US20060272573A1 - Damage evaluation method of compound semiconductor member, production method of compound semiconductor member, gallium nitride compound semiconductor member, and gallium nitride compound semiconductor membrane - Google Patents

Damage evaluation method of compound semiconductor member, production method of compound semiconductor member, gallium nitride compound semiconductor member, and gallium nitride compound semiconductor membrane Download PDF

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US20060272573A1
US20060272573A1 US11/446,976 US44697606A US2006272573A1 US 20060272573 A1 US20060272573 A1 US 20060272573A1 US 44697606 A US44697606 A US 44697606A US 2006272573 A1 US2006272573 A1 US 2006272573A1
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compound semiconductor
semiconductor member
gallium nitride
damage
photoluminescence
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Akihiro Hachigo
Takayuki Nishiura
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Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
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Publication of US20060272573A1 publication Critical patent/US20060272573A1/en
Priority to US11/907,322 priority Critical patent/US8177911B2/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors

Definitions

  • the present invention relates to a damage evaluation method of a compound semiconductor member, a production method of a compound semiconductor member, a gallium nitride compound semiconductor member, and a gallium nitride compound semiconductor membrane.
  • Compound semiconductors have various merits in comparison with Si.
  • the compound semiconductors permit control of the bandgap through adjustment of compositions.
  • the compound semiconductors have such optical properties as direct transition and wide bandgap, and are thus suitably applied to optical devices such as LEDs or LDs. Since the compound semiconductors have high carrier mobility, they are also suitably applied to high-speed devices.
  • a substrate used is a compound semiconductor substrate, or a laminated substrate in which a compound semiconductor membrane is formed on an amorphous substrate such as a glass substrate.
  • a compound semiconductor membrane or electrodes are formed on a surface of the compound semiconductor substrate or laminated substrate.
  • the device characteristics of the compound semiconductor devices are significantly affected by an interface between the compound semiconductor substrate or laminated substrate and the compound semiconductor membrane or by interfaces between the compound semiconductor substrate or laminated substrate and the electrodes. Therefore, it is important to evaluate the interfaces in the compound semiconductor devices.
  • damage occurs on the foregoing interfaces in several production processes.
  • the surface of the compound semiconductor substrate or laminated substrate is subjected to polishing or etching. This process produces scratches or distortion on the surface to cause damage on the surface.
  • dry etching or wet etching or the like is used in forming a thin film or fine pattern of nanometer size on the surface of the compound semiconductor substrate or laminated substrate. At this time, damage is caused on the surface of the compound semiconductor substrate or laminated substrate or on the surface of the thin film or fine pattern.
  • a compound semiconductor device is produced, for example, by growing an epitaxial film on the surface of the compound semiconductor substrate or compound semiconductor membrane with the surface including the damage as described above, the device characteristics are degraded by virtue of the damage existing at the interface between the compound semiconductor substrate or compound semiconductor membrane and the epitaxial film.
  • Methods for evaluating the damage on the surface of the compound semiconductor substrate or compound semiconductor membrane include methods using X-ray diffraction, scanning electron microscope (SEM), cathodoluminescence, or the like as usually adopted methods.
  • Japanese Patent Application Laid-Open No. 9-246341 discloses a method of evaluating damage on a semiconductor wafer by a photoluminescence method.
  • An object of the present invention is therefore to provide a damage evaluation method of a compound semiconductor member permitting detailed evaluation of a level of damage on a surface and a production method of a compound semiconductor member with a low level of damage, and to provide a gallium nitride compound semiconductor member and a gallium nitride compound semiconductor membrane with a low level of damage.
  • a damage evaluation method of a compound semiconductor member is a method of evaluating damage of a compound semiconductor member, comprising: a step of performing measurement of photoluminescence on a surface of the compound semiconductor member; and a step of evaluating damage on the surface of the compound semiconductor member, using a half width of a peak at a wavelength corresponding to a bandgap of the compound semiconductor member, in an emission spectrum obtained by the measurement of photoluminescence.
  • Another damage evaluation method of a compound semiconductor member according to the present invention is a method of evaluating damage of a compound semiconductor member, comprising: a step of performing measurement of photoluminescence on a surface of the compound semiconductor member; and a step of evaluating damage on the surface of the compound semiconductor member, using an intensity of a peak located on a longer wavelength side than a wavelength corresponding to a bandgap of the compound semiconductor member, in an emission spectrum obtained by the measurement of photoluminescence.
