US4970587A - Alignment table for automatic exposing apparatus - Google Patents

Alignment table for automatic exposing apparatus Download PDF

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Publication number
US4970587A
US4970587A US07/430,263 US43026389A US4970587A US 4970587 A US4970587 A US 4970587A US 43026389 A US43026389 A US 43026389A US 4970587 A US4970587 A US 4970587A
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US
United States
Prior art keywords
alignment table
work
plate
video cameras
upper plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US07/430,263
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English (en)
Inventor
Chiaki Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ORC MANUFACTURING Co
Orc Manufacturing Co Ltd
Original Assignee
ORC MANUFACTURING Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ORC MANUFACTURING Co filed Critical ORC MANUFACTURING Co
Assigned to ORC MANUFACTURING CO., LTD. reassignment ORC MANUFACTURING CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: ABE, CHIAKI
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Publication of US4970587A publication Critical patent/US4970587A/en
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0008—Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0266—Marks, test patterns or identification means
    • H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09918—Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components

Definitions

  • the present invention relates generally to an alignment table used for automatically locating a work such as a copper-plated laminar plate serving as a base material for a printed wiring board at a predetermined position or for inspecting the work when it is laminated in a laminar structure. More particularly, the present invention relates to an alignment table for an automatic exposing apparatus which assures that figures taken by video cameras can be processed exactly.
  • the conventional apparatus essentially comprises an aligning section 2 for determining the position of a work 1, an exposing section 3 in which the work 1 is exposed to light beam and a transferring section 4 for transferring the work 1 from the aligning section 2 to the exposing section 3.
  • the aligning section 2 includes an alignment table designed in a hollow structure to hold the work 1 thereon, support rod 6 disposed below the alignment table 5, a motor drive mechanism 8 for rotating the alignment table 5 about the axis of the support rod 6 and displacing the alignment table 5 above a base 7 in the leftward/rightward direction (in the X-direction) as well as in the forward/rearward direction (Y-direction), a plurality of video cameras 13 for separately photographing via upper and lower transparent plates 9 and 10 attached to the alignment table 5 two or more position determining reference holes 12 (only one of them shown in the drawings) formed on the work 1, a position indexing unit 16 for deriving a central position 14a of each of figures taken by the video cameras 13 (see FIG.
  • the motor drive mechanism 8 comprises a X-coordinate drive mechanism 20, a Y-coordinate drive mechanism 22 and a THEATA drive mechanism 23.
  • reference numeral 15 designates a position adjusting mechanism for displacing the respective video cameras 13 to a region where photographing can be effected and for generating signals a indicative of positions of the video cameras 13.
  • the position adjusting mechanism 15 comprises a X-coordinate drive mechanism 24 for displacing the video cameras 13 in the leftward/rightward direction, a Y-coordinate drive mechanism 25 for displacing the video cameras 13 in the forward/rearward direction and Z-coordinate drive mechanism 26 for displacing the video cameras 13 in the upward/downward direction.
  • reference numeral 28 designates an introduction handler for bringing an unexposed work 1 from an entry stocker
  • reference numeral 30 designates a traverser for transferring the work 1 located in position on the alignment table 5 to the exposing section 3
  • reference numeral 31 designates a taking-out handler for transferring the exposed work 1 to a taking-out stocker 32
  • reference numeral 33 designates an exposing lamp
  • reference numeral 34 designates a mirror
  • reference numeral 35 designate a suction duct.
  • reference numeral 36 designates a suction hole by way of which air is sucked so as to allow the work 1 to be brought in close contact with the upper surface of the alignment table 5.
  • the conventional apparatus offers advantageous features that it is possible to form a fine pattern and a number of products each having an excellent quality can be produced in a mass production line.
  • Alignment of a film with the work 2 in the exposing section 3 is carried out before the film is firmly held on the exposing frame 17.
  • the upper and lower surfaces of the work 1 including reference holes 12 (only one of them shown in the drawing) placed on the alignment table 5 are fully covered with dry films 38 (mask films), and each of the dry films 38 is curved inwardly in the reference hole 12 in a concave configuration.
  • the same malfunction as described above takes place also during a step of placing a plurality of laminar plates each having a predetermined pattern formed thereon, one above another in a laminated structure.
  • this step the central position of each of concave or convex recognition marks on the work is recognized but a high intensity of reflected light is generated along a part of the circumferential edge of the recognition mark. This causes bright spots to appear round the circumferential edge of a figure indicative of the recognition mark.
  • the present invention has been made with the foregoing background in mind and its object resides in providing an alignment table employable for an automatic exposing apparatus or the like which assures that a figure processing can reliably be performed for reference holes or recognition marks photographed by video cameras so as to exactly determine the position of a work.
  • the present invention provides an alignment table for an automatic exposing apparatus or the like having a work such as a copper-plated laminar or the like plate placed thereon, the alignment table including a plurality of video cameras for photographing a plurality of position determining reference holes or recognition marks on the work via transparent plates placed on the alignment table and a position indexing unit for deriving the central position of a figure indicative of each of the reference holes or the recognition marks photographed by the video cameras by performing a figure processing so as to index the central position of each of the reference holes or the recognition marks while the positions of photographing of the video cameras are inputted into the position indexing unit, wherein the alignment table is designed in the form of a flat and hollow box-shaped configuration comprising an upper plate, a lower plate and side plates, the upper plate and the lower plate are provided with tow or more transparent plates at positions opposite to each other, respectively, and the upper surface of each of the transparent plates on the upper plate is provided in the form of a mat surface.
  • the alignment table as constructed in the above-described manner functions correctly while offering advantageous effects as noted hereinbelow.
  • FIGS. 1 to 4 illustrate an alignment table for an automatic exposing apparatus or the like in accordance with an embodiment of the present invention, wherein
  • FIG. 1 is a fragmentary sectional side view of the alignment table (i.e., a partially enlarged sectional view of the alignment table shown in FIG. 3),
  • FIG. 2 is an explanatory sectional side view illustrating operation of the alignment table (i.e., an enlarged sectional view of a section II in FIG. 1),
  • FIG. 3 is a schematic view of the alignment table, particularly illustrating an aligning section
  • FIG. 4 is a plan view of the alignment table (i.e., a view as seen in the direction of IV marks in FIG. 3).
  • FIG. 5 is a schematic view illustrating arrangement of the automatic exposing apparatus.
  • FIG. 6 is a fragmentary sectional side view illustrating the structure of a conventional alignment table.
  • FIGS. 7 and 8 are an explanatory view illustrating the figure cf a reference hole derived with the use of the conventional alignment table, respectively.
  • FIGS. 1 to 4 illustrate an alignment table for an automatic exposing apparatus or the like in accordance with the embodiment of the present invention.
  • an alignment table 5a of the present invention is designed in the form of a flat and hollow box-shaped configuration comprising an upper plate 51, a lower plate 52 and side plates 53.
  • the upper plate 51 and the lower plate 52 are formed with windows 54 and 55 each having predetermined dimensions at plural positions (at two positions in the shown embodiment) located opposite to each other.
  • the windows 54 and 55 are fitted with transparent plates 9a and 10 made of glass, acrilic resin or ceramic material.
  • the upper surface of the transparent plate 9a on the upper plate 51 is provided in the form of a frosted surface, i.e. a mat surface 56.
  • the reflected light coming from the peripheral portion of the reference hole 12 creates an intense ring-shaped reflected light during a soldering step. However, since this reflected light is introduced in and scattered from the the mat surface 56 and then released upwardly through the upper opening of the reference hole 12 during a light collecting step, no bright spot appears round the circumferential edge of the figure indicative of the reference hole 12.
  • transparent plates may be arranged at three or more locations on the alignment table. Further, instead of arrangement of the transparent plates at two corners located in the diagonal direction of a work, they may be arranged at the central part of the alignment table or at positions located in the proximity of the central part. It should of course be understood that various changes or modifications may be made without departure from the scope of the present invention as defined by the appended claim.
  • the present invention offers the following advantageous effects.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
US07/430,263 1989-05-15 1989-11-02 Alignment table for automatic exposing apparatus Expired - Fee Related US4970587A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1989055500U JPH071635Y2 (ja) 1989-05-15 1989-05-15 自動露光装置等におけるアライメントテーブル
JP1-55500[U] 1989-05-15

Publications (1)

Publication Number Publication Date
US4970587A true US4970587A (en) 1990-11-13

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Application Number Title Priority Date Filing Date
US07/430,263 Expired - Fee Related US4970587A (en) 1989-05-15 1989-11-02 Alignment table for automatic exposing apparatus

Country Status (2)

Country Link
US (1) US4970587A (enrdf_load_stackoverflow)
JP (1) JPH071635Y2 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5627378A (en) * 1996-02-28 1997-05-06 Orc Electronic Products, A Divison Of Benson Eyecare Corporation Die set for automatic UV exposure system
EP0813235A3 (en) * 1996-06-12 1998-11-18 Hitachi, Ltd. Method for manufacturing multilayer wiring board and wiring pattern forming apparatus
US5843831A (en) * 1997-01-13 1998-12-01 Taiwan Semiconductor Manufacturing Company, Ltd. Process independent alignment system
US6621553B2 (en) 2001-03-30 2003-09-16 Perkinelmer, Inc. Apparatus and method for exposing substrates
US9107334B2 (en) 2011-11-08 2015-08-11 Ngk Spark Plug Co., Ltd. Ceramic substrate and method of manufacturing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4342090A (en) * 1980-06-27 1982-07-27 International Business Machines Corp. Batch chip placement system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4342090A (en) * 1980-06-27 1982-07-27 International Business Machines Corp. Batch chip placement system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5627378A (en) * 1996-02-28 1997-05-06 Orc Electronic Products, A Divison Of Benson Eyecare Corporation Die set for automatic UV exposure system
EP0813235A3 (en) * 1996-06-12 1998-11-18 Hitachi, Ltd. Method for manufacturing multilayer wiring board and wiring pattern forming apparatus
US5970310A (en) * 1996-06-12 1999-10-19 Hitachi, Ltd. Method for manufacturing multilayer wiring board and wiring pattern forming apparatus
US5843831A (en) * 1997-01-13 1998-12-01 Taiwan Semiconductor Manufacturing Company, Ltd. Process independent alignment system
US6621553B2 (en) 2001-03-30 2003-09-16 Perkinelmer, Inc. Apparatus and method for exposing substrates
US9107334B2 (en) 2011-11-08 2015-08-11 Ngk Spark Plug Co., Ltd. Ceramic substrate and method of manufacturing the same

Also Published As

Publication number Publication date
JPH071635Y2 (ja) 1995-01-18
JPH02146648U (enrdf_load_stackoverflow) 1990-12-12

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Owner name: ORC MANUFACTURING CO., LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:ABE, CHIAKI;REEL/FRAME:005250/0830

Effective date: 19900301

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
FP Lapsed due to failure to pay maintenance fee

Effective date: 19941116

STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362