GB1443478A - Specimen heating device for electron microscopes - Google Patents
Specimen heating device for electron microscopesInfo
- Publication number
- GB1443478A GB1443478A GB5764673A GB5764673A GB1443478A GB 1443478 A GB1443478 A GB 1443478A GB 5764673 A GB5764673 A GB 5764673A GB 5764673 A GB5764673 A GB 5764673A GB 1443478 A GB1443478 A GB 1443478A
- Authority
- GB
- United Kingdom
- Prior art keywords
- specimen
- support
- holder
- balls
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
1443478 Electron microscopes NIHON DENSHI KK 12 Dec 1973 [14 Dec 1972] 57646/73 Heading H1D A specimen holder on a specimens support, for insertion into an electron microscope in a direction perpendicular to the electron-optical axis, and provided with means for heating the specimen, is arranged so that thermal expansion produces oppositely directed movements of the holder and the support, whereby drift of the specimen from the optical axis may be prevented. The holder 9 is mounted on the support 8, and is tiltable with respect to the electron optical axis by rotation of support 8 by knob 3; is displaceable along the Y-axis by adjustment of the screw 6; and is displaceable along the X-axis by adjustment of the screw 15, which axially displaces the rod 11 which is connected to the support 8 by a thermally insulating ball 10 of ruby. The specimen holder 9 is supported within an aperture 16, Fig. 2, in the support 8 by thermally insulating ruby balls 17a, 17b, 17c and 17d, the first two of which engage in corresponding cone-shaped depressions 18a and 18b in the sides of the holder, while balls 17c and 17d engage in V-shaped grooves 19a and 19b in the sides of the holder. A rise of temperature causes the specimen support to move the specimen cartridge 23 to the right with respect to the point 10 defined by the end of the rod 11, while the specimen holder 9 moves the cartridge to the left from the anchored balls 17a and 17b, whereby the suitable choice of the dimensions l 1 and l 2 , Fig. 2, and of materials, movement of the cartridge may be substantially prevented. The specimen catridge 23 is mounted in the specimen holder 8 by the ruby balls 24a, 24b and 24c, and incorporates a heating coil 22, Fig. 3. T6 specimen support 18 may also include a heater (25, Fig. 5, not shown) to permit preheating of the support, with consequent reduction in the time required to reach thermal equilibrium.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14372672 | 1972-12-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1443478A true GB1443478A (en) | 1976-07-21 |
Family
ID=15345561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5764673A Expired GB1443478A (en) | 1972-12-14 | 1973-12-12 | Specimen heating device for electron microscopes |
Country Status (4)
Country | Link |
---|---|
US (1) | US3896314A (en) |
DE (1) | DE2362249C3 (en) |
FR (1) | FR2327699A1 (en) |
GB (1) | GB1443478A (en) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6054151A (en) * | 1983-09-02 | 1985-03-28 | Internatl Precision Inc | Sample-moving device for electron ray device |
DE3546095A1 (en) * | 1985-12-24 | 1987-06-25 | Zeiss Carl Fa | GONIOMETER TABLE |
US4703181A (en) * | 1986-04-07 | 1987-10-27 | Gatan Inc. | Anti-drift device for side entry electron microscope specimen holders |
JPH0614460B2 (en) * | 1987-05-22 | 1994-02-23 | 日本電子株式会社 | Sample equipment for electron microscopes, etc. |
JP2561699B2 (en) * | 1988-04-28 | 1996-12-11 | 日本電子株式会社 | Electron microscope sample device |
FR2639473A1 (en) * | 1988-11-18 | 1990-05-25 | Chaixmeca Sarl | DEVICE FOR THE TRANSFER UNDER A CONTROLLED ATMOSPHERE OF SAMPLES FOR EXAMINATION IN TRANSMISSION ELECTRON MICROSCOPY |
