US3563202A - Mobile vbaporative firing source - Google Patents

Mobile vbaporative firing source Download PDF

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Publication number
US3563202A
US3563202A US836334A US3563202DA US3563202A US 3563202 A US3563202 A US 3563202A US 836334 A US836334 A US 836334A US 3563202D A US3563202D A US 3563202DA US 3563202 A US3563202 A US 3563202A
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US
United States
Prior art keywords
vessels
transporting
web
heating
boats
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US836334A
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English (en)
Inventor
Thomas Mackrael
William E Welch
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Pennwalt Corp
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Pennwalt Corp
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Publication date
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Definitions

  • This invention relates to an apparatus for evaporation of materials upon a substrate, and more particularly relates to a system in which uniform deposition may be effected upon a continuously moving strip or web.
  • the invention is especially advantageous in the evaporation of granular, crystalline or noncontinuous evaporates and in producing relatively heavy depositions thereof.
  • Another object of this invention is to provide an evaporation system for continuously moving substrates wherein the rate of deposition may be easily adjusted.
  • Another object of this invention is to provide a continuous system for evaporation of discrete particulate materials.
  • Another object of this invention is to provide a continuous evaporative system in which a precise measured amount of material is fed to the firing source.
  • Yet another object of this invention is to provide an apparatus for evaporating a material to be deposited on a substrate and for controlling the temperature of operation during the entire deposition process.
  • Still another object of this invention is to provide a continuous evaporative system in which the speed of operations can be precisely controlled.
  • Yet still another object of this invention is to provide a continuous evaporative system in which the need to break vacuum for refilling of the firing source is completely eliminated.
  • FIG. 1 is a perspective view, and partly broken away, of a mobile evaporative firing source embodying this invention.
  • FIG. 2 is a sectional view taken along lines 2-2 of FIG. 1.
  • FIG. 3 is a sectional view taken along lines 3-3 of FIG. 2.
  • FIG. 4 is a fragmentary perspective view of an evaporation boat embodied in this invention.
  • FIG. 5 is a sectional view taken along lines 5-5 of FIG. 4.
  • the present apparatus includes a web drive roll assembly, generally designated as A, for transporting the strip substrate through a vacuum chamber B, and a conveyor, generally designated as C, for carrying a plurality of evaporation boats C1 in the same direction as the substrate.
  • the conveyor C is intermittently actuated and moves at a different and usually slower speed from that of the substrate being conveyed by the roll assembly A.
  • the boats Cl containing material to be evaporated pass over and dwell upon longitudinally spaced heating elements D to heat the material to evaporation temperature and deposit it on the strip substrate.
  • the boats C1 are charged with a measured amount of material which is metered from a dispensing hopper E in timed disposition with boat position.
  • the roll assembly A constitutes any suitable carrier for transporting a continuous strip or web 12 to be coated through the chamber B.
  • the web 12 may be, for example, plastic film or metal foil 48 inches wide and dispensed from a roll outside the chamber.
  • Conventional idler rollers l4, l6, 18, 20 and 22 direct the web 12 in a prescribed path through the chamber, the drive or takeup mechanism (not shown) conveying the strip or web at a fixed speed of perhaps 10 to feet per minute. As can be seen, the underside of the web 12 is exposed for deposition.
  • the vacuum chamber B is quite conventional and may consist of a steel structure capable of withstanding, when evacuated, an external pressure approximating one atmosphere.
  • the conduit 24 couples the interior of the chamber with an evacuation pump or system which is capable of reducing the internal pressure in the range of a few microns.
  • Suitable seals are provided at slot 26 where the web 12 enters the chamber B and at exit opening 28.
  • a door (not shown) is also provided for access to the chamber B during maintenance and startup operations. Continuous or semicontinuous operations can be accommodated.
  • the conveyor C comprises a pair of laterally spaced endless chains 30 and 36 which are adapted to be straddled by the boats Cl.
  • a pair of side-by-side conveyors C are demonstrated to illustrate a suitable arrangement for deposition of extremely wide sheets 12.
  • Drive sprockets 38 are coupled to main shaft 40 through a Geneva drive mechanism 42 whereby motorreducer drive unit 44 will produce intermittent stop-and-go motion of the conveyor C.
  • Idler sprockets 45 mounted on suitably journaled shaft 46 support the distal ends of the chains and takeup units (not shown) tension them so that the boats Cl do not sag.
  • the boats C1 are preferably made of quartz although other refractory materials, including boron nitride may be satisfactory.
  • Each boat Cl is in the form of a flat bottomed, generally rectangular vessel 48 having ears or lugs 50 outwardly exte nding from both ends.
  • the lugs 50 are secured to inwardly turned fingers 52 on opposing chains by means of bolts 54. See FIGS. 3, 4 and 5.
  • the boats C1 are thereby carried in an upright position at the upper level of the chains and inverted at the lower or return level.
  • Each boat C1 is approximately 3 inches wide, 1 inch deep, and perhaps 24 to 30 inches long.
  • the boats are longitudinally spaced from each other by approximately 1 inch.
  • the heaters D are strip elements which may be fabricated from tungsten ribbon, for example.
  • the strip elements have a width dimension just under the width of a boat and are spaced on the same centers.
  • the first heating element DI adjacent to the metering hopper E is operated at the highest temperature, l,300 F. for example in the case of evaporation of zinc.
  • the two intermediate heaters D2 and D3 may operate at 1,000 F and the most distal heater D4 at 800 F. Such an arrangement permits an initially peaked temperature just as soon as a newly filled boat C1 passes beyond water cooled barrier or shield 58.
  • the operation of the motor-drive unit 44 through Geneva drive 42 produces an intermittent stop-and-go motion of the boats CI in the same direction as the moving web 12.
  • the speed of the conveyors C is in the neighborhood of 2 feet per minute and having approximately a 5 second motion with a 30 second dwell period. During the dwell period, each of the boats C1 on the upper chain level beyond the shield 58 lies immediately spaced above a corresponding heating element D and hides the same.
  • the boats C1 are successively charged with material from the metering dispenser E which may contain powdered zinc, for example.
  • the dispenser E includes a hopper 60 which may be divided into multiple sections to allow dispensing of material for various web widths.
  • a rotatable star wheel 62 is journaled at the lower portion of each hopper 60 whereby a measured amount of evaporative powder can be dispensed into a boat stationed therebelow. Referring to FIGS. 1 and 3, it may be seen that the shaft of the star wheel 62 has a sprocket 64 which is coupled to drive shaft 40 through chain 66 and sprocket 6h. The rotation of the star wheel dispenser 62 is in timed relation with the movement of the boats.
  • the star wheel 62 dispenses a precise quantity of powder into its vessel 48.
  • Vibrator 70 coupled to the lower portion of hopper 60 insures that the powder therein and in the star wheel 62 are kept in flowing motion to prevent clumping or bridging.
  • a brush 72 suspended from the rear wall of the shield 53 evens out the level of powdered material charged into the boat.
  • the powdered material is dumped into the hoppers 60 from outside the vacuum chamber B.
  • a bulk charger arrangement (not shown) may be employed with a vacuum valve to maintain the low pressure in the firing chamber B during loading of the chargers. When the chargers are filled the lid is closed. High-low" signaling devices may be used to indicate when the hoppers 60 require additional material or that sufficient loading has occurred.
  • the powdered material is fed into the metering drum or star vheel 62 which is timed to coordinate the position of the boat being loaded with the loading station.
  • Each boat C l which has been filled passes under the water-cooled shield 58 and then passes over the high temperature heater D1 which is peaked to insure immediate evaporation just-as soon as that particular boat enters the firing chamber.
  • a preheater D may be incorporated behind the barrier 58 so that the temperature of the material in the boat may be elevated somewhat even before that boat is in place under the substrate 12.
  • the temperature of the boats can be accurately controlled by individual control of the respective heater strips D.
  • the lineal speed of the substrate 12 may be controlled by way of the web drive A, and the speed of the boat conveyor C can be correlated with that of the substrate. Accordingly, the thickness and uniformity of the coating can be controlled to a very fine degree.
  • the continuous operation of the firing source eliminates the need to shut down the vacuum chamber.
  • Apparatus for continuously evaporating material into a moving web comprising:
  • conveying means for carrying the web through the vacuum chamber at a predetermined speed
  • said means for heating comprises a plurality of longitudinally spaced stationary heating elements oriented below said means for transporting.
  • the apparatus of claim 5 including means for successively loading the vessels with the material prior to subjecting the vessels to said means for heating.
  • said means for successively loading comprises a metering dispenser in timed disposition with said means for trans orting.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
US836334A 1969-06-25 1969-06-25 Mobile vbaporative firing source Expired - Lifetime US3563202A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83633469A 1969-06-25 1969-06-25

Publications (1)

Publication Number Publication Date
US3563202A true US3563202A (en) 1971-02-16

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US (1) US3563202A (enExample)
DE (1) DE2030688A1 (enExample)
FR (1) FR2052433A5 (enExample)
NL (1) NL7007310A (enExample)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3908585A (en) * 1974-04-25 1975-09-30 Goodyear Tire & Rubber Apparatus using super-heated vapor for drying solvent-treated tire cord fabric
US4023523A (en) * 1975-04-23 1977-05-17 Xerox Corporation Coater hardware and method for obtaining uniform photoconductive layers on a xerographic photoreceptor
US4748313A (en) * 1985-08-23 1988-05-31 Elektroschmelzwerk Kempten Gmbh Apparatus by the continuous vaporization of inorganic compositions by means of a photon-generating thermal source of radiation heat
US4776299A (en) * 1986-05-15 1988-10-11 The United States Of America As Represented By The United States Department Of Energy Source replenishment device for vacuum deposition
DE3842506A1 (de) * 1987-12-17 1989-06-29 Toyo Ink Mfg Co Verfahren und einrichtung zum herstellen von ablagerungsfilmen
US4880960A (en) * 1987-03-06 1989-11-14 Centre National D'etudes Spatiales Continuous vacuum evaporation device for metal
US5179622A (en) * 1990-05-19 1993-01-12 Leybold Aktiengesellschaft Series evaporator for vacuum vapor-deposition apparatus
US5716206A (en) * 1995-01-05 1998-02-10 Sumitomo Wiring Systems, Ltd. Apparatus for heating a wire connection or connector
US20050268854A1 (en) * 2001-03-12 2005-12-08 Semiconductor Energy Laboratory Co., Ltd., A Japan Corporation Film forming apparatus and film forming method
US20090061090A1 (en) * 2006-05-19 2009-03-05 Ulvac, Inc. Vapor deposition apparatus for an organic vapor deposition material and a method for producing an organic film
EP2402478A1 (en) * 2010-07-02 2012-01-04 PrimeStar Solar, Inc Apparatus and methods of forming a conductive transparent oxide film.
JP2012087408A (ja) * 2010-10-18 2012-05-10 Samsung Mobile Display Co Ltd 連続蒸着が可能な薄膜蒸着装置、並びにその薄膜蒸着装置に使われるマスク・ユニット及びクルーシブル・ユニット
US8241938B2 (en) 2010-07-02 2012-08-14 Primestar Solar, Inc. Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
WO2013049550A1 (en) * 2011-09-30 2013-04-04 Primestar Solar, Inc. In-line deposition system and process for deposition of a thin film layer
TWI425105B (zh) * 2011-09-20 2014-02-01 Ind Tech Res Inst 蒸鍍裝置以及蒸鍍機台
EP2775009A2 (en) 2010-10-18 2014-09-10 Samsung Display Co., Ltd. Crucible unit for a thin film deposition apparatus
US10669621B2 (en) * 2016-08-24 2020-06-02 Toshiba Memory Corporation Vaporization system

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2916080C2 (de) * 1979-04-20 1984-12-06 Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev Verfahren zum Molekular-Aufdampfen von Halbleiterschichten und Vorrichtung zur Durchführung dieses Verfahrens
CA1219547A (en) * 1983-04-04 1987-03-24 Prem Nath Apparatus for and method of continuously depositing a highly conductive, highly transmissive film
DE4027034C1 (enExample) * 1990-08-27 1991-09-12 Leybold Ag, 6450 Hanau, De
DE102004047938B4 (de) * 2004-10-01 2008-10-23 Leybold Optics Gmbh Vorrichtung für die Verdampferbeschichtung eines bandförmigen Substrates

Cited By (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3908585A (en) * 1974-04-25 1975-09-30 Goodyear Tire & Rubber Apparatus using super-heated vapor for drying solvent-treated tire cord fabric
US4023523A (en) * 1975-04-23 1977-05-17 Xerox Corporation Coater hardware and method for obtaining uniform photoconductive layers on a xerographic photoreceptor
US4748313A (en) * 1985-08-23 1988-05-31 Elektroschmelzwerk Kempten Gmbh Apparatus by the continuous vaporization of inorganic compositions by means of a photon-generating thermal source of radiation heat
US4776299A (en) * 1986-05-15 1988-10-11 The United States Of America As Represented By The United States Department Of Energy Source replenishment device for vacuum deposition
US4880960A (en) * 1987-03-06 1989-11-14 Centre National D'etudes Spatiales Continuous vacuum evaporation device for metal
DE3842506A1 (de) * 1987-12-17 1989-06-29 Toyo Ink Mfg Co Verfahren und einrichtung zum herstellen von ablagerungsfilmen
US5179622A (en) * 1990-05-19 1993-01-12 Leybold Aktiengesellschaft Series evaporator for vacuum vapor-deposition apparatus
US5716206A (en) * 1995-01-05 1998-02-10 Sumitomo Wiring Systems, Ltd. Apparatus for heating a wire connection or connector
US20050268854A1 (en) * 2001-03-12 2005-12-08 Semiconductor Energy Laboratory Co., Ltd., A Japan Corporation Film forming apparatus and film forming method
US7481889B2 (en) * 2001-03-12 2009-01-27 Semiconductor Energy Laboratory Co., Ltd. Film forming apparatus and film forming method
US20090061090A1 (en) * 2006-05-19 2009-03-05 Ulvac, Inc. Vapor deposition apparatus for an organic vapor deposition material and a method for producing an organic film
TWI470097B (zh) * 2006-05-19 2015-01-21 愛發科股份有限公司 有機蒸鍍材料用蒸鍍裝置以及有機薄膜之製造方法
US8308866B2 (en) * 2006-05-19 2012-11-13 Ulvac, Inc. Vapor deposition apparatus for an organic vapor deposition material and a method for producing an organic film
EP2402478A1 (en) * 2010-07-02 2012-01-04 PrimeStar Solar, Inc Apparatus and methods of forming a conductive transparent oxide film.
US8241938B2 (en) 2010-07-02 2012-08-14 Primestar Solar, Inc. Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
US8236601B2 (en) 2010-07-02 2012-08-07 Primestar Solar, Inc. Apparatus and methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
EP2441856A3 (en) * 2010-10-18 2012-06-20 Samsung Mobile Display Co., Ltd. Thin film deposition apparatus
CN102453871A (zh) * 2010-10-18 2012-05-16 三星移动显示器株式会社 薄膜沉积设备以及掩模单元和坩埚单元
EP2775009A2 (en) 2010-10-18 2014-09-10 Samsung Display Co., Ltd. Crucible unit for a thin film deposition apparatus
EP2775009A3 (en) * 2010-10-18 2014-11-12 Samsung Display Co., Ltd. Crucible unit for a thin film deposition apparatus
JP2012087408A (ja) * 2010-10-18 2012-05-10 Samsung Mobile Display Co Ltd 連続蒸着が可能な薄膜蒸着装置、並びにその薄膜蒸着装置に使われるマスク・ユニット及びクルーシブル・ユニット
CN102453871B (zh) * 2010-10-18 2015-08-05 三星显示有限公司 薄膜沉积设备以及掩模单元和坩埚单元
JP2016121404A (ja) * 2010-10-18 2016-07-07 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 連続蒸着が可能な薄膜蒸着装置、並びにその薄膜蒸着装置に使われるマスク・ユニット及びクルーシブル・ユニット
TWI425105B (zh) * 2011-09-20 2014-02-01 Ind Tech Res Inst 蒸鍍裝置以及蒸鍍機台
WO2013049550A1 (en) * 2011-09-30 2013-04-04 Primestar Solar, Inc. In-line deposition system and process for deposition of a thin film layer
US8673777B2 (en) 2011-09-30 2014-03-18 First Solar, Inc. In-line deposition system and process for deposition of a thin film layer
CN103958725A (zh) * 2011-09-30 2014-07-30 初星太阳能公司 在线淀积系统和用于淀积薄膜层的过程
CN103958725B (zh) * 2011-09-30 2016-04-20 初星太阳能公司 在线淀积系统和用于淀积薄膜层的过程
US10669621B2 (en) * 2016-08-24 2020-06-02 Toshiba Memory Corporation Vaporization system

Also Published As

Publication number Publication date
NL7007310A (enExample) 1970-12-29
DE2030688A1 (de) 1971-01-14
FR2052433A5 (enExample) 1971-04-09

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