  • Another damage evaluation method of a compound semiconductor member according to the present invention is a method of evaluating damage of a compound semiconductor member, comprising: a step of performing measurement of photoluminescence on a surface of the compound semiconductor member; and a step of evaluating damage on the surface of the compound semiconductor member, using a half width of a peak located on a longer wavelength side than a wavelength corresponding to a bandgap of the compound semiconductor member, in an emission spectrum obtained by the measurement of photoluminescence.
  • Another damage evaluation method of a compound semiconductor member according to the present invention is a method of evaluating damage of a compound semiconductor member, comprising: a step of performing measurement of photoluminescence on a surface of the compound semiconductor member; and a step of evaluating damage on the surface of the compound semiconductor member, using a ratio of an intensity of a peak at a wavelength corresponding to a bandgap of the compound semiconductor member to an intensity of a peak located on a longer wavelength side than the wavelength corresponding to the bandgap, in an emission spectrum obtained by the measurement of photoluminescence.
  • the compound semiconductor member is preferably a compound semiconductor substrate.
  • the compound semiconductor member is preferably a compound semiconductor membrane provided on a substrate.
  • the compound semiconductor member is preferably comprised of either one of monocrystalline material and polycrystalline material.
  • the bandgap is preferably not less than 1.6 ⁇ 10 ⁇ 19 J.
  • the compound semiconductor member is preferably comprised of a nitride compound semiconductor containing at least one of B, Al, and Ga.
  • the compound semiconductor member is preferably comprised of an oxide compound semiconductor containing at least one of Be and Zn.
  • the compound semiconductor member is preferably comprised of a ZnSe compound semiconductor.
  • a production method of a compound semiconductor member according to the present invention is a method of producing a compound semiconductor member, comprising: a step of performing measurement of photoluminescence on a surface of the compound semiconductor member; and a step of determining that the compound semiconductor member is nondefective when a half width of a peak at a wavelength corresponding to a bandgap of the compound semiconductor member in an emission spectrum obtained by the measurement of photoluminescence is not more than a predetermined threshold.
  • Another production method of a compound semiconductor member according to the present invention is a method of producing a compound semiconductor member, comprising: a step of performing measurement of photoluminescence on a surface of the compound semiconductor member; and a step of determining that the compound semiconductor member is nondefective when an intensity of a peak at a wavelength corresponding to a bandgap of the compound semiconductor member in an emission spectrum obtained by the measurement of photoluminescence is not less than a predetermined threshold with respect to an intensity of a peak at the wavelength in an emission spectrum obtained by measurement of photoluminescence on a surface of a compound semiconductor member without damage.
  • Another production method of a compound semiconductor member according to the present invention is a method of producing a compound semiconductor member, comprising: a step of performing measurement of photoluminescence on a surface of the compound semiconductor member; and a step of determining that the compound semiconductor member is nondefective when a half width of a peak on a longer wavelength side than a wavelength corresponding to a bandgap of the compound semiconductor member in an emission spectrum obtained by the measurement of photoluminescence is not more than a predetermined threshold.
  • Another production method of a compound semiconductor member according to the present invention is a method of producing a compound semiconductor member, comprising: a step of performing measurement of photoluminescence on a surface of the compound semiconductor member; and a step of determining that the compound semiconductor member is nondefective when a ratio of an intensity of a peak at a wavelength corresponding to a bandgap of the compound semiconductor member to an intensity of a peak located on a longer wavelength side than the wavelength corresponding to the bandgap in an emission spectrum obtained by the measurement of photoluminescence is not less than a predetermined threshold.
  • the compound semiconductor member is preferably a compound semiconductor substrate.
  • the compound semiconductor member is preferably a compound semiconductor membrane provided on a substrate.
  • the production methods of the compound semiconductor member preferably further comprise a step of forming a thin film on the surface of the compound semiconductor member, after the step of determining that the compound semiconductor member is nondefective.
  • the production methods of the compound semiconductor member preferably further comprise a step of forming an electrode on the surface of the compound semiconductor member, after the step of determining that the compound semiconductor member is nondefective.
  • a gallium nitride compound semiconductor member according to the present invention is a gallium nitride compound semiconductor member wherein in an emission spectrum obtained by measurement of photoluminescence on a surface of the gallium nitride compound semiconductor member, an intensity of a peak at a wavelength corresponding to a bandgap of the gallium nitride compound semiconductor member is not less than twice an intensity of a peak located on a longer wavelength side than the wavelength corresponding to the bandgap.
  • Another gallium nitride compound semiconductor member according to the present invention is a gallium nitride compound semiconductor member wherein in an emission spectrum obtained by measurement of photoluminescence on a surface of the gallium nitride compound semiconductor member, an intensity of a peak at a wavelength corresponding to a bandgap of the gallium nitride compound semiconductor member is not less than 1/10 of an intensity of a peak at the wavelength in an emission spectrum obtained by measurement of photoluminescence on a surface of a gallium nitride compound semiconductor member without damage.
  • the gallium nitride compound semiconductor member is preferably a gallium nitride compound semiconductor substrate.
  • the gallium nitride compound semiconductor member is preferably a gallium nitride compound semiconductor membrane provided on a substrate.
  • a gallium nitride compound semiconductor membrane according to the present invention is a gallium nitride compound semiconductor membrane formed on a gallium nitride compound semiconductor member wherein in an emission spectrum obtained by measurement of photoluminescence on a surface of the gallium nitride compound semiconductor member, an intensity of a peak at a wavelength corresponding to a bandgap of the gallium nitride compound semiconductor member is not less than twice an intensity of a peak located on a longer wavelength side than the wavelength corresponding to the bandgap.
  • Another gallium nitride compound semiconductor membrane according to the present invention is a gallium nitride compound semiconductor membrane formed on a gallium nitride compound semiconductor member wherein in an emission spectrum obtained by measurement of photoluminescence on a surface of the gallium nitride compound semiconductor member, an intensity of a peak at a wavelength corresponding to a bandgap of the gallium nitride compound semiconductor member is not less than 1/10 of an intensity of a peak at the wavelength in an emission spectrum obtained by measurement of photoluminescence on a surface of a gallium nitride compound semiconductor member without damage.
  • FIG. 1 is a flowchart showing steps in a damage evaluation method of a compound semiconductor member and in a production method of a compound semiconductor member according to an embodiment.
  • FIG. 2 is a drawing schematically showing a photoluminescence measurement step.
  • FIG. 3 is a sectional view schematically showing a compound semiconductor membrane provided on a substrate.
  • FIG. 4 is a drawing schematically showing an emission spectrum obtained by photoluminescence measurement.
  • FIG. 5A is a sectional view schematically showing a compound semiconductor substrate in a thin film forming step
  • FIG. 5B is a sectional view schematically showing a compound semiconductor membrane in the thin film forming step.
  • FIG. 6A is a sectional view schematically showing a compound semiconductor substrate in an electrode forming step
  • FIG. 6B is a sectional view schematically showing a compound semiconductor membrane in the electrode forming step.
  • FIG. 7 is a graph showing an emission spectrum obtained from a monocrystalline GaN substrate of Experiment Example 5.
  • FIG. 8 is a graph showing a correlation between photoluminescence measurement and cathodoluminescence measurement.
  • FIG. 9 shows intensities of a peak near 365 nm in respective emission spectra obtained from monocrystalline GaN substrates of Experiment Example 1 to Experiment Example 5.
  • FIG. 1 is a flowchart showing steps in a damage evaluation method of a compound semiconductor member and in a production method of a compound semiconductor member according to an embodiment.
  • the damage evaluation method of the compound semiconductor member according to the embodiment includes a photoluminescence measurement step S 1 and a damage evaluation step S 2 .
  • the production method of the compound semiconductor member according to the embodiment includes the photoluminescence measurement step S 1 and damage evaluation step S 2 and, preferably, further includes a thin film forming step S 3 and an electrode forming step S 4 .
  • FIG. 2 is a drawing schematically showing the photoluminescence measurement step.
  • the photoluminescence measurement step S 1 is to perform measurement of photoluminescence on a surface 10 a of a compound semiconductor substrate 10 (compound semiconductor member).
  • the photoluminescence measurement is preferably carried out with a photoluminescence measurement device 16 .
  • the photoluminescence measurement device 16 has a light source 12 for emitting light L 1 toward the surface 10 a of the compound semiconductor substrate 10 .
  • the energy of light L 1 is set to be higher than the bandgap of the compound semiconductor substrate 10 .
  • electrons are excited from the valence band to the conduction band and then return to the valence band to emit light L 2 from the compound semiconductor substrate 10 .
  • the light L 2 enters a light detection unit 14 , an emission spectrum is acquired.
  • the light L 1 is preferably monochromatic laser light, but may include a plurality of wavelength components.
  • the light source 12 to be used is preferably a dye laser.
  • the light L 1 can be white light containing wavelength components with energy higher than the bandgap of the compound semiconductor substrate 10 .
