DE69609952T2 - Photostrukturierbare zusammensetzungen - Google Patents
Photostrukturierbare zusammensetzungenInfo
- Publication number
- DE69609952T2 DE69609952T2 DE69609952T DE69609952T DE69609952T2 DE 69609952 T2 DE69609952 T2 DE 69609952T2 DE 69609952 T DE69609952 T DE 69609952T DE 69609952 T DE69609952 T DE 69609952T DE 69609952 T2 DE69609952 T2 DE 69609952T2
- Authority
- DE
- Germany
- Prior art keywords
- photostructurable
- compositions
- photostructurable compositions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/008—Azides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
- Y10S430/12—Nitrogen compound containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
- Y10S430/124—Carbonyl compound containing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Formation Of Insulating Films (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US41595695A | 1995-04-03 | 1995-04-03 | |
PCT/US1996/004530 WO1996031805A1 (en) | 1995-04-03 | 1996-04-03 | Photodefineable compositions |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69609952D1 DE69609952D1 (de) | 2000-09-28 |
DE69609952T2 true DE69609952T2 (de) | 2001-03-22 |
Family
ID=23647925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69609952T Expired - Lifetime DE69609952T2 (de) | 1995-04-03 | 1996-04-03 | Photostrukturierbare zusammensetzungen |
Country Status (7)
Country | Link |
---|---|
US (1) | US6727038B1 (de) |
EP (1) | EP0819266B1 (de) |
JP (1) | JP3802062B2 (de) |
KR (1) | KR100395832B1 (de) |
DE (1) | DE69609952T2 (de) |
TW (1) | TW455742B (de) |
WO (1) | WO1996031805A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19600305C2 (de) * | 1996-01-05 | 2001-05-03 | Siemens Ag | Herstellverfahren für eine Siliziumdioxid-Schicht auf einer Topographie sowie eine nach diesem Verfahren hergestellte Siliziumdioxidschicht |
US6479411B1 (en) | 2000-03-21 | 2002-11-12 | Angela T. Hui | Method for forming high quality multiple thickness oxide using high temperature descum |
US7019093B2 (en) * | 2002-10-18 | 2006-03-28 | Dow Global Technologies Inc. | Aqueous developable, photosensitive benzocyclobutene-based oligomers and polymers with high moisture resistance |
US7164197B2 (en) | 2003-06-19 | 2007-01-16 | 3M Innovative Properties Company | Dielectric composite material |
JP2005220270A (ja) * | 2004-02-06 | 2005-08-18 | Dow Global Technologies Inc | 樹脂付きキャリアフィルムおよび多層回路板 |
JP4623515B2 (ja) * | 2005-03-14 | 2011-02-02 | 国立大学法人京都大学 | オリゴチオフェンを用いた光記憶媒体 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62165644A (ja) * | 1986-01-17 | 1987-07-22 | Nippon Telegr & Teleph Corp <Ntt> | 感光性樹脂組成物とパタ−ン形成方法 |
EP0616701B1 (de) | 1991-12-10 | 2002-02-13 | The Dow Chemical Company | Strahlungshärtbare cyclobutaren zusammensetzungen |
US5426164A (en) * | 1992-12-24 | 1995-06-20 | The Dow Chemical Company | Photodefinable polymers containing perfluorocyclobutane groups |
US5854302A (en) * | 1993-04-29 | 1998-12-29 | The Dow Chemical Company | Partially polymerized divinylsiloxane linked bisbenzocyclobutene resins and methods for making said resins |
-
1996
- 1996-04-03 EP EP96909908A patent/EP0819266B1/de not_active Expired - Lifetime
- 1996-04-03 KR KR1019970706934A patent/KR100395832B1/ko not_active IP Right Cessation
- 1996-04-03 JP JP53043496A patent/JP3802062B2/ja not_active Expired - Lifetime
- 1996-04-03 DE DE69609952T patent/DE69609952T2/de not_active Expired - Lifetime
- 1996-04-03 WO PCT/US1996/004530 patent/WO1996031805A1/en active IP Right Grant
- 1996-04-10 TW TW085104219A patent/TW455742B/zh not_active IP Right Cessation
-
2001
- 2001-07-20 US US09/910,130 patent/US6727038B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1996031805A1 (en) | 1996-10-10 |
EP0819266A1 (de) | 1998-01-21 |
KR19980703530A (ko) | 1998-11-05 |
DE69609952D1 (de) | 2000-09-28 |
JPH11503248A (ja) | 1999-03-23 |
JP3802062B2 (ja) | 2006-07-26 |
KR100395832B1 (ko) | 2004-06-23 |
US6727038B1 (en) | 2004-04-27 |
EP0819266B1 (de) | 2000-08-23 |
TW455742B (en) | 2001-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |