US20150014177A1 - Method for producing matt copper deposits - Google Patents

Method for producing matt copper deposits Download PDF

Info

Publication number
US20150014177A1
US20150014177A1 US14/374,000 US201214374000A US2015014177A1 US 20150014177 A1 US20150014177 A1 US 20150014177A1 US 201214374000 A US201214374000 A US 201214374000A US 2015014177 A1 US2015014177 A1 US 2015014177A1
Authority
US
United States
Prior art keywords
electrolyte
group
deposition
matte
copper coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US14/374,000
Other languages
English (en)
Inventor
Stefan Kretschmer
Philip Hartmann
Bernd Roelfs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Atotech Deutschland GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Assigned to ATOTECH DEUTSCHLAND GMBH reassignment ATOTECH DEUTSCHLAND GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ROELFS, BERND, HARTMANN, PHILIP, KRETSCHMER, STEFAN
Publication of US20150014177A1 publication Critical patent/US20150014177A1/en
Assigned to BARCLAYS BANK PLC, AS COLLATERAL AGENT reassignment BARCLAYS BANK PLC, AS COLLATERAL AGENT SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ATOTECH DEUTSCHLAND GMBH, ATOTECH USA INC
Assigned to ATOTECH USA, LLC, ATOTECH DEUTSCHLAND GMBH reassignment ATOTECH USA, LLC RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Abandoned legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/627Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance

Definitions

  • the present invention relates to a method for deposition of matte copper deposits in the field of decorative coatings.
  • Matte copper coatings in the field of decorative coatings are required as a surface finish for e.g. sanitary equipment.
  • Another application of matte copper coatings is to replace matte nickel layers (“satin nickel”) as an intermediate layer in decorative multilayer coating systems which becomes more demanding due to the toxicity of nickel.
  • a homogeneous matte appearance is required for decorative metal layers.
  • the homogeneity of the matte appearance can easily be achieved on substrates which have no complex shape because the current density distribution during electroplating of matte copper layers is within a narrow range. However, in cases where the substrate to be coated has a complex shape, the current density during electroplating is within a wide range.
  • Typical substrates having a complex shape which are to be coated with a matte copper coating are for example shower heads and automotive interior parts.
  • matte copper layers Another requirement for matte copper layers is that their matte level should be adjustable in order to be able to manufacture copper layers having different matte levels.
  • Plating bath compositions comprising at least one polyglycerine compound for producing matte copper layers during manufacture of printed circuit boards are disclosed in US 2004/0020783 A1. It is neither possible to obtain a homogeneously matte copper deposit on a substrate having a complex shape nor to adjust the matte level of such a copper deposit when using the electrolyte disclosed therein.
  • the copper coatings obtained by the method according to the present invention have a homogeneous matte appearance on substrates having a complex shape. Furthermore, the matte appearance of the copper coating can be adjusted during deposition of the individual copper layers.
  • the method for deposition of a matte copper coating comprises deposition of two individual copper layers onto a substrate from two individual copper electrolytes which are herein denoted first electrolyte from which the first copper layer is deposited and second electrolyte from which the second copper layer is deposited onto the first copper layer.
  • the first electrolyte comprises a source of copper ions, at least one acid and at least one polyether compound.
  • the first electrolyte does not contain an organic compound comprising divalent sulfur, e.g., sulfides, disulfides, thiols, and derivatives thereof.
  • Copper ions are added to the first electrolyte in the form of a water-soluble copper salt or an aqueous solution thereof.
  • the source of copper ions is selected from copper sulfate and copper methane sulfonate.
  • the concentration of copper ions in the first electrolyte preferably ranges from 15 to 75 g/l, more preferably from 40 to 60 g/l.
  • the at least one acid in the first electrolyte is selected from the group comprising sulfuric acid, fluoroboric acid and methane sulfonic acid.
  • the concentration of the at least one acid in the first electrolyte preferably ranges from 20 to 400 g/l and more preferably from 40 to 300 g/l.
  • sulfuric acid is used as the acid, it is preferably added in form of a 50 to 96 wt.-% solution. More preferably, sulphuric acid is added to the first electrolyte as a 50 wt.-% aqueous solution of sulfuric acid.
  • the at least one polyether compound in the first electrolyte is selected from the group consisting of polyalkylene ethers and polyglycerine compounds.
  • Suitable polyalkylene ethers are selected from the group consisting of polyethylene glycol, polypropylene glycol, stearylalcoholpolyglycolether, nonylphenolpolyglycolether, octanolpolyalkylenglcolether, octanediol-bis(polyalkylenglycolether), poly(ethylenglycol-ran-propylenglycol), poly(ethylenglycol)-block-poly(propylenglycol)-block-poly(ethylenglycol) and poly-(propylenglycol)-block-poly(ethylenglycol)-block-poly(propylenglycol).
  • Suitable polyglycerine compounds are selected from the group consisting of poly(1,2,3-propantriol), poly(2,3-epoxy-1-propanol) and derivatives thereof which are represented by formulae (1), (2) and (3):
  • n is an integer from 1 to 80, preferably from 2 to 30;
  • R 6 , R 7 and R 8 are identical or different and are selected from the group consisting of hydrogen, alkyl, acyl, phenyl and benzyl, wherein alkyl preferably is linear or branched C 1 to C 18 alkyl and acyl preferably is R 10 —CO, wherein R 10 is linear or branched C 1 to C 18 alkyl, phenyl or benzyl; alkyl phenyl and benzyl in formula (1) may be substituted;
  • R 6 , R 7 , R 8 and R 9 are identical or different and are selected from the group consisting of hydrogen, alkyl, acyl, phenyl and benzyl, wherein alkyl preferably is linear or branched C 1 to C 18 alkyl and acyl preferably is R 10 —CO, wherein R 10 is linear or branched C 1 to C 18 alkyl, phenyl or benzyl; alkyl phenyl and benzyl in formula (2) may be substituted;
  • n is an integer from 1 to 80; preferably from 2 to 20; and wherein R 6 , R 7 are selected from the group consisting of hydrogen, alkyl, acyl, phenyl and benzyl, wherein alkyl preferably is linear or branched C 1 to C 18 alkyl and acyl preferably is R 10 —CO, wherein R 10 is linear or branched C 1 to C 18 alkyl, phenyl or benzyl; alkyl phenyl and benzyl in formula (3) may be substituted.
  • Polyglycerine compounds are produced according to known methods. Indications on the conditions of production are disclosed in the following publications for example: Cosmet. Sci. Technol. Ser., glycerines, page 106 and U.S. Pat. No. 3,945,894. Further details on the syntheses of polyglycerine compounds according to formulae (1), (2) and (3) are disclosed in US 2004/0020783 A1.
  • the at least one polyether compound in the first electrolyte is selected from compounds according to formulae (1), (2) and (3).
  • the concentration of the at least one polyether compound or all polyether compounds together in case more than one polyether compound is added preferably ranges from 0.005 g/l to 20 g/l, more preferably from 0.01 g/l to 5 g/l.
  • the temperature of the first electrolyte is preferably adjusted to a value in the range of from 30 to 60° C., more preferably from 40 to 50° C.
  • the current density applied to the substrate during copper deposition from the first aqueous electrolyte preferably ranges from 0.5 to 5 A/dm 2 , more preferably from 1 to 3 A/dm 2 .
  • the substrate is rinsed with water before depositing the second copper layer from the second electrolyte.
  • Copper ions are added to the second electrolyte as a water-soluble copper salt or an aqueous solution thereof.
  • the source of copper ions is selected from copper sulfate and copper methane sulfonate.
  • the concentration of copper ions in the second electrolyte preferably ranges from 15 to 75 g/l, more preferably from 40 to 60 g/l.
  • the at least one acid in the second electrolyte is selected from the group comprising sulfuric acid, fluoroboric acid and methane sulfonic acid.
  • the concentration of the at least one acid in the second electrolyte preferably ranges from 20 to 400 g/l and more preferably from 40 to 300 g/l.
  • sulfuric acid is used as the acid, it is added in form of a 50 to 96 wt.-% solution.
  • sulfuric acid is added as a 50 wt.-% aqueous solution of sulfuric to the second electrolyte.
  • the second electrolyte further comprises a first water-soluble sulfur-containing additive and a second water-soluble sulfur-containing additive.
  • the first water-soluble sulfur-containing compound is an alkyl sulfonic acid derivative.
  • the alkyl sulfonic acid derivative comprises divalent sulfur.
  • the second water-soluble sulfur-containing compound is an aromatic sulfonic acid derivative.
  • the aromatic sulfonic acid derivative comprises divalent sulfur.
  • the first sulfur-containing additive is more preferably selected from the group consisting of compounds according to formulae (4) and (5):
  • R 1 is selected from the group consisting of hydrogen, methyl, ethyl, propyl, butyl, lithium, sodium, potassium and ammonium, more preferably R 1 is selected from the group consisting of hydrogen, methyl, ethyl, propyl, sodium and potassium; n is an integer from 1 to 6, more preferably n is an integer from 2 to 4; R 2 is selected from the group consisting of hydrogen, methyl, ethyl, propyl, butyl, lithium, sodium, potassium and ammonium, more preferably, R 2 is selected from the group consisting of hydrogen, sodium and potassium; R 3 is selected from the group consisting of hydrogen, methyl, ethyl, propyl, butyl, lithium, sodium, potassium and ammonium, more preferably R 3 is selected from the group consisting of hydrogen, sodium, potassium and m is an integer from 1 to 6, more preferably m is an integer from 2 to 4.
  • the concentration of the first sulfur-containing additive in the second electrolyte preferably ranges from 0.0001 to 0.05 g/l, more preferably from 0.0002 to 0.025 g/l.
  • the second sulfur-containing additive in the second electrolyte is more preferably selected from the group consisting of compounds according to formulae (6) and (7):
  • R 4 is selected from the group consisting of
  • X is selected from the group consisting of
  • y is an integer from 1 to 4 and M is selected from the group consisting of hydrogen, sodium, potassium and ammonium;
  • R 5 is selected from the group consisting of hydrogen, SH and SO 3 M and M is selected from the group consisting of hydrogen, sodium, potassium and ammonium.
  • the second sulfur-containing additive is selected from compounds according to formula (6).
  • the concentration of the second sulfur-containing additive in the second electrolyte preferably ranges from 0.005 to 1 g/l, more preferably from 0.01 to 0.25 g/l.
  • the second electrolyte further comprises one or more carrier additive selected from the group consisting of polyvinylalcohol, carboxymethylcellulose, polyethylene glycol, polypropylene glycol, stearic acid polyglycolester, alkoxylated naphtoles, oleic acid polyglycolester, stearylalcoholpolyglycolether, nonylphenolpolyglycolether, octanolpolyalkylenglycolether, octanediol-bis(polyalkylenglycolether), poly(ethylenglycol-ran-propylenglycol), poly(ethylenglycol)-block-poly(propylenglycol)-block-poly(ethylenglycol) and poly(propylenglycol)-block-poly(ethylenglycol)-block-poly(propylenglycol).
  • carrier additive selected from the group consisting of polyvinylalco
  • the concentration of the optional carrier additive in the second electrolyte preferably ranges from 0.005 g/l to 5 g/l, more preferably from 0.01 g/l to 3 g/l.
  • the temperature of the second electrolyte is preferably adjusted to a value in the range of from 20 to 50° C., most preferably of from 25 to 30° C.
  • the current density applied to the substrate during copper deposition from the second aqueous electrolytes preferably ranges from 0.5 to 5 A/dm 2 , more preferably from 1 to 3 A/dm 2 .
  • the matte level of the copper surface may be tailored by adjusting the thicknesses of the first and second copper layer by simple experimentation. A more matte appearance may be achieved with a thinner second copper layer, whereas a less matte appearance may be achieved with a thicker second copper layer.
  • ABS acrylonitrile-butadiene-styrol-copolymer
  • brass substrates having a complex shape were used throughout all examples.
  • ABS substrates were etched in chromic acid, activated with a palladium containing colloid and metallised by electroless plating of nickel from an acidic hypophosphite-based electrolyte prior to copper deposition.
  • the brass substrates were degreased prior to deposition of copper.
  • a homogenous, strongly matte copper surface was obtained which is too matte for decorative applications.
  • the copper surface obtained has a homogenous technical gloss which is not desired for decorative applications.
  • a first layer of copper was deposited onto ABS and brass substrates having a complex shape from the electrolyte used in example 2. Thereon, a second copper layer was deposited from the electrolyte used in example 1.
  • a homogenous, strongly matte copper surface was obtained which is too matte for decorative applications.
  • a first copper layer was deposited onto ABS and brass substrates having a complex shape from the electrolyte used in example 1.
  • the second electrolyte did not contain a second sulfur-containing additive selected from compounds according to formulae (6) and (7).
  • the resulting copper surface has a non-homogeneous matte appearance which is not acceptable for decorative applications.
  • a first copper layer was deposited onto ABS and brass substrates having a complex shape from the electrolyte used in example 1.
  • a second copper layer was deposited thereon from a second electrolyte comprising 80 g/l CuSO 4 .5H 2 O, 240 g/l sulfuric acid, and 80 mg/l of a sulfur-containing additive according to formula (6) with
  • the second electrolyte did not contain a first sulfur-containing additive selected from compounds according to formulae (4) and (5).
  • the copper surface obtained has a matte appearance with burnt areas (shady black appearance) which is not acceptable for decorative applications.
  • the first copper layer was deposited onto the ABS and brass substrates from the electrolyte used in Example 1.
  • the second copper layer was deposited thereon from the electrolyte used in Example 2.
  • the copper surface obtained has a homogeneous matte appearance which is desired for decorative applications.
  • the first copper layer was deposited from a first electrolyte comprising 80 g/l CuSO 4 .5H 2 O, 240 g/l sulfuric acid, and 1 g/l polyethylene glycol.
  • the second copper layer was deposited thereon from the electrolyte used in Example 2.
  • the copper surface obtained has a homogeneous matte appearance which is desired for decorative applications.
  • Example 1 Example 2* Example 3* Example 4* Example 5* Example 6
  • Example 7 First Containing none Containing Containing Containing Containing Containing Containing Containing electrolyte mix of additives with mix of mix of mix of polyethyleneglycol; polyglycines divalent sulfur polyglycines polyglycines No additive according to according to according to according to with divalent formula (1); formula (5) formula (1); formula (1); formula (1); sulfur No additive and (6) No additive No additive No additive with divalent with divalent with divalent sulfur sulfur sulfur sulfur sulfur sulfur sulfur Second none Containing Containing Containing Containing Containing Containing Containing electrolyte additives with mix of additive with additive with additives with additives with divalent sulfur polyglycines divalent sulfur divalent sulfur divalent sulfur according to according to according to according to according to formula (5) formula (1); formula (5); formula (6); formula formula (1); formula (5); formula (6); formula (1);

