JP2000006100A - Breaking device for plate-shaped work - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device capable of breaking a plate-shaped work well along a scribing line. SOLUTION: A bearing part R of a table 10 is constituted of a rigid part 11 and an elastic part 20 covering it. The rigid part 11 is formed with an upheaving part 13, and in a first range R1 corresponding to the upheaval 13, the elastic part 20 is thin, while in a second range R2 not corresponding to the upheaval 13, the elastic part 20 is thick. A work 100 is placed on the bearing part R with a surface 100a having a scribing line 101y directed upwards. At this time, the scribing line 101y is made to meet the upheaving part 13. By conducting sucking from a suction hole 25 formed at the second range R2, bending stress is applied along the scribing line 101y to break the work 100.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for breaking a plate-like work having a scribe line along a scribe device.

[0002]

2. Description of the Related Art Japanese Patent Laying-Open No. 9-278469 discloses a conventional breaking device including a table on which a rubber sheet is attached and a pressing member such as a rod or a roller. In this apparatus, a work is placed on a table with the scribe line formed side down. In this state,
When a portion corresponding to the scribe line is pressed from above by the pressing member, a bending stress is applied to the work, and the work is broken along the scribe line. Further, the new breaking device proposed in the above publication includes a table and vacuum means. The work is placed on this table with the scribe line formed side down. The table has a suction passage formed along a scribe line, and the suction passage is connected to the vacuum means. When the work is sucked through the suction passage by the vacuum means, a bending stress is applied to the work, and the work is broken along the scribe line.

[0003]

In the breaking device disclosed as a conventional device in the above-mentioned publication, it is difficult to adjust the pressing force by the roller, and by applying an excessive force, the breaking at the scribe line can be performed well. I didn't. In the breaking device disclosed as a new device in the above publication, the use of vacuum facilitates adjustment of bending stress at the time of breaking, but since a suction passage is formed on the upper surface of a rigid table, the edge of this suction passage is The work could be damaged. SUMMARY OF THE INVENTION An object of the present invention is to provide a breaking device which can satisfactorily break a work along a scribe line and does not damage other parts of the work.

[0004]

According to a first aspect of the present invention, a plate-like work having first and second surfaces and having a scribe line formed on the first surface is broken along the scribe line. The apparatus has the following configuration. (A) A table on which the work is set. The table has a receiving portion, and an exposed surface of the receiving portion is provided as a receiving surface for receiving the second surface of the work. The receiving portion includes a first area along a scribe line of the work in the set state,
And second regions disposed on both sides of the first region. The first region is suppressed or prohibited from being elastically compressed, and the second region is elastically compressible more than the first region. This second
A suction passage is formed in the region, and one end of the suction passage is open to the receiving surface. (B) vacuum means connected to the other end of the suction passage.

According to a second aspect of the present invention, in the plate-like workpiece breaking device according to the first aspect, the receiving portion of the table has a rigid portion and an elastic portion covering the rigid portion. Is provided as the receiving surface, the rigid portion has a protrusion protruding toward the receiving surface, and a first portion of the receiving portion is provided.
The region includes the ridge and an elastic portion covering the ridge, and the second region of the receiving portion does not include the ridge and the thickness of the elastic portion is the first.
It is characterized by being thicker than the region. According to a third aspect of the present invention, in the apparatus for breaking a plate-like workpiece according to the second aspect, the bulge forms a lattice, and a central portion of the plurality of second regions divided by the lattice serves as the suction passage. It is characterized in that a hole is formed. According to a fourth aspect of the present invention, in the plate-like workpiece breaking device according to the third aspect, the table includes an auxiliary suction passage formed in the rigid portion and one internal space, and the elastic portion The numerous suction holes of
It is characterized in that it is connected to the vacuum means via an auxiliary suction passage and an internal space. According to a fifth aspect of the present invention, in the plate-like workpiece breaking device according to the third aspect,
The lattice ridges include a plurality of first ridges extending parallel to a first axis and a plurality of second ridges extending parallel to a second axis orthogonal to the first axis. And the first raised portion is higher than the second raised portion.

