US3601569A - Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod - Google Patents

Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod

Info

Publication number
US3601569A
US3601569A US864360A US3601569DA US3601569A US 3601569 A US3601569 A US 3601569A US 864360 A US864360 A US 864360A US 3601569D A US3601569D A US 3601569DA US 3601569 A US3601569 A US 3601569A
Authority
US
United States
Prior art keywords
flat
hollow member
coil
wound
wound coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US864360A
Other languages
English (en)
Inventor
Wolfgang Keller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of US3601569A publication Critical patent/US3601569A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • General Induction Heating (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Furnace Details (AREA)
US864360A 1968-10-11 1969-10-07 Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod Expired - Lifetime US3601569A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681802524 DE1802524B1 (de) 1968-10-11 1968-10-11 Vorrichtung zum tiegelfreien Zonenschmelzen eines kristallinen Stabes,insbesondere Halbleiterstabes

Publications (1)

Publication Number Publication Date
US3601569A true US3601569A (en) 1971-08-24

Family

ID=5710285

Family Applications (1)

Application Number Title Priority Date Filing Date
US864360A Expired - Lifetime US3601569A (en) 1968-10-11 1969-10-07 Device for crucible-free or floating-zone melting a crystalline rod, especially a semiconductor rod

Country Status (9)

Country Link
US (1) US3601569A (ja)
JP (1) JPS4817561B1 (ja)
AT (1) AT299129B (ja)
CH (1) CH520524A (ja)
DE (1) DE1802524B1 (ja)
FR (1) FR2020390A1 (ja)
GB (1) GB1240074A (ja)
NL (1) NL6913795A (ja)
SE (1) SE360277B (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898413A (en) * 1973-06-18 1975-08-05 Siemens Ag Induction heat coil arrangement
US4761528A (en) * 1986-06-03 1988-08-02 Commissariat A L'energie Atomique High frequency induction melting furnace
US4851628A (en) * 1988-02-18 1989-07-25 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Method for the crucible-free floating zone pulling of semiconductor rods and an induction heating coil therefor
US4942279A (en) * 1987-05-25 1990-07-17 Shin-Etsu Handotai Co., Ltd. RF induction heating apparatus for floating-zone melting
EP1968355A1 (de) * 2007-03-08 2008-09-10 HÜTTINGER Elektronik GmbH + Co. KG Induktionsspule und Vorrichtung zum induktiven Erwärmen von Werkstücken

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3625669A1 (de) * 1986-07-29 1988-02-04 Siemens Ag Induktionsheizer zum tiegelfreien zonenschmelzen
GB2478275A (en) * 2010-02-24 2011-09-07 Tubefuse Applic V O F Induction heating apparatus and method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2408229A (en) * 1943-04-30 1946-09-24 Rca Corp Electrical heating apparatus
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
US2814707A (en) * 1954-11-12 1957-11-26 Rca Corp Induction heating device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1152269B (de) * 1959-04-28 1963-08-01 Siemens Ag Einrichtung zum tiegelfreien Zonenschmelzen eines Halbleiterstabes in einer Vakuumkammer
NL302045A (ja) * 1963-01-08
DE1188043B (de) * 1962-12-24 1965-03-04 Siemens Ag Vorrichtung zum tiegelfreien Zonenschmelzen von Halbleitermaterial

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2408229A (en) * 1943-04-30 1946-09-24 Rca Corp Electrical heating apparatus
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
US2814707A (en) * 1954-11-12 1957-11-26 Rca Corp Induction heating device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898413A (en) * 1973-06-18 1975-08-05 Siemens Ag Induction heat coil arrangement
US4761528A (en) * 1986-06-03 1988-08-02 Commissariat A L'energie Atomique High frequency induction melting furnace
US4942279A (en) * 1987-05-25 1990-07-17 Shin-Etsu Handotai Co., Ltd. RF induction heating apparatus for floating-zone melting
US4851628A (en) * 1988-02-18 1989-07-25 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Method for the crucible-free floating zone pulling of semiconductor rods and an induction heating coil therefor
EP1968355A1 (de) * 2007-03-08 2008-09-10 HÜTTINGER Elektronik GmbH + Co. KG Induktionsspule und Vorrichtung zum induktiven Erwärmen von Werkstücken

Also Published As

Publication number Publication date
GB1240074A (en) 1971-07-21
FR2020390A1 (ja) 1970-07-10
NL6913795A (ja) 1970-04-14
DE1802524B1 (de) 1970-06-04
AT299129B (de) 1972-06-12
SE360277B (ja) 1973-09-24
CH520524A (de) 1972-03-31
JPS4817561B1 (ja) 1973-05-30

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