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
US14/374,000 2012-01-25 2012-11-27 Method for producing matt copper deposits Abandoned US20150014177A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP12152390.6A EP2620529B1 (en) 2012-01-25 2012-01-25 Method for producing matt copper deposits
EP12152390.6 2012-01-25
PCT/EP2012/073688 WO2013110373A2 (en) 2012-01-25 2012-11-27 Method for producing matt copper deposits

Publications (1)

Publication Number Publication Date
US20150014177A1 true US20150014177A1 (en) 2015-01-15

Family

ID=47226182

Family Applications (1)

Application Number Title Priority Date Filing Date
US14/374,000 Abandoned US20150014177A1 (en) 2012-01-25 2012-11-27 Method for producing matt copper deposits

Country Status (11)

Country Link
US (1) US20150014177A1 (zh)
EP (1) EP2620529B1 (zh)
JP (1) JP6086930B2 (zh)
KR (1) KR101979975B1 (zh)
CN (1) CN104080955B (zh)
BR (1) BR112014018114B1 (zh)
CA (1) CA2862141C (zh)
ES (1) ES2478267T3 (zh)
PL (1) PL2620529T3 (zh)
TW (1) TWI526582B (zh)
WO (1) WO2013110373A2 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022047480A1 (en) * 2020-08-28 2022-03-03 Macdermid Enthone Inc. Compositions and methods for the electrodeposition of nanotwinned copper
US11555252B2 (en) 2018-11-07 2023-01-17 Coventya, Inc. Satin copper bath and method of depositing a satin copper layer
WO2023014524A1 (en) * 2021-08-05 2023-02-09 Macdermid Enthone Inc. Compositions and methods for the electrodeposition of nanotwinned copper

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4009087A (en) * 1974-11-21 1977-02-22 M&T Chemicals Inc. Electrodeposition of copper
US6129830A (en) * 1996-12-13 2000-10-10 Atotech Deutschland Gmbh Process for the electrolytic deposition of copper layers
US20020043467A1 (en) * 2000-10-13 2002-04-18 Shipley Company, L.L.C. Electrolyte
US20020074231A1 (en) * 2000-10-13 2002-06-20 Shipley Company, L.L.C. Electroplating method
US20040020783A1 (en) * 2000-10-19 2004-02-05 Gonzalo Urrutia Desmaison Copper bath and methods of depositing a matt copper coating
US20040154926A1 (en) * 2002-12-24 2004-08-12 Zhi-Wen Sun Multiple chemistry electrochemical plating method
US20050045485A1 (en) * 2003-09-03 2005-03-03 Taiwan Semiconductor Manufacturing Co. Ltd. Method to improve copper electrochemical deposition

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ZA739310B (en) * 1972-12-14 1974-11-27 M & T Chemicals Inc Electrode position of copper
US3945894A (en) 1975-04-11 1976-03-23 Oxy Metal Industries Corporation Bath composition and method of electrodepositing utilizing the same
JPH04139787A (ja) * 1990-09-28 1992-05-13 Fujitsu Ltd プリント配線板の電解メッキ方法
DE4324995C2 (de) * 1993-07-26 1995-12-21 Demetron Gmbh Cyanidisch-alkalische Bäder zur galvanischen Abscheidung von Kupfer-Zinn-Legierungsüberzügen
JP2915305B2 (ja) * 1994-11-04 1999-07-05 有限会社カネヒロ・メタライジング つや消しメッキ方法および検針器対応つや消しメッキ方法
DE19540011C2 (de) * 1995-10-27 1998-09-10 Lpw Chemie Gmbh Verfahren zur galvanischen Abscheidung von blendfreien Nickel- oder Nickellegierungsniederschlägen
DE10354760A1 (de) * 2003-11-21 2005-06-23 Enthone Inc., West Haven Verfahren zur Abscheidung von Nickel und Chrom(VI)freien metallischen Mattschichten
EP2143828B1 (en) * 2008-07-08 2016-12-28 Enthone, Inc. Electrolyte and method for the deposition of a matt metal layer
DE102008033174B3 (de) * 2008-07-15 2009-09-17 Enthone Inc., West Haven Cyanidfreie Elektrolytzusammensetzung zur galvanischen Abscheidung einer Kupferschicht und Verfahren zur Abscheidung einer kupferhaltigen Schicht
JP5823665B2 (ja) * 2009-02-20 2015-11-25 株式会社大和化成研究所 めっき浴及びそれを用いためっき方法
KR101141923B1 (ko) * 2009-12-28 2012-05-07 한밭대학교 산학협력단 이중 전기도금법을 이용한 전기도금법 및 이로부터 형성되는 금속 박막

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4009087A (en) * 1974-11-21 1977-02-22 M&T Chemicals Inc. Electrodeposition of copper
US6129830A (en) * 1996-12-13 2000-10-10 Atotech Deutschland Gmbh Process for the electrolytic deposition of copper layers
US20020043467A1 (en) * 2000-10-13 2002-04-18 Shipley Company, L.L.C. Electrolyte
US20020074231A1 (en) * 2000-10-13 2002-06-20 Shipley Company, L.L.C. Electroplating method
US20040020783A1 (en) * 2000-10-19 2004-02-05 Gonzalo Urrutia Desmaison Copper bath and methods of depositing a matt copper coating
US20040154926A1 (en) * 2002-12-24 2004-08-12 Zhi-Wen Sun Multiple chemistry electrochemical plating method
US20050045485A1 (en) * 2003-09-03 2005-03-03 Taiwan Semiconductor Manufacturing Co. Ltd. Method to improve copper electrochemical deposition

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11555252B2 (en) 2018-11-07 2023-01-17 Coventya, Inc. Satin copper bath and method of depositing a satin copper layer
WO2022047480A1 (en) * 2020-08-28 2022-03-03 Macdermid Enthone Inc. Compositions and methods for the electrodeposition of nanotwinned copper
US11384446B2 (en) 2020-08-28 2022-07-12 Macdermid Enthone Inc. Compositions and methods for the electrodeposition of nanotwinned copper
US11873568B2 (en) 2020-08-28 2024-01-16 Macdermid Enthone Inc. Compositions and methods for the electrodeposition of nanotwinned copper
WO2023014524A1 (en) * 2021-08-05 2023-02-09 Macdermid Enthone Inc. Compositions and methods for the electrodeposition of nanotwinned copper

Also Published As

Publication number Publication date
BR112014018114A2 (zh) 2017-06-20
KR101979975B1 (ko) 2019-09-03
BR112014018114A8 (pt) 2017-07-11
JP2015510038A (ja) 2015-04-02
JP6086930B2 (ja) 2017-03-01
CA2862141A1 (en) 2013-08-01
WO2013110373A2 (en) 2013-08-01
BR112014018114B1 (pt) 2020-09-01
CA2862141C (en) 2020-03-10
TWI526582B (zh) 2016-03-21
WO2013110373A3 (en) 2014-04-24
TW201333274A (zh) 2013-08-16
PL2620529T3 (pl) 2014-09-30
KR20140119123A (ko) 2014-10-08
CN104080955A (zh) 2014-10-01
EP2620529A1 (en) 2013-07-31
ES2478267T3 (es) 2014-07-21
EP2620529B1 (en) 2014-04-30
CN104080955B (zh) 2016-03-23

Similar Documents

Publication Publication Date Title
US10006135B2 (en) Electroplating bath and method for producing dark chromium layers
JP5574912B2 (ja) スズめっき液
US20080314757A1 (en) Acid copper electroplating bath composition
US20130240368A1 (en) Low internal stress copper electroplating method
US10201097B2 (en) Polymers containing benzimidazole moieties as levelers
KR20170035783A (ko) 산성 구리 전기도금조 및 낮은 내부 응력 및 양호한 연성 구리 침착물을 전기도금하는 방법
TW201638395A (zh) 酸性銅電鍍浴以及用於電鍍低內應力及優良延展性的銅沈積物的方法
US20150014177A1 (en) Method for producing matt copper deposits
US11555252B2 (en) Satin copper bath and method of depositing a satin copper layer
US11174566B2 (en) Aqueous acidic copper electroplating bath and method for electrolytically depositing of a copper coating
CN106757192A (zh) 在薄膜衬底上电镀低内应力铜沉积物以抑制翘曲的方法
US20180237930A1 (en) Copper electroplating baths containing compounds of reaction products of amines and quinones
US20180237931A1 (en) Copper electroplating baths containing compounds of reaction products of amines, polyacrylamides and sultones
US20120003498A1 (en) Copper-zinc alloy electroplating bath and method of plating using same

Legal Events

Date Code Title Description
AS Assignment

Owner name: ATOTECH DEUTSCHLAND GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KRETSCHMER, STEFAN;HARTMANN, PHILIP;ROELFS, BERND;SIGNING DATES FROM 20140717 TO 20140728;REEL/FRAME:033409/0109

AS Assignment

Owner name: BARCLAYS BANK PLC, AS COLLATERAL AGENT, NEW YORK

Free format text: SECURITY INTEREST;ASSIGNORS:ATOTECH DEUTSCHLAND GMBH;ATOTECH USA INC;REEL/FRAME:041590/0001

Effective date: 20170131

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION

AS Assignment

Owner name: ATOTECH DEUTSCHLAND GMBH, GERMANY

Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC, AS COLLATERAL AGENT;REEL/FRAME:055653/0714

Effective date: 20210318

Owner name: ATOTECH USA, LLC, SOUTH CAROLINA

Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:BARCLAYS BANK PLC, AS COLLATERAL AGENT;REEL/FRAME:055653/0714

Effective date: 20210318