US20070216026A1 - Aluminum bump bonding for fine aluminum wire - Google Patents

Aluminum bump bonding for fine aluminum wire Download PDF

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Publication number
US20070216026A1
US20070216026A1 US11/385,022 US38502206A US2007216026A1 US 20070216026 A1 US20070216026 A1 US 20070216026A1 US 38502206 A US38502206 A US 38502206A US 2007216026 A1 US2007216026 A1 US 2007216026A1
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United States
Prior art keywords
wire
bump
aluminum
bond
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/385,022
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English (en)
Inventor
Adams Zhu
Xingquan Fang
Fred Ren
Yongsuk Kwon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Components Industries LLC
Original Assignee
Fairchild Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Semiconductor Corp filed Critical Fairchild Semiconductor Corp
Priority to US11/385,022 priority Critical patent/US20070216026A1/en
Priority to TW096107721A priority patent/TW200742017A/zh
Priority to PCT/US2007/064373 priority patent/WO2007109652A2/fr
Priority to MYPI20083443A priority patent/MY147586A/en
Priority to CN2007800094755A priority patent/CN101405860B/zh
Priority to JP2009501692A priority patent/JP2009530872A/ja
Priority to DE200711000671 priority patent/DE112007000671T8/de
Priority to KR1020087022387A priority patent/KR101355987B1/ko
Publication of US20070216026A1 publication Critical patent/US20070216026A1/en
Assigned to FAIRCHILD SEMICONDUCTOR CORPORATION reassignment FAIRCHILD SEMICONDUCTOR CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FANG, XINGQUAN, KWON, YONGSUK, REN, FRED, ZHU, ADAMS
Priority to US12/580,560 priority patent/US8138081B2/en
Assigned to SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC reassignment SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FAIRCHILD SEMICONDUCTOR CORPORATION
Abandoned legal-status Critical Current

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    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01013—Aluminum [Al]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01014—Silicon [Si]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01028—Nickel [Ni]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01029—Copper [Cu]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01042—Molybdenum [Mo]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/012—Semiconductor purity grades
    • H01L2924/01202—2N purity grades, i.e. 99%
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/014—Solder alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/20—Parameters
    • H01L2924/207—Diameter ranges
    • H01L2924/20755—Diameter ranges larger or equal to 50 microns less than 60 microns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/20—Parameters
    • H01L2924/207—Diameter ranges
    • H01L2924/20757—Diameter ranges larger or equal to 70 microns less than 80 microns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/20—Parameters
    • H01L2924/207—Diameter ranges
    • H01L2924/2076—Diameter ranges equal to or larger than 100 microns

Definitions

  • This invention relates to the bonding application of aluminum wire to a surface such as a leadframe or a contact on a semiconductor device.
  • the bond stitch on bump method for bonding gold wires to a leadframe uses a gold bump on the leadframe as the interface between the bond wire and the leadframe. This relaxes the range of bonding parameters for gold bond wires.
  • Other methods may use solder bumps in a similar fashion. However, neither of these methods are suitable for bonding aluminum wire.
  • the invention comprises, in one form thereof, a packaged semiconductor device in which the bond wires are bonded to the leads with an aluminum bump bond.
  • the semiconductor device is mounted on a leadframe having leads with a nickel plating.
  • a fine aluminum wire such as a 2 mil diameter wire
  • an aluminum bump is bonded to the nickel plating and the wire is bonded to the bump.
  • the bump is aluminum doped with nickel and is formed from a large diameter wire, such as a 6 mil diameter wire.
  • the invention includes a method for packaging a semiconductor device.
  • the method comprises the steps of providing a leadframe with a semiconductor device attached thereto, wherein the leadframe has a plurality of leads; building a bump on the surface of one or more of the leads; and wire bonding an aluminum bond wire to each of the bumps.
  • the bond wire has a fine diameter, such as a diameter of about 2 mil, and the bump has a large diameter, such as a diameter of about 6 mil.
  • the bump comprises aluminum and it may be doped with nickel.
  • the leads may have a nickel plating.
  • the method may also include the further step of encapsulating the leadframe, semiconductor device, and bond wires in a non-conducting encapsulation polymer.
  • An advantage of the present invention is that the aluminum to nickel bond is achieved through the large diameter bump and the fine aluminum wire is the able to be bonded to an aluminum surface. While the fine wire aluminum to nickel bond has been shown to be unreliable and particularly sensitive to surface conditions and bonding parameters, the large diameter wire aluminum to nickel bond has been shown to be robust and less sensitive to surface conditions and bonding parameters. Further, the invention shows a great reduction in bond lift and heel crack conditions.
  • FIG. 1 is a cross-sectional view of a semiconductor package using aluminum bump bonds according to the present invention
  • FIG. 2 is a side view of the aluminum bump bond of a wire to a lead according to FIG. 1 ;
  • FIG. 3A is a front view of the tip of a wedge tool for forming the aluminum bumps according to FIG. 2 ;
  • FIG. 3B is a cross-sectional view of the wedge tool tip of FIG. 3A ;
  • FIG. 4 is a flow chart of the aluminum bump bonding process of the present invention.
  • the package 10 includes a semiconductor device 12 , a leadframe 14 , several aluminum bond wires 16 , and several bump bonds 18 .
  • the leadframe 14 includes several leads 20 and a die pad 22 for supporting the semiconductor device 12 .
  • the semiconductor device includes several electrodes for being connected to the leads 20 by the bond wires 16 .
  • the bond wires 16 have a diameter of about 2 mil (50 ⁇ m) and a composition of about 99% aluminum and about 1% silicon.
  • the wire 16 may have alternative characteristics in different embodiments. For the purposes of this description, a fine wire is a wire having a diameter of 3 mil or less and a large diameter wire has a diameter of greater than 3 mil.
  • the bump bond 18 is shown in detail in FIG. 2 , bonding a wire 16 to a lead 20 .
  • the lead 20 is typically copper with a nickel plating 24 on its surface.
  • the bump bond 18 includes an aluminum bump 26 comprising a portion of large diameter aluminum wire, such as a diameter of about 6 mil (150 ⁇ m).
  • the bump 26 comprises aluminum doped with nickel.
  • the bump 26 is bonded to the nickel plating 24 similarly to the leadframe bonding of a 6 mil wire, except that the wedge tool has a flat surface as opposed to the triangular wedge normally used.
  • the flat tip wedge tool 28 shown in FIGS. 3A and 3B , provides a bonded bump 26 with a flat surface for bonding with the wire 16 . Since the bump 26 doesn't have heel like a wire would, the wedge tool 28 does not have an upward curve on the wedge surface to accommodate the heel as a conventional wedge tool would.
  • the process of the invention includes the steps of wafer sawing 30 , die attach 32 , bump building 34 , wire bonding 36 , encapsulation 38 , and the typical end-of-line finishing and testing 40 .
  • the wafer sawing step 30 and the die attach step 32 are particular to the semiconductor device and leadframe.
  • the bump building step 34 comprises the bonding of the end of a 6 mil aluminum wire to the nickel plating 24 on a lead 20 using the flat tip wedge tool 28 . The 6 mil wire is then broken away from the end to leave the bump 26 . In a particular embodiment, care is taken to line up the length of the bump 26 with the direction of the wire 16 that will be bonded thereto.
  • the size of the bump 26 should be at least as big as the gate pad opening on the semiconductor chip.
  • the end of the aluminum wire 16 is bonded to the aluminum bump 26 using typical wire bonding techniques.
  • Non-conducting encapsulation polymer 42 ( FIG. 1 ) is molded over the package in the encapsulation step 38 .
  • the typical finishing and testing is then carried out in step 40 .
  • the aluminum to nickel bond is between the nickel plating 24 and the bump 26 , which is a piece of 6 mil aluminum wire.
  • Such bonds have been shown to be a much more reliable process with relaxed bond parameters than the direct bonding between a fine aluminum wire and the nickel plating.
  • the fine aluminum wire 16 is bonded to the bump 26 in an aluminum to aluminum bond, which is inherently more reliable than the aluminum to nickel bond of the fine wire.
  • the bump bond 18 has improved results in a bond shear test and a bond pull test over the fine wire aluminum to nickel bond. Further, the bond thickness of the wire 16 is improved resulting in better resistance to heel crack.
  • wire and bond sizes may be used.
  • a wire bond for a 5 mil wire may use a 20 mil bump.

