GB1443478A - Specimen heating device for electron microscopes - Google Patents

Specimen heating device for electron microscopes

Info

Publication number
GB1443478A
GB1443478A GB5764673A GB5764673A GB1443478A GB 1443478 A GB1443478 A GB 1443478A GB 5764673 A GB5764673 A GB 5764673A GB 5764673 A GB5764673 A GB 5764673A GB 1443478 A GB1443478 A GB 1443478A
Authority
GB
United Kingdom
Prior art keywords
specimen
support
holder
balls
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5764673A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1443478A publication Critical patent/GB1443478A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

1443478 Electron microscopes NIHON DENSHI KK 12 Dec 1973 [14 Dec 1972] 57646/73 Heading H1D A specimen holder on a specimens support, for insertion into an electron microscope in a direction perpendicular to the electron-optical axis, and provided with means for heating the specimen, is arranged so that thermal expansion produces oppositely directed movements of the holder and the support, whereby drift of the specimen from the optical axis may be prevented. The holder 9 is mounted on the support 8, and is tiltable with respect to the electron optical axis by rotation of support 8 by knob 3; is displaceable along the Y-axis by adjustment of the screw 6; and is displaceable along the X-axis by adjustment of the screw 15, which axially displaces the rod 11 which is connected to the support 8 by a thermally insulating ball 10 of ruby. The specimen holder 9 is supported within an aperture 16, Fig. 2, in the support 8 by thermally insulating ruby balls 17a, 17b, 17c and 17d, the first two of which engage in corresponding cone-shaped depressions 18a and 18b in the sides of the holder, while balls 17c and 17d engage in V-shaped grooves 19a and 19b in the sides of the holder. A rise of temperature causes the specimen support to move the specimen cartridge 23 to the right with respect to the point 10 defined by the end of the rod 11, while the specimen holder 9 moves the cartridge to the left from the anchored balls 17a and 17b, whereby the suitable choice of the dimensions l 1 and l 2 , Fig. 2, and of materials, movement of the cartridge may be substantially prevented. The specimen catridge 23 is mounted in the specimen holder 8 by the ruby balls 24a, 24b and 24c, and incorporates a heating coil 22, Fig. 3. T6 specimen support 18 may also include a heater (25, Fig. 5, not shown) to permit preheating of the support, with consequent reduction in the time required to reach thermal equilibrium.
GB5764673A 1972-12-14 1973-12-12 Specimen heating device for electron microscopes Expired GB1443478A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14372672 1972-12-14

Publications (1)

Publication Number Publication Date
GB1443478A true GB1443478A (en) 1976-07-21

Family

ID=15345561

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5764673A Expired GB1443478A (en) 1972-12-14 1973-12-12 Specimen heating device for electron microscopes

Country Status (4)

Country Link
US (1) US3896314A (en)
DE (1) DE2362249C3 (en)
FR (1) FR2327699A1 (en)
GB (1) GB1443478A (en)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054151A (en) * 1983-09-02 1985-03-28 Internatl Precision Inc Sample-moving device for electron ray device
DE3546095A1 (en) * 1985-12-24 1987-06-25 Zeiss Carl Fa GONIOMETER TABLE
US4703181A (en) * 1986-04-07 1987-10-27 Gatan Inc. Anti-drift device for side entry electron microscope specimen holders
JPH0614460B2 (en) * 1987-05-22 1994-02-23 日本電子株式会社 Sample equipment for electron microscopes, etc.
JP2561699B2 (en) * 1988-04-28 1996-12-11 日本電子株式会社 Electron microscope sample device
FR2639473A1 (en) * 1988-11-18 1990-05-25 Chaixmeca Sarl DEVICE FOR THE TRANSFER UNDER A CONTROLLED ATMOSPHERE OF SAMPLES FOR EXAMINATION IN TRANSMISSION ELECTRON MICROSCOPY
NL8902727A (en) * 1989-11-06 1991-06-03 Philips Nv OBJECT HOLDER FOR SUPPORTING AN OBJECT IN A LOADED PARTICLE BUNDLE SYSTEM.
US5225683A (en) * 1990-11-30 1993-07-06 Jeol Ltd. Detachable specimen holder for transmission electron microscope
US5124645A (en) * 1991-04-24 1992-06-23 The United States Of America As Represented By The Secretary Of The Air Force Transmission electron microscope (TEM) power probe for in-situ viewing of electromigration and operation of an integrated circuit or microprocessor
DE69229432T2 (en) * 1991-10-24 2000-02-17 Hitachi Ltd Sample holder for electron microscope
US5289005A (en) * 1992-05-29 1994-02-22 Jeol Ltd. Electron microscope
US5635836A (en) * 1994-10-21 1997-06-03 International Business Machines Corporation Mechanical apparatus with rod, pivot, and translation means for positioning a sample for use with a scanning microscope
US6025592A (en) * 1995-08-11 2000-02-15 Philips Electronics North America High temperature specimen stage and detector for an environmental scanning electron microscope
US5898177A (en) * 1996-08-08 1999-04-27 Hitachi, Ltd. Electron microscope
NL1020936C2 (en) 2002-06-25 2003-12-30 Univ Delft Tech Specimen holder for an electron microscope, assembly of a specimen holder and an electron microscope and method for reducing thermal drift in an electron microscope.
JP4616701B2 (en) * 2005-05-30 2011-01-19 日本電子株式会社 Sample holder for electron microscope
JP5094788B2 (en) * 2009-06-18 2012-12-12 株式会社日立製作所 Electron microscope and its sample holder
US9316569B2 (en) * 2009-11-27 2016-04-19 Hysitron, Inc. Micro electro-mechanical heater
US8631687B2 (en) 2010-04-19 2014-01-21 Hysitron, Inc. Indenter assembly
EP2780689B1 (en) 2011-11-14 2017-01-04 Hysitron, Inc. Probe tip heating assembly
JP6574932B2 (en) 2011-11-28 2019-09-18 ブルカー ナノ インコーポレイテッドBruker Nano,Inc. Test assembly, heating system and method for testing a sample
WO2013187972A1 (en) 2012-06-13 2013-12-19 Schmitz Roger William Environmental conditioning assembly for use in mechanical testing at micron or nano-scales
NL2011876C2 (en) 2013-12-02 2015-06-03 Univ Delft Tech Low specimen drift holder and cooler for use in microscopy.
WO2016154200A1 (en) * 2015-03-23 2016-09-29 Nanomechanics, Inc. Structure for achieving dimensional stability during temperature changes
JP6796541B2 (en) * 2017-04-26 2020-12-09 日本電子株式会社 Holder and charged particle beam device
WO2019042905A1 (en) 2017-08-31 2019-03-07 Asml Netherlands B.V. Electron beam inspection tool
JP6471254B1 (en) * 2018-04-10 2019-02-13 株式会社メルビル Sample holder

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2753458A (en) * 1954-04-12 1956-07-03 Kazato Kenji Electron microscope
US3778621A (en) * 1972-06-13 1973-12-11 Jeol Ltd Specimen tilting device for an electron optical device

Also Published As

Publication number Publication date
FR2327699B1 (en) 1978-03-24
US3896314A (en) 1975-07-22
FR2327699A1 (en) 1977-05-06
DE2362249A1 (en) 1974-07-04
DE2362249B2 (en) 1978-07-06
DE2362249C3 (en) 1979-03-22

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years

Effective date: 19931211