imaging equipment Focusing an object onto a focal plane, such as a charge-coupled detector array. The detected information is the contaminant by a computer programmed to provide identification such as total number and size It is processed.

Various advantages can be obtained from this configuration. Since only a few parts are movable, the structure of the present invention is It is easier to read and use, has fewer malfunctions, and is less expensive. identified Identification of contaminants is both direct and slow as size and total number are immediately identified. Provided automatically and without delay. Other objects and advantages as well as a more complete understanding of the invention will become apparent from the following description of an exemplary embodiment and the accompanying drawings.

Brief description of the drawing There is only one drawing and it automatically removes particulate contaminants on the Witphos mirror. FIG. 2 is a diagram of a counting device.

Description of the preferred embodiment Therefore, the device 10 for observing particulate contaminants such as dust can is placed to observe the fitness plate 12. The witness plate 12 is located within and adjacent to the optical device where contaminants are monitored.

a light source 14 for illuminating particulate contaminants falling onto the witness plate; is arranged to guide the light beam 16 at a glancing angle with respect to the lightness plate. Only the particles are irradiated by the including a high-resolution lens system 18 secured to the housing 20 by a possible connection 22; nothing. A charge-coupled device (CCD) array 24 having a conventional configuration is provided in the housing. 20 and defines a focal plane 25. The bellows 22 is free from particulate contamination. Adjustments are made to sharply focus the image of the object onto the focal plane array 24.

This adjustment is accomplished by using a flip mirror 26 that is pivotable about point 28. the contaminants are focused onto the screen 30. like this Focusing is conventional - used in ocular reflex cameras. Similar to sharp focusing is defined on said screen 30; If the mirror 30 pivots, the image is focused onto the focal plane of the charge coupled device 24. Ru.

The image detected by the array 24 is A conventional computer 32 such as a Hewlett Packard 98B6 Conducted by air. The computer determines the size and size of particulate contaminants. The total count is quickly calculated and the calculation and identification results are displayed or graphically displayed. expressed.

The focal plane is preferably a CCD array, more specifically a stationary array or A linear array that sweeps the image from plate 12, which is used commercially. There is. Such units currently in use have approximately 1600 pixels on a line. Provides 2000 positions and sweeps automatically.

Although the present invention has been described with respect to specific embodiments, the intent and scope of the invention Various changes and changes are possible without leaving.

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Claims (8)

[Claims] 1. Means for providing particulate matter only irradiation and focal plane array of charge-coupled devices and, means for focusing radiation onto the focal plane array; and means connected to the focal plane array; means for providing particulate species; A device that identifies particulate matter on the Witsutonezu plate. 2. Claim 1, wherein said focal plane array comprises a stationary array of charge-coupled devices. The device according to item 1. 3. The focal plane array comprises a linear array of charge-coupled devices sweeping the illumination. An apparatus according to claim 1, comprising: 4. Claim 1, wherein said focusing means comprises a high resolution lens magnifier. equipment. 5. The type providing means is a computer that provides the size and total number of particulate matter. 2. The apparatus according to claim 1, comprising: a. 6. a screen and said wit to enable fine focusing by said focusing means; a pivotable mirror disposed between the neck plate and the screen; An apparatus according to claim 1, comprising: 7. The irradiation means, the focal plane, the focusing means, and the type providing means are contaminated. The apparatus according to claim 1 located within the environment of the dyed product and adjacent to the environment of the contaminated product. equipment. 8. Irradiates particulate matter, The irradiated particulate matter is focused onto a focal plane array, and the irradiated particulate matter is instantaneously discharged from the focal plane array. A method for measuring the instantaneous size of particulate matter, comprising the step of temporarily obtaining the size.