Classifications

• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/004—Photosensitive materials
  • G03F7/075—Silicon-containing compounds
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/004—Photosensitive materials
  • G03F7/008—Azides
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/004—Photosensitive materials
  • G03F7/075—Silicon-containing compounds
  • G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
  • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
  • Y10S430/1055—Radiation sensitive composition or product or process of making
  • Y10S430/114—Initiator containing
  • Y10S430/12—Nitrogen compound containing
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
  • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
  • Y10S430/1055—Radiation sensitive composition or product or process of making
  • Y10S430/114—Initiator containing
  • Y10S430/124—Carbonyl compound containing

Definitions

• This invention relates to photodefineable polymers.
• DVS resin compositions are useful as thin film dielectrics in electronic applications such as multichip modules, integrated circuits and printed circuit boards.
• a photosensitive agent such as a bis azide
• this monomer herein should not be construed to define any particular geometric isomer or spatial orientation about the ethenylene double bonds. Compositions made by the processes disclosed herein contain positional isomers about these double bonds as well as other compounds.
• This monomer will be hereinafter referred to as DVS bis BCB.
• a partially polymerized DVS bis BCB monomer will be hereinafter referred to as DVS resin.
• the DVS bis BCB monomer can be prepared by methods disclosed in U.S. Pat. Nos. 4,812,588; 5,136,069; 5,138,081; and 5,264,646.
• the most preferred group of photosensitive agents disclosed to render a DVS resin photodefineable is the azides.
• the azides disclosed in preparing the photodefineable polymers correspond to the formula:
• Q is an x-valent organic moiety
• x is an integer of 2 or more.
• BAC-M 2,6-Bis(4-azidobenzylidene)-4-methylcyclohexanone
• the formulation containing these components is not only sensitive to photon radiation but is also unstable at room temperature.
• the bis azide reacts to form species which will no longer render the polymer photodefineable.
• At room temperature substantial changes in the formulation properties occur in as little as three days. Because of this, the formulation is stored under refrigeration. A precipitate was found after storing the formulation under refrigeration. Upon analysis, this precipitate was found to consist largely of the BAC-M bis azide. Precipitation of a formulation component is unacceptable for many users of the formulation who require consistent and predictable behavior from the formulation.
• This invention is a photodefineable, organic-soluble mixture
• DVS resin as its major resin component dissolved in mesitylene and at least 2,6-bis (4-azidobenzylidene)-4-ethylcyclohexanone as a photosensitive agent in an amount sufficient to convert the mixture to an organic-insoluble solid upon exposing the mixture to photon radiation.
• the mixture of this invention may be exposed to photon radiation to form an organic-insoluble solid polymer which may be patterned by masking portions of the mixture from the photon radiation. These photo-crosslinked polymers may then be subjected to thermal curing. These photo/thermally cured polymers are useful in many applications such as thin film dielectrics in integrated circuits, multichip modules, printed circuit boards and other microelectronic devices, as passivation or overcoat layers in microelectronics, as planarization layers in flat panel displays, as binders for conductive adhesives and the like.
• a feature of this invention is that the photodefineable mixture contains DVS resin as its major resin component dissolved in mesitylene and at least 2,6-bis(4-azidobenzylidene)-4-ethylcyclohexanone as a photosensitive agent.
• An advantage of this invention is that the photodefineable mixture may go for months at lower temperatures to preserve the consistency of performance of the formulation and not form a precipitate.
• the DVS resin used in the mixture of the invention is described in the hereinbefore cited references.
• the DVS resin-containing portion of the formulation may be oligomerized or B-staged prior to use to improve handling, processing, and performance characteristics.
• the required bis azide has the formula:
• BAC-E absorbs light at 365 nm. In thicker layers, this may prevent the photon radiation from penetrating the full depth of the film.
• BAC-E used as the sole bis azide is a good choice for thin layers such as 5 microns or less. In thicker layers such as 10 microns, one may wish to use BAC-E in conjunction with another bis azide that does not absorb at such a wavelength.
• Preferred second bis azides include 4,4′- or 3,3′-diazidophenyl sulfone, 4,4′- or 3,3′-diazidophenyl ether, 2,2-bis[4-(4-azidophenoxy) phenyl] propane or 2,2-bis[4-(3-azidophenoxy) phenyl)] propane. Most preferred is 2,2-bis[4-(4-azidophenoxy) phenyl] propane.