According to a sixth aspect of the present invention, there is provided an apparatus for breaking a plate-like work having first and second surfaces and having a scribe line formed on the first surface along the scribe line. It is characterized by having. (A) A table on which the work is set. The table has a receiving portion, and an exposed surface of the receiving portion is provided as a receiving surface for receiving the first surface of the work. The receiving portion includes a first area along a scribe line of the work in the set state,
And second regions disposed on both sides of the first region. The first region is elastically compressible, and the second region is suppressed or prohibited from being elastically compressed as compared to the first region. A suction passage is formed in the first region, and one end of the suction passage is open to the receiving surface. (B) vacuum means connected to the other end of the suction passage.

According to a seventh aspect of the present invention, in the plate-like workpiece breaking device according to the sixth aspect, the receiving portion of the table has a rigid portion and an elastic portion covering the rigid portion. Is provided as the receiving surface, the rigid portion has a protrusion protruding toward the receiving surface, and a second portion of the receiving portion is provided.
The region includes the ridge and an elastic portion covering the ridge, and the first region of the receiving portion does not include the ridge and has a thickness of the second elastic portion of the second portion.
It is characterized by being thicker than the region. According to an eighth aspect of the present invention, in the plate-like workpiece breaking device according to the seventh aspect, the suction passage is formed along a virtual grid, and is provided at a central portion of a receiving portion divided by the virtual grid. The ridge is formed. According to a ninth aspect of the present invention, in the plate-like workpiece breaking device according to the eighth aspect, the suction passage includes a large number of suction holes arranged along the virtual lattice. According to a tenth aspect of the present invention, in the plate-like workpiece breaking device according to the sixth aspect, the suction passages are arranged on both sides of a scribe line of the set work. According to an eleventh aspect of the present invention, in the apparatus for breaking a plate-like workpiece according to the tenth aspect, the suction passage is constituted by a large number of suction holes arranged on both sides along a scribe line. .

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. Before explaining the breaking device of the present embodiment, the work 100 to be broken
Will be described. As shown in FIGS. 2 and 3, the workpiece 100 is a disc-shaped ceramic wafer, and has two flat surfaces 100a and 100 parallel to each other.
b (first and second surfaces). One side 10
0a, scribe lines 101x, 101 extending linearly in parallel with horizontal axes X, Y orthogonal to each other.
1y is formed. These scribe lines 101x,
A lattice 103 including a large number of rectangular divided areas 104 is drawn by 101y. Each of these divided regions 104 constitutes an electronic component, for example, a noise filter.

The method of forming the scribe lines 101x and 101y is not a feature of the present invention, but will be described briefly. The scribe lines 101x and 101y are formed by moving the cutter with a sharp tip pressed against the surface 100a of the work 100. At this time, it is preferable to apply high-frequency vibration to the cutter. As shown in FIG. 3, the scribe lines 101x and 101y are
Has a vertical crack 105 in the thickness direction.

Next, the breaking device will be described in detail. As schematically shown in FIG. 4, the breaking device includes a table 10 and vacuum means 30. The above table 10
As shown in FIGS. 1 and 3, a metal body 11 is provided. This body 11 has a shallow box 11a and this box 11
and a lid 11b (rigid portion) that closes the upper end of a. A circular concave portion 12 is formed on the upper surface of the lid 11b,
On the bottom surface of the concave portion 12, a ridge 13 forming a lattice is formed. The ridge 13 includes a first ridge 13x and a second ridge 13y extending linearly in parallel with the axes X and Y. As shown in FIG. 5, the first raised portion 1
3x is formed slightly higher than the second raised portion 13y.

The elastic member 2 is provided in the recess 12 of the lid 11b.
0 (elastic portion) is accommodated, and the elastic member 20 covers the entire area of the concave portion 12. The flat and horizontal upper surface 20a of the elastic member 20 is a receiving surface for receiving the surface 100b of the work 100. The elastic member 20 is obtained, for example, by pouring an elastic material such as rubber in a molten state into the concave portion 12 and solidifying it.

The receiving portion R for the work 100 is constituted by the lid 11b and the elastic member 20. This receiving part R
Is a first region R1 corresponding to the ridge 13 of the lid 11b.
And a second region R2 corresponding to the portion 14 where the ridge 13 is not formed. Note that the second region R2
Is a small rectangular area (hereinafter, referred to as an inner second area) divided by a lattice constituted by the bumps 13,
And a region located outside the lattice (hereinafter, referred to as an outside second region).

In the first region R1 of the receiving portion R, the cover 1
The elastic member 20 is thin because it includes the protrusion 13 of 1b. Therefore, elastic compression is suppressed in the first region R1. On the other hand, since the second region R2 does not include the protrusion 13, the elastic member 20 is thick. Therefore, the second
The region R2 can be elastically compressed more than the first region R1. In the present embodiment, the thickness of the elastic member 20 in the first region R1 is set to about 10 to 35% of the second region R2. In FIG. 3, the height of the protrusion 13 and the thickness of the elastic member 20 and the work 100 are exaggerated for easy understanding.

A vertically extending suction hole 25 (suction passage) is formed at the center of the inner second region R2. The suction holes 25 are also arranged along the lattice in the outer second region R2. As a result, the suction holes 25 are arranged on both sides of the first region R1 located on the four sides of the inner second region R2. The upper ends of these suction holes 25 are open to the receiving surface 20a.

The lid 11b has a large number of suction holes 15 (auxiliary suction passages) connected to the suction holes 25 of the elastic member 20. On the other hand, a shallow internal space 16 is formed by the box 11a and the lid 11b, and the numerous suction holes 15 are connected to the internal space 16. The internal space 16 communicates with the vacuum means 30 shown in FIG. 4 through a communication hole 17 formed in a side wall of the box 11a.

The vacuum means 30 includes a vacuum pump 3
1, a main tank 32, and a sub tank 33 are sequentially provided toward the table 10. The sub tank 33 is
The main tank 32 has a capacity much larger than that of the sub-tank 33, having a capacity approximately twice that of the internal space 16 of the table 10. Vacuum pump 31 and main tank 3
A regulator 35 is provided in the passage between the first and second motors. A valve 36 is provided in a passage between the main tank 32 and the sub tank 33, and the sub tank 33 and the table 1
The valve 37 is also provided in the passage between the zero communication hole 17.

The operation of the breaking device having the above configuration will be described. First, the vacuum pump 31 is driven with the valve 36 of the vacuum means 30 opened and the valve 37 closed. Thus, the main tank 32 and the sub tank 33 are set to the degree of vacuum set by the regulator 35.
On the other hand, as shown in FIGS. 2 and 3, the work 100 on which the scribe lines 101x and 101y are formed is placed on the receiving member 20 by a transport mechanism (not shown). At this time, work 1
00 surface 100b of the receiving member 20
a, and the surface 100a on which the scribe lines 101x and 101y are formed faces upward. The transport mechanism positions the work 100 such that the scribe lines 101x and 101y are directly above the raised portions 13x and 13y of the body 11 of the table 10, respectively.

With the work 100 set, the valve 36 is closed and then the valve 37 is opened. This allows
The internal space 16 communicates with the sub-tank 33, and the air is drawn by the sub-tank 33, so that both are at the same negative pressure. This negative pressure is lower than the degree of vacuum set by the regulator 35. Next, after closing the valve 37, the valve 36 is opened to return the pressure of the sub tank 33 to the above-mentioned set vacuum degree. Next, by closing the valve 36 and then opening the valve 37, the internal space 16 and the sub-tank 33 are communicated again. In this way, the level of the negative pressure in the internal space 16 is gradually increased.

As described above, the internal space 16 of the table 10
When the pressure becomes negative, the work 100 is sucked through the suction holes 15 and 25. Since the receiving surface 20a of the table 10 is formed by the exposed surface of the elastic member 20 over the entire area, the seal between the work 100 and the elastic member 20 is good, and the suction can be performed efficiently.
Further, since the entire work 100 is elastically received, it is possible to reliably prevent the work 100 from being damaged at the time of setting the work 100 and at the time of a suction operation described later.

When the work 100 is sucked toward the table 10, the work 100 descends while compressing the elastic member 20. At this time, in the first region R1 of the receiving portion R, the amount of compression of the elastic member 20 is small because the protrusion 13 is present and the elastic member 20 is thin. Therefore, the workpiece 100 is located in the first region R
1, the scribe lines 101x, 10
The descending amount is small at the portion where 1y is formed. On the contrary,
In the second region R2 of the receiving portion R, since the elastic member 20 is thick, its elastic compression amount is large. Therefore, the work 100 has a portion corresponding to the center of the second region R2, that is, the divided region 1
At the center of 04, the descending amount is maximum.

As a result, the workpiece 100 is subjected to a bending stress such that the portions where the scribe lines 101x and 101y are formed project upward. As described above, when the degree of negative pressure in the internal space 16 increases stepwise and the force for sucking the work 100 through the suction holes 25 increases stepwise, the bending stress also increases stepwise. When the bending stress exceeds the threshold, the vertical crack 105 of the scribe lines 101x and 101y grows and breaks, whereby the work 100
It is decomposed into a number of small chips corresponding to the divided area 104 inside the lattice 103 and a part outside the lattice 103. As described above, when the degree of the negative pressure is increased stepwise, the bending stress sharply increases, so that the fracture can be favorably performed.

In the present embodiment, the raised portion 1 along the X axis is
Since 3x is higher than the raised portion 13y along the Y axis, the scribe line 101x
The bending stress at the portion along the scribe line 101y
Is larger than the bending stress at the part along. Therefore, at first, the fracture is performed along the scribe line 101x, and thereafter, the fracture is performed along the scribe line 101y.
As a result, a smooth break is made. In addition, by gradually lowering the height of the plurality of parallel protrusions 13x (or 13y) in the arrangement order, the plurality of scribe lines 101x
(Or 101y) may be sequentially broken. The scribe line may be smoothly broken from one end to the other end by gradually lowering the height of the ridge from one end to the other end.

Since a large number of small chips divided by the breaking are sucked by the suction holes 25, they do not fly apart due to the impact at the time of the breaking. Note that the valve 37 is opened even after the break, and the internal space 16 of the table 10 is opened.
It is preferable to use the negative pressure of the sub-tank 33 and the sub-tank 33 for suctioning small chips, but it is also possible to close the valve 37 and use only the negative pressure of the internal space 16 for suctioning small chips. The small chips divided as described above are placed on the table 10,
It is transported to the next step, for example, the step of mounting the chip on the motherboard. Even in the course of this transfer, the small chips are stably held by the suction action in the suction holes 25. After the break, the valve (not shown) may be opened to return the internal space 16 to the atmospheric pressure.

In the first embodiment, the scribe lines 101x and 101y are formed on the upper surface 100a of the workpiece 100, and are then left as they are (that is, the scribe lines 101x and 101y are kept upside down without being turned upside down). ,
It can be placed on the table 10 and broken, resulting in good production efficiency.

In the first embodiment, the case where the work is broken into many chips has been described. However, the present invention can also be applied to the case where the work is divided into two along a straight line, for example. In this case, only one ridge is formed on the lid 11b of the table 10, and the elastic member 20 has suction passages formed on both sides of the ridge. In addition, the work 100 is placed on the table 1
0, and the scribe line 101 is set in this set state.
x, 101y may be formed and then the breaking described above may be performed.

Next, another embodiment of the present invention will be described. In these embodiments, components corresponding to those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted. In the second embodiment shown in FIG. 6 and FIG.
It is set upside down with the embodiment. That is, the surface 100a on which the scribe lines 101x and 101y are formed faces downward.

In the apparatus of the second embodiment, the table 10A
A large number of suction holes 25A are formed in the elastic member 20A along the virtual lattice. A suction hole 15A is formed in the lid 11b at a position corresponding to the suction hole 25A. In the lid 11b, a columnar protrusion 13A is formed at the center of the area divided by the virtual lattice.
That is, the suction hole 25A is formed at the position where the protrusion 13 is formed in the first embodiment, and the protrusion 13A is formed at the position where the suction hole 25 is formed according to the first embodiment. In the second embodiment, the first region R1 ′ of the receiving portion R ′ does not include the protrusion 13A,
Large elastic compression is possible. On the other hand, the second region R2 ′ includes the ridge 13A, and the elastic compression is suppressed.

When setting the workpiece 100, the surface 10
0a on the receiving surface 20a, and the scribe line 1
01x and 101y are matched with the virtual lattice in which the suction holes 25A are arranged, and the center of the divided region 104 is set to the ridge 25A.
To match. As described above, when the work 100 is sucked through the suction holes 15A and 25A by the vacuum means (indicated by reference numeral 30 in FIG. 4), the scribe lines 101x and 1x are drawn.
At the location where 01y is formed, a bending stress that makes the projection convex downward acts, and the vertical crack 105 grows and is broken. In this embodiment, the suction passage may be a lattice-shaped groove instead of the large number of suction holes 25A.

In the third embodiment shown in FIGS. 8 and 9, the cells of two liquid crystal display devices are formed by breaking the cell material 200. The cell material 200 is obtained by bonding two substrates 201 and 202 (a plate-like work) with an adhesive.
202a (the outer surface of the substrates 201 and 202, that is, the first surface)
Scribe lines 203 and 20 extending straight in the center of
4 are formed. The adhesive is disposed along the periphery of the cell material 200 and the scribe lines 203 and 204.

In the apparatus according to the third embodiment, the table 1
The body 11B of 0B is formed to be elongated so as to extend in the left-right direction in FIG. 8, and has a box 11a and a lid 11b. The upper surface of the lid 11b is flat and horizontal. An elastic member 20B having a flat plate shape made of rubber is attached to the upper surface of a central portion in the longitudinal direction of the lid 11b, and a support member 40 having a flat plate shape made of hard resin is attached to the upper surfaces of left and right portions thereof. Have been. The lid 11b, the elastic member 20B, and the support member 40 form a receiving portion R ". The first region R1" of the receiving portion R "
B is a region occupied by the second support member 4
This is the area occupied by 0. Elastic member 20B and support member 40
The exposed upper surface becomes a receiving surface for receiving the cell material 200. In the present embodiment, the thickness of the elastic member 20B and the supporting member 40 are made equal and the upper surfaces thereof are flush, but the elastic member 20B may be made slightly thicker.

A number of suction holes 25B are formed in the elastic member 20B so as to form two rows with the center in the width direction interposed therebetween (that is, along two virtual straight lines). The lid 11b is also provided with a suction hole 15B corresponding to the suction hole 25B.

In the above configuration, the cell material 200 is set in the receiving portion 20R "such that one substrate 201 faces down. At this time, the scribe lines 203 are formed in two rows of the suction holes 25B.
The cell material 200 is positioned so as to be at the center between the two. In this state, as in the first and second embodiments, when the vacuum means is operated, the substrate 201
Therefore, the lowering is prohibited, and only the central portion corresponding to the elastic member 20B attempts to lower. As a result, a bending stress that causes the substrate 201 to project downward along the scribe line 203 acts, and the substrate 201 can be broken along the scribe line 203. Next, the cell member 200 is turned upside down, the substrate 202 is set on the receiving portion R ″, and the substrate 202 is broken along the scribe line 204 in the same manner as described above. As a result, the two separated cells become can get.

In the above embodiment, the scribe line 20
When the break is performed along 3,204, even if there is a shock of the break, the cell separated into two can be stably held because the suction state by the suction hole 25B is maintained. .

In the third embodiment, as shown by an imaginary line in FIG. 8, a table 1 having the same configuration as the table 10B is used.
0B 'may be arranged upside down so that the cell material 200 is sandwiched therebetween. In this case, the substrates 201 and 202 can be broken at different times without reversing the cell material 200. In the third embodiment, when four cells are obtained by forming a scribe line in a cross shape on a cell material, an elastic member is arranged corresponding to the scribe line. The third embodiment can be applied to a case where one piece of work is broken instead of a cell material. Further, a groove may be used as the suction passage instead of the large number of suction holes 25B.

In the first to third embodiments, the work is made of ceramic or glass, but may be made of another hard brittle material.

[0036]

According to the first aspect of the present invention, the work surface on which the scribe line is formed can be positioned opposite to the receiving surface of the table and broken. Further, by applying a bending stress to the work by the suction action, the work is broken along the scribe line, so that good breaking can be performed. In addition, other parts of the work are not damaged by the edge of the suction passage. Further, by sucking the broken piece of the work through the suction passage, the broken piece can be stably held even if there is a shock of the break. According to the second aspect of the present invention, the rigid portion is covered with the elastic portion, and the exposed surface of the elastic portion is used as the receiving surface for the work, so that the work can be more reliably prevented from being damaged. According to the third aspect of the present invention, a work having a grid-shaped scribe line can be efficiently broken into a large number of small pieces in a short time. In the invention of claim 4,
By forming the internal space in the table, suction with a large number of suction holes can be performed with a simple structure. In the invention according to claim 5, the scribe lines orthogonal to each other are broken at a time difference, so that the scribe lines can be broken more smoothly. According to the sixth aspect of the present invention, the work can be broken in a state where the work is arranged in reverse to the first aspect. In addition, by applying a bending stress to the work by the suction action, the work can be broken well along the scribe line, and the edge of the suction passage does not damage other parts of the work. According to the seventh aspect of the invention, the same effects as those of the second aspect can be obtained with the arrangement of the workpieces reversed. According to the eighth aspect of the invention, the same effects as those of the third aspect can be obtained with the arrangement of the workpieces reversed. According to the ninth aspect of the present invention, since the suction passage is formed by a large number of suction holes, the seal between the work and the receiving surface can be satisfactorily performed, and the suction operation can be reliably performed. According to the tenth aspect of the present invention, the divided pieces of the work are sucked through the suction passages on both sides of the scribe line, so that the divided pieces can be stably held even if there is a breaking impact. According to the eleventh aspect, the same effect as that of the ninth aspect can be obtained.

[Brief description of the drawings]

FIG. 1 is a plan view showing a table of a breaking device according to a first embodiment of the present invention.

FIG. 2 is a plan view showing a state where a work is placed on the table.

FIG. 3 is an enlarged sectional view taken along line III-III in FIG.

FIG. 4 is a schematic view showing the entire configuration of the breaking device.

FIG. 5 is an enlarged perspective view showing a lattice formed on a body of the table.

FIG. 6 is a plan view showing a table of a breaking device according to a second embodiment of the present invention.

FIG. 7 is an enlarged sectional view of a main part of a table according to the second embodiment.

FIG. 8 is a sectional view of a table according to a third embodiment of the present invention.

FIG. 9 is a plan view of a main part of a table according to the third embodiment.

[Description of Signs] R receiving portions R1, R1 ′, R1 ″ first region R2, R2 ′, R2 ″ second region 10 table 11b lid (rigid portion) 13, 13A raised 13x first raised portion 13y 2 raised portion 15, 15A, 15B suction hole (auxiliary suction passage) 16 internal space 20, 20A, 20B elastic member (elastic portion) 20a receiving surface 25, 25A, 25B suction hole (suction passage) 100, 201, 202 Work 100a, 201a, 202a First surface of work 101x, 101y, 203, 204 Scribe line 103 Grid

Claims (11)

[Claims] An apparatus for breaking a plate-shaped work having first and second surfaces and having a scribe line formed on the first surface along the scribe line has the following configuration. Characteristic plate work breaker. (A) A table on which the work is set. The table has a receiving portion, and an exposed surface of the receiving portion is provided as a receiving surface for receiving the second surface of the work. The receiving portion includes a first area along a scribe line of the work in the set state,
And second regions disposed on both sides of the first region. The first region is suppressed or prohibited from being elastically compressed, and the second region is elastically compressible more than the first region. This second
A suction passage is formed in the region, and one end of the suction passage is open to the receiving surface. (B) vacuum means connected to the other end of the suction passage. 2. The receiving portion of the table has a rigid portion and an elastic portion covering the rigid portion, and an exposed surface of the elastic portion is provided as the receiving surface, and the rigid portion includes the receiving surface. And a first region of the receiving portion includes the protrusion and an elastic portion covering the protrusion, and a second region of the receiving portion does not include the protrusion and has a thickness of the elastic portion. The apparatus for breaking a plate-like workpiece according to claim 1, wherein the apparatus is thicker than the first region. 3. The suction device according to claim 2, wherein the ridge forms a lattice, and a suction hole serving as the suction passage is formed in a central portion of the plurality of second regions divided by the lattice. Plate breaking machine. 4. The table has an auxiliary suction passage formed in the rigid portion and one internal space, and a number of suction holes of the elastic portion are provided through the auxiliary suction passage and the internal space. 4. The apparatus for breaking a plate-like workpiece according to claim 3, wherein the apparatus is connected to the vacuum means. 5. A ridge comprising a plurality of first raised portions extending parallel to a first axis and a plurality of raised portions extending parallel to a second axis orthogonal to the first axis. Second
The plate-shaped workpiece breaking device according to claim 3, further comprising a raised portion, wherein the first raised portion is higher than the second raised portion. 6. An apparatus for breaking a plate-like work having first and second surfaces and having a scribe line formed on the first surface along the scribe line, the apparatus having the following configuration. Characteristic plate work breaker. (A) A table on which the work is set. The table has a receiving portion, and an exposed surface of the receiving portion is provided as a receiving surface for receiving the first surface of the work. The receiving portion includes a first area along a scribe line of the work in the set state,
And second regions disposed on both sides of the first region. The first region is elastically compressible, and the second region is suppressed or prohibited from being elastically compressed as compared to the first region. A suction passage is formed in the first region, and one end of the suction passage is open to the receiving surface. (B) vacuum means connected to the other end of the suction passage. 7. The receiving portion of the table has a rigid portion and an elastic portion covering the rigid portion, and an exposed surface of the elastic portion is provided as the receiving surface, and the rigid portion includes the receiving surface. And the second region of the receiving portion includes the ridge and an elastic portion covering the ridge, and the first region of the receiving portion does not include the ridge and has a thickness of the elastic portion. The plate-like workpiece breaking device according to claim 6, wherein the thickness is larger than the second region. 8. The method according to claim 7, wherein the suction passage is formed along a virtual grid, and the bulge is formed at a central portion of a region of the receiving portion divided by the virtual grid. An apparatus for breaking a plate-like work according to the above. 9. The apparatus according to claim 8, wherein the suction passage includes a plurality of suction holes arranged along the virtual lattice. 10. The apparatus according to claim 6, wherein the suction passages are arranged on both sides of a scribe line of the set work. 11. The apparatus for breaking a plate-like work according to claim 10, wherein said suction passage is constituted by a number of suction holes arranged on both sides thereof along a scribe line.