US20110108126A1 - Method and apparatus for gas flow control - Google Patents

Method and apparatus for gas flow control Download PDF

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Publication number
US20110108126A1
US20110108126A1 US12/906,058 US90605810A US2011108126A1 US 20110108126 A1 US20110108126 A1 US 20110108126A1 US 90605810 A US90605810 A US 90605810A US 2011108126 A1 US2011108126 A1 US 2011108126A1
Authority
US
United States
Prior art keywords
flow
control valve
valve
flow restriction
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/906,058
Other languages
English (en)
Inventor
Adam J. MONKOWSKI
James MacAllen Chalmers
Jialing Chen
Tao Ding
Joseph R. Monkowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pivotal Systems Corp
Original Assignee
Pivotal Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pivotal Systems Corp filed Critical Pivotal Systems Corp
Priority to US12/906,058 priority Critical patent/US20110108126A1/en
Assigned to PIVOTAL SYSTEMS CORPORATION reassignment PIVOTAL SYSTEMS CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHEN, JIALING, DING, TAO, MONKOWSKI, ADAM J., MONKOWSKI, JOSEPH R., CHALMERS, JAMES MACALLEN
Publication of US20110108126A1 publication Critical patent/US20110108126A1/en
Priority to US14/475,472 priority patent/US9904297B2/en
Priority to US14/475,494 priority patent/US9523435B2/en
Priority to US15/342,067 priority patent/US9983595B2/en
Assigned to WESTERN ALLIANCE BANK reassignment WESTERN ALLIANCE BANK SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: PIVOTAL SYSTEMS CORPORATION
Assigned to WESTERN ALLIANCE BANK reassignment WESTERN ALLIANCE BANK SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: PIVOTAL SYSTEMS CORPORATION
Abandoned legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezo-electric benders
    • F16K31/006—Piezo-electric benders having a free end
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0379—By fluid pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7737—Thermal responsive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8225—Position or extent of motion indicator
    • Y10T137/8242—Electrical
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8225—Position or extent of motion indicator
    • Y10T137/8275—Indicator element rigidly carried by the movable element whose position is indicated
US12/906,058 2009-10-15 2010-10-15 Method and apparatus for gas flow control Abandoned US20110108126A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/906,058 US20110108126A1 (en) 2009-10-15 2010-10-15 Method and apparatus for gas flow control
US14/475,472 US9904297B2 (en) 2009-10-15 2014-09-02 Method and apparatus for gas flow control
US14/475,494 US9523435B2 (en) 2009-10-15 2014-09-02 Method and apparatus for gas flow control
US15/342,067 US9983595B2 (en) 2009-10-15 2016-11-02 Method and apparatus for gas flow control

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US25214309P 2009-10-15 2009-10-15
US12/906,058 US20110108126A1 (en) 2009-10-15 2010-10-15 Method and apparatus for gas flow control

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US14/475,494 Division US9523435B2 (en) 2009-10-15 2014-09-02 Method and apparatus for gas flow control
US14/475,472 Division US9904297B2 (en) 2009-10-15 2014-09-02 Method and apparatus for gas flow control

Publications (1)

Publication Number Publication Date
US20110108126A1 true US20110108126A1 (en) 2011-05-12

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Family Applications (4)

Application Number Title Priority Date Filing Date
US12/906,058 Abandoned US20110108126A1 (en) 2009-10-15 2010-10-15 Method and apparatus for gas flow control
US14/475,494 Active US9523435B2 (en) 2009-10-15 2014-09-02 Method and apparatus for gas flow control
US14/475,472 Active US9904297B2 (en) 2009-10-15 2014-09-02 Method and apparatus for gas flow control
US15/342,067 Active US9983595B2 (en) 2009-10-15 2016-11-02 Method and apparatus for gas flow control

Family Applications After (3)

Application Number Title Priority Date Filing Date
US14/475,494 Active US9523435B2 (en) 2009-10-15 2014-09-02 Method and apparatus for gas flow control
US14/475,472 Active US9904297B2 (en) 2009-10-15 2014-09-02 Method and apparatus for gas flow control
US15/342,067 Active US9983595B2 (en) 2009-10-15 2016-11-02 Method and apparatus for gas flow control

Country Status (7)

Country Link
US (4) US20110108126A1 (zh)
EP (1) EP2488925B1 (zh)
JP (1) JP6064599B2 (zh)
KR (1) KR101718570B1 (zh)
CN (2) CN102687087B (zh)
TW (1) TWI435196B (zh)
WO (1) WO2011047361A1 (zh)

