TWM654328U - Multi-layer suction cup device - Google Patents

Abstract

A multi-layer suction cup device includes a first suction cup, a second suction cup, a third suction cup, an air receiving block, a reed and an air exchange block. The first suction cup is provided with a first groove and a first through hole. The second suction cup is provided with a second groove, a third groove, a concave groove, a first annular groove, a second through hole and a third through hole. The third suction cup is provided with a fourth through hole, a fifth through hole and a fourth groove. The air receiving block is provided with a center hole, a passage, an air outlet and a first through hole. The reed is arranged in the center hole. Each air exchange block is provided with an axis hole and a second through hole. Thus, the structural configuration of the invention can absorb the first suction cup and the die by negative pressure, and break the vacuum and push the die by positive pressure. It is suitable for film peeling, transporting, cleaning, turning over and picking, and can clean the front and back sides of the die.

Description

Multi-layer suction cup device

The invention relates to a suction cup, in particular to a multi-layer suction cup device.

Before the wafer is thinned, it is usually pasted on a carrier film, and then the subsequent thinning process such as cutting and wire bonding is carried out. After the thinning process is completed, the wafer is cut into multiple dies. During the cleaning process, the dies are still pasted on the carrier film, and only the front side of the dies can be cleaned. After the cleaning process is completed, the dies still need to be separated from the carrier film.

However, during the separation process of the dies from the carrier film, adhesive residues are left on the backside of the dies, which can affect the performance of integrated circuits when they are packaged in 3D.

The main purpose of this invention is to provide a multi-layer suction cup device that can clean particles on the front side of the die and adhesive residues on the back side, so that when the integrated circuit is packaged in 3D, there will be no problem of adhesive residues affecting its performance.

In order to achieve the aforementioned purpose, the present invention provides a multi-layer suction cup device, including a first suction cup, a second suction cup, a third suction cup, a plurality of air receiving blocks, a plurality of reeds and a plurality of air exchange blocks.

The first suction cup is provided with a plurality of first grooves and a plurality of first through holes. The first grooves are located on a top surface of the first suction cup. The first through holes penetrate the top surface and a bottom surface of the first suction cup and are communicated with the first grooves respectively.

The second suction cup is disposed below the first suction cup and is provided with a plurality of second grooves, a plurality of third grooves, a concave groove, a first annular groove, a plurality of second through holes and a plurality of third through holes. The second grooves and the third grooves are both located on a top surface of the second suction cup, and a plurality of first partition walls are provided between the second grooves and the third grooves. The second grooves are communicated with the first through holes. The groove and the first annular groove are both opened on a bottom surface of the second suction cup, the first annular groove surrounds the outer side of the groove, and a second partition wall is provided between the groove and the first annular groove, the second through holes and the third through holes both penetrate the top surface and the bottom surface of the second suction cup, the second through holes are communicated with the second grooves and the groove, and the third through holes are communicated with the third grooves and the first annular groove.

The third suction cup is arranged below the second suction cup and is provided with a plurality of fourth through holes, a plurality of fifth through holes and a plurality of fourth grooves. The fourth through holes and the fifth through holes all penetrate a top surface and a bottom surface of the third suction cup. The fourth through holes are communicated with the groove, the fifth through holes are communicated with the first annular groove, and the fourth grooves are located on the bottom surface of the third suction cup and surround the outer sides of the fourth through holes.

The air receiving blocks are arranged below the third suction cup, and each of the air receiving blocks is provided with a center hole, a plurality of channels, an air outlet and a plurality of first through holes. The center hole penetrates a top surface of each of the air receiving blocks and corresponds to the fourth through holes. The channels are communicated with the center hole, and a third partition wall is provided between two adjacent channels. The air outlet penetrates a bottom surface of each of the air receiving blocks and is communicated with the center hole. A diameter of the center hole is larger than a diameter of the air outlet. A plurality of protrusions are protruded from a bottom wall of the center hole, and a height of the protrusions is less than a depth of the center hole. The first through holes are respectively communicated with the fourth grooves.

The reeds are respectively arranged in the central holes of the air receiving blocks, the outer sides of the reeds are respectively against the third partition walls, the bottom surfaces of the reeds selectively against the protrusions, and the top surfaces of the reeds are used to open or close the fourth through holes and the fourth grooves.