  • the compound semiconductor substrate 10 Since the compound semiconductor substrate 10 is a bulk, it will suffer little influence from other members, e.g. influence of the back surface of the compound semiconductor substrate 10 or influence of a jig for fixing the compound semiconductor substrate 10 even if the light L 1 penetrates deep, for example, into the interior of the compound semiconductor substrate 10 in the photoluminescence measurement.
  • the bandgap of the compound semiconductor substrate 10 is preferably not less than 1.6 ⁇ 10 ⁇ 19 J (1 eV). In this case, even if the compound semiconductor substrate 10 is heated by the light L 1 during the photoluminescence measurement, the compound semiconductor substrate 10 will be less likely to be affected by heat. For this reason, the photoluminescence measurement can be performed without difficulty and with high accuracy.
  • the compound semiconductor substrate 10 is preferably comprised of a nitride compound semiconductor containing at least one of B, Al, and Ga.
  • the compound semiconductor substrate 10 is preferably comprised of an oxide compound semiconductor containing at least one of Be and Zn.
  • the compound semiconductor substrate 10 is preferably comprised of a ZnSe compound semiconductor. In all these cases, the bandgap of the compound semiconductor substrate 10 is increased, and thus the compound semiconductor substrate becomes less likely to be affected by heat in the photoluminescence measurement.
  • the compound semiconductor substrate 10 is made, for example, of a III-V compound semiconductor such as GaAs or InP, a nitride compound semiconductor such as BN, GaN, AlN, or InN, a II-VI compound semiconductor such as ZnO or ZnS, an oxide compound semiconductor such as Be x O y , ZnO, Ga 2 O 3 , or Al 2 O 3 , a ZnSe compound semiconductor such as ZnSe, or a ternary compound semiconductor such as GaAlN or InGaN.
  • III-V compound semiconductor such as GaAs or InP
  • a nitride compound semiconductor such as BN, GaN, AlN, or InN
  • a II-VI compound semiconductor such as ZnO or ZnS
  • an oxide compound semiconductor such as Be x O y , ZnO, Ga 2 O 3 , or Al 2 O 3
  • a ZnSe compound semiconductor such as ZnSe
  • a ternary compound semiconductor such as GaAl
  • the gallium nitride compound semiconductor suitably applicable is of the wurtzite structure or the zinc blende (cubic crystal) structure.
  • the surface 10 a may be any one of the (0001) face called the C-plane, the (10-10) face called the M-plane, the (11-20) face called the A-plane, the (01-12) face called the R-plane, and the (10-11) face called the S-plane.
  • the C-plane can be either a Ga plane consisting of Ga or an N plane consisting of N. Since the Ga plane is normally more resistant to etching, the surface 10 a is preferably the Ga plane, but the surface 10 a may be the N plane.
  • a compound semiconductor membrane 20 (compound semiconductor member) shown in FIG. 3 may also be used instead of the compound semiconductor substrate 10 .
  • FIG. 3 is a sectional view schematically showing a compound semiconductor membrane provided on a substrate.
  • the substrate 22 shown in FIG. 3 is, for example, an amorphous substrate such as a glass substrate, or a monocrystalline substrate such as a sapphire substrate or Si substrate.
  • a constituent material of the compound semiconductor membrane 20 can be one of the materials listed for the compound semiconductor substrate 10 .
  • the photoluminescence measurement is carried out by projecting the light L 1 onto a surface 20 a of the compound semiconductor membrane 20 . If the light L 1 is made incident from the direction perpendicular to the surface 20 a, the light L 2 can contain more information about the substrate 22 , depending upon the film thickness of the compound semiconductor membrane 20 . As the direction of incidence of the light L 1 deviates from the direction perpendicular to the surface 20 a, the information about the substrate 22 in the light L 2 tends to decrease relatively.
  • FIG. 4 is a drawing schematically showing an emission spectrum obtained by the photoluminescence measurement.
  • the damage evaluation step S 2 is to evaluate damage on the surface 10 a of the compound semiconductor substrate 10 , using the emission spectrum obtained by the photoluminescence measurement. Examples of such damage include damage, scratches, distortion, or the like due to polishing, etching, or the like.
  • the emission spectrum shown in FIG. 4 has a peak P 1 at a wavelength ⁇ 1 corresponding to the bandgap of the compound semiconductor substrate 10 .
  • the wavelength ⁇ 1 has the same energy as the bandgap.
  • the peak P 1 does not always have to be maximum at the wavelength ⁇ 1 .
  • This emission spectrum also has a peak P 2 at a wavelength ⁇ 2 located on the longer wavelength side than the wavelength ⁇ 1 .
  • the peak P 2 does not always have to be maximum at the wavelength ⁇ 2 .
  • the use of this emission spectrum enables detailed evaluation of damage on the surface 10 a by Method 1 to Method 4 described below.
  • the compound semiconductor substrate 10 is made, for example, of a monocrystalline material or polycrystalline material
  • the monocrystalline material or polycrystalline material turns into the amorphous form in a damaged region, and thus it becomes easier to discriminate the damaged region from the other region without damage. For this reason, damage becomes easier to detect, so that the accuracy of damage evaluation can be improved.
  • Method 1 is to perform evaluation of damage using the half width W 1 of the peak P 1 .
  • Method 1 enables detailed damage evaluation as described below, using the half width W 1 of the peak P 1 .
  • the half width W 1 of the peak P 1 varies with change in the spread of the band of the compound semiconductor substrate 10 .
  • the spread of the band varies with change in the interatomic distance between atoms constituting the compound semiconductor substrate 10 .
  • the interatomic distance varies depending upon the level of damage on the surface 10 a. Therefore, the level of damage can be evaluated in detail by use of the half width W 1 of the peak P 1 .
  • the half width W 1 of the peak P 1 tends to increase with increasing level of damage.
  • Method 1 is suitably applicable to production of compound semiconductor substrate 10 .
  • the compound semiconductor substrate 10 is determined to be nondefective when the half width W 1 of the peak P 1 is not more than a predetermined threshold; this permits the compound semiconductor substrate 10 with a low level of damage to be produced at a high yield.
  • Method 2 is to perform evaluation of damage using the intensity I 2 of the peak P 2 .
  • Method 2 enables detailed damage evaluation as described below, using the intensity I 2 of the peak P 2 .
  • the peak P 2 arises from energy levels appearing between bands of the compound semiconductor substrate 10 . Therefore, the peak P 2 appears if damage to induce emission of light exists in the compound semiconductor substrate 10 . Since the intensity I 2 of the peak P 2 varies depending upon the level of damage to induce emission of light, the level of damage can be evaluated in detail by use of the intensity I 2 of the peak P 2 . For example, the intensity I 2 of the peak P 2 tends to increase with increasing level of damage.
  • Method 2 is suitably applicable to production of compound semiconductor substrate 10 .
  • the compound semiconductor substrate 10 is determined to be nondefective when the intensity I 2 of the peak P 2 is not more than a predetermined threshold, relative to an intensity of a peak located at the wavelength ⁇ 2 in an emission spectrum obtained by photoluminescence measurement on a surface of a compound semiconductor substrate from which damage is preliminarily eliminated; this permits the compound semiconductor substrate 10 with a low level of damage to be produced at a high yield.
  • Method 3 is to perform evaluation of damage using the half width W 2 of the peak P 2 .
  • Method 3 enables detailed damage evaluation as described below, using the half width W 2 of the peak P 2 .
  • the level of damage can be evaluated in detail by use of the half width W 2 of the peak P 2 .
  • the half width W 2 of the peak P 2 tends to increase with increasing level of damage.
  • Method 3 is suitably applicable to production of compound semiconductor substrate 10 .
  • the compound semiconductor substrate 10 is determined to be nondefective when the half width W 2 of the peak P 2 is not more than a predetermined threshold; this permits the compound semiconductor substrate 10 with a low level of damage to be produced at a high yield.
  • Method 4 is to perform evaluation of damage using an intensity ratio (I 1 /I 2 ) of the intensity I 1 of the peak P 1 to the intensity I 2 of the peak P 2 .
  • Method 4 enables detailed damage evaluation as described below, using the intensity ratio (I 1 /I 2 ).
  • the intensity ratio (I 1 /I 2 ) can be an index of relationship between the level of damage to change arrangement of atoms constituting the compound semiconductor substrate 10 and the level of damage to induce emission of light. Therefore, the relationship can be evaluated in detail by use of the intensity ratio (I 1 /I 2 ). For example, the intensity ratio (I 1 /I 2 ) tends to decrease with increasing level of damage.
  • Method 4 is suitably applicable to production of compound semiconductor substrate 10 .
  • the compound semiconductor substrate 10 is determined to be nondefective when the intensity ratio (I 1 /I 2 ) is not less than a predetermined threshold; this permits the compound semiconductor substrate 10 with a low level of damage to be produced at a high yield.