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US20130298833A1 (en) * 2011-10-06 2013-11-14 Industrial Technology Research Institute Evaporation apparatus
US20140007950A1 (en) * 2012-07-03 2014-01-09 Horiba Stec, Co., Ltd. Pressure Control Device, Flow Rate Control Device and Recording Medium Having Programs Used for Pressure Control Device, Recording Medium Having Programs Used for Flow Rate Control Device
US20140124061A1 (en) * 2012-11-08 2014-05-08 Kyle Patrick Daniels Shutter Valve for Pressure Regulation
US20140182692A1 (en) * 2011-05-10 2014-07-03 Fujikin Incorporated Pressure type flow control system with flow monitoring
US8770215B1 (en) * 2011-07-20 2014-07-08 Daniel T. Mudd Low flow injector to deliver a low flow of gas to a remote location
US20150060337A1 (en) * 2012-04-20 2015-03-05 Satake Corporation Piezoelectric valve, and optical particulate matter sorter provided with air-blowing means that uses piezoelectric valve
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
US9471066B2 (en) 2012-01-20 2016-10-18 Mks Instruments, Inc. System for and method of providing pressure insensitive self verifying mass flow controller
US9523435B2 (en) 2009-10-15 2016-12-20 Pivotal Systems Corporation Method and apparatus for gas flow control
US9556518B2 (en) 2011-07-08 2017-01-31 Fujikin Incorporated Raw material gas supply apparatus for semiconductor manufacturing equipment
US9557744B2 (en) 2012-01-20 2017-01-31 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9568111B2 (en) 2013-08-07 2017-02-14 Clarke Industrial Engineering, Inc. Shutter valve
US9631777B2 (en) 2011-09-06 2017-04-25 Fujikin Incorporated Raw material vaporizing and supplying apparatus equipped with raw material concentration
US9690301B2 (en) 2012-09-10 2017-06-27 Reno Technologies, Inc. Pressure based mass flow controller
US9846074B2 (en) 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US20180090353A1 (en) * 2016-09-27 2018-03-29 Reno Technologies, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US10031005B2 (en) 2012-09-25 2018-07-24 Mks Instruments, Inc. Method and apparatus for self verification of pressure-based mass flow controllers
US10229844B2 (en) * 2015-06-19 2019-03-12 Tokyo Electron Limited Gas supply system, gas supply control method and gas replacement method
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US20190243392A1 (en) * 2018-02-02 2019-08-08 Mks Instruments, Inc. Method And Apparatus For Pulse Gas Delivery With Isolation Valves
US20190250648A1 (en) * 2016-07-28 2019-08-15 Fujikin Incorporated Pressure-type flow rate control device
US10401202B2 (en) 2015-07-10 2019-09-03 Pivotal Systems Corporation Method and apparatus for gas flow control
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
US10697848B1 (en) * 2016-12-12 2020-06-30 Kirk A. Dobbs Smart building water supply management system with leak detection and flood prevention
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
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US11003198B2 (en) 2011-08-20 2021-05-11 Ichor Systems, Inc. Controlled delivery of process gas using a remote pressure measurement device
CN113000083A (zh) * 2019-12-18 2021-06-22 帝肯贸易股份公司 移液装置和方法
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US11300982B2 (en) * 2020-01-13 2022-04-12 Promix Solutions Ag System and method for the metering of a liquid or gaseous medium
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US11391608B2 (en) * 2017-11-30 2022-07-19 Fujikin Incorporated Self-diagnosis method for flow rate control device
US11404290B2 (en) 2019-04-05 2022-08-02 Mks Instruments, Inc. Method and apparatus for pulse gas delivery
US11447861B2 (en) * 2016-12-15 2022-09-20 Asm Ip Holding B.V. Sequential infiltration synthesis apparatus and a method of forming a patterned structure
US11454993B2 (en) * 2020-08-05 2022-09-27 Horiba Stec, Co., Ltd. Flow rate control apparatus, flow rate control method, and program recording medium recording flow rate control program
US20220413521A1 (en) * 2021-06-25 2022-12-29 Horiba Stec, Co., Ltd. Fluid control device, fluid control system, storage medium storing a program for fluid control device, and fluid control method
US11550341B2 (en) * 2017-09-29 2023-01-10 Hitachi Metals, Ltd. Mass flow control system, and semiconductor manufacturing equipment and vaporizer including the system
US20230244251A1 (en) * 2020-06-29 2023-08-03 Fujikin Incorporated Fluid control device, fluid supply system, and fluid supply method
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JP2013508825A (ja) 2013-03-07
CN102687087A (zh) 2012-09-19
US20140367596A1 (en) 2014-12-18
US9523435B2 (en) 2016-12-20
KR101718570B1 (ko) 2017-03-21
TW201115292A (en) 2011-05-01
CN104615157A (zh) 2015-05-13
US9983595B2 (en) 2018-05-29
US20170052546A1 (en) 2017-02-23
US20140366952A1 (en) 2014-12-18
CN102687087B (zh) 2016-08-24
KR20120095362A (ko) 2012-08-28
EP2488925B1 (en) 2016-11-30
CN104615157B (zh) 2018-05-04
WO2011047361A1 (en) 2011-04-21
JP6064599B2 (ja) 2017-01-25
US9904297B2 (en) 2018-02-27
WO2011047361A4 (en) 2011-08-04
TWI435196B (zh) 2014-04-21

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