The top surfaces of the air exchange blocks are respectively against the bottom surfaces of the air connection blocks. Each of the air exchange blocks is provided with an axial hole and a plurality of second through holes. The axial hole and the second through holes penetrate a top surface and a bottom surface of each of the air exchange blocks. The axial hole is communicated with the air outlet, and the second through holes are respectively communicated with the first through holes.

The effectiveness of this invention lies in that the structural configuration of the multi-layer suction cup device of this invention can absorb the first suction cup by a first negative pressure, absorb the die by a second negative pressure, and break the vacuum state and push the die by a positive pressure. It is suitable for film peeling process, transportation process, die back cleaning process, flipping process, die front cleaning process and picking process, and can clean the particles on the front side of the die and the residual glue on the back side. When the integrated circuit is 3D packaged, there will be no problem of residual glue affecting its performance.

The following is a more detailed description of the implementation of this invention with the help of diagrams and component symbols, so that those who are familiar with the art can implement it accordingly after reading this manual.

As shown in FIG. 1 , FIG. 2 and FIG. 14 , the present invention provides a multi-layer suction cup device, including a first suction cup 10 , a second suction cup 20 , a third suction cup 30 , a plurality of air receiving blocks 40 , 40A, a plurality of reeds 50 and a plurality of air exchange blocks 60 , 60A.

As shown in FIG3 , the first suction cup 10 is provided with a plurality of first grooves 11 and a plurality of first through-holes 121 to 124. The first grooves 11 are located on a top surface of the first suction cup 10. The first through-holes 121 to 124 penetrate the top surface and a bottom surface of the first suction cup 10 and are respectively communicated with the first grooves 11. As shown in FIG3 , in a preferred embodiment, each first groove 11 includes a claw-shaped groove 111, a rectangular groove 112 and a cross groove 113. An intersection of the claw-shaped groove 111 is communicated with one of the corners of the rectangular groove 112. The first through-holes 121 to 124 are respectively located at the four corners of the rectangular groove 112, and a diameter of the first through-hole 121 is larger than a diameter of the first through-holes 122 to 124. The cross groove 113 is located in the middle of the rectangular groove 112 , and four ends of the cross groove 113 are respectively connected to four corners of the rectangular groove 112 .

Compared to the preferred embodiment, in some embodiments, each first groove 11 can have various different forms. As shown in FIG. 4A , each first groove 11A does not include the rectangular groove 112 , the cross groove 113 and the first through holes 122 to 124 , and the first through hole 121 is located at the intersection of the claw-shaped groove 111 . As shown in FIG. 4B and FIG. 4C , each first groove 11B, 11C does not include the rectangular groove 112 , the cross groove 113 , and further includes an L-shaped groove 114 and a plurality of straight grooves 115 , the intersection of the claw-shaped groove 111 communicates with an intersection of the L-shaped groove 114 , and the straight grooves 115 are arranged around the L-shaped groove 114 and communicate with the L-shaped groove 114 . As shown in FIG. 4B , the L-shaped groove 114 is shorter, the number of the straight grooves 115 is smaller, the first through hole 121 is located at the intersection of the claw-shaped groove 111 and the intersection of the L-shaped groove 114, and does not include the first through holes 122 to 124. As shown in FIG. 4C , the L-shaped groove 114 is longer, the number of the straight grooves 115 is larger, the first through hole 121 is located at the intersection of the claw-shaped groove 111 and the intersection of the L-shaped groove 114, and the first through holes 122 and 123 are respectively located at the other two corners of the L-shaped groove 114. As shown in FIG. 4D , each first groove 11D does not include the cross groove 113 and further includes a plurality of straight grooves 115, which are arranged around the rectangular groove 112 and communicate with the rectangular groove 112. As shown in FIG. 4E , each first groove 11E does not include a claw-shaped groove 111. As shown in FIG. 4F , FIG. 4G and FIG. 4H , each first groove 11F, 11G, 11H further includes a plurality of straight grooves 115, which are arranged around the rectangular groove 112 and communicate with the rectangular groove 112. The straight grooves 115 of FIG. 4F and FIG. 4G are distributed on both sides of the rectangular groove 112, and the number of the straight grooves 115 of FIG. 4F is less than that of the straight grooves 115 of FIG. 4G. The straight grooves 115 of FIG. 4H are distributed on the four sides of the rectangular groove 112.

As shown in FIG. 1 and FIG. 2 , the second suction cup 20 is disposed below the first suction cup 10. As shown in FIG. 5 to FIG. 7 , the second suction cup 20 is provided with a plurality of second grooves 21, a plurality of third grooves 22, a concave groove 23, a first annular groove 24, a plurality of second through holes 25, and a plurality of third through holes 26. As shown in FIG. 5 , the second grooves 21 and the third grooves 22 are both located on a top surface of the second suction cup 20, and a plurality of first partition walls 27 are provided between the second grooves 21 and the third grooves 22. The second grooves 21 are in communication with the first through holes 121 to 124 (see FIG. 17 ). Specifically, the second grooves 21 are parallel to each other; the third grooves 22 include a plurality of straight grooves 221 and an annular groove 222, the straight grooves 221 are parallel to each other and arranged alternately with the second grooves 21, the annular groove 222 surrounds the outer side of the straight grooves 221, and the two ends of the straight grooves 221 are connected to the annular groove 222. As shown in FIG6, the groove 23 and the first annular groove 24 are both opened on a bottom surface of the second suction cup 20, the first annular groove 24 surrounds the outer side of the groove 23, and a second partition wall 28 is provided between the groove 23 and the first annular groove 24. As shown in FIGS. 5 to 7 , the second through holes 25 and the third through holes 26 all penetrate the top and bottom surfaces of the second suction cup 20. The second through holes 25 communicate with the second groove 21 and the groove 23, and the third through holes 26 communicate with the annular groove 222 and the first annular groove 24. As shown in FIG. 6 , the second suction cup 20 has a plurality of ribs 29, which are disposed on the bottom surface of the second suction cup 20 and are located in the groove 23.

As shown in FIG8 , in some embodiments, the third grooves 22 further include a plurality of arc grooves 223. The arc grooves 223 are respectively disposed on two sides of the straight grooves 221 and communicate with the straight grooves 221. A protrusion 224 is provided between each arc groove 223 and each straight groove 221.

As shown in FIG. 1 and FIG. 2 , the third suction cup 30 is disposed below the second suction cup 20, and the ribs 29 (see FIG. 6 ) abut against the top surface of the third suction cup 30. Preferably, the second suction cup 20 and the third suction cup 30 are fixed by a plurality of fasteners (e.g., screws, not shown). As shown in FIG. 9 and FIG. 10 , the third suction cup 30 is provided with a plurality of fourth through holes 31, a plurality of fifth through holes 32, and a plurality of fourth grooves 33. The fourth through holes 31 and the fifth through holes 32 both penetrate a top surface and a bottom surface of the third suction cup 30, the fourth through holes 31 form a plurality of arrays 311 and communicate with the groove 23 (see FIG. 15 ), and the fifth through holes 32 communicate with the first annular groove 24 (see FIG. 15 ). The fourth grooves 33 are located on the bottom surface of the third suction cup 30 and surround the outer sides of the fourth through holes 31. More specifically, each fourth groove 33 includes two straight grooves 331 and an annular groove 332. The straight grooves 331 are respectively disposed on two opposite sides of the annular groove 332 and communicate with the annular groove 332.

As shown in FIG. 2 , the air receiving blocks 40 and 40A are disposed below the third suction cup 30. Preferably, the third suction cup 30 is fixed to the air receiving blocks 40 and 40A by a plurality of fasteners (e.g., screws, not shown). As shown in FIGS. 11 to 13 , each air receiving block 40 and 40A is provided with a center hole 41, a plurality of channels 42, an air outlet 43, and a plurality of first through holes 44. The center hole 41 passes through a top surface of each air receiving block 40 and 40A and corresponds to the fourth through holes 31 (see FIG. 16B ). The channels 42 are connected to the center hole 41, and a third partition wall 45 is provided between two adjacent channels 42. The annular grooves 332 correspond to the channels 42 (see FIG. 15 ). The air outlet hole 43 passes through a bottom surface of each air receiving block 40, 40A and communicates with the center hole 41. The diameter of the center hole 41 is larger than the diameter of the air outlet hole 43. A plurality of protrusions 46 are protruded from a bottom wall of the center hole 41. The height of the protrusions 46 is less than the depth of the center hole 41. The straight grooves 331 communicate with the first through holes 44 respectively (see FIG. 15).

As shown in Figures 11 and 12, each reed 50 is disposed in the center hole 41 of each air receiving block 40, 40A, and the outer side surface of each reed 50 abuts against the third partition walls 45. The position of each reed 50 can be maintained in the middle of the center hole 41 by the third partition walls 45, and the third partition walls 45 can limit the vertical movement of each reed 50 in the center hole 41.

