US9081031B2 - Electrical current sensor and method of manufacturing the same - Google Patents

Electrical current sensor and method of manufacturing the same Download PDF

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Publication number
US9081031B2
US9081031B2 US13/741,244 US201313741244A US9081031B2 US 9081031 B2 US9081031 B2 US 9081031B2 US 201313741244 A US201313741244 A US 201313741244A US 9081031 B2 US9081031 B2 US 9081031B2
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United States
Prior art keywords
substrate
laminated body
shield layer
magnetic detection
detection element
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US13/741,244
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US20130221959A1 (en
Inventor
Naruaki Oki
Yoshihiro Nishiyama
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Alps Alpine Co Ltd
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Alps Green Devices Co Ltd
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Assigned to ALPS GREEN DEVICES CO., LTD. reassignment ALPS GREEN DEVICES CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: NISHIYAMA, YOSHIHIRO, OKI, NARUAKI
Publication of US20130221959A1 publication Critical patent/US20130221959A1/en
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Assigned to ALPS ELECTRIC CO., LTD. reassignment ALPS ELECTRIC CO., LTD. MERGER (SEE DOCUMENT FOR DETAILS). Assignors: ALPS GREEN DEVICES CO., LTD.
Assigned to ALPS ALPINE CO., LTD. reassignment ALPS ALPINE CO., LTD. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: ALPS ELECTRIC CO., LTD.
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
    • G01R15/207—Constructional details independent of the type of device used
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0092—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring current only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
US13/741,244 2012-02-27 2013-01-14 Electrical current sensor and method of manufacturing the same Active 2033-11-10 US9081031B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-040139 2012-02-27
JP2012040139A JP5909822B2 (ja) 2012-02-27 2012-02-27 電流センサ及びその作製方法

Publications (2)

Publication Number Publication Date
US20130221959A1 US20130221959A1 (en) 2013-08-29
US9081031B2 true US9081031B2 (en) 2015-07-14

Family

ID=49002140

Family Applications (1)

Application Number Title Priority Date Filing Date
US13/741,244 Active 2033-11-10 US9081031B2 (en) 2012-02-27 2013-01-14 Electrical current sensor and method of manufacturing the same

Country Status (2)

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US (1) US9081031B2 (ja)
JP (1) JP5909822B2 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10984939B2 (en) * 2017-01-30 2021-04-20 Tdk Corporation Multilayer coil component
JP2020148640A (ja) * 2019-03-14 2020-09-17 株式会社東芝 電流検出装置

Citations (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0573851A (ja) * 1991-09-11 1993-03-26 Nec Corp 磁気抵抗効果ヘツド
GB2285331A (en) * 1993-12-14 1995-07-05 Ibm A magnetoresistive head having a substrate which carries a tantalum or chromium surface layer
US5831426A (en) * 1996-08-16 1998-11-03 Nonvolatile Electronics, Incorporated Magnetic current sensor
US6279406B1 (en) * 1998-07-31 2001-08-28 Yi-Qun Li Passive solid-state magnetic field sensors and applications therefor
US6423191B1 (en) * 1994-02-17 2002-07-23 Thin Films, Ltd. Sputtering method and apparatus for depositing a coating onto substrate
US20020114110A1 (en) * 2000-10-25 2002-08-22 Toru Katakura Magnetoresistance-effect magnetic head
JP2002333468A (ja) 2001-03-07 2002-11-22 Yamaha Corp 磁気センサとその製法
US20040023065A1 (en) * 2002-03-28 2004-02-05 Nve Corporation Superparamagnetic devices
US20050201018A1 (en) * 2004-03-08 2005-09-15 Tdk Corporation Magnetic head, head suspension assembly and magnetic disk apparatus
US7106046B2 (en) * 2002-06-18 2006-09-12 Asahi Kasei Emd Corporation Current measuring method and current measuring device
US20060226826A1 (en) * 2003-02-21 2006-10-12 Wolfram Teppan Magnetic field sensor and electrical current sensor therewith
US7164263B2 (en) * 2004-01-16 2007-01-16 Fieldmetrics, Inc. Current sensor
CN101345117A (zh) * 2008-05-09 2009-01-14 北京科技大学 一种用于磁电子罗盘的磁电阻薄膜材料及其制备方法
US7557562B2 (en) * 2004-09-17 2009-07-07 Nve Corporation Inverted magnetic isolator
US7564238B2 (en) * 2006-08-30 2009-07-21 Alps Electric Co., Ltd. Magnetic detection device connecting element and detection circuit and method of manufacturing the same
US20090309590A1 (en) * 2006-04-13 2009-12-17 Makoto Kataoka Magnetic sensor and method of manufacturing thereof
US20100067148A1 (en) * 2008-09-16 2010-03-18 Tdk Corporation Thin film magnetic head having a pair of magnetic layers whose magnetization is controlled by shield layers
US20100301835A1 (en) * 2009-05-27 2010-12-02 Sae Magnetics (H.K.) Ltd. Current sensor
US7885036B2 (en) * 2006-02-22 2011-02-08 Tdk Corporation Magnetic device, perpendicular magnetic recording head, magnetic recording system, method of forming magnetic layer pattern, and method of manufacturing perpendicular magnetic recording head
US20110193573A1 (en) * 2009-12-31 2011-08-11 Mapper Lithography Ip B.V. Integrated sensor system
US20110221436A1 (en) * 2010-03-12 2011-09-15 Alps Green Devices Co., Ltd. Current sensor
US20120038355A1 (en) * 2010-08-10 2012-02-16 Tdk Corporation Magnetic sensor and magnetic detection apparatus
US20120074510A1 (en) * 2010-09-24 2012-03-29 Tdk Corporation Magnetic sensor and magnetic head
US20120112365A1 (en) * 2010-03-26 2012-05-10 Infineon Technologies Ag Semiconductor Packages and Methods For Producing The Same
US20130015839A1 (en) * 2011-07-13 2013-01-17 Joerg Franke Integrated current sensor
US20130119975A1 (en) * 2010-08-23 2013-05-16 Sumitomo Wiring Systems, Limited Current detector
US8618796B2 (en) * 2008-01-25 2013-12-31 Lem Intellectual Property Sa Electrical current sensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08236835A (ja) * 1995-03-01 1996-09-13 Murata Mfg Co Ltd 磁電変換素子およびその製造方法
JP2010258981A (ja) * 2009-04-28 2010-11-11 Alps Green Devices Co Ltd 磁気結合型アイソレータ

Patent Citations (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0573851A (ja) * 1991-09-11 1993-03-26 Nec Corp 磁気抵抗効果ヘツド
GB2285331A (en) * 1993-12-14 1995-07-05 Ibm A magnetoresistive head having a substrate which carries a tantalum or chromium surface layer
US6423191B1 (en) * 1994-02-17 2002-07-23 Thin Films, Ltd. Sputtering method and apparatus for depositing a coating onto substrate
US5831426A (en) * 1996-08-16 1998-11-03 Nonvolatile Electronics, Incorporated Magnetic current sensor
US6279406B1 (en) * 1998-07-31 2001-08-28 Yi-Qun Li Passive solid-state magnetic field sensors and applications therefor
US20020114110A1 (en) * 2000-10-25 2002-08-22 Toru Katakura Magnetoresistance-effect magnetic head
JP2002333468A (ja) 2001-03-07 2002-11-22 Yamaha Corp 磁気センサとその製法
US20040023065A1 (en) * 2002-03-28 2004-02-05 Nve Corporation Superparamagnetic devices
US7106046B2 (en) * 2002-06-18 2006-09-12 Asahi Kasei Emd Corporation Current measuring method and current measuring device
US20060226826A1 (en) * 2003-02-21 2006-10-12 Wolfram Teppan Magnetic field sensor and electrical current sensor therewith
US7164263B2 (en) * 2004-01-16 2007-01-16 Fieldmetrics, Inc. Current sensor
US20050201018A1 (en) * 2004-03-08 2005-09-15 Tdk Corporation Magnetic head, head suspension assembly and magnetic disk apparatus
US8884606B2 (en) * 2004-09-17 2014-11-11 Nve Corporation Inverted magnetic isolator
US7557562B2 (en) * 2004-09-17 2009-07-07 Nve Corporation Inverted magnetic isolator
US7885036B2 (en) * 2006-02-22 2011-02-08 Tdk Corporation Magnetic device, perpendicular magnetic recording head, magnetic recording system, method of forming magnetic layer pattern, and method of manufacturing perpendicular magnetic recording head
US20090309590A1 (en) * 2006-04-13 2009-12-17 Makoto Kataoka Magnetic sensor and method of manufacturing thereof
US7564238B2 (en) * 2006-08-30 2009-07-21 Alps Electric Co., Ltd. Magnetic detection device connecting element and detection circuit and method of manufacturing the same
US8618796B2 (en) * 2008-01-25 2013-12-31 Lem Intellectual Property Sa Electrical current sensor
CN101345117A (zh) * 2008-05-09 2009-01-14 北京科技大学 一种用于磁电子罗盘的磁电阻薄膜材料及其制备方法
US20100067148A1 (en) * 2008-09-16 2010-03-18 Tdk Corporation Thin film magnetic head having a pair of magnetic layers whose magnetization is controlled by shield layers
US20100301835A1 (en) * 2009-05-27 2010-12-02 Sae Magnetics (H.K.) Ltd. Current sensor
US20110193573A1 (en) * 2009-12-31 2011-08-11 Mapper Lithography Ip B.V. Integrated sensor system
US20110221436A1 (en) * 2010-03-12 2011-09-15 Alps Green Devices Co., Ltd. Current sensor
US20120112365A1 (en) * 2010-03-26 2012-05-10 Infineon Technologies Ag Semiconductor Packages and Methods For Producing The Same
US20120038355A1 (en) * 2010-08-10 2012-02-16 Tdk Corporation Magnetic sensor and magnetic detection apparatus
US20130119975A1 (en) * 2010-08-23 2013-05-16 Sumitomo Wiring Systems, Limited Current detector
US20120074510A1 (en) * 2010-09-24 2012-03-29 Tdk Corporation Magnetic sensor and magnetic head
US20130015839A1 (en) * 2011-07-13 2013-01-17 Joerg Franke Integrated current sensor

Also Published As

Publication number Publication date
JP5909822B2 (ja) 2016-04-27
US20130221959A1 (en) 2013-08-29
JP2013174542A (ja) 2013-09-05

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