GB2306640B - Method of characterising a semiconductor material - Google Patents

Method of characterising a semiconductor material

Info

Publication number
GB2306640B
GB2306640B GB9521226A GB9521226A GB2306640B GB 2306640 B GB2306640 B GB 2306640B GB 9521226 A GB9521226 A GB 9521226A GB 9521226 A GB9521226 A GB 9521226A GB 2306640 B GB2306640 B GB 2306640B
Authority
GB
United Kingdom
Prior art keywords
characterising
semiconductor material
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9521226A
Other versions
GB9521226D0 (en
GB2306640A (en
Inventor
Andrew James Shields
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Europe Ltd
Original Assignee
Toshiba Cambridge Research Centre Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Cambridge Research Centre Ltd filed Critical Toshiba Cambridge Research Centre Ltd
Priority to GB9521226A priority Critical patent/GB2306640B/en
Publication of GB9521226D0 publication Critical patent/GB9521226D0/en
Publication of GB2306640A publication Critical patent/GB2306640A/en
Application granted granted Critical
Publication of GB2306640B publication Critical patent/GB2306640B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors

Landscapes

  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
GB9521226A 1995-10-17 1995-10-17 Method of characterising a semiconductor material Expired - Fee Related GB2306640B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9521226A GB2306640B (en) 1995-10-17 1995-10-17 Method of characterising a semiconductor material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9521226A GB2306640B (en) 1995-10-17 1995-10-17 Method of characterising a semiconductor material

Publications (3)

Publication Number Publication Date
GB9521226D0 GB9521226D0 (en) 1995-12-20
GB2306640A GB2306640A (en) 1997-05-07
GB2306640B true GB2306640B (en) 1998-01-14

Family

ID=10782416

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9521226A Expired - Fee Related GB2306640B (en) 1995-10-17 1995-10-17 Method of characterising a semiconductor material

Country Status (1)

Country Link
GB (1) GB2306640B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8218140B2 (en) 2005-10-11 2012-07-10 Bt Imaging Pty Limited Method and system for inspecting indirect bandgap semiconductor stucture

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006339605A (en) 2005-06-06 2006-12-14 Sumitomo Electric Ind Ltd Method of evaluating damage of compound semiconductor member, method of manufacturing compound semiconductor member, gallium nitride based compound semiconductor member and gallium nitride based compound semiconductor film
CN102483378B (en) 2009-07-20 2014-06-18 Bt成像股份有限公司 Separation of doping density and minority carrier lifetime in photoluminescence measurements on semiconductor materials
JP6268039B2 (en) * 2014-05-23 2018-01-24 グローバルウェーハズ・ジャパン株式会社 Calibration curve creation method, impurity concentration measurement method, and semiconductor wafer manufacturing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4492871A (en) * 1981-10-07 1985-01-08 Agency Of Industrial Science & Technology Method for determining impurities in epitaxial silicon crystals

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4492871A (en) * 1981-10-07 1985-01-08 Agency Of Industrial Science & Technology Method for determining impurities in epitaxial silicon crystals

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8218140B2 (en) 2005-10-11 2012-07-10 Bt Imaging Pty Limited Method and system for inspecting indirect bandgap semiconductor stucture
US9234849B2 (en) 2005-10-11 2016-01-12 Bt Imaging Pty Limited Method and system for inspecting indirect bandgap semiconductor structure
US9909991B2 (en) 2005-10-11 2018-03-06 Bt Imaging Pty Limited Method and system for inspecting indirect bandgap semiconductor structure

Also Published As

Publication number Publication date
GB9521226D0 (en) 1995-12-20
GB2306640A (en) 1997-05-07

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20101017