As shown in FIG. 15 and FIG. 19 , a top surface of each air exchange block 60, 60A abuts against the bottom surface of each air connection block 40, 40A to achieve an airtight effect. As shown in FIG. 14 , each air exchange block 60, 60A is provided with an axial hole 61, a plurality of second through holes 62, a second annular groove 63 and a plurality of slots 64. The axial hole 61 and the second through holes 62 both penetrate a top surface and a bottom surface of each air exchange block 60, 60A, the axial hole 61 communicates with the air outlet 43 (see FIG. 16B ), and the second through holes 62 communicate with the first through holes 44 respectively (see FIG. 16B ). The second annular groove 63 is located on the top surface of each air exchange block 60, 60A and surrounds the outer side of the second through holes 62. The slots 64 are located on the top surface of each gas exchange block 60, 60A and are connected to the second annular groove 63. A protrusion 65 is convexly provided on a bottom wall of each slot 64. The second through holes 62 respectively penetrate the protrusions 65. A top surface of each protrusion 65 abuts against the bottom surface of each gas connection block 40, 40A (see FIG. 16B ), achieving an airtight effect, preventing positive pressure from applying pressure to the entire bottom surface of the gas connection block 40, 40A through the second through holes 62, thereby causing excessive separation force and causing gas leakage. The second annular groove 63 and the slots 64 can prevent the gas exchange blocks 60, 60A from being damaged by the gas connection blocks 40, 40A, resulting in insufficient airtightness.

As shown in FIG15 , two air-connecting blocks 60 are placed on a spindle 110 of a machine 100, and the top surfaces of the two air-connecting blocks 60 are against the bottom surfaces of the two air-connecting blocks 40 located in the middle of the bottom surface of the third suction cup 30; a plurality of dies 210 fixed on a frame 200 are placed on the top surface of the first suction cup 10. As shown in FIG16A and FIG16B , the spindle 110 provides a first negative pressure, and the first negative pressure sequentially passes through the fifth through-holes 32, the first annular grooves 24, the third through-holes 26, the annular grooves 222, and the straight grooves 221 to absorb the first suction cup 10, so that the first suction cup 10 is fixed on the second suction cup 20. Specifically, the annular groove 222 can absorb the periphery of the first suction cup 10 , and the straight grooves 221 can absorb the center of the first suction cup 10 .

As shown in FIG8 , in some embodiments, the arc grooves 223 can further increase the surface area of the third grooves 22, thereby enhancing the effect of the third grooves 22 in sucking the middle of the first suction cup 10. The protrusions 224 can support the first suction cup 10, preventing the first suction cup 10 from being sucked by the first negative pressure and being deformed downward.

As shown in FIG. 17 , the main shaft 110 provides a second negative pressure, which sequentially absorbs the reed 50 through the shaft hole 61, the air outlet hole 43, and the lower part of the center hole 41, so that the bottom surface of the reed 50 abuts against the protrusions 46 to open the fourth through holes 31 and the annular groove 332, and prevents the reed 50 from closing the air outlet hole 43. The fourth through holes 31 and the annular groove 332 can communicate with the channels 42 through the center hole 41, and the second negative pressure can further pass through the channels 42, the upper part of the center hole 41, the fourth through holes 31, the groove 23, the second through holes 25, the second grooves 21, the first through holes 121-124, and the first grooves 11 in sequence to absorb a plurality of dies 210, so that the dies 210 are fixed on the top surface of the first suction cup 10. As shown in FIG. 18 , the frame 200 is cut off and a carrier film 120 is started to be torn off, and the torn direction of the carrier film 120 is from the upper left corner to the lower right corner of the dies 210.

Importantly, the first through-hole 121 at the upper left corner of each first groove 11 can provide a larger second negative pressure to absorb the upper left corner of the die 210, and the claw-shaped groove 111 can further increase the area of the upper left corner of the die 210 to absorb the larger second negative pressure, thereby improving the stability of tearing off the carrier film 120 from the upper left corner of the die 210, thereby providing a better fixing effect to maintain the position of the die 210 on the top surface of the first suction cup 10.

In addition, the first through holes 122 ˜ 124 at the other three corners of each first trench 11 can absorb the other three corners of the die 210 by the second negative pressure.

Furthermore, the rectangular groove 112 can absorb the periphery of the die 210 by the second negative pressure.

In addition, the cross groove 113 can absorb the center of the die 210 by the second negative pressure.

In addition, the L-shaped groove 114 can absorb two sides of the die 210 by the second negative pressure.

Furthermore, the straight grooves 115 can enhance the absorption of the periphery of the die 210 by the second negative pressure, and the greater the number of the straight grooves 115, the more significant the effect.

It is worth mentioning that the ribs 29 can support the second suction cup 20 to prevent the second suction cup 20 from being sucked by the second negative pressure and being deformed downward, so that the second negative pressure can flow smoothly in the groove 23.

As shown in FIG. 19 , the two air-connecting blocks 60A are placed on a fork shovel 300, and the fork shovel 300 moves to the bottom of the third suction cup 30, and the top surface of the two air-connecting blocks 60A abuts against the bottom surface of the two air-connecting blocks 40A located on both sides of the bottom surface of the third suction cup 30. The first negative pressure and the second negative pressure of the main shaft 110 of the machine 100 are turned off, and the fork shovel 300 provides the first negative pressure and the second negative pressure instead. The functions of the first negative pressure and the second negative pressure are as described above. As shown in FIG. 20 , the fork shovel 300 transports the multi-layer suction cup device of the invention toward a cleaning machine (not shown). As shown in FIG. 21 , during the process of the fork shovel 300 carrying the multi-layer suction cup device of the present invention, because the second negative pressure is provided by the fork shovel 300 and the second air connection block 60 is already far away from the second air connection block 40 located in the middle of the bottom surface of the third suction cup 30, the second reeds 50 in the two center holes 41 of the second air connection block 40 located in the middle of the bottom surface of the third suction cup 30 will be pushed upward by the atmospheric pressure, so that the second reeds 50 seal the fourth through holes 31 and the annular grooves 332 of the third suction cup 30 to achieve an airtight effect. As shown in FIG. 22 , after the fork shovel 300 carries the multi-layer suction cup device of the invention to the cleaning machine, the second air exchange block 60 is placed on a main shaft 110A of a machine 100A, and the fork shovel 300 places the multi-layer suction cup device of the invention on the main shaft 110A, and the top surface of the second air exchange block 60 abuts against the bottom surface of the second air exchange block 40 located in the middle of the bottom surface of the third suction cup 30. The first negative pressure and the second negative pressure of the fork shovel 300 are turned off, and the fork shovel 300 and the second air exchange block 60A are moved out of the cleaning machine together, and the main shaft 110A provides the first negative pressure and the second negative pressure instead, and the functions of the first negative pressure and the second negative pressure are as described above. As shown in FIG. 21 , because the second negative pressure is provided by the spindle 110A and the two air connection blocks 60A are already far away from the two air connection blocks 40A located on the two sides of the bottom surface of the third suction cup 30, the two reeds 50 in the two center holes 41 of the two air connection blocks 40A located on the two sides of the bottom surface of the third suction cup 30 will be pushed upward by the atmospheric pressure, so that the two reeds 50 seal the fourth through holes 31 and the annular grooves 332 to achieve an airtight effect.

As shown in FIG23 , a cleaning head 400 sprays a high-pressure water column or high-pressure gas toward the back side of the die 210 (i.e., the surface attached to the carrier film 120) to remove the residual glue on the back side of the die 210. The cross groove 113 can help the die 210 withstand the pressure of the high-pressure water column or high-pressure gas.

As shown in FIG24, the machine 100A is moved to a flipping machine (not shown), and the multi-layer suction cup device 1A of the present invention is configured on a spindle 110B of a machine 100B and is located above the machine 100B and the multi-layer suction cup device 1 of the present invention. No crystal grains 210 are placed on the first suction cup 10 of the multi-layer suction cup device 1A of the present invention. The spindle 110B provides a first negative pressure, so that the second suction cup 20 of the multi-layer suction cup device 1A of the present invention sucks the first suction cup 10 by the first negative pressure. As shown in FIG25A, the multi-layer suction cup device 1 of the present invention with a plurality of crystal grains 210 placed is located at the bottom, and the multi-layer suction cup device 1A of the present invention without any crystal grains 210 placed is located at the top. As shown in FIG25B , the first suction cup 10 of the multi-layer suction cup device 1A of the present invention located at the top contacts the back side of the grains 210, the spindle 110B provides a second negative pressure, the first suction cup 10 of the multi-layer suction cup device 1A of the present invention located at the top sucks the back side of the grains 210 by the second negative pressure, the spindle 110A turns off the second negative pressure, and the multi-layer suction cup device 1 of the present invention located at the bottom stops sucking the front side of the grains 210 (i.e., the other side of the surface attached to the carrier film 120) by the second negative pressure. As shown in FIG. 25C , the spindle 110B moves the multi-layer chuck device 1A of the present invention located above upward, so that the chips 210 are separated from the multi-layer chuck device 1 of the present invention located below.

In more detail, as shown in FIG. 26 , when the main shaft 110A closes the second negative pressure, the main shaft 110A provides a positive pressure, which passes through the second through holes 62, the first through holes 44, the straight grooves 331 and the annular groove 332 in sequence to blow and act on the top surface of the reed 50, so that the reed 50 moves downward to the protrusions 46, thereby destroying the vacuum state and preventing the reed 50 from closing the air outlet 43. At this time, the positive pressure can further pass through the upper part of the center hole 41, the fourth through-holes 31, the grooves 23, the second through-holes 25, the second grooves 21, the first through-holes 121-124, and the first grooves 11 in sequence to blow and act on the front surfaces of the die 210, so that the die 210 can be pushed upward by the positive pressure. At this time, the back surfaces of the die 210 can closely contact the first suction cup 10 of the multi-layer suction cup device 1A of the present invention located above. It is important that the spindle 110A must maintain providing the first negative pressure to continuously suck the first suction cup 10 of the multi-layer suction cup device 1 of the present invention located below, to prevent the first suction cup 10 from being pushed upward by the positive pressure.

As shown in FIG. 27 , the machine 100B and the multi-layer suction cup device 1A of the present invention are moved together into a cleaning machine, and the cleaning head 400 sprays high-pressure water columns or high-pressure gas toward the front of the die 210 to remove particles on the front of the die 210. The cross groove 113 can help the die 210 withstand the pressure of the high-pressure water column or high-pressure gas.

As shown in FIG. 28 , the machine 100B and the multi-layer suction cup device 1A of the present invention are moved together to a picking machine (not shown), and a picking head 500 performs a picking process on the die 210 .

In summary, the structural configuration of the multi-layer suction cup device of the present invention can suck the first suction cup 10 by a first negative pressure, suck the die 210 by a second negative pressure, and break the vacuum state and push the die 210 by a positive pressure. It is suitable for film peeling process, transportation process, die 210 back side cleaning process, flipping process, die 210 front side cleaning process and picking process, and can clean the particles on the front side and the residual glue on the back side of the die 210. When the integrated circuit is 3D packaged, there will be no problem of residual glue affecting its performance.

The above is only used to explain the best implementation example of this creation, and is not intended to limit this creation in any form. Therefore, any modification or change of this creation made under the same creative spirit should still be included in the scope of protection intended by this creation.

1,1A: Multi-layer suction cup device 10: First suction cup 11,11A~11H: First groove 111: Claw groove 112: Rectangular groove 113: Cross groove 114: L-shaped groove 115: Straight groove 121~124: First through hole 20: Second suction cup 21: Second groove 22: Third groove 221: Straight groove 222: Annular groove 223: Arc groove 224: Boss 23: Groove 24: First annular groove 25: Second through hole 26: Third through hole 27: First partition wall 28: Second partition wall 29: Rib 30: Third suction cup 31: Fourth through hole 311: Array 32: Fifth through hole 33: Fourth groove 331: Straight groove 332: Annular groove 40,40A: Air connection block 41: Center hole 42: Channel 43: Air outlet 44: First through hole 45: Third partition wall 46: Bump 50: Reed 60,60A: Air connection block 61: Shaft hole 62: Second through hole 63: Second annular groove 64: Slot 65: Protrusion 100,100A,100B: Machine 110,110A,110B: Main shaft 120: Carrier film 200: Frame 210: Die 300: Fork shovel 400: Cleaning head 500: Take the lead

Figure 1 is a three-dimensional diagram of the multi-layer suction cup device of the present invention. Figure 2 is a three-dimensional diagram of the multi-layer suction cup device of the present invention from another perspective. Figure 3 is a top view of the first suction cup of the present invention. Figures 4A to 4H are schematic diagrams of some embodiments of the first groove of the present invention. Figure 5 is a top view of the second suction cup of the present invention. Figure 6 is a bottom view of the second suction cup of the present invention. Figure 7 is a cross-sectional view of the second suction cup of the present invention. Figure 8 is a schematic diagram of some embodiments of the second suction cup of the present invention. Figure 9 is a top view of the third suction cup of the present invention. Figure 10 is a bottom view of the third suction cup of the present invention. Figure 11 is a three-dimensional diagram of the air receiving block and the reed of the present invention. Figure 12 is an exploded view of the air receiving block and the reed of the present invention. Figure 13 is a three-dimensional view of the air receiving block and the reed of the present invention from another perspective. Figure 14 is a three-dimensional view of the air receiving block of the present invention. Figure 15 is a schematic diagram of the multi-layer suction cup device of the present invention placed on the machine. Figures 16A and 16B are schematic diagrams of the present invention using the first negative pressure to suck the first suction cup. Figure 17 is a schematic diagram of the present invention using the second negative pressure to suck the crystal grain. Figure 18 is a schematic diagram of the carrier film being torn off the crystal grain. Figure 19 is a schematic diagram of the fork shovel moving to the bottom of the third suction cup of the present invention. Figure 20 is a schematic diagram of the fork shovel carrying the multi-layer suction cup device of the present invention. Figure 21 is a schematic diagram of the reed-sealed annular groove and the fourth perforation of the present invention. Figure 22 is a schematic diagram of a fork shovel carrying the multi-layer suction cup device of the present invention into a cleaning machine. Figure 23 is a schematic diagram of the multi-layer suction cup device of the present invention performing a cleaning procedure. Figure 24 is a schematic diagram of two multi-layer suction cup devices of the present invention preparing to perform a flipping procedure. Figures 25A to 25C are schematic diagrams of two multi-layer suction cup devices of the present invention performing a flipping procedure. Figure 26 is a schematic diagram of the multi-layer suction cup device of the present invention breaking the vacuum state. Figure 27 is a schematic diagram of another multi-layer suction cup device of the present invention performing a cleaning procedure. Figure 28 is a schematic diagram of another invention's multi-layer suction cup device performing a picking process.

10: First suction cup

20: Second suction cup

30: The third suction cup

Claims (16)

A multi-layer suction cup device comprises: a first suction cup, on which a plurality of first grooves and a plurality of first through-holes are formed, wherein the first grooves are located on a top surface of the first suction cup, and the first through-holes penetrate the top surface and a bottom surface of the first suction cup and are respectively communicated with the first grooves; a second suction cup, arranged below the first suction cup, and on which a plurality of second grooves, a plurality of third grooves, a concave groove, a first annular groove, a plurality of second through-holes and a plurality of third through-holes are formed, wherein the second grooves and the third grooves are both located on a top surface of the second suction cup, and a plurality of first partition walls are provided between the second grooves and the third grooves, and the second grooves are communicated with the first through-holes. The groove and the first annular groove are both opened on a bottom surface of the second suction cup, the first annular groove surrounds the outer side of the groove, and a second partition wall is provided between the groove and the first annular groove, the second through-holes and the third through-holes all penetrate the top surface and the bottom surface of the second suction cup, the second through-holes are communicated with the second grooves and the groove, and the third through-holes are communicated with the third grooves and the first annular groove; a third suction cup is arranged below the second suction cup and is provided with a plurality of fourth through-holes, a plurality of fifth through-holes and a plurality of fourth grooves, the fourth through-holes and the fifth through-holes all penetrate the top surface and the bottom surface of the third suction cup, the fourth through-holes are communicated with the groove, the The fifth through hole is communicated with the first annular groove, and the fourth grooves are located on the bottom surface of the third suction cup and surround the outer sides of the fourth through holes; a plurality of air receiving blocks are arranged below the third suction cup, and each of the air receiving blocks is provided with a central hole, a plurality of channels, an air outlet and a plurality of first through holes, and the central hole passes through a top surface of each of the air receiving blocks and corresponds to the fourth through holes, and the channels are communicated with the central hole, and a third partition wall is provided between two adjacent channels, and the air outlet passes through a bottom surface of each of the air receiving blocks and is communicated with the central hole, and a straight diameter of the central hole is larger than a straight diameter of the air outlet, and a plurality of protrusions are protruded on a bottom wall of the central hole, and a height of the protrusions is less than that of the central hole. The depth of the center hole is 100 mm, and the first through holes are respectively connected to the fourth grooves; a plurality of reeds are respectively arranged in the center holes of the air receiving blocks, the outer side surfaces of the reeds are respectively against the third partition walls, the bottom surfaces of the reeds are selectively against the protrusions, and the top surfaces of the reeds are used to open or close the fourth through holes and the fourth grooves; and a plurality of air exchange blocks, the top surfaces of which are respectively against the bottom surfaces of the air receiving blocks, each of the air exchange blocks is provided with an axial hole and a plurality of second through holes, the axial hole and the second through holes both penetrate a top surface and a bottom surface of each of the air exchange blocks, the axial hole is connected to the air outlet, and the second through holes are respectively connected to the first through holes. A multi-layer suction cup device as described in claim 1, wherein each of the first grooves includes a claw-shaped groove, and each of the first through-holes is located at an intersection of the claw-shaped grooves. A multi-layer suction cup device as described in claim 2, wherein each of the first grooves further comprises a rectangular groove, the intersection of the claw-shaped grooves communicates with one of the corners of the rectangular groove, the first through holes are respectively located at the four corners of the rectangular groove, and the diameter of the first through hole located at the intersection of the claw-shaped grooves is larger than the diameter of the first through holes located at the other three corners of the rectangular groove. A multi-layer suction cup device as described in claim 3, wherein each of the first grooves further includes a cross groove, the cross groove is located in the middle of the rectangular groove, and the four ends of the cross groove are respectively connected to the four corners of the rectangular groove. A multi-layer suction cup device as described in claim 3 or 4, wherein each of the first grooves further includes a plurality of straight grooves, which are arranged around the rectangular groove and communicate with the rectangular groove. A multi-layer suction cup device as described in claim 2, wherein each of the first grooves further includes an L-shaped groove, and the intersection of the claw-shaped groove communicates with an intersection of the L-shaped groove. A multi-layer suction cup device as described in claim 6, wherein the first through holes are respectively located at the three corners of the L-shaped groove, and the diameter of the first through hole located at the intersection of the claw-shaped groove is larger than the diameter of the first through holes located at the other two corners of the L-shaped groove. A multi-layer suction cup device as described in claim 6 or 7, wherein each of the first grooves further includes a plurality of straight grooves, which are arranged around the L-shaped groove and communicate with the L-shaped groove. A multi-layer suction cup device as described in claim 1, wherein each of the first grooves includes a rectangular groove and a cross groove, the cross groove is located in the middle of the rectangular groove, and the four ends of the cross groove are connected to the four corners of the rectangular groove. The multi-layer suction cup device as described in claim 1, wherein the second grooves are parallel to each other, the third grooves include a plurality of straight grooves and an annular groove, the straight grooves are parallel to each other and arranged alternately with the second grooves, the annular groove surrounds the outer side of the straight grooves, the two ends of the straight grooves are connected to the annular groove, and the third through holes are connected to the annular groove. The multi-layer suction cup device as described in claim 10, wherein the third grooves further include a plurality of arc grooves, the arc grooves are respectively arranged on two sides of the straight grooves and communicate with the straight grooves, and a convex column is provided between each of the arc grooves and each of the straight grooves. The multi-layer suction cup device as described in claim 1, wherein the second suction cup has a plurality of ribs, the ribs are arranged on the bottom surface of the second suction cup, located in the groove, and abut against the top surface of the third suction cup. A multi-layer suction cup device as described in claim 1, wherein the fourth through holes form a plurality of arrays, and the central holes of the air receiving blocks correspond to the arrays respectively. The multi-layer suction cup device as described in claim 1, wherein each of the fourth grooves includes two straight grooves and an annular groove, the straight grooves are respectively arranged on two opposite sides of the annular groove and communicate with the annular groove and the first through holes, the annular groove corresponds to the channels, and the top surface of the reed is used to open or close the annular groove. A multi-layer suction cup device as described in claim 1, wherein each of the air exchange blocks is provided with a second annular groove, the second annular groove is located on the top surface of each of the air exchange blocks and surrounds the outer sides of the second through holes. As described in claim 15, the multi-layer suction cup device, wherein each of the air exchange blocks is provided with a plurality of slots, the slots are located on the top surface of each of the air exchange blocks and communicate with the second annular slot, a protrusion is protruded from a bottom wall of each of the slots, the second through holes respectively penetrate the protrusions, and a top surface of each of the protrusions abuts against the bottom surface of each of the air exchange blocks.