• the mixture containing BAC-E and 2,2-bis [4-(4-azidophenoxy) phenyl] propane may have a longer pot life at room temperature than a mixture containing BAC-M and 4,4′- or 3,3′-diazidophenyl sulfone.
• the mixture of the invention preferably contains no other bis azide substituted cyclohexanones.
• the amounts of DVS resin and BAC-E employed in preparing the photodefineable mixture of this invention can vary. Suitable amounts are those which contain DVS resin as the major component and provide a photodefineable mixture from which photodefined organic-insoluble polymers can be prepared. A suitable amount of BAC-E is that which provides sufficient curing in the photon-exposed portion of the mixture to render it insoluble in the developing solvent.
• a preferred weight percent range of photosensitive agent(s) is about 0.1 to about 20 based on the sum of the weights of the photosensitive agent and the DVS resin. A more preferred weight percent range of photosensitive agent is about 1 to about 6. The most preferred weight percent range of photosensitive agent is about 2 to about 4.
• a preferred weight percent range of the DVS resin is about 80 to about 99.9 based on the sum of the weights of the photosensitive agent and the DVS resin.
• a more preferred weight percent range of the DVS resin is about 94 to about 99.
• the most preferred weight percent range of the DVS resin is about 96 to about 98.
• the photosensitive agent can be dissolved in the partially polymerized DVS resin/solvent system by conventional means such as agitation, sonication and heating. All manipulations of the DVS resin/photo-sensitive agent mixture are preferably performed in a darkened environment to prevent premature initiation of the photosensitive reaction by photon radiation.
• One means of providing a suitable environment is by using working space equipped with amber filtered (yellow) lights which filter out wavelengths of less than 500 nm.
• the percentage of mesitylene in the mixture of the invention is that which is sufficient to dissolve the DVS resin, the photosensitive agent and any other formulation components present.
• the DVS resin and the mesitylene have different viscosities. It is common to vary the quantity of mesitylene to adjust the viscosity of the mixture. A lower viscosity may be used to yield a thinner film, for example, by spin-coating.
• the concentration of DVS resin in the solution and molecular weight of the DVS resin determine the viscosity of the mixture. Spin-time and speed may be used to control film quality and thickness at a particular formulation viscosity. Details of substrate coating with DVS resin films can be found in the Journal of Electronic Materials , Vol. 19, No. 12, 1990, which is incorporated herein by reference.
• the DVS resin formulation has a viscosity of 1100 ⁇ 50 cSt at 25° C.
• a stream of xylene may be directed at the back of the substrate being coated to avoid dried resin (cotton candy) from adhering to the edges of the substrate.
• some embodiments of this invention contain one or more optional components which may be added to tailor the invention's characteristics.
• An antioxidant may be added to increase the formulation's oxidative stability during processing as well as in the cured resin.
• Antioxidants of the phenol-, sulfide-, phosphite-, and amine-type may be employed in this invention.
• Hindered amines are the preferred antioxidants.
• Hindered amines with aliphatic and aromatic moieties are more preferred antioxidants.
• the most preferred antioxidant is polymerized 1,2-dihydro-2,2,4-trimethylquinoline, CAS registry number 26780-96-1.
• This antioxidant is available as an oligomer of the formula:
• R is hydrogen, an electron-withdrawing or electron-donating group and n is 0-6.
• R is hydrogen, but it also can be any substituent that does not interfere with the antioxidant activity of the compound.
• 2,2,4-Trimethyl-1,2-dihydroquinoline wherein R is hydrogen, is available as AgeRite® MA from R. T. Vanderbilt as an oligomer with a degree of polymerization of about 3 or 4 (n is about 1 or 2).
• the optional antioxidant is employed at a weight percent range of less than 8, more preferably at a weight percent range of less than 7, and most preferably at 0.001 to 6 weight percent.
• the solvent and DVS bis BCB monomer are free of ions which would effect the dielectric properties of the final fully cured film.
• ions excluded are metal ions such as alkali metal and transition metal ions, and anions such as halides, sulfates and nitrates.
• Thin films of the DVS resin-containing formulation may be applied to substrates without the use of an adhesion promoter.
• an optional adhesion promoter is formulated as a spray- or spin-on solution which is applied immediately before applying the DVS resin-containing formulation.
• the adhesion promoter is added to the DVS resin/photo-crosslinking agent formulation.
• the adhesion promoter is designed such that one end of the molecule either covalently attaches or adsorbs to the metal, metal oxide, or ceramic substrate surface, while the second end of the molecule reacts with the DVS resin polymer matrix.
• Suitable adhesion promoters include trialkoxyvinylsilanes and trialkoxy-vinylsilyl benzocyclobutanes. The preparation and properties of trialkoxyvinylsilyl benzocyclobutanes are described in U.S. Pat. Nos. 4,831,172 and 5,002,808, which are incorporated herein by reference.
• More preferred adhesion promoters include 3-aminopropyltriethoxysilane (3-APS), 3-methacryloxypropyl trimethoxysilane (MOPS)(CAS-02530-85-0), trimethoxyvinylsilane, triethoxyvinylsilane (TEVS), trimethoxyvinylsilyl benzocyclobutanes, and triethoxyvinylsilyl benzocyclobutanes.
• the most preferred adhesion promoter is 3-aminopropyltriethoxysilane (3-APS).
• Suitable substrates are comprised of silicon, alumina, ceramic materials such as aluminum nitride, glasses, co-fired ceramics, copper sheet, printed circuit boards, polycrystalline diamond films, GaAs, i.e. XIII-XV semiconductors, silicon nitride films, glass ceramic and high temperature polymer films such as polyimides and polybenzazoles. More preferred substrates are comprised of alumina and silicon. The most preferred substrate is silicon.
• Spin-coating is easy to control, predictable and well known and is used preferably with single wafers.
• a softbake cycle may be required to remove residual solvent.
• the softbake also relaxes stress resulting from the flow of the polymer film, increases the film's adhesion to the substrate, and hardens the film for more convenient handling during processing; for example, to prevent adhesion to a mask when printing in a hard contact mode.
• the softbake may be performed in a convection oven, belt oven or on a hot plate.
• a preferred softbake temperature is one sufficient to remove residual solvent, provide stress relaxation which requires a temperature above the polymer's glass transition temperature, but low enough to avoid oxidizing or thermal curing of the resin or undesired reactions of the formulation additives and which allows the resin to flow sufficiently to promote planarization.
• the preferred softbake temperature will vary depending in part on the components of the DVS resin-containing formulation.
• a preferred softbake temperature for DVS resin ranges from 70° C. to 120° C.
• the most preferred softbake temperature is 90° C. on a hot plate and 75° C. in a box oven.
• the softbake time is temperature dependent.
• a preferred softbake time is one sufficient to remove residual solvent, provide stress relaxation, but short enough to avoid oxidizing or thermal reaction of the resin components.
• the preferred softbake time will vary depending in part on the components of the cyclobutarene resin-containing formulation.
• a preferred softbake time for the DVS resin ranges from 15 seconds to 60 minutes. The most preferred softbake time range depends on balancing desired performance results with maximizing throughput, may vary from 15 seconds to 30 minutes. To maximize throughput, the minimum time would be optimal.
• Suitable softbake atmospheres include a vacuum, solvent vapor, air, nitrogen, argon, and helium. Nitrogen is the most preferred atmosphere. Oxygen is to be avoided.
• the soft baked film may then be exposed to a photon source to render portions of the film organic insoluble.
• Suitable photon sources include those which contain wavelengths absorbed by BAC-E.
• Preferred photon sources include visible light, ultraviolet light, X-rays, and electron beams. More preferred photon sources include ultraviolet and visible light.
• the most preferred photon source is a super high pressure mercury arc. Selective removal of various components of a high pressure mercury photon source may provide superior film performance.
• the dose varies depending on the film thickness and the type of photosensitive agent used. For a 10 micron thick film, suitable dose at the I-line (365 nm) is 250 to 800 mJ/cm 2 .
• a softbake cycle may be employed. This cycle increases the reaction rate of long-lived photochemically generated intermediates. These intermediates have increased mobility during this cycle and thus may migrate and find a reactant species.
• An alternative means of increasing the mobility of these reactive intermediates is heating during photon-exposure. Such a procedure may increase the photo-sensitive agent's sensitivity.
• Solvent development comprises the use of a solvent in which photo-exposed resin is only slightly soluble and the nonphoto-exposed resin is soluble to dissolve the nonphoto-exposed resin. The dissolved resin is then removed.
• Suitable developing solvents are those which selectively dissolve the nonphoton-exposed film component while minimizing swelling of the photon-exposed film.
• the most preferred solvents for DVS resin film systems are Stoddard solvent and formulations of ProglydeTM DMM dipropylene glycol dimethyl ether with hydrocarbons such as IsoparTM L or NorparlTM 12. Stoddard solvent gives better film retentions but is slow to dissolve the unexposed DVS resin and has a low flash point. ProglydeTM DMM dipropylene glycol dimethyl ether gives lower film retentions but has a higher flash point and may be less toxic and teratogenic than, for example, diglyme. n-Butyl n-butyrate is a good choice for films less than 8 microns thick, but tends to cause crazing in thicker films. Triisopropyl benzene provides a wider processing window but requires additional rinses with other solvents because of its slow evaporation after use. The choice of development solvent will to some extent be governed by the users choices between these attributes.
• Preferred solvent development methods include spray, puddle or immersion techniques.
• Spray development is a preferred technique due to its amenability to large scale production.
• One preferred technique is puddling solvent on the wafer, allowing it to penetrate for a period of time which can be determined by experiment.
• the wafer is rinsed in the development solvent and spun at a high speed to remove the solvent and solvent penetrated film.
• Preferred development methods may depend on the solvent.
• the spin speed must be lowered to, for example, 850 rpm for low viscosity solutions or one may increase the viscosity and spin at higher speeds.
• portions of the resin are photo-cured with 365 nm wavelength light for 600 to 1000 mJ/cm 2 .
• a ProglydeTM DMM development solvent is puddled on the wafer for at least 90 seconds before being spun off.
• Stoddard solvent or n-butyl n-butyrate is an effective solvent.
• Stoddard solvent is preferred.
• the solvent developed film may be post-baked to remove solvent.
• the post-bake may include elevation of the temperature to 120° C. to 140° C. for 0.5 to 2 minutes.
• the 10 micron film may be post-baked on a hot plate in air at 100° C. for 1 minute.
• the patterned thin film may have additional microcircuitry and photodefined dielectric layers applied to it or it can be further thermally cured.
• the remaining resin may be cured under a nitrogen atmosphere, using one of the following schedules:
• the preferred 10 micron thick film may be fully cured at 250° C. for 60 minutes.
• a suitable furnace and procedure are disclosed in P. E. Garrou et al., “Rapid Thermal Cure of BCB Dielectrics,” Proceedings ECTC , San Diego, May 1992, pp. 770-776.
• a Radiant Technology Corporation Model No. LA-306 infrared belt oven may be used with a nitrogen atmosphere.
• a soft cure may be obtained with a 1.5 minute residence at 260° C.
• a hard cure may be obtained with a 30-second residence at 280° C.
• O 2 /CF 4 90/10 plasma at 300 watts, 200 mTorr for 30 seconds.
• the need for this may vary depending on the size and shape of the vias and the amount of scum remaining.
• DVS bis BCB monomer is B-staged at 25 weight percent monomer in mesitylene for 46 hours at 165° C. and for sufficient time at 145° C. to obtain a viscosity of 4.4 cp at 145° C. (or 35 cSt at 25° C.) which should be equivalent to an Mw of 140,000 ⁇ 10,000.
• the DVS resin is concentrated by vacuum stripping to 54 weight percent solids (viscosity 4,000 cp at 25° C.).
• the DVS resin is formulated by adding 2.3 weight percent BAC-E, 5.0 weight percent 2,2-5 bis[4-(4-azidophenoxy) phenyl] propane and 4.0 weight percent AgeRite® MA antioxidant, all based on the weight of resin and diluting with mesitylene to a viscosity of 1100 ⁇ 50 cSt at 25° C.
• This formulation may be spin-coated onto SiO 2 , an underlying partially thermally cured DVS resin formulation or copper on a substrate to form a 10 micron thick, patterned, cured, final film.
• Spin-coat at 68° F. to 70° F. and 45 to 55 percent relative humidity.
• Spread for 10 seconds at 500 rpm and spin for 30 seconds at 2800 rpm.
• Soft cure at 210° C. for 40 minutes in N 2 if you want to add additional layers.
• Hard cure at 250° C. for 60 minutes in N 2 for a final cure.
• molecular weights given are apparent molecular weights obtained by size exclusion chromatography using linear polystyrenes as standards. The molecular weights are apparent because the DVS resin is not linear and may have different response sensitivities to the detection means.
• BAC-M is 2,6-bis(4-azidobenzylidene)-4-methylcyclohexanone and differs from the bis azide of the invention by having a methyl substituent on the cyclohexanone ring instead of ethyl.
• BAC-P is 2,6-bis(4-azidobenzylidene)-4-n-propyl cyclohexanone and differs from the bis azide of the invention by having an n-propyl substituent on the cyclohexanone ring instead of ethyl.
• the weight percent in the mixture is calculated based on the total weight of mixture.
• a 54 weight percent solids DVS resin is formulated by adding 2.3 weight percent BAC-E, 5.0 weight percent 2,2-bis[4-(4-azidophenoxy) phenyl] propane and 4.0 weight percent AgeRite® MA antioxidant, all based on the weight of resin and diluting with mesitylene to a viscosity of 1100 ⁇ 50 cSt at 25° C. Samples are taken periodically and spun onto a wafer at uniform conditions. The potlife is considered ended when the initial thickness of the film varies by five percent. Under these criteria the potlife of this mixture is seven days.
• the same DVS resin is formulated by adding 2 weight percent BAC-M, 0.75 weight percent 3,3′-diazidophenyl sulfone and 0.75 weight percent AgeRite® MA antioxidant and diluting with mesitylene to a viscosity of 1100 ⁇ 50 cSt at 25° C. Under these criteria the potlife of this mixture is three days. The difference is attributable to the change from 3,3′-diazidophenyl sulfone to 2,2-bis[4-(4-azidophenoxy) phenyl] propane and high dissolution speed of BAC-E compared to BAC-M (Example 4).
• a formulation containing 3.6 weight percent BAC-E in a mixture of 45 weight percent DVS resin in mesitylene is stored for more than five months at ⁇ 15° C. No precipitate forms.
• a formulation containing 4.05 weight percent BAC-E in a mixture of 45 weight percent DVS resin in mesitylene is stored at ⁇ 15° C.
• a formulation containing 2.0 weight percent BAC-M in a mixture of 45 weight percent DVS resin in mesitylene is stored at ⁇ 15° C.
• BAC-E up to four weight percent, is added to a mixture of 45 weight percent DVS resin in mesitylene and shaken at room temperature. The BAC-E dissolves in thirty minutes.
• BAC-M at 2.0 weight percent is added to a mixture of 45 weight percent DVS resin in mesitylene and shaken at room temperature. The BAC-M requires more than eight hours of shaking to dissolve.
• the films are puddle developed on a spin coater by puddling about eight mL of a 32.5 percent ProglydeTM DMM/67.5 percent IsoparTM L on the top of each for 75 seconds.
• the wafers are then spun at 500 rpm for ten seconds while a stream of the same development solvent is sprayed onto the surface of the wafers.
• the spin speed is increased to 5,000 rpm for 30 seconds to partially dry the wafers.
• the films are then cured at 250° C. for one hour. After cure the average film thickness is 5.59 microns or 75 percent retention of initial film thickness.
• Features as small as ten micron round vias are successfully patterned in the films.
• the films are puddle developed on a spin-coater by puddling about eight mL of a 32.5 percent ProglydeTM DMM/67.5 percent IsoparTM L on the top of each for 65 seconds.
• the wafers are then spun at 500 rpm for ten seconds while a stream of the same development solvent is sprayed onto the surface of the wafers.
• the spin speed is increased to 5,000 rpm for thirty seconds to partially dry the wafers.
• the films are then cured at 250° C. for one hour. After cure the final film thickness is measured.
• Features as small as 25 micron round vias are successfully patterned in many of the films. Film retentions are set out in Table II.

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• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Spectroscopy & Molecular Physics (AREA)
• Formation Of Insulating Films (AREA)
• Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
• Compositions Of Macromolecular Compounds (AREA)
• Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
• Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

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• 1996
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