FR2327699A1 - Dispositif pour chauffer un specimen, pour un microscope electronique - Google Patents

Dispositif pour chauffer un specimen, pour un microscope electronique

Info

Publication number
FR2327699A1
FR2327699A1 FR7344579A FR7344579A FR2327699A1 FR 2327699 A1 FR2327699 A1 FR 2327699A1 FR 7344579 A FR7344579 A FR 7344579A FR 7344579 A FR7344579 A FR 7344579A FR 2327699 A1 FR2327699 A1 FR 2327699A1
Authority
FR
France
Prior art keywords
specimen
heating
electronic microscope
microscope
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7344579A
Other languages
English (en)
French (fr)
Other versions
FR2327699B1 (OSRAM
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of FR2327699A1 publication Critical patent/FR2327699A1/fr
Application granted granted Critical
Publication of FR2327699B1 publication Critical patent/FR2327699B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
FR7344579A 1972-12-14 1973-12-13 Dispositif pour chauffer un specimen, pour un microscope electronique Granted FR2327699A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14372672 1972-12-14

Publications (2)

Publication Number Publication Date
FR2327699A1 true FR2327699A1 (fr) 1977-05-06
FR2327699B1 FR2327699B1 (OSRAM) 1978-03-24

Family

ID=15345561

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7344579A Granted FR2327699A1 (fr) 1972-12-14 1973-12-13 Dispositif pour chauffer un specimen, pour un microscope electronique

Country Status (4)

Country Link
US (1) US3896314A (OSRAM)
DE (1) DE2362249C3 (OSRAM)
FR (1) FR2327699A1 (OSRAM)
GB (1) GB1443478A (OSRAM)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054151A (ja) * 1983-09-02 1985-03-28 Internatl Precision Inc 電子線装置の試料移動装置
DE3546095A1 (de) * 1985-12-24 1987-06-25 Zeiss Carl Fa Goniometertisch
US4703181A (en) * 1986-04-07 1987-10-27 Gatan Inc. Anti-drift device for side entry electron microscope specimen holders
JPH0614460B2 (ja) * 1987-05-22 1994-02-23 日本電子株式会社 電子顕微鏡等における試料装置
JP2561699B2 (ja) * 1988-04-28 1996-12-11 日本電子株式会社 電子顕微鏡用試料装置
FR2639473A1 (fr) * 1988-11-18 1990-05-25 Chaixmeca Sarl Dispositif pour le transfert sous atmosphere controlee d'echantillons destines a l'examen en microscopie electronique en transmission
NL8902727A (nl) * 1989-11-06 1991-06-03 Philips Nv Objecthouder voor ondersteuning van een object in een geladen deeltjesbundelsysteem.
US5225683A (en) * 1990-11-30 1993-07-06 Jeol Ltd. Detachable specimen holder for transmission electron microscope
US5124645A (en) * 1991-04-24 1992-06-23 The United States Of America As Represented By The Secretary Of The Air Force Transmission electron microscope (TEM) power probe for in-situ viewing of electromigration and operation of an integrated circuit or microprocessor
EP0538861B1 (en) * 1991-10-24 1999-06-16 Hitachi, Ltd. Electron microscope specimen holder
US5289005A (en) * 1992-05-29 1994-02-22 Jeol Ltd. Electron microscope
US5635836A (en) * 1994-10-21 1997-06-03 International Business Machines Corporation Mechanical apparatus with rod, pivot, and translation means for positioning a sample for use with a scanning microscope
US6025592A (en) * 1995-08-11 2000-02-15 Philips Electronics North America High temperature specimen stage and detector for an environmental scanning electron microscope
US5898177A (en) * 1996-08-08 1999-04-27 Hitachi, Ltd. Electron microscope
NL1020936C2 (nl) * 2002-06-25 2003-12-30 Univ Delft Tech Preparaathouder voor een elektronenmicroscoop, samenstel van een preparaathouder en een elektronenmicroscoop en werkwijze voor het reduceren van thermische drift in een elektronenmicroscoop.
JP4616701B2 (ja) * 2005-05-30 2011-01-19 日本電子株式会社 電子顕微鏡の試料ホルダ
JP5094788B2 (ja) * 2009-06-18 2012-12-12 株式会社日立製作所 電子顕微鏡及びその試料ホルダ
WO2011066018A1 (en) * 2009-11-27 2011-06-03 Hysitron, Inc. Micro electro-mechanical heater
US8631687B2 (en) 2010-04-19 2014-01-21 Hysitron, Inc. Indenter assembly
US9476816B2 (en) 2011-11-14 2016-10-25 Hysitron, Inc. Probe tip heating assembly
US9804072B2 (en) 2011-11-28 2017-10-31 Hysitron, Inc. High temperature heating system
WO2013187972A1 (en) 2012-06-13 2013-12-19 Schmitz Roger William Environmental conditioning assembly for use in mechanical testing at micron or nano-scales
NL2011876C2 (en) 2013-12-02 2015-06-03 Univ Delft Tech Low specimen drift holder and cooler for use in microscopy.
US10168261B2 (en) 2015-03-23 2019-01-01 Kla-Tencor Corporation Structure for achieving dimensional stability during temperature changes
JP6796541B2 (ja) * 2017-04-26 2020-12-09 日本電子株式会社 ホルダーおよび荷電粒子線装置
WO2019042905A1 (en) 2017-08-31 2019-03-07 Asml Netherlands B.V. ELECTRON BEAM INSPECTION TOOL
JP6471254B1 (ja) * 2018-04-10 2019-02-13 株式会社メルビル 試料ホルダー

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2753458A (en) * 1954-04-12 1956-07-03 Kazato Kenji Electron microscope
US3778621A (en) * 1972-06-13 1973-12-11 Jeol Ltd Specimen tilting device for an electron optical device

Also Published As

Publication number Publication date
GB1443478A (en) 1976-07-21
US3896314A (en) 1975-07-22
FR2327699B1 (OSRAM) 1978-03-24
DE2362249B2 (de) 1978-07-06
DE2362249A1 (de) 1974-07-04
DE2362249C3 (de) 1979-03-22

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