US20040175261A1 - Method of manufacturing vacuum pump rotors, and rotors obtained thereby - Google Patents

Method of manufacturing vacuum pump rotors, and rotors obtained thereby Download PDF

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Publication number
US20040175261A1
US20040175261A1 US10/655,235 US65523503A US2004175261A1 US 20040175261 A1 US20040175261 A1 US 20040175261A1 US 65523503 A US65523503 A US 65523503A US 2004175261 A1 US2004175261 A1 US 2004175261A1
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US
United States
Prior art keywords
rotor
billet
rotors
forging
cavity
Prior art date
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Abandoned
Application number
US10/655,235
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English (en)
Inventor
Fausto Casaro
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Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Assigned to VARIAN S.P.A. reassignment VARIAN S.P.A. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CASARO, FAUSTO
Publication of US20040175261A1 publication Critical patent/US20040175261A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21K—MAKING FORGED OR PRESSED METAL PRODUCTS, e.g. HORSE-SHOES, RIVETS, BOLTS OR WHEELS
    • B21K1/00—Making machine elements
    • B21K1/28—Making machine elements wheels; discs
    • B21K1/36—Making machine elements wheels; discs with blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21K—MAKING FORGED OR PRESSED METAL PRODUCTS, e.g. HORSE-SHOES, RIVETS, BOLTS OR WHEELS
    • B21K3/00—Making engine or like machine parts not covered by sub-groups of B21K1/00; Making propellers or the like
    • B21K3/04—Making engine or like machine parts not covered by sub-groups of B21K1/00; Making propellers or the like blades, e.g. for turbines; Upsetting of blade roots

Definitions

  • the present invention relates to high vacuum turbine pumps and more particularly to a method of manufacturing vacuum pump rotors for a turbomolecular pump as well as to the rotors obtained thereof.
  • Conventional rotor of a turbomolecular pump comprises a group of impellers mounted onto a rotating shaft, each impeller comprising a disk equipped with a set of peripheral radial vanes. During operation, the rotor rotates at peripheral velocity that can be as high as 300 m/sec.
  • the severe working conditions and the search for higher and higher performance for turbomolecular pumps, in terms of compression ratio and pumping speed, require that each impeller and the rotor in the whole be made as a structure that is robust and balanced at the same time.
  • the impeller vanes must be shaped so as to optimize the pump performance.
  • manufacturing of the rotor starts from an extruded metal bar, from which cylinders are cut that are subsequently processed by different methods, such as turning, milling, electric discharge machining and so on.
  • the impeller is made by forming the blades by milling, by using an apparatus allowing simultaneous processing of several disks.
  • the known manufacturing methods have certain drawbacks and limitations.
  • the mechanical properties and the density of the material are not homogenous enough to ensure a long operating life of the rotors.
  • the transversal mechanical properties are far worse than the longitudinal properties.
  • the longevity of the rotors at elevated temperature is limited. It is of the order of a few hundred hours for a rotor made of aluminium alloy 2014 exposed continuously to temperatures of about 130° C., with equivalent stresses (determined for instance according to the Von Mises failure criterion) of about 300 MPa.
  • the method of the invention comprises the steps of preparing an intermediate semi-finished piece having homogeneous mechanical properties, which is obtained by forging and subsequent finishing thereof by a conventional mechanical working means.
  • the method of the invention is especially suitable for obtaining bell-shaped rotors or, in general, non-monolithic rotors with shaft driven into an axial bore.
  • FIG. 1 is a diagrammatic view showing the formation of the bar, by forging of a cylindrical billet according to the present invention
  • FIGS. 2A and 2B are diagrammatic view showing the formation by forging of a bell-shaped billet according to the present invention
  • FIGS. 3 and 4 are cross-sectional views of two rotors obtained by the method of the present invention.
  • a cylindrical billet 1 is obtained by forging through an axial compression by forces P 1 , as schematically shown, while preventing radial expansion through means (not shown) by forces Pr.
  • billet II In case the rotor is a, so-called, bell-shaped rotor, starting from a bar portion, billet II would be first shaped into a substantially cylindrical shape by axial compression by forces P 1 as schematically shown in FIG. 2A. Subsequently an axial cavity is formed through a punch 12 , by forcing into billet 11 , while preventing the billet radial expansion by retaining it in a mold by applying forces P r , as shown in FIG. 2B.
  • billet 11 is mechanically worked by known techniques such as milling, turning, etc., to form the vanes.
  • axial cavity 13 is preferably only partly formed by means of the punch by forging, while the remaining part is finished by mechanical working.
  • the axial size of the cavity obtained by means of the punch is usually half of the total height of the billet after forging.
  • the aluminium alloys commonly used to manufacture turbomolecular pump rotors are alloys 2014 (Al—Cu alloy) and 7075 (Al—Zn alloy) made in the form of extruded bars that are then tempered and aged. According to the present invention, it is still possible to utilize bars of such kind at the beginning of the process, then to cut portions thereof, to forge such portions, to bore them and then to perform a thermal treatment. Forming a central bore on the bottom of the bell-shaped piece obtained by forging allows a further homogenisation of the mechanical properties obtained through the subsequent thermal treatment.
  • FIGS. 3 and 4 show two rotors obtained by the method of the invention.
  • the solid lines show the profile of the bell-shaped billet 11 (intermediate piece) that is subsequently refined by mechanical working.
  • the dashed lines show the profile of the rotor that can be obtained by turning the forged billet.
  • the rotors obtained by the method of the invention exhibit a homogenization of the material density. This feature is of particular interest in parts that have to rotate at high speed (with tangential velocity of the order of 300-400 m/sec), as is the case for rotors of high vacuum turbomolecular pumps.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Forging (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
US10/655,235 2002-09-06 2003-09-04 Method of manufacturing vacuum pump rotors, and rotors obtained thereby Abandoned US20040175261A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT000770A ITTO20020770A1 (it) 2002-09-06 2002-09-06 Metod0 per fabbricare rotori di pompe da vuoto e prodotti
ITTO2002A000770 2002-09-06

Publications (1)

Publication Number Publication Date
US20040175261A1 true US20040175261A1 (en) 2004-09-09

Family

ID=31972229

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/655,235 Abandoned US20040175261A1 (en) 2002-09-06 2003-09-04 Method of manufacturing vacuum pump rotors, and rotors obtained thereby

Country Status (4)

Country Link
US (1) US20040175261A1 (https=)
EP (1) EP1402975A1 (https=)
JP (1) JP2004263687A (https=)
IT (1) ITTO20020770A1 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103850949A (zh) * 2012-12-04 2014-06-11 普发真空有限公司 真空泵
CN110168783A (zh) * 2017-04-19 2019-08-23 株式会社Lg化学 锂二次电池用负极、包含其的锂二次电池以及制备所述负极的方法
CN112719813A (zh) * 2020-12-31 2021-04-30 宝鼎重工有限公司 一种轴套类产品转子中心的精加工方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101432525A (zh) * 2006-04-29 2009-05-13 欧瑞康莱宝真空公司 涡轮分子泵的转子或定子
JP7390408B2 (ja) * 2022-01-13 2023-12-01 エドワーズ株式会社 真空ポンプ、真空ポンプ用回転体、及び真空ポンプの製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2080641A (en) * 1934-06-22 1937-05-18 Aluminum Co Of America Method of producing locomotive connecting rods
US3786290A (en) * 1971-01-21 1974-01-15 Papst Motoren Kg Electromotor construction
US4789410A (en) * 1987-03-03 1988-12-06 United Technologies Corporation Method for heat treating and quenching complex metal components using salt baths
US4860567A (en) * 1987-12-21 1989-08-29 United Technologies Corporation Ring forging process
US5188514A (en) * 1989-11-03 1993-02-23 Varian Associates, Inc. Process for manufacturing an impeller by electrical discharge machining and articles so obtained
US5507617A (en) * 1993-08-04 1996-04-16 General Signal Corporation Regenerative turbine pump having low horsepower requirements under variable flow continuous operation
US6094815A (en) * 1998-02-16 2000-08-01 Zexel Corporation Method of manufacturing rotor for a vane compressor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584323A (ja) * 1981-06-26 1983-01-11 Osaka Shinku Kiki Seisakusho:Kk 動翼付ロ−タ−の成形法
JPH02136595A (ja) * 1988-11-16 1990-05-25 Anelva Corp 真空ポンプ
JP3702044B2 (ja) * 1996-07-10 2005-10-05 三菱重工業株式会社 アルミニウム合金製羽根車及びその製造方法
JP3784977B2 (ja) * 1998-12-28 2006-06-14 古河スカイ株式会社 鍛造品回転体の製造方法
JP2000254754A (ja) * 1999-03-08 2000-09-19 Showa Denko Kk アルミニウム合金製ローター素材の製造方法およびアルミニウム合金製ローター素材
JP2002285306A (ja) * 2001-03-27 2002-10-03 Kobe Steel Ltd アルミニウム合金製ロータ材の製造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2080641A (en) * 1934-06-22 1937-05-18 Aluminum Co Of America Method of producing locomotive connecting rods
US3786290A (en) * 1971-01-21 1974-01-15 Papst Motoren Kg Electromotor construction
US4789410A (en) * 1987-03-03 1988-12-06 United Technologies Corporation Method for heat treating and quenching complex metal components using salt baths
US4860567A (en) * 1987-12-21 1989-08-29 United Technologies Corporation Ring forging process
US5188514A (en) * 1989-11-03 1993-02-23 Varian Associates, Inc. Process for manufacturing an impeller by electrical discharge machining and articles so obtained
US5507617A (en) * 1993-08-04 1996-04-16 General Signal Corporation Regenerative turbine pump having low horsepower requirements under variable flow continuous operation
US6094815A (en) * 1998-02-16 2000-08-01 Zexel Corporation Method of manufacturing rotor for a vane compressor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103850949A (zh) * 2012-12-04 2014-06-11 普发真空有限公司 真空泵
CN110168783A (zh) * 2017-04-19 2019-08-23 株式会社Lg化学 锂二次电池用负极、包含其的锂二次电池以及制备所述负极的方法
US11508953B2 (en) 2017-04-19 2022-11-22 Lg Energy Solution, Ltd. Negative electrode for lithium secondary battery, lithium secondary battery comprising the same, and method of preparing the negative electrode
CN112719813A (zh) * 2020-12-31 2021-04-30 宝鼎重工有限公司 一种轴套类产品转子中心的精加工方法

Also Published As

Publication number Publication date
JP2004263687A (ja) 2004-09-24
EP1402975A1 (en) 2004-03-31
ITTO20020770A1 (it) 2004-03-07

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Date Code Title Description
AS Assignment

Owner name: VARIAN S.P.A., ISRAEL

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:CASARO, FAUSTO;REEL/FRAME:015363/0367

Effective date: 20040415

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION