US3896314A - Specimen heating and positioning device for an electron microscope - Google Patents

Specimen heating and positioning device for an electron microscope Download PDF

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Publication number
US3896314A
US3896314A US421978A US42197873A US3896314A US 3896314 A US3896314 A US 3896314A US 421978 A US421978 A US 421978A US 42197873 A US42197873 A US 42197873A US 3896314 A US3896314 A US 3896314A
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United States
Prior art keywords
specimen
stage
heating
optical axis
holder
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US421978A
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English (en)
Inventor
Shigeru Nukui
Hideaki Mikazuki
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Jeol Ltd
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Jeol Ltd
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Publication of US3896314A publication Critical patent/US3896314A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Definitions

  • a specimen must be set in a magnetic field of an objective lens for high resolution electron microscopy.
  • a device for positioning the specimen can be classified into two types with respect to the way of insertion of the specimen.
  • One is the top entry type in which the specimen is inserted from an upper part of an objective lens, and another is the side entry type in which the specimen is inserted laterally into the objective lens. Both types have respective features, but the side entry type is now used more frequently because of easy operation providing larger angles of tilt than the top entry type. From another viewpoint, since one end of a side entry specimen stage is held to a microscope column, the distance between the column and the specimen must be extremely long.
  • the specimen largely drifts perpendicularly away from the optical axis as the thermal expansion or contraction due to the change in temperature at the specimen stage occurs; it follows, therefore, that in observation of the specimen being heated, its resolving power remarkably lowers due to the drift.
  • An advantage of this invention is therefore to provide a specimen heating device for electron microscopes capable of observing the heated specimen with high resolving power.
  • Another object of this invention is to provide a specimen heating device for electron microscopes or the like, which is capable of compensating the drift of a specimen due to the thermal expansion or contraction of the specimen stage.
  • a specimen heating and positioning device for an electron microscope or the like comprises a specimen stage adjustably fixed to the microscope column for positioning the specimen along the optical axis.
  • the stage is arranged to expand on heating along an axis perpendicular to the optical axis and away from a first reference point fixed relative to the optical axis.
  • a specimen holder is mounted in the specimen stage.
  • the holder is arranged to expand on heating along the same axis along which the specimen holder expands away from a second reference point fixed relative to the specimen stage and on the opposite side of the optical axis from the first reference point.
  • Means are provided for heating the specimen.
  • the distances between the reference points and the optical axis can be selected such that as the specimen holder and specimen stage are heated, the thermal expansion of the specimen stage and the specimen holder are approximately equal, thus maintaining the specimen substantially at the optical axis.
  • FIG. 1 is a cross-sectional view of one embodiment of this invention
  • FIG. 2 is a plane view showing a substantial part in FIG. 1;
  • FIG. 3 is a cross-sectional view taken along line A-A in FIG. 2;
  • FIG. 4 is a cross-sectional view taken along line B-B in FIG. 2;
  • FIG. 5 is a cross-sectional view showing another embodiment of this invention.
  • a section of a microscope column l for example, the objective lens yoke has mounted therein a rotating body 2 rotatable about an axis intersecting the electron optical axis of the microscope perpendicular thereto (hereafter the X axis" as shown on the drawing).
  • a knob 3 attached to the external end of the rotating body 2 serves to rotate the body 2 about its X axis.
  • a supporting member 5 terminating on a sphere 4 is supported in a spherical socket of the rotating body 2 so that it is rotatable about a center in the sphere 4.
  • a screw 6 threaded in the rotating body, and the tip of the screw directly touches a side of the supporting member 5.
  • the rotating body 2 is biased against the screw by a spring 7.
  • a specimen stage 8 passes through the said supporting member 5 and is positioned across the optical axis.
  • a specimen holder 9 is mounted in the specimen stage to be positioned at or near the optical axis.
  • An end of the stage abuts a connecting rod 11 through a ball or bearing I0 made of thermally insulating material as ruby.
  • the connecting rod is set inside a cylinder 12 disposed in the column 1 and is capable of shifting through the cylinder 12 in a longitudinal direction, and may also be slightly tilted within the cylinder 12. The end of this cylinder outside the column touches a bell crank 14, positionable by a screw 15.
  • the supporting member S, and the stage 8 turn about the axis X and the specimen is tilted in a certain direction and at a certain angle with respect to the axis X.
