US6759670B2 - Method for dynamic manipulation of a position of a module in an optical system - Google Patents

Method for dynamic manipulation of a position of a module in an optical system Download PDF

Info

Publication number
US6759670B2
US6759670B2 US10/002,635 US263501A US6759670B2 US 6759670 B2 US6759670 B2 US 6759670B2 US 263501 A US263501 A US 263501A US 6759670 B2 US6759670 B2 US 6759670B2
Authority
US
United States
Prior art keywords
velocity
component
drivers
processing unit
setpoint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US10/002,635
Other languages
English (en)
Other versions
US20020074529A1 (en
Inventor
Karl-Eugen Aubele
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of US20020074529A1 publication Critical patent/US20020074529A1/en
Assigned to CARL ZEISS SMT AG reassignment CARL ZEISS SMT AG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AUBELE, KARL-EUGEN
Application granted granted Critical
Publication of US6759670B2 publication Critical patent/US6759670B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment

Definitions

  • the invention relates to a method for dynamic manipulation and for adjustment of a module or a component in an optical system in the sub- ⁇ m range. More specific the invention relates to a method for dynamic manipulation and for adjustment of a module or a component in a microlithographic projection, exposure objective in the sub- ⁇ m range for the manufacture of semi-conductors.
  • control elements provided with corresponding step-up or step-down transmissions, for example with screw or worm drives or the like.
  • DE 42 36 795 C1 describes a corresponding device for adjusting mechanical components.
  • the displacement of the components needed for the adjustment is brought about using a mechanical pulse generator which, by means of a striker pin, exerts an impulse on the mounting of the component to be adjusted in a manner comparable with the aforementioned hammer.
  • vibrations also occur in the optical system, which can very easily lead to de-adjustment of components in a neighboring region.
  • this object is achieved by a method for dynamic manipulation of a module or a component in an optical system in the sub- ⁇ m range, the module or component being displaced by at least two actuators, which have detectors for determining at least their relative path displacements, a position of the module or component being determined by at least two sensors, the sensors and the actuators with their detectors communicating with one another in the manner of a control loop, and at least one mechanical impulse being exerted on the module or component by the actuators, wherein the timing of the impulse can be deliberately varied, to which end the displacement of the actuators is carried out with a time-variant velocity profile dictated as a function of a determined position (s n actual ) with respect to a setpoint position (s setpoint ) of the module or component, the said position (s n actual ) of the module or component being re-determined after the velocity profile has been executed, and the aforementioned method steps being repeated until the desired position (s setpoint ) of the module or component is reached.
  • the timing of the impulse can be
  • the inventors have surprisingly and unexpectedly found that by the two consecutively organized method steps, in which the actuators execute the velocity profile and then, depending on the determined actual position, execute a further velocity profile matched to the setpoint/actual difference, it is possible to position the components very rapidly, i.e. with few repetitions of these steps.
  • the method according to invention provides both faster and better and more reliable manipulation of the optical elements.
  • the velocity profiles it is in this case very favorable for the velocity profiles to respectively have at least one velocity gradient rising from an initial velocity and one velocity gradient falling to a final velocity, the slopes of which are matched in accordance with the path section still to be traveled, which in general becomes smaller and smaller from one method step to the next.
  • this may be a comparatively gently rising velocity gradient, which is followed by a further flat or optionally even constant velocity, before the corresponding final velocity is reached through a falling velocity gradient.
  • the gradients provide very gentle velocity changes, which can be executed rapidly but nevertheless in a manner which is comparatively free from vibrations.
  • the values of the initial velocity and the final velocity can in this case both be zero, so that very gentle adjustment of the actuators and therefore of the components, compared with an abrupt impulse, is achieved.
  • FIG. 1 shows a schematic plan of a setup for carrying out the method
  • FIG. 2 shows examples of velocity profiles according to the method
  • FIG. 3 shows a possible implementation of the method relating to a selected example with the aid of a diagram.
  • FIG. 1 shows an outline representation of an optical system with a microlithographic projection exposure objective 1 for manufacture of semiconductors with an indicated module 2 to be manipulated, here a lens 2 .
  • the manipulation of this lens 2 is in this case intended to be carried out by two actuators 3 , 4 which, for example, may be of electrically driven design.
  • Each of the two actuators 3 , 4 has a detector 5 , designed as an incremental detector, which delivers information about the displacement that has taken place or at least the relative displacement of the actuators 3 , 4 , and which sends the information through corresponding control lines 6 to the respective amplifier elements 7 or the motor regulator 8 .