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Wire Bonding (AREA)
US11/385,022 2006-03-20 2006-03-20 Aluminum bump bonding for fine aluminum wire Abandoned US20070216026A1 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
US11/385,022 US20070216026A1 (en) 2006-03-20 2006-03-20 Aluminum bump bonding for fine aluminum wire
TW096107721A TW200742017A (en) 2006-03-20 2007-03-06 Aluminum bump bonding for fine aluminum wire
JP2009501692A JP2009530872A (ja) 2006-03-20 2007-03-20 細いアルミニウムワイヤのためのアルミニウムバンプボンディング
MYPI20083443A MY147586A (en) 2006-03-20 2007-03-20 Aluminum bump bonding for fine aluminum wire
CN2007800094755A CN101405860B (zh) 2006-03-20 2007-03-20 用于细铝线的铝凸块接合
PCT/US2007/064373 WO2007109652A2 (fr) 2006-03-20 2007-03-20 Collage a l'aluminium pour fils fins en aluminium
DE200711000671 DE112007000671T8 (de) 2006-03-20 2007-03-20 Aluminiumerhebungs-Bonden für feinen Aluminiumdraht
KR1020087022387A KR101355987B1 (ko) 2006-03-20 2007-03-20 미세한 알루미늄 배선용 알루미늄 범프 본딩
US12/580,560 US8138081B2 (en) 2006-03-20 2009-10-16 Aluminum bump bonding for fine aluminum wire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/385,022 US20070216026A1 (en) 2006-03-20 2006-03-20 Aluminum bump bonding for fine aluminum wire

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/580,560 Division US8138081B2 (en) 2006-03-20 2009-10-16 Aluminum bump bonding for fine aluminum wire

Publications (1)

Publication Number Publication Date
US20070216026A1 true US20070216026A1 (en) 2007-09-20

Family

ID=38516959

Family Applications (2)

Application Number Title Priority Date Filing Date
US11/385,022 Abandoned US20070216026A1 (en) 2006-03-20 2006-03-20 Aluminum bump bonding for fine aluminum wire
US12/580,560 Active 2026-05-13 US8138081B2 (en) 2006-03-20 2009-10-16 Aluminum bump bonding for fine aluminum wire

Family Applications After (1)

Application Number Title Priority Date Filing Date
US12/580,560 Active 2026-05-13 US8138081B2 (en) 2006-03-20 2009-10-16 Aluminum bump bonding for fine aluminum wire

Country Status (8)

Country Link
US (2) US20070216026A1 (fr)
JP (1) JP2009530872A (fr)
KR (1) KR101355987B1 (fr)
CN (1) CN101405860B (fr)
DE (1) DE112007000671T8 (fr)
MY (1) MY147586A (fr)
TW (1) TW200742017A (fr)
WO (1) WO2007109652A2 (fr)

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Also Published As

Publication number Publication date
TW200742017A (en) 2007-11-01
WO2007109652A3 (fr) 2008-01-17
US8138081B2 (en) 2012-03-20
DE112007000671T8 (de) 2009-05-14
DE112007000671T5 (de) 2009-01-29
WO2007109652A2 (fr) 2007-09-27
CN101405860A (zh) 2009-04-08
JP2009530872A (ja) 2009-08-27
KR101355987B1 (ko) 2014-01-28
MY147586A (en) 2012-12-31
CN101405860B (zh) 2011-06-08
KR20080103072A (ko) 2008-11-26
US20100035385A1 (en) 2010-02-11

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