  • the supporting member 5 rotates centering the sphere 4. Accordingly, the specimen is moved along the axis Y perpendicular to the X axis.
  • adjusting the screw 15, the stage 8 or the specimen shifts in a direction of the axis X through the movement of bell crank 14, the cylinder 12 and the connecting rod 11.
  • the present invention is characterized by a mechanism which holds the specimen holder 9 to the specimen stage 8.
  • an opening I6 bigger than the specimen holder 9 is formed in the specimen stage 8 and the said holder is accommodated in this hole, supported by balls 17a, 17b, 17c and 17d made of thermal insulating material such as ruby.
  • a pair of cone-shaped sockets 18a and 18b and a pair of V- shaped grooves and 1% are cut into opposite sides of the specimen holder 8.
  • the cone-shaped sockets 18a and 18b are, in FIG.
  • the balls or bearings 17a and 17b are accommodated in the cone-shaped sockets 18a and 18b, respectively, while the balls 17c and 17d are positioned in the V-shaped grooves 19a and 19b, respectively, and all bearings are kept in position by screws 20a, 20b, 20c and 20d respectively, (20a and 20b not shown).
  • the contact points of the balls 17a and 17b are fixed on the stage 8; while the balls 17c and 17d can be freely shifted permitting the specimen holder to expand away from sockets 18a and 18b.
  • a specimen cartridge 23 which includes the specimen 21 and a heating coil 22 held by grooves and ruby balls 24a, 24b and 24c placed therein.
  • the heating device according to this invention is designed so that the expanding directions of the stage 8 and the holder 9 are opposed and the specimen has little, if any drift.
  • the specimen holder 9 expands to reverse direction of the arrow marked C, away from the ruby balls 17a and 17b, thus the center of the specimen shifts in the same direction in an amount corresponding to the thermal expansion for the length 1 If the shifting distances due to the thermal expansion of both mem bers are equal by virtue of pertinent selection of their dimensions and materials, the drift of the specimen can be substantially prevented. Since the temperature of the specimen holder will be much higher than that of the specimen stage, even if these members are made of identical material, the center of the specimen can be held at a stationary position.
  • FIG. shows another embodiment of this invention.
  • a heater 25 is also accommodated into the specimen stage.
  • This heater is used in order to heat the stage 8 up to a certain temperature prior to the observation of a heated specimen by electron microscope.
  • the period of time required for reaching the thermal equilibrium stage during heating the specimen can be shortened, and hence also even a slight drift during equilibrium can be excluded.
  • the position of the heater 25 is not limited to the end of the stage 8 as shown in the drawing, but may be adjacent to the specimen holder 9.
  • specimen stage 8 In the practical application of this invention. diverse modifications may be realized. For instance, though a fixed point of the specimen stage 8 was previously selected at its tip, it may be on the right of the axis Y in FIG. 1. Further, the specimen holder and the specimen cartridge which were independently formed as in the earlier embodiment, may be unitary or integral.
  • a specimen heating and positioning device for an electron microscope or the like having an electron optical axis comprising a specimen stage adjustably fixed for positioning a specimen along the optical axis, said stage arranged to expand on heating on an axis passing through the optical axis away from a first reference point fixed relative to the optical axis and spaced therefrom, a specimen holder mounted in said specimen stage for holding the specimen and arranged to expand on heating along the same axis along which the specimen stage expands in a direction away from a second reference point fixed relative to the specimen stage and on the opposite side of the optical axis from the first reference point, means for heating the specimen, the distances between the reference points and the optical axis being selected such that as the specimen holder and specimen are heated, incidental to the heating of the specimen, the expansion of the stage and holder are approximately equal thus maintaining the specimen substantially at the optical axis.
  • a specimen heating device according to claim 1 in which means are provided for heating the specimen stage.
  • a specimen heating and positioning device according to claim 1 wherein the said specimen holder is held on the said specimen stage by bearings made of thermal insulating material.
  • a specimen heating device wherein the specimen holder mounted in said specimen stage is secured by four ball bearings, two bearings being seated in cone-shaped sockets formed on opposite sides of the said specimen holder and the adjoining portions of the specimen stage therein defining the second reference point and two being positioned in V- shaped grooves on opposite sides of the specimen holder and adjoining portions of the specimen stage.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
US421978A 1972-12-14 1973-12-05 Specimen heating and positioning device for an electron microscope Expired - Lifetime US3896314A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14372672 1972-12-14

Publications (1)

Publication Number Publication Date
US3896314A true US3896314A (en) 1975-07-22

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Application Number Title Priority Date Filing Date
US421978A Expired - Lifetime US3896314A (en) 1972-12-14 1973-12-05 Specimen heating and positioning device for an electron microscope

Country Status (4)

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US (1) US3896314A (OSRAM)
DE (1) DE2362249C3 (OSRAM)
FR (1) FR2327699A1 (OSRAM)
GB (1) GB1443478A (OSRAM)

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4703181A (en) * 1986-04-07 1987-10-27 Gatan Inc. Anti-drift device for side entry electron microscope specimen holders
US4710633A (en) * 1983-02-09 1987-12-01 Akashi Seisakusho Ltd. Specimen moving device for electron microscope
EP0226804A3 (en) * 1985-12-24 1989-01-11 Firma Carl Zeiss Goniometric stage
US4837444A (en) * 1987-05-22 1989-06-06 Jeol Ltd. Electron microscope
EP0369913A1 (fr) * 1988-11-18 1990-05-23 CHAIXMECA, Sàrl Dispositif pour le transfert et des réactions in-situ sous atmosphère contrôlée d'échantillons destinés à l'examen en microscopie électronique en transmission
US5001350A (en) * 1988-04-28 1991-03-19 Jeol Ltd. Electron microscope
US5091651A (en) * 1989-11-06 1992-02-25 U.S. Philips Corp. Object holder for supporting an object in a charged particle beam system
US5124645A (en) * 1991-04-24 1992-06-23 The United States Of America As Represented By The Secretary Of The Air Force Transmission electron microscope (TEM) power probe for in-situ viewing of electromigration and operation of an integrated circuit or microprocessor
US5225683A (en) * 1990-11-30 1993-07-06 Jeol Ltd. Detachable specimen holder for transmission electron microscope
US5289005A (en) * 1992-05-29 1994-02-22 Jeol Ltd. Electron microscope
US5367171A (en) * 1991-10-24 1994-11-22 Hitachi, Ltd. Electron microscope specimen holder
WO1997007526A1 (en) * 1995-08-11 1997-02-27 Philips Electronics North America Corporation High temperature specimen stage and detector for an environmental scanning electron microscope
US5635836A (en) * 1994-10-21 1997-06-03 International Business Machines Corporation Mechanical apparatus with rod, pivot, and translation means for positioning a sample for use with a scanning microscope
US5898177A (en) * 1996-08-08 1999-04-27 Hitachi, Ltd. Electron microscope
WO2004023514A1 (en) 2002-06-25 2004-03-18 Technische Universiteit Delft Specimen holder for an electron microscope, and method for reducing thermal drift in a microscope
US20060289784A1 (en) * 2005-05-30 2006-12-28 Jeol Ltd. Specimen holder for electron microscope
US20100320396A1 (en) * 2009-06-18 2010-12-23 Hitachi, Ltd. Sample holder for electron microscope
US20120292528A1 (en) * 2009-11-27 2012-11-22 Hysitron, Inc. Micro electro-mechanical heater
US8631687B2 (en) 2010-04-19 2014-01-21 Hysitron, Inc. Indenter assembly
NL2011876C2 (en) * 2013-12-02 2015-06-03 Univ Delft Tech Low specimen drift holder and cooler for use in microscopy.
WO2016154200A1 (en) * 2015-03-23 2016-09-29 Nanomechanics, Inc. Structure for achieving dimensional stability during temperature changes
US9476816B2 (en) 2011-11-14 2016-10-25 Hysitron, Inc. Probe tip heating assembly
US9804072B2 (en) 2011-11-28 2017-10-31 Hysitron, Inc. High temperature heating system
US9829417B2 (en) 2012-06-13 2017-11-28 Hysitron, Inc. Environmental conditioning assembly for use in mechanical testing at micron or nano-scales
JP2018185962A (ja) * 2017-04-26 2018-11-22 日本電子株式会社 ホルダーおよび荷電粒子線装置
JP6471254B1 (ja) * 2018-04-10 2019-02-13 株式会社メルビル 試料ホルダー
US11158484B2 (en) 2017-08-31 2021-10-26 Asml Netherlands B.V. Electron beam inspection tool and method of controlling heat load

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2753458A (en) * 1954-04-12 1956-07-03 Kazato Kenji Electron microscope
US3778621A (en) * 1972-06-13 1973-12-11 Jeol Ltd Specimen tilting device for an electron optical device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2753458A (en) * 1954-04-12 1956-07-03 Kazato Kenji Electron microscope
US3778621A (en) * 1972-06-13 1973-12-11 Jeol Ltd Specimen tilting device for an electron optical device

Cited By (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4710633A (en) * 1983-02-09 1987-12-01 Akashi Seisakusho Ltd. Specimen moving device for electron microscope
EP0226804A3 (en) * 1985-12-24 1989-01-11 Firma Carl Zeiss Goniometric stage
US4703181A (en) * 1986-04-07 1987-10-27 Gatan Inc. Anti-drift device for side entry electron microscope specimen holders
US4837444A (en) * 1987-05-22 1989-06-06 Jeol Ltd. Electron microscope
US5001350A (en) * 1988-04-28 1991-03-19 Jeol Ltd. Electron microscope
EP0369913A1 (fr) * 1988-11-18 1990-05-23 CHAIXMECA, Sàrl Dispositif pour le transfert et des réactions in-situ sous atmosphère contrôlée d'échantillons destinés à l'examen en microscopie électronique en transmission
FR2639473A1 (fr) * 1988-11-18 1990-05-25 Chaixmeca Sarl Dispositif pour le transfert sous atmosphere controlee d'echantillons destines a l'examen en microscopie electronique en transmission
US5036205A (en) * 1988-11-18 1991-07-30 Chaixmeca Sarl Apparatus for the transfer and in-situ reactions under a controlled atmosphere, of specimens for transmissive electron microscopy
US5091651A (en) * 1989-11-06 1992-02-25 U.S. Philips Corp. Object holder for supporting an object in a charged particle beam system
US5225683A (en) * 1990-11-30 1993-07-06 Jeol Ltd. Detachable specimen holder for transmission electron microscope
US5124645A (en) * 1991-04-24 1992-06-23 The United States Of America As Represented By The Secretary Of The Air Force Transmission electron microscope (TEM) power probe for in-situ viewing of electromigration and operation of an integrated circuit or microprocessor
US5367171A (en) * 1991-10-24 1994-11-22 Hitachi, Ltd. Electron microscope specimen holder
US5289005A (en) * 1992-05-29 1994-02-22 Jeol Ltd. Electron microscope
US5635836A (en) * 1994-10-21 1997-06-03 International Business Machines Corporation Mechanical apparatus with rod, pivot, and translation means for positioning a sample for use with a scanning microscope
WO1997007526A1 (en) * 1995-08-11 1997-02-27 Philips Electronics North America Corporation High temperature specimen stage and detector for an environmental scanning electron microscope
US6025592A (en) * 1995-08-11 2000-02-15 Philips Electronics North America High temperature specimen stage and detector for an environmental scanning electron microscope
US5898177A (en) * 1996-08-08 1999-04-27 Hitachi, Ltd. Electron microscope
WO2004023514A1 (en) 2002-06-25 2004-03-18 Technische Universiteit Delft Specimen holder for an electron microscope, and method for reducing thermal drift in a microscope
EP1516349B1 (en) * 2002-06-25 2010-09-15 Technische Universiteit Delft Specimen holder for an electron microscope and method for reducing thermal drift in an electron microscope
US20060289784A1 (en) * 2005-05-30 2006-12-28 Jeol Ltd. Specimen holder for electron microscope
US7566884B2 (en) * 2005-05-30 2009-07-28 Jeol Ltd. Specimen holder for electron microscope
US20100320396A1 (en) * 2009-06-18 2010-12-23 Hitachi, Ltd. Sample holder for electron microscope
US8338798B2 (en) * 2009-06-18 2012-12-25 Hitachi, Ltd. Sample holder for electron microscope
US9759641B2 (en) 2009-11-27 2017-09-12 Hysitron, Inc. Micro electro-mechanical heater
US20120292528A1 (en) * 2009-11-27 2012-11-22 Hysitron, Inc. Micro electro-mechanical heater
US9316569B2 (en) * 2009-11-27 2016-04-19 Hysitron, Inc. Micro electro-mechanical heater
US8631687B2 (en) 2010-04-19 2014-01-21 Hysitron, Inc. Indenter assembly
US9476816B2 (en) 2011-11-14 2016-10-25 Hysitron, Inc. Probe tip heating assembly
US10241017B2 (en) 2011-11-28 2019-03-26 Bruker Nano, Inc. High temperature heating system
US9804072B2 (en) 2011-11-28 2017-10-31 Hysitron, Inc. High temperature heating system
US9829417B2 (en) 2012-06-13 2017-11-28 Hysitron, Inc. Environmental conditioning assembly for use in mechanical testing at micron or nano-scales
WO2015084169A1 (en) 2013-12-02 2015-06-11 Technische Universiteit Delft Low specimen drift holder, cooler and heat flow reductor for use in microscopy
US9887065B2 (en) 2013-12-02 2018-02-06 Technische Universiteit Delft Low specimen drift TEM holder and cooler for use in microscopy
NL2011876C2 (en) * 2013-12-02 2015-06-03 Univ Delft Tech Low specimen drift holder and cooler for use in microscopy.
WO2016154200A1 (en) * 2015-03-23 2016-09-29 Nanomechanics, Inc. Structure for achieving dimensional stability during temperature changes
US10168261B2 (en) 2015-03-23 2019-01-01 Kla-Tencor Corporation Structure for achieving dimensional stability during temperature changes
JP2018185962A (ja) * 2017-04-26 2018-11-22 日本電子株式会社 ホルダーおよび荷電粒子線装置
US11158484B2 (en) 2017-08-31 2021-10-26 Asml Netherlands B.V. Electron beam inspection tool and method of controlling heat load
JP6471254B1 (ja) * 2018-04-10 2019-02-13 株式会社メルビル 試料ホルダー

Also Published As

Publication number Publication date
FR2327699A1 (fr) 1977-05-06
GB1443478A (en) 1976-07-21
FR2327699B1 (OSRAM) 1978-03-24
DE2362249B2 (de) 1978-07-06
DE2362249A1 (de) 1974-07-04
DE2362249C3 (de) 1979-03-22

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