NL8902727A (en) * | 1989-11-06 | 1991-06-03 | Philips Nv | OBJECT HOLDER FOR SUPPORTING AN OBJECT IN A LOADED PARTICLE BUNDLE SYSTEM. |
US5225683A (en) * | 1990-11-30 | 1993-07-06 | Jeol Ltd. | Detachable specimen holder for transmission electron microscope |
US5124645A (en) * | 1991-04-24 | 1992-06-23 | The United States Of America As Represented By The Secretary Of The Air Force | Transmission electron microscope (TEM) power probe for in-situ viewing of electromigration and operation of an integrated circuit or microprocessor |
DE69229432T2 (en) * | 1991-10-24 | 2000-02-17 | Hitachi Ltd | Sample holder for electron microscope |
US5289005A (en) * | 1992-05-29 | 1994-02-22 | Jeol Ltd. | Electron microscope |
US5635836A (en) * | 1994-10-21 | 1997-06-03 | International Business Machines Corporation | Mechanical apparatus with rod, pivot, and translation means for positioning a sample for use with a scanning microscope |
US6025592A (en) * | 1995-08-11 | 2000-02-15 | Philips Electronics North America | High temperature specimen stage and detector for an environmental scanning electron microscope |
US5898177A (en) * | 1996-08-08 | 1999-04-27 | Hitachi, Ltd. | Electron microscope |
NL1020936C2 (en) | 2002-06-25 | 2003-12-30 | Univ Delft Tech | Specimen holder for an electron microscope, assembly of a specimen holder and an electron microscope and method for reducing thermal drift in an electron microscope. |
JP4616701B2 (en) * | 2005-05-30 | 2011-01-19 | 日本電子株式会社 | Sample holder for electron microscope |
JP5094788B2 (en) * | 2009-06-18 | 2012-12-12 | 株式会社日立製作所 | Electron microscope and its sample holder |
US9316569B2 (en) * | 2009-11-27 | 2016-04-19 | Hysitron, Inc. | Micro electro-mechanical heater |
US8631687B2 (en) | 2010-04-19 | 2014-01-21 | Hysitron, Inc. | Indenter assembly |
EP2780689B1 (en) | 2011-11-14 | 2017-01-04 | Hysitron, Inc. | Probe tip heating assembly |
JP6574932B2 (en) | 2011-11-28 | 2019-09-18 | ブルカー ナノ インコーポレイテッドBruker Nano,Inc. | Test assembly, heating system and method for testing a sample |
WO2013187972A1 (en) | 2012-06-13 | 2013-12-19 | Schmitz Roger William | Environmental conditioning assembly for use in mechanical testing at micron or nano-scales |
NL2011876C2 (en) | 2013-12-02 | 2015-06-03 | Univ Delft Tech | Low specimen drift holder and cooler for use in microscopy. |
WO2016154200A1 (en) * | 2015-03-23 | 2016-09-29 | Nanomechanics, Inc. | Structure for achieving dimensional stability during temperature changes |
JP6796541B2 (en) * | 2017-04-26 | 2020-12-09 | 日本電子株式会社 | Holder and charged particle beam device |
WO2019042905A1 (en) | 2017-08-31 | 2019-03-07 | Asml Netherlands B.V. | Electron beam inspection tool |
JP6471254B1 (en) * | 2018-04-10 | 2019-02-13 | 株式会社メルビル | Sample holder |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2753458A (en) * | 1954-04-12 | 1956-07-03 | Kazato Kenji | Electron microscope |
US3778621A (en) * | 1972-06-13 | 1973-12-11 | Jeol Ltd | Specimen tilting device for an electron optical device |
-
1973
- 1973-12-05 US US421978A patent/US3896314A/en not_active Expired - Lifetime
- 1973-12-12 GB GB5764673A patent/GB1443478A/en not_active Expired
- 1973-12-13 FR FR7344579A patent/FR2327699A1/en active Granted
- 1973-12-14 DE DE2362249A patent/DE2362249C3/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2327699B1 (en) | 1978-03-24 |
US3896314A (en) | 1975-07-22 |
FR2327699A1 (en) | 1977-05-06 |
DE2362249A1 (en) | 1974-07-04 |
DE2362249B2 (en) | 1978-07-06 |
DE2362249C3 (en) | 1979-03-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PE20 | Patent expired after termination of 20 years |
Effective date: 19931211 |