  • Method 5 is to perform evaluation of damage using the intensity I 1 of the peak P 1 .
  • the intensity I 1 of the peak P 1 decreases with increasing level of damage.
  • Method 5 is suitably applicable to production of compound semiconductor substrate 10 .
  • the compound semiconductor substrate 10 is determined to be nondefective when the intensity I 1 of the peak P 1 is not less than a predetermined threshold, relative to an intensity of a peak located at the wavelength ⁇ 1 in an emission spectrum obtained by photoluminescence measurement on a surface of a compound semiconductor substrate from which damage is preliminarily eliminated; this permits the compound semiconductor substrate 10 with a low level of damage to be produced at a high yield.
  • the intensity ratio (I 1 /I 2 ) is preferably not less than 2.
  • a gallium nitride compound semiconductor substrate is obtained with a low level of damage on its surface.
  • the intensity I 1 of the peak P 1 at the wavelength ⁇ 1 (near 365 nm) is preferably not less than 1/10 of an intensity of a peak at the wavelength ⁇ 1 (near 365 nm) in an emission spectrum obtained by photoluminescence measurement on a surface of a gallium nitride compound semiconductor substrate from which damage is eliminated (a gallium nitride compound semiconductor member without damage).
  • a gallium nitride compound semiconductor substrate is obtained with a low level of damage on its surface.
  • Damage of compound semiconductor membrane 20 may also be evaluated instead of the compound semiconductor substrate 10 .
  • the photoluminescence measurement is preliminarily carried out on the surface 22 a of the substrate 22 , and the level of damage can be evaluated in detail on the surface 20 a of the compound semiconductor membrane 20 provided on the substrate 22 , by one of Method 1 to Method 4. Since the relative influence of damage on the compound semiconductor membrane 20 is greater, the damage can be detected easier even if the level of damage is low.
  • the compound semiconductor membrane 20 with a low level of damage can be produced at a high yield by use of Method 1 to Method 5.
  • the intensity ratio (I 1 /I 2 ) is preferably not less than 2. In this case, a gallium nitride compound semiconductor membrane is obtained with a low level of damage on its surface.
  • the intensity I 1 of the peak P 1 at the wavelength ⁇ 1 (near 365 nm) is preferably not less than 1/10 of an intensity of a peak at the wavelength ⁇ 1 (near 365 nm) in an emission spectrum obtained by photoluminescence measurement on a surface of a gallium nitride compound semiconductor membrane from which damage is eliminated (a gallium nitride compound semiconductor member without damage).
  • a gallium nitride compound semiconductor membrane is obtained with a low level of damage on its surface.
  • FIG. 5A is a sectional view schematically showing a compound semiconductor substrate in the thin film forming step.
  • FIG. 5B is a sectional view schematically showing a compound semiconductor membrane in the thin film forming step.
  • the thin film forming step S 3 is preferably carried out after the damage evaluation step S 2 .
  • the thin film forming step S 3 is to form a thin film 30 on the surface 10 a of the compound semiconductor substrate 10 , as shown in FIG. 5A .
  • the thin film 30 is formed, for example, by an epitaxial growth method.
  • the thin film 30 can be a compound semiconductor film, an oxide film, a ZnO film, an amorphous film, or the like.
  • an improvement is made in crystallinity and surface roughness of the thin film 30 .
  • the compound semiconductor substrate 10 is made of a gallium nitride compound semiconductor and where the intensity ratio (I 1 /I 2 ) is not less than 2, an improvement is made in crystallinity and surface roughness of the thin film 30 made of a gallium nitride compound semiconductor.
  • the compound semiconductor substrate 10 is made of a gallium nitride compound semiconductor and where the intensity I 1 of the peak P 1 at the wavelength ⁇ 1 (near 365 nm) is not less than 1/10 of an intensity of a peak at the wavelength ⁇ 1 (near 365 nm) in an emission spectrum obtained by photoluminescence measurement on a surface of a gallium nitride compound semiconductor substrate from which damage is eliminated (a gallium nitride compound semiconductor member without damage), an improvement is made in crystallinity and surface roughness of the thin film 30 made of a gallium nitride compound semiconductor.
  • the thin film forming step S 3 may also be to form a thin film 32 on the surface 20 a of the compound semiconductor membrane 20 , as shown in FIG. 5B .
  • the thin film 32 is formed, for example, by an epitaxial growth method.
  • the thin film 32 can be the same as the thin film 30 .
  • an improvement is made in crystallinity and surface roughness of the thin film 32 .
  • the compound semiconductor membrane 20 is made of a gallium nitride compound semiconductor and where the intensity ratio (I 1 /I 2 ) is not less than 2, an improvement is made in crystallinity and surface roughness of the thin film 32 made of a gallium nitride compound semiconductor.
  • the compound semiconductor membrane 20 is made of a gallium nitride compound semiconductor and where the intensity I 1 of the peak P 1 at the wavelength ⁇ 1 (near 365 nm) is not less than 1/10 of an intensity of a peak at the wavelength ⁇ 1 (near 365 nm) in an emission spectrum obtained by photoluminescence measurement on a surface of a gallium nitride compound semiconductor membrane from which damage is eliminated (a gallium nitride compound semiconductor member without damage), an improvement is made in crystallinity and surface roughness of the thin film 32 made of a gallium nitride compound semiconductor.
  • FIG. 6A is a sectional view schematically showing a compound semiconductor substrate in the electrode forming step.
  • FIG. 6B is a sectional view schematically showing a compound semiconductor membrane in the electrode forming step.
  • the electrode forming step S 4 is preferably carried out after the damage evaluation step S 2 and more preferably carried out after the thin film forming step S 3 .
  • the electrode forming step S 4 is to form an electrode 40 , for example, of a metal film or the like on the thin film 30 , as shown in FIG. 6A .
  • the thin film 30 has excellent crystallinity and reduced surface roughness, and occurrence of damage can be suppressed at the interface between the thin film 30 and the electrode 40 .
  • the electrode 40 may also be formed directly on the surface 10 a of the compound semiconductor substrate 10 . In that case, when the compound semiconductor substrate 10 with a low level of damage is used, occurrence of damage can be suppressed at the interface between the compound semiconductor substrate 10 and the electrode 40 .
  • the electrode forming step S 4 may also be to form an electrode 42 on the thin film 32 , as shown in FIG. 6B .
  • the thin film 32 has excellent crystallinity and reduced surface roughness, and occurrence of damage can be suppressed at the interface between the thin film 32 and the electrode 42 .
  • the electrode 40 may also be formed directly on the surface 20 a of the compound semiconductor membrane 20 . In that case, when the compound semiconductor membrane 20 with a low level of damage is used, occurrence of damage can be suppressed at the interface between the compound semiconductor membrane 20 and the electrode 42 .
  • a compound semiconductor device can be produced through the steps described above.
  • a monocrystalline GaN ingot was sliced to prepare a monocrystalline GaN substrate with the diameter of 2 inches.
  • the surface of the monocrystalline GaN substrate prepared was polished and thereafter the surface was dry-etched by reactive ion etching (RIE).
  • RIE reactive ion etching
  • the monocrystalline GaN substrate was immersed in a 5% NH 4 OH solution at 40° C. for 15 minutes to effect wet etching.
  • the monocrystalline GaN substrate of Experiment Example 1 was obtained as described above.
  • a monocrystalline GaN ingot was sliced to prepare a monocrystalline GaN substrate with the diameter of 2 inches.
  • the surface of the monocrystalline GaN substrate prepared was roughly polished and thereafter the surface was further polished by means of diamond abrasive grains with the grain size of 0.5 ⁇ m. Thereafter, the surface was cleaned with isopropyl alcohol.
  • the monocrystalline GaN substrate of Experiment Example 2 was obtained as described above.
  • a monocrystalline GaN substrate of Experiment Example 3 was obtained in the same manner as in Experiment Example 2 except that diamond abrasive grains with the grain size of 0.1 ⁇ m were used instead of the diamond abrasive grains with the grain size of 0.5 ⁇ m.
  • a monocrystalline GaN substrate of Experiment Example 4 was obtained by effecting dry etching in Experiment Example 1 on a monocrystalline GaN substrate obtained in the same manner as in Experiment Example 3.
  • a monocrystalline GaN substrate of Experiment Example 5 was obtained by effecting wet etching with a diluted H 3 PO 4 solution on a monocrystalline GaN substrate obtained in the same manner as in Experiment Example 4.
  • the photoluminescence measurement was conducted using a He—Cd laser that can emit a laser beam with the wavelength of 325 nm, as the light source 12 .
  • the laser beam is made incident normally to the surfaces of the monocrystalline GaN substrates of Experiment Example 1 to Experiment Example 5, to obtain their respective emission spectra.
  • FIG. 7 shows an example of an emission spectrum.
  • FIG. 7 is a graph showing the emission spectrum obtained from the monocrystalline GaN substrate of Experiment Example 5.
