US20050101226A1 - Finishing polishing method - Google Patents

Finishing polishing method Download PDF

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Publication number
US20050101226A1
US20050101226A1 US10/705,017 US70501703A US2005101226A1 US 20050101226 A1 US20050101226 A1 US 20050101226A1 US 70501703 A US70501703 A US 70501703A US 2005101226 A1 US2005101226 A1 US 2005101226A1
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US
United States
Prior art keywords
polishing
finishing
polishing element
range
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/705,017
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English (en)
Inventor
Jean-Jacques Ferme
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Europeenne de Systemes Optiques Ste
Original Assignee
Europeenne de Systemes Optiques Ste
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to AT03292647T priority Critical patent/ATE322957T1/de
Priority to EP03292647A priority patent/EP1525947B1/fr
Priority to ES03292647T priority patent/ES2262958T3/es
Priority to DK03292647T priority patent/DK1525947T3/da
Priority to DE60304579T priority patent/DE60304579T2/de
Application filed by Europeenne de Systemes Optiques Ste filed Critical Europeenne de Systemes Optiques Ste
Priority to US10/705,017 priority patent/US20050101226A1/en
Assigned to SOCIETE EUROPEENNE DE SYSTEMES OPTIQUES reassignment SOCIETE EUROPEENNE DE SYSTEMES OPTIQUES ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FERME, JEAN-JACQUES
Publication of US20050101226A1 publication Critical patent/US20050101226A1/en
Abandoned legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories

Definitions

  • the present invention relates to a method of performing finishing polishing on a surface using a polishing element and an abrasive.
  • a polishing element e.g. a felt
  • an abrasive e.g. colloidal silica.
  • the technique that is generally used consists in sticking the felt on a metal tool, optionally with flexible material of the foam type, for example, being interposed between them. That technique presents the drawback of deforming the surface to be polished, and so the results obtained are not as good as they should be.
  • the present invention provides a method that enables the above-mentioned problem to be remedied, at least in part.
  • the invention thus provides a method of finishing polishing a surface using a polishing element and an abrasive, the method implementing the following steps:
  • said material is deformable in creep and/or is hardenable.
  • it may be pitch which is heated to a temperature that enables it to creep and which, after b) and before c), is subsequently cooled in order to cause it to harden, or it may be an adhesive which is in the form of a gel and which is hardened, after b) and before c), for example by being polymerized, or by applying radiation, and in particular ultraviolet (UV) radiation.
  • the material may be plaster.
  • the polishing element may be a felt or any other polishing material suitable for performing finishing polishing that leads to very low levels of roughness (of the order of 1 Angstrom ( ⁇ ) to a few ⁇ , for example).
  • the polishing material is advantageously carried by a polishing support.
  • finishing polishing may be performed with the help of a machine that imparts relative displacement in translation between the polishing element and the surface to be polished in two perpendicular directions, and possibly also in rotation about an axis parallel to one of said perpendicular directions.
  • Finishing polishing is particularly suitable for use with surfaces of the kind that have a generator line, the surface being disposed in such a manner that the direction of its generator line is parallel to that one of the two above-mentioned directions which is parallel to the axis of rotation.
  • the method applies in particular to surfaces which, prior to finishing polishing, have previously been subjected to pre-polishing (or “coarse” polishing), and to polishing, proper.
  • the surface presents roughness lying in the range 3 ⁇ to 15 ⁇ , for example, whereas after finishing polishing, its roughness may lie in the range 1 ⁇ to 5 ⁇ , and more particularly 1 ⁇ to 3 ⁇ for surfaces made of glass, silica, silicon, or ceramic (or even in the range 1 ⁇ to 2 ⁇ for surfaces made of glass or of silica), or in the range 3 ⁇ to 5 ⁇ for a nickel coating on a metal surface.
  • FIGS. 1A and 1B are section views showing the finishing polishing method of the invention being implemented.
  • FIG. 2 shows a machine for performing finishing polishing on a surface in the context of the present invention
  • FIGS. 3A and 3B or 4 A and 4 B show two other embodiments of the machine.
  • the invention relates to finishing polishing for low-roughness surfaces (in particular mirrors) of a shape which is rectangular, for example.
  • the invention relies on using polishing machines having drive systems for imparting movement along two perpendicular linear axes.
  • the shapes generated on the surfaces may be plane, spherical, or cylindrical in long dimension (meridianal cylinder) or in short dimension (sagittal cylinder), mirrors having a meridianal profile that is elliptical or parabolic, or mirrors that are parabolic or elliptical, representing a portion of a body of revolution.
  • One of the applications for such surfaces is making mirrors suitable for use in processing X-ray beams emitted by synchrotron type or free electron laser type light sources.
  • this step is conventional for working on materials of the glass or ceramic or silicon type and it consists in shaping the support on which the low-roughness surface is to be made.
  • Such tools are close to those of the surface to be polished.
  • Such tools can be obtained by machining of the kind that is conventional in engineering.
  • the material used may be aluminum, brass, and in some cases pieces of glass stuck to a mechanical support.
  • a polishing machine having a drive system with two linear axes, serving to impart relative shapes to the tool and to the surface to be polished.
  • the surface that is to be polished is applied to the tool and relative movement is imparted between the surface and the tool parallel to the major length of the surface together with a movement that is perpendicular for the width.
  • Either the tool or the surface is held stationary and the complementary piece is moved, being driven by the two movements in translation.
  • the tool is driven in translation while the surface is driven to move in perpendicular translation.
  • either the tool or the surface is free to turn about an axis parallel to its long direction.
  • a bedding operation is performed using conventional polishing abrasives and the grain size is reduced until a surface is obtained having a fine polished appearance.
  • the tool is retouched until the final geometrical shape is obtained on the surface to be polished to within a few microns ( ⁇ m).
  • Movement in the long direction (X direction) is of an amplitude lying in the range 5 millimeters (mm) to 200 mm, for example, and in the width direction (Y direction), it is of an amplitude lying, for example, in the range 1 mm to 100 mm.
  • polishing material is pitch which is cast onto the tool and then shaped with the surface to be polished by being heated.
  • the polishing abrasive used is constituted by cerium oxide, for example. Polishing pressures lie in the range 5 grams per square centimeter (g/cm 2 ) to 100 g/cm 2 , for example. This polishing is terminated when the surface to be polished has the right shape and there are no longer any points or defects corresponding to the preceding steps. At this stage, roughness lies in the range 3 ⁇ to 15 ⁇ for square analysis zones having a side of 1 ⁇ m to 1000 ⁇ m.
  • the felt is stuck directly to the pitch and advantage is taken of its ability to creep in order to shape the surface of the felt so that it is complementary to the surface that is to be polished.
  • Shaping is performed by heating the pitch, the tool, or the substrate of the surface to be polished, the mold being the surface that is to be polished itself. Heating is performed to a temperature of about 60° C. at which pitch becomes sufficiently viscous to deform in creep without running.
  • the movements and the pressures that are applied are similar to those used during polishing proper (step 4 above), i.e. they lie in the range 5 g/cm 2 to 100 g/cm 2 .
  • the felt is stuck to a metal tool, optionally with a flexible material of the foam type, for example, being interposed between the tool and the felt.
  • the advantage of the method of the invention is that it makes a tool available that is hard (pitch at a temperature of 20° C.) with an outline that matches the shape of the surface to be polished.
  • the roughness obtained generally lies in the range 1 ⁇ to 2 ⁇ for materials of the glass or silica type. It generally lies in the range 1 ⁇ to 3 ⁇ for silicon and ceramic, and in the range 3 ⁇ to 5 ⁇ for nickel-coated metal surfaces.
  • the polishing element 2 (e.g. of thickness lying in the range 0.1 mm to 2 mm) is stuck on the pitch 3 which is secured to a support 4 , e.g. a cylindrical support that acts as a polishing tool.
  • the polishing element 2 may be of a porous material such as a felt, and in particular a microcellular polyurethane foam from the supplier Rhodes (Bierkeek, Belgium) or a porous synthetic material (“Finishing Pad”) from the supplier Rodel, or polishing supports (or “drops”) from the supplier Buehler.
  • the tool 4 is pressed against the surface to be polished 6 of the optical component 1 at a pressure that is sufficient for creep deformation of the pitch to enable the felt 2 in contact with the surface 6 to adopt locally the shape of the surface 6 .
  • the felt 2 which may be constituted by one or more pieces, preferably has a surface 5 of area that is equal to that of the surface 6 plus or minus 20%.
  • the pressure P applied during finishing polishing is of the order of 5 g/cm 2 to 100 g/cm 2 .
  • FIG. 1B shows the method for a plane surface or a mirror having a generator line G in the plane of the section.
  • FIG. 2 shows a machine suitable for use in implementing the finishing polishing method, and also for the earlier steps of smoothing, pre-polishing, and polishing proper.
  • Each of the sliders carries a respective arm 17 , 18 , e.g. extending in a direction Y that is perpendicular to the direction X, with height adjacent means 17 ′, 18 ′ in a direction Z that is perpendicular both to X and to Y.
  • Each of the arms presents a housing 19 , 20 for receiving a rotary shaft 21 , 22 of a part carrier 23 that carries the component 1 whose surface 6 is to be subjected finishing polishing.
  • the tool 4 is placed on a support 15 secured to a table 27 presenting means for moving the tool 4 and thus also the felt 2 in translation in the direction Y perpendicular to the direction X.
  • These means for moving in translation are constituted by slideways 26 , for example.
  • Polishing speeds in each of the directions X and Y can be selected to lie in the range 0.05 meters per second (m/s) to 0.5 m/s, for example.
  • FIGS. 3A & 3B and FIGS. 4A & 4B show two implementations of finishing polishing (after the support of deformable material, e.g. pitch or adhesive, has hardened).
  • Displacement in the X direction e.g. in the range 5 mm to 200 mm
  • movement in translation in the Y direction e.g. in the range 1 mm to 100 mm
  • rotation about the axis of ( 21 , 22 ) enables the surface 6 to polish and follow the polishing element 2 by turning as it is displaced along the Y direction.
  • the combination of these three movements serves to polish the surface over its outline and over its entire length.
  • the component 1 is of cylindrical or plane section and is carried by the part carrier 23 and the tool 4 is secured to the support 25 .
  • the component 1 is cylindrical or plane and is secured to the support 25 , while it is the tool 4 that is carried by the part carrier 23 .
  • the method also applies to surfaces that do not have a generator line. Shaping the element 2 improves performance relative to the surface that has the closest generator line.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
US10/705,017 2003-10-23 2003-11-11 Finishing polishing method Abandoned US20050101226A1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
AT03292647T ATE322957T1 (de) 2003-10-23 2003-10-23 Verfahren zum abschliessenden polieren
EP03292647A EP1525947B1 (fr) 2003-10-23 2003-10-23 Procédé de polissage de finition
ES03292647T ES2262958T3 (es) 2003-10-23 2003-10-23 Procedimiento de pulido de acabado.
DK03292647T DK1525947T3 (da) 2003-10-23 2003-10-23 Fremgangsmåde ved slutpolering
DE60304579T DE60304579T2 (de) 2003-10-23 2003-10-23 Verfahren zum abschliessenden Polieren
US10/705,017 US20050101226A1 (en) 2003-10-23 2003-11-11 Finishing polishing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03292647A EP1525947B1 (fr) 2003-10-23 2003-10-23 Procédé de polissage de finition
US10/705,017 US20050101226A1 (en) 2003-10-23 2003-11-11 Finishing polishing method

Publications (1)

Publication Number Publication Date
US20050101226A1 true US20050101226A1 (en) 2005-05-12

Family

ID=34712591

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/705,017 Abandoned US20050101226A1 (en) 2003-10-23 2003-11-11 Finishing polishing method

Country Status (6)

Country Link
US (1) US20050101226A1 (fr)
EP (1) EP1525947B1 (fr)
AT (1) ATE322957T1 (fr)
DE (1) DE60304579T2 (fr)
DK (1) DK1525947T3 (fr)
ES (1) ES2262958T3 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7988534B1 (en) * 2004-05-19 2011-08-02 Sutton Stephen P Optical polishing pitch formulations
US10052737B2 (en) 2013-07-22 2018-08-21 Canon Kabushiki Kaisha Component manufacturing method and polishing apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008043600A1 (de) * 2008-11-10 2010-05-12 Carl Zeiss Smt Ag Glättungswerkzeug und Verfahren zum Glätten einer optischen Oberfläche
CN109079646A (zh) * 2018-08-10 2018-12-25 杨斯晨 一种陶瓷加工用釉面抛光装置

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1651181A (en) * 1924-12-06 1927-11-29 Continental Optical Corp Tool for treating ophthalmic lenses and process of making same
US2822647A (en) * 1955-12-16 1958-02-11 Younger Mfg Company Method and apparatus for forming bifocal lenses
US3583111A (en) * 1966-08-22 1971-06-08 David Volk Lens grinding apparatus
US3594963A (en) * 1969-07-17 1971-07-27 Univis Inc Grinding pad
US4979337A (en) * 1986-10-03 1990-12-25 Duppstadt Arthur G Polishing tool for contact lenses and associated method
US4989316A (en) * 1987-03-09 1991-02-05 Gerber Scientific Products, Inc. Method and apparatus for making prescription eyeglass lenses
US5205083A (en) * 1991-10-24 1993-04-27 Pettibone Dennis R Method and apparatus for polishing optical lenses
US5347763A (en) * 1987-03-19 1994-09-20 Canon Kabushiki Kaisha Polishing apparatus
US5417130A (en) * 1989-04-12 1995-05-23 Carl Benzinger Gmbh & Co. Process and device for machining and workpieces to shape
US5695393A (en) * 1994-11-26 1997-12-09 Loh Optikmaschinen Ag Tool for the precision processing of optical surfaces
US6375551B1 (en) * 1999-06-25 2002-04-23 Corning Incorporated Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms
US6532770B2 (en) * 2000-01-05 2003-03-18 Schott Glass Technologies, Inc. Methods of preparing glass substrates for magnetic media

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3801969A1 (de) * 1988-01-23 1989-07-27 Zeiss Carl Fa Verfahren und vorrichtung zum laeppen bzw. polieren optischer flaechen
US6589102B2 (en) * 2001-01-30 2003-07-08 Larsen Equipment Design, Inc. Surface polishing method and apparatus
FR2843711B1 (fr) * 2002-08-22 2005-05-13 Europ De Systemes Optiques Soc Procede de polissage de finition

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1651181A (en) * 1924-12-06 1927-11-29 Continental Optical Corp Tool for treating ophthalmic lenses and process of making same
US2822647A (en) * 1955-12-16 1958-02-11 Younger Mfg Company Method and apparatus for forming bifocal lenses
US3583111A (en) * 1966-08-22 1971-06-08 David Volk Lens grinding apparatus
US3594963A (en) * 1969-07-17 1971-07-27 Univis Inc Grinding pad
US4979337A (en) * 1986-10-03 1990-12-25 Duppstadt Arthur G Polishing tool for contact lenses and associated method
US4989316A (en) * 1987-03-09 1991-02-05 Gerber Scientific Products, Inc. Method and apparatus for making prescription eyeglass lenses
US5347763A (en) * 1987-03-19 1994-09-20 Canon Kabushiki Kaisha Polishing apparatus
US5417130A (en) * 1989-04-12 1995-05-23 Carl Benzinger Gmbh & Co. Process and device for machining and workpieces to shape
US5205083A (en) * 1991-10-24 1993-04-27 Pettibone Dennis R Method and apparatus for polishing optical lenses
US5695393A (en) * 1994-11-26 1997-12-09 Loh Optikmaschinen Ag Tool for the precision processing of optical surfaces
US6375551B1 (en) * 1999-06-25 2002-04-23 Corning Incorporated Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms
US6532770B2 (en) * 2000-01-05 2003-03-18 Schott Glass Technologies, Inc. Methods of preparing glass substrates for magnetic media

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7988534B1 (en) * 2004-05-19 2011-08-02 Sutton Stephen P Optical polishing pitch formulations
US8231432B1 (en) * 2004-05-19 2012-07-31 Stephen P. Sutton Optical polishing pitch formulations
US10052737B2 (en) 2013-07-22 2018-08-21 Canon Kabushiki Kaisha Component manufacturing method and polishing apparatus
US20180333822A1 (en) * 2013-07-22 2018-11-22 Canon Kabushiki Kaisha Component manufacturing method and polishing apparatus
US10252393B2 (en) * 2013-07-22 2019-04-09 Canon Kabushiki Kaisha Component manufacturing method and polishing apparatus

Also Published As

Publication number Publication date
EP1525947B1 (fr) 2006-04-12
ES2262958T3 (es) 2006-12-01
ATE322957T1 (de) 2006-04-15
EP1525947A1 (fr) 2005-04-27
DE60304579D1 (de) 2006-05-24
DK1525947T3 (da) 2006-07-31
DE60304579T2 (de) 2007-05-10

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Legal Events

Date Code Title Description
AS Assignment

Owner name: SOCIETE EUROPEENNE DE SYSTEMES OPTIQUES, FRANCE

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:FERME, JEAN-JACQUES;REEL/FRAME:014341/0595

Effective date: 20031216

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION