US20080132078A1 - Ashing Method And Ashing Apparatus - Google Patents

Ashing Method And Ashing Apparatus Download PDF

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US20080132078A1
US20080132078A1 US11/574,571 US57457104A US2008132078A1 US 20080132078 A1 US20080132078 A1 US 20080132078A1 US 57457104 A US57457104 A US 57457104A US 2008132078 A1 US2008132078 A1 US 2008132078A1
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plasma
added
gas
ashing
inert gas
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Katsuhiro Yamazaki
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Shibaura Mechatronics Corp
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Assigned to SHIBAURA MECHATRONICS CORPORATION reassignment SHIBAURA MECHATRONICS CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: YAMAZAKI, KATSUHIRO
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31127—Etching organic layers
    • H01L21/31133—Etching organic layers by chemical means
    • H01L21/31138—Etching organic layers by chemical means by dry-etching
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/427—Stripping or agents therefor using plasma means only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching

Definitions

  • the present invention relates to an ashing device for peeling photoresist that is used as a mask when making a circuit on a wafer in a semiconductor wafer process, and more particularly to technology to prevent reduction of the ashing rate and increase the life of a plasma generating chamber member.
  • LSI Large Scale Integration circuits are semiconductor integrated circuits which have over 1000 elements, and ULSI or the like are those which have over one million elements stored on a single chip, and in recent years, 100 million or more elements have been formed on a single chip.
  • Low-K film low dielectric constant interlayer insulating film
  • the ashing process that removes the unneeded resist mask after patterning conventionally uses oxygen (O 2 ) plasma.
  • oxygen oxygen
  • the dielectric constant of Low-K films is dramatically increased by ashing with oxygen plasma.
  • interlayer insulating films which use porous materials with a low relative dielectric constant have a plurality of fine air voids which are exposed (large relative surface area), so the resistance to highly reactive oxygen plasma is extremely low, the film properties are easily degraded, and the degradation due to oxygen plasma is very significant.
  • Patent Reference 1 Japanese Laid-open Patent Application 2002-261092
  • Patent Reference 2 Japanese Laid-open Patent Application 2001-110775
  • the present invention was proposed in order to resolve the problems with the aforementioned conventional technology, and an object of the present invention is to provide an ashing device and ashing method which can positively remove resist from the wafer while preventing degradation of film properties for Low-K film (especially Low-K film that uses porous material) that is exposed on the wafer.
  • weight ratios expressed as percentages are on a mass basis unless otherwise noted.
  • the present invention is an ashing method of introducing a gas to a plasma generating chamber formed at least in part of a dielectric material, exciting the gas to generate a plasma, and performing plasma processing using the gas plasma on a processing subject in use of a Low-K film, the method comprising the steps of: introducing an inert gas to which H 2 has been added to the plasma generating chamber; generating plasma by exciting the inert gas; and removing resist that is on the processing subject by hydrogen radicals that are generated.
  • the change in the dielectric constant will be minimal, and the ashing rate will be high. Because the ashing rate can be increased while reducing the increase in the dielectric constant by using an inert gas to which H 2 has been added as the ashing gas, degradation of the film properties of a porous Low-K film can be prevented, and resist can positively be removed from the wafer.
  • H 2 is added to an inert gas at a ratio of between 1 and 20%.
  • the ratio of H 2 added to the inert gas is in a range between 1 and 20%, the change in the ashing rate compared to the change in H 2 will be within the range permitted by the processing capability, and the ashing process will be stable.
  • H 2 O is added to the inert gas to which H 2 has been added, plasma is generated using the gas blend, and the resist on the processing subject is removed by the hydrogen radicals that are generated. Furthermore, the preferred embodiment is characterized by also adding H 2 O to the inert gas to which H 2 has been added.
  • deactivation of the H radical is dramatically reduced by adding H 2 O to the inert gas, and as a result, the amount of H radical that reaches the wafer can be increased. Thereby, the peeling residual can be improved without extending the processing time.
  • An additional effect is that a reducing effect on the dielectric material section as well as on other materials of the plasma generating chamber inner surface or the like can be minimized or prevented, thus contributing to increased life of the plasma generating chamber member.
  • H 2 O is added to the inert gas at a ratio of between 0.1 and 5%.
  • deactivation of the H radical is dramatically reduced by adding between 0.1 and 5% H 2 O to the inert gas, and as a result the amount of H radical that reaches the wafer can be increased. Thereby, the peeling residual can be improved without extending the processing time.
  • An additional effect is that a reducing effect on the dielectric material section as well as on other materials of the plasma generating chamber inner surface or the like can be minimized or prevented, thus contributing to increased life of the plasma generating chamber member.
  • O 2 is added to the inert gas to which H 2 has been added, plasma is generated using this inert gas, and the resist on the processing subject is removed by hydrogen radicals that are generated.
  • deactivation of the H radical is dramatically reduced by adding O 2 to the inert gas, and as a result the amount of H radical that reaches the wafer can be increased. Thereby, the peeling residual can be improved without extending the processing time.
  • An additional effect is that a reducing effect on the dielectric material section as well as on other materials of the plasma generating chamber inner surface or the like can be minimized or prevented, thus contributing to increased life of the plasma generating chamber member.
  • O 2 is added to the inert gas at a ratio of between 0.01 and 0.1%.
  • deactivation of the H radical is dramatically reduced by adding between 0.01 and 0.1% O 2 to the inert gas, and as a result the amount of H radical that reaches the wafer can be increased. Thereby, the peeling residual can be improved without extending the processing time.
  • An additional effect is that a reducing effect on the dielectric material section as well as on other materials of the plasma generating chamber inner surface or the like can be minimized or prevented, thus contributing to increased life of the plasma generating chamber member.
  • the inert gas is consisting of He.
  • He causes the level of metastable state energy to be high, and for instance, even if trace amounts of H 2 are added, the startup of the in the ashing rate will be fast.
  • He is an atom with a mass essentially equal to that of H 2 , so the gas diffusion will be favorable, and the distribution of the ashing process on the wafer surface can be expected to be uniform. Furthermore, a stable processing operation can be performed.
  • the positional relationship between the processing subject and the plasma generating chamber is arranged to prevent linear irradiation so that ultraviolet rays included in the plasma do not directly radiate onto the processing subject from the plasma generating chamber.
  • the ultraviolet rays included in the plasma that is generated in the plasma generating chamber will be eliminated prior to reaching the processing subject, and only radicals will be supplied to the surface of the processing subject. Therefore, the increase in the dielectric constant of the processing subject caused by impingement of ultraviolet light on the processing subject can be reduced.
  • the ashing rate can be increased while an increase in the dielectric constant can be minimized by using a gas blend of H 2 and inert gas as the ashing gas. Therefore, degradation of the film properties of Low-K film (especially Low-K film which uses porous materials) can be prevented, and resist can positively be removed from the wafer. Furthermore, if He is used as the inert gas, favorable results with no change in the dielectric constant can be achieved.
  • H radical can be dramatically minimized by adding H 2 O or O 2 to the gas blend of H 2 and inert gas, and as a result, the peeling residue can be improved for the same processing time because the level of H radical that reaches the wafer is increased, and furthermore as an additional result, reducing of the material on the inner surface of the plasma generating chamber can be reduced, thus contributing to the extended life of the plasma generating chamber materials.
  • FIG. 1 is a block diagram showing the first embodiment of the present invention
  • FIG. 2 is a diagram showing the change in the ashing rate when H 2 is added to the inert gas
  • FIG. 3 is a diagram showing the change in the dielectric constant when H 2 is added to the inert gas
  • FIG. 4 is a diagram showing the changes to the ashing rate when H 2 is added to the inert gas
  • FIG. 5 is a partial expanded diagram showing the structure of the first embodiment of the present invention.
  • FIG. 6 is a partial expanded diagram showing an alternate example of the first embodiment of the present invention.
  • FIG. 7 shows the change in the ashing rate when H 2 O is added to a gas blend of H 2 and He.
  • FIG. 8 is a diagram showing the change in the dielectric constant when H 2 O or O 2 is added to a gas blend of H 2 and He.
  • the ashing device of the present embodiment provides a process chamber 2 which is a vacuum chamber 1 inside a vacuum chamber 1 as shown in FIG. 1 .
  • a support stand 3 is provided in the process chamber 2 , and the processing subject S is placed on the support stand 3 .
  • the support stand 3 has a temperature control mechanism not shown in the drawings, and the temperature of the processing subject S can be controlled by this temperature control mechanism.
  • the processing subject includes silicon wafers for manufacturing semiconductor devices and glass substrates for liquid crystal display devices.
  • An exhaust port 5 is formed in the bottom plate 4 of the vacuum chamber 1 , and an exhaust pipe 6 connected to a vacuum pump (not shown in the drawings) on one end is attached to the exhaust port 5 . Furthermore, a gas injection port 8 is formed in the center of the upper lid 7 which forms the top plate of the vacuum chamber 1 , and a gas injection pipe 9 made of a fluorine based resin is attached to the gas injection port 8 .
  • a plasma generating chamber member 10 is connected to the gas injection pipe 9 .
  • Quartz (SiO 2 ), alumina (Al 2 O 3 ), sapphire, or aluminum nitride or the like can be used as the dielectric material which forms the plasma generating chamber member 10 .
  • a sealing member 11 is attached to the other end of the plasma generating chamber member 10 , and the inside of the sealing member 11 forms a gas flow path 19 .
  • a gas transport pipe 18 is connected to the sealing member 11 , and a gas regulator 20 that supplies ashing gas to the plasma generating chamber member 10 is provided on the other end of the gas transport pipe 18 .
  • a radical generating means comprising a microwave waveguide pipe 12 , or in other words a plasma generating unit 13 , is provided along the plasma generating chamber member 10 so as to encompass the plasma generating chamber member 10 , and a plasma generating chamber 14 is formed inside the plasma generating chamber member 10 which is encompassed by the plasma generating unit 13 . Therefore, the plasma generating chamber 14 is provided on the outside of the vacuum chamber 1 .
  • the microwave generating unit 15 is connected to the microwave waveguide pipe 12 .
  • a gas storage chamber 16 is formed on the top of the process chamber 2 and a shower nozzle 17 is provided in order to uniformly supply the radicals (etching seed) injected into the process chamber 2 through the gas injection port 8 formed in the upper lid 7 (top plate) of the vacuum chamber 1 across the whole surface of the processing subject S. Furthermore, a plurality of gas spray holes are formed in the shower nozzle 17 .
  • This embodiment is characterized by the fact that the composition ratio of the ashing gas introduced to the plasma generating chamber member 10 is controlled by the gas regulator 20 when ashing is performed using the aforementioned ashing device.
  • the ashing gas used in the present embodiment is an inert gas to which H 2 has been added. Plasma is generated using this gas blend, and the resist is removed by the hydrogen radicals that are generated.
  • the inert gas used may be for instance helium (He) or argon (Ar).
  • the ratio of H 2 gas in the ashing gas is within a range between 1 and 20% of the total mass flow, but, is preferably approximately 5% or higher which is essentially the saturation level for the ashing rate (A/R) as shown in FIG. 2 .
  • the rise in the ashing rate will be fast even when trace amounts of H 2 are added because He has a higher metastable state energy than does Ar. Therefore, when the H 2 ratio is in a range around 5%, the rate saturated He will have less variation compared to the relative change of H 2 , which is preferable. Furthermore, He is an atom with a mass essentially equal to that of H 2 , so the gas diffusion will be favorable compared to when Ar is used, and the distribution of the ashing process on the wafer surface can be expected to be uniform. Therefore the use of He is preferable in order to achieve a stable process.
  • the change in the dielectric constant was minimal, but as shown in FIG. 4 , the ashing rate was less than half that when the ashing gas is He or Ar with 5% H 2 added.
  • the ashing rate will be similar to the case where 5% H 2 is added to He or Ar, but there will be a significant increase in the dielectric constant.
  • the total flow of the ashing gas can be 1 slm (standard liter/minute) or higher, but as the flow rate increases, the ashing rate can be increased, so using a rate of approximately 7 slm is preferable.
  • the processing pressure can be within a range between 50 Pa and 200 Pa.
  • the dielectric constant will increase.
  • a bend is provided between the plasma generating chamber 14 and the gas injection tube 9 or the gas injection port 8 , so ultraviolet light will not directly impinge on the processing subject S.
  • a construction where the ultraviolet light is shielded such as by applying an ultraviolet light absorbing material to the shower nozzle 17 is also possible. Thereby the ultraviolet rays included in the plasma generated in the plasma generating chamber 10 will be eliminated prior to reaching the processing subject S, and only radicals will be supplied through the shower nozzle 17 to the surface of the processing subject S in the process chamber 2 .
  • the present embodiment described the case of a CDE (chemical dry etching) device, but the aforementioned shielding construction of the present invention is not restricted to this, and for instance, the down-flow type dry etching device shown in FIG. 6 has an overlapping construction where the position of the holes of the shower nozzle (punching plate) are staggered, and thereby, direct radiation by ultraviolet light onto the processing subject S can be prevented. Furthermore, similar to as shown above, an ultraviolet light can be absorbed by applying an ultraviolet light absorbing material to the shower nozzle.
  • the ashing device adds a change to the composition of ashing gas that is injected from the gas regulator 20 in the first embodiment. Specifically, a composition where between 0.01% and 0.1% O 2 or between 1% and 5% H 2 O is added to the H 2 and He gas blend. Note, other components are similar to the aforementioned first embodiment and have been omitted from the description.
  • peeling residue occurs after ashing in a process where an H 2 and He gas blend is used as the ashing gas.
  • the plasma generating chamber member 10 is made from SiO 2 as described above, when a gas containing H 2 is supplied from the gas regulator 20 and the hydrogen plasma is excited in the plasma generating chamber 14 over a discharge time of several tens of hours, the SiO 2 that forms the plasma generating chamber member 10 will be reduced to Si.
  • the SiO 2 is converted to Si by reduction from the hydrogen plasma, the H radicals required for ashing will be dramatically deactivated. Therefore, the ashing rate will normally be reduced after several tens of hours, and therefore peeling residual will occur after ashing. This peeling residual can be eliminated by extending the processing time, but this will reduce the efficiency of the processing operation.