  • the vertical axis indicates the PL intensities (photoluminescence intensities) and the horizontal axis the wavelengths.
  • the PL intensities are relative values with respect to 1 for the intensity I 1 of the peak P 1 near 365 nm.
  • a broad peak P 2 appears near 470-640 nm on the longer wavelength side than 365 nm.
  • the photoluminescence measurement was carried out at wavelength intervals of 0.5 nm and values near the peak P 1 were interpolated by a Gaussian distribution.
  • the background was adjusted by linear approximation of wing portions of the peak P 1 .
  • FIG. 8 is a graph showing a correlation between photoluminescence measurement and cathodoluminescence measurement.
  • the vertical axis indicates the PL intensities and the horizontal axis the CL intensities (cathodoluminescence intensities).
  • plot D 1 to plot D 5 represent respective intensities I 1 of the peak P 1 near 365 nm in the emission spectra obtained from the monocrystalline GaN substrates of Experiment Example 1 to Experiment Example 5.
  • the PL intensities are relative values with respect to 1 for the intensity I 1 of the peak P 1 near 365 nm in the emission spectrum obtained from the monocrystalline GaN substrate of Experiment Example 2.
  • the CL intensities are also relative values with respect to 1 for the CL intensity in the monocrystalline GaN substrate of Experiment Example 2.
  • FIG. 9 shows the intensities I 1 of the peak P 1 near 365 nm in the emission spectra obtained from the monocrystalline GaN substrates of Experiment Example 1 to Experiment Example 5. It is seen from FIG. 9 that the level of damage on the surface increases in the order of Experiment Example 1, Experiment Example 4, Experiment Example 5, Experiment Example 3, and Experiment Example 2.
  • Table 1 shows the half width W 1 of the peak P 1 near 365 nm in each of the emission spectra obtained from the monocrystalline GaN substrates of Experiment Example 1 to Experiment Example 5. It is seen from Table 1 that the half width W 1 of the peak P 1 increases with increasing level of damage. TABLE 1 Half Width W 1 of Peak P 1 [nm] Experiment Example 2 10.6 Experiment Example 3 9.7 Experiment Example 5 8.4 Experiment Example 4 8.1 Experiment Example 1 7.1
  • Table 2 shows the intensity I 2 and half width W 2 of the peak P 2 in each of the emission spectra obtained from the monocrystalline GaN substrates of Experiment Example 1 to Experiment Example 5. It is seen from Table 2 that the intensity I 2 and half width W 2 of the peak P 2 both increase with increasing level of damage. TABLE 2 Half Width W 2 of Intensity I 2 of Peak P 2 Peak P 2 [nm] Experiment 1 142 Example 2 Experiment 0.86 137 Example 3 Experiment 0.31 134 Example 5 Experiment 0.25 105 Example 4 Experiment 0.11 101 Example 1
  • Table 3 shows the intensity ratio (I 1 /I 2 ) in each of the emission spectra obtained from the monocrystalline GaN substrates of Experiment Example 1 to Experiment Example 5. It is seen from Table 3 that the intensity ratio (I 1 /I 2 ) decreases with increasing level of damage. TABLE 3 Intensity Ratio (I 1 /I 2 ) Experiment Example 2 1 Experiment Example 3 4 Experiment Example 5 19 Experiment Example 4 28 Experiment Example 1 100
  • a monocrystalline GaN substrate of Experiment Example 6 without damage was obtained in the same manner as in Experiment Example 1, except that the substrate used was a monocrystalline GaN substrate 20 mm square.
  • a monocrystalline GaN ingot was sliced to prepare a monocrystalline GaN substrate 20 mm square.
  • the surface of the monocrystalline GaN substrate prepared was roughly polished and thereafter the surface was further polished by means of diamond abrasive grains with the grain size of 0.3 ⁇ m, to obtain the monocrystalline GaN substrate of Experiment Example 7.
  • a monocrystalline GaN substrate of Experiment Example 8 was obtained in the same manner as in Experiment Example 7 except that diamond abrasive grains with the grain size of 0.8 ⁇ m were used instead of the diamond abrasive grains with the grain size of 0.3 ⁇ m.
  • GaCl gas is obtained by reaction of Ga metal with HCl gas at 880° C.
  • the present invention provides the damage evaluation methods of the compound semiconductor member permitting the detailed evaluation of the level of damage on the surface and the production methods of the compound semiconductor member with a low level of damage, and also provides the gallium nitride compound semiconductor members and gallium nitride compound semiconductor membranes with a low level of damage.

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