  • the motor regulator also supplies the system with the power P el needed for operating the actuators 3 , 4 , and it is connected through further lines 9 , for example a bus system 9 , to a data processing unit 10 .
  • This data processing unit 10 can be connected to further external components 11 , which are known per se, by which setpoint values can be specified, or the like.
  • the setup has an acquisition chain 13 , which is likewise connected to the data processing unit 10 through a bus system, possibly the same bus system 9 .
  • This acquisition chain 13 basically consists of two sensors 14 , 15 , which are designed to record the position of the lens 2 in two different space directions, as well as further functional electronic parts, for example amplifiers 16 , demodulation units, or the like.
  • the actuators 3 , 4 are now capable of displacing the lens 2 in different space directions, to which end there may be mechanical transmission elements 17 , 18 (indicated in outline) which, for example, are designed as lever arrangements or the like.
  • the exact position of the lens 2 is recorded by the two sensors 14 , 15 and is reported to the data processing unit 10 .
  • the data processing unit 10 initiates a further displacement of the lens 2 by means of the actuators 3 , 4 , these method steps being repeated until the desired setpoint position has been achieved, at least within the scope of acceptable tolerances.
  • FIG. 2 now shows a diagram of velocity profiles 19 , which is executed by the actuators 3 or 4 when the lens 2 is being manipulated.
  • velocity profiles 19 can be specified, for example, by a corresponding voltage profile that is applied to the actuators.
  • a corresponding pressure profile would need to be produced and delivered to the actuator. In principle, this is immaterial for said method, so long as such a velocity profile 19 is executed by the actuators 3 , 4 .
  • a first velocity profile 20 is selected when there is a very large difference between the setpoint position and the actual position determined by the sensors 14 , 15 .
  • the velocity profile 20 is in this case composed of a velocity gradient 21 rising from an initial velocity, here 0, an approximately constant velocity 22 for dealing with the majority of the path to be manipulated, as well as a velocity gradient 23 subsequently falling to a final velocity.
  • both the initial velocity and the final velocity are 0. They could in principle, however, especially in the case of dynamic manipulation, also be final values or initial values reached by a previous manipulation, which could on the one hand be different than 0 and, on the other hand, could also be very different, i.e. for example, a very large initial velocity and a very small final velocity.
  • a second velocity profile 24 is composed of a very much more steeply rising gradient 25 and a gradient 26 falling immediately thereafter. Such a velocity profile 24 is suitable, for example, whenever the lens 2 is intended to travel a very small path section by means of the actuators 3 , 4 .
  • FIG. 3 will now explain a method for iterative approximation of the desired setpoint position in more detail, with reference to a selected example.
  • the relationship actually existing between the path input s in specified by the data processing unit 10 and the path output s out achieved in the system is by no means linear, at least in the range of the orders of magnitude to be manipulated here, which are a few nanometers in the case of movement paths, but rather follows the curve 27 that is represented here by way of example and is constant for this special case.
  • this curve 27 can be approximated by the straight compensation line 28 .
  • the position S 1 is therefore applied, following the straight compensation line 28 , through a first manipulation by means of the path section ⁇ s 1 .
  • this position s 1 does not lie at s setpoint , as desired, but the actual position s 1 actual is reached instead.
  • the sensors 14 , 15 determine that the position s 1 reached does not correspond to the setpoint position s setpoint .
  • the actuators 3 , 4 then apply the correction path ⁇ s 2 , which is very much smaller than ⁇ s 1 in the present case and is of negative design, as viewed from the point s 1 .
  • the position s 2 actual After the position s 2 has been reached, the fact that the actual position of the lens 2 is now the position s 2 actual is verified.
  • This position s 2 actual also differs from the desired setpoint position s setpoint , and the data processing unit 10 induces a re-correction, by the path section ⁇ s 3 to the position s 3 , which in turn corresponds to the position s 3 actual according to the curve 27 .
  • the method thereby permits a type of “self-learning” operation, since the iteration steps become smaller as the method progresses, which in turn further enhances the rapid implementation of the method.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lens Barrels (AREA)
  • Micromachines (AREA)
US10/002,635 2000-11-16 2001-11-15 Method for dynamic manipulation of a position of a module in an optical system Expired - Fee Related US6759670B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10056782A DE10056782A1 (de) 2000-11-16 2000-11-16 Verfahren zur dynamischen Manipulation der Position einer Baugruppe in einem optischen System
DE10056782 2000-11-16
DE10056782.7 2000-11-16