  • H 2 O is added to the gas blend of H 2 and He in order to prevent this peeling residual. If H 2 O is added in this manner, oxygen plasma will be generated in the plasma generating chamber 14 . Furthermore, reduction of the dielectric material (discharge tube and dielectric material window) of the plasma generating chamber member 10 will be prevented by the oxygen plasma, and the dielectric material will be reoxidized. Therefore, the deactivation of H radical will be dramatically reduced, and as a result, the amount of H radical that reaches the wafer will be increased so peeling residual can be resolved without increasing the processing time. An additional effect is that the reducing effect on the dielectric material section as well as on other materials of the plasma generating chamber member 10 inner surface or the like can be minimized or prevented, thus contributing to increased life of the plasma generating chamber member 10 .
  • FIG. 7 shows the change in the dielectric constant of a Low-K film and the change in the ashing rate for the case where H 2 O is added. Furthermore, FIG. 8 shows the change in the dielectric constant when O 2 is added as compared to H 2 O.
  • the ashing rate can be increased to 1000 nm/min or higher by adding H 2 O to the gas blend of H 2 and He. This is due to the aforementioned increase in the amount of H radical reaching the wafer in conjunction with the effect of the oxygen radical generated. Therefore, the peeling residual on the wafer can be eliminated without extending the processing time. Furthermore, as shown in FIG. 8 , when 0.1 to 5% of H 2 O is added, there is almost no change in the dielectric constant of the Low-K film, and favorable film properties are obtained.
  • the permissible range for the amount of O 2 added is narrower than that of H 2 O is not definitely understood, but is thought to be affected by the difference in the life of the O 2 radical generated when O 2 is added and when H 2 O is added, and to the difference that the activity level (reactivity) towards Low-K film has on the change in the dielectric constant.
  • the amount of O 2 added is preferably 0.01% or less.
  • deactivation of H radical can be dramatically reduced by adding either between 0.01% and 0.1% of O 2 or between 0.1 and 5% of H 2 O to the gas blend of H 2 and He that is injected from the gas regulator 20 , and as a result, the amount of H radical that reaches the wafer can be increased. Thereby, the peeling residual can be improved without extending the processing time.
  • An additional effect is that the reducing effect on the dielectric material section as well as on other materials of the plasma generating chamber inner surface or the like can be minimized or prevented, thus contributing to increased life of the plasma generating chamber materials.
  • the ashing device and ashing method of the aforementioned embodiments can not only be used for resist ashing on a wafer, but for instance can also be used as an etching device and etching method for removing spontaneously generated oxides or for directly etching Low-K films.
  • the use of a chemical dry etching device or a down-flow type dry etching device was described, but the present invention can be achieved not only by these devices, but by any device that can perform ashing primarily using radicals, and is preferably a device that can shield ultraviolet light.
  • FIG. 1 is a block diagram showing the first embodiment of the present invention
  • FIG. 2 is a diagram showing the change in the ashing rate when H 2 is added to the inert gas
  • FIG. 3 is a diagram showing the change in the dielectric constant when H 2 is added to the inert gas
  • FIG. 4 is a diagram showing the changes to the ashing rate when H 2 is added to the inert gas
  • FIG. 5 is a partial expanded diagram showing the structure of the first embodiment of the present invention.
  • FIG. 6 is a partial expanded diagram showing an alternate example of the first embodiment of the present invention.
  • FIG. 7 shows the change in the ashing rate when H 2 O is added to a gas blend of H 2 and He.
  • FIG. 8 is a diagram showing the change in the dielectric constant when H 2 O or O 2 is added to a gas blend of H 2 and He.

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  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
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JP2004254248A JP4588391B2 (ja) 2004-09-01 2004-09-01 アッシング方法及びアッシング装置
PCT/JP2004/018629 WO2006025123A1 (ja) 2004-09-01 2004-12-14 アッシング方法及びアッシング装置

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US11251052B2 (en) 2017-06-29 2022-02-15 Tokyo Electron Limited Plasma processing method and plasma processing apparatus
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US7479457B2 (en) * 2005-09-08 2009-01-20 Lam Research Corporation Gas mixture for removing photoresist and post etch residue from low-k dielectric material and method of use thereof
JP2008065944A (ja) * 2006-09-08 2008-03-21 Ulvac Japan Ltd 磁性層パターンの形成方法、磁気抵抗素子の製造方法、及び磁気記憶媒体の製造方法
JP5019913B2 (ja) * 2007-03-06 2012-09-05 シャープ株式会社 窒化物半導体素子の製造方法
US7807579B2 (en) * 2007-04-19 2010-10-05 Applied Materials, Inc. Hydrogen ashing enhanced with water vapor and diluent gas
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