Publications (2)

Publication Number Publication Date
US20020074529A1 US20020074529A1 (en) 2002-06-20
US6759670B2 true US6759670B2 (en) 2004-07-06

Family

ID=7663506

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/002,635 Expired - Fee Related US6759670B2 (en) 2000-11-16 2001-11-15 Method for dynamic manipulation of a position of a module in an optical system

Country Status (6)

Country Link
US (1) US6759670B2 (fr)
EP (1) EP1209502B1 (fr)
JP (1) JP2002361598A (fr)
KR (1) KR20020038513A (fr)
DE (2) DE10056782A1 (fr)
TW (1) TW519573B (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080288108A1 (en) * 2005-12-22 2008-11-20 Carl Zeiss Smt Ag Projection objective with decentralized control
US20110235005A1 (en) * 2010-03-29 2011-09-29 Carl Zeiss Smt Gmbh Positioning method for an optical arrangement of a projection illumination system

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100662872B1 (ko) * 2005-11-22 2007-01-02 삼성전자주식회사 임펄스 신호 획득 방법 및 장치
DE102006046200A1 (de) * 2006-09-29 2008-04-03 Carl Zeiss Smt Ag Verfahren und Vorrichtung zur Positionierung eines Elements in einem optischen System

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4305283A (en) * 1979-08-29 1981-12-15 Whessoe Limited Position determining apparatus
US4857717A (en) 1986-10-14 1989-08-15 Hitachi, Ltd. Automatic focusing device using a light sensor of center-split type
EP0596301A1 (fr) 1992-11-01 1994-05-11 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Dispositif d'ajustage d'éléments optiques, notamment pour fabriquer un polygone à miroirs multiples
US6047135A (en) 1997-11-21 2000-04-04 Minolta Co., Ltd. Driving mechanism for keeping feedback cycle constant, apparatus with the mechanism, and its control method
US6560059B1 (en) * 1999-05-07 2003-05-06 Seagate Technology Llc Method and apparatus for suppressing seek-induced vibration in a disc drive

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4305283A (en) * 1979-08-29 1981-12-15 Whessoe Limited Position determining apparatus
US4857717A (en) 1986-10-14 1989-08-15 Hitachi, Ltd. Automatic focusing device using a light sensor of center-split type
EP0596301A1 (fr) 1992-11-01 1994-05-11 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Dispositif d'ajustage d'éléments optiques, notamment pour fabriquer un polygone à miroirs multiples
US6047135A (en) 1997-11-21 2000-04-04 Minolta Co., Ltd. Driving mechanism for keeping feedback cycle constant, apparatus with the mechanism, and its control method
US6560059B1 (en) * 1999-05-07 2003-05-06 Seagate Technology Llc Method and apparatus for suppressing seek-induced vibration in a disc drive

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080288108A1 (en) * 2005-12-22 2008-11-20 Carl Zeiss Smt Ag Projection objective with decentralized control
US20110235005A1 (en) * 2010-03-29 2011-09-29 Carl Zeiss Smt Gmbh Positioning method for an optical arrangement of a projection illumination system
US8810934B2 (en) 2010-03-29 2014-08-19 Carl Zeiss Smt Gmbh Positioning method for an optical arrangement of a projection illumination system

Also Published As

Publication number Publication date
JP2002361598A (ja) 2002-12-18
TW519573B (en) 2003-02-01
EP1209502A2 (fr) 2002-05-29
US20020074529A1 (en) 2002-06-20
DE10056782A1 (de) 2002-05-23
EP1209502A3 (fr) 2003-08-27
DE50103386D1 (de) 2004-09-30
EP1209502B1 (fr) 2004-08-25
KR20020038513A (ko) 2002-05-23

Similar Documents

Publication Publication Date Title
EP0596494B1 (fr) Sonde-microscope de balayage et procédé pour la correction d'erreurs dans une système de commande
EP2096494B1 (fr) Apprentissage itératif pour réglage de position dans un appareil d'exposition
US5771406A (en) Camera with a shift optical system responsive to an external device
US6759670B2 (en) Method for dynamic manipulation of a position of a module in an optical system
US5696590A (en) Position control method position control apparatus, and semiconductor manufacturing apparatus
US20040037547A1 (en) Lens control apparatus, lens control method and camera
EP1022099A2 (fr) Méthode pour le positionnement précis et le montage de composants miniatures, et système de préhension pour sa mise en oeuvre
US7330312B2 (en) Image blur compensation device
JP2000222845A (ja) 偏揺れ修正を備えた磁気ヘッド及びディスクテスタ―
JP2003241838A (ja) 位置決め装置
US6708082B2 (en) System identification to improve control of a micro-electro-mechanical mirror
US6287735B2 (en) Method and apparatus for controlling the leveling table of a wafer stage
JP3437327B2 (ja) 半導体露光装置の位置決め装置
JP2672498B2 (ja) ズームレンズの像補正装置
US10298164B2 (en) Linear actuator force matching using back EMF
JP2010039003A (ja) ステージ装置、露光装置、及びステージ制御方法
US7361921B2 (en) Device and method for plane-parallel orientation of a the surface of an object to be examined in relation to a focus plane of a lens
KR102612470B1 (ko) 제어 시스템, 제어 방법 및 컴퓨터 판독 가능한 기억 매체
EP2015298B1 (fr) Dispositif de lecture optique, dispositif de commande de lecture optique et procede de commande de lecture optique
JP2007322759A (ja) ズームレンズ位置制御装置、ズームレンズ位置制御方法およびズームレンズ位置制御プログラム
JP2002361598A5 (fr)
JP2004117010A (ja) 変位測定装置
JPH02266312A (ja) ズームレンズシステム
JPH1034571A (ja) ロボットの位置ずれ修正装置
JP2010272686A (ja) 移動体制御装置、露光装置、及び移動体制御方法

Legal Events

Date Code Title Description
FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

AS Assignment

Owner name: CARL ZEISS SMT AG, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:AUBELE, KARL-EUGEN;REEL/FRAME:014999/0944

Effective date: 20040127

CC Certificate of correction
FPAY Fee payment

Year of fee payment: 4

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20120706