M426867 五、新型說明： 【新型所屬之技術領域】 本創作係關於一種分類收料片交換裝置之設計，特 別是關於一種雙平台分類收料片更替裝置。 【先前技術】 晶片的測試與分選是半導體生產製造過程中的一 道手續。以發光二極體(light emitting diode，LED)為例， 隨著LED技術的進步，人們對LED的質量要求越來越 高。若將未經分選過的LED使用於顯示器時，其顯示 晝面會因為人眼對於顏色波長及亮度的敏感性而在視 覺上感到不均勻。因此，依據LED的波長、發光強度、 光通量、色溫、工作電壓…等參數進行測試與分選是十 分重要的。 晶片的測試與分選一般是由自動化設備來執行，其 將分選後的晶片轉移到一分類收料片（Bin Table)，再以 一滑台將此分類收料片搬移輸出，然後利用此滑台將新 的分類收料片送回原位，以供經下一階段分選的晶片轉 移至新的分類收料片。藉由如此依次循環，將晶片依不 同規格、等級而分選轉移到對應的分類收料片，以方便 後續的分裝動作的進行或是用於對應送入下一階段的 製程。 【新型内容】 本創作所欲解決之技術問題 然而，在習知技術中，自滑台將分類收料片搬移輸 出直至將新的分類收料片送回原位的這段時間是無法 執行晶片分選作業的空窗期。在較嚴重的情況中，空窗 3 期的所佔時間甚至比晶片分選作業的所需時間還多，從 而造成整體製程的大幅拖延，使得製程效率低下。 緣此，本創作之目的即是提供一種雙平台分類收料 片更替裝置，以減短更替分類收料片的空窗期，進而提 升整體製程效率。 本創作解決問題之技術手段 本創作為解決習知技術之問題所採用之技術手段 係提供一種雙平台分類收料片更替裝置，用於更替分類 收料片以執行晶片分選作業，雙平台分類收料片更替裝 置包括：一第一搬送滑台，滑設於一連接在一晶片分選 位置與一第一交換位置之間的第一路徑上，用以搬送分 類收料片；一第二搬送滑台，滑設於一連接在晶片分選 位置與一第二交換位置之間的第二路徑上，用以搬送分 類收料片；以及一分類收料片搬送機構，設置鄰近於第 一交換位置與第二交換位置，而在第一搬送滑台滑移至 第一交換位置或第二搬送滑台滑移至第二交換位置 時，將第一搬送滑台或第二搬送滑台所搬送的分類收料 片與位在一待換位置的另一分類收料片予以交換位 置，其中當第一搬送滑台將分類收料片或經交換位置後 之分類收料片自第一交換位置送至晶片分選位置時，第 二搬送滑台滑移向第二交換位置執行分類收料片交換 作業，其中當第二搬送滑台將分類收料片或經交換位置 後之分類收料片自第二交換位置送至晶片分選位置 時，第一搬送滑台滑移向第一交換位置執行分類收料片 交換作業。 依據本創作的一實施例，其中第一路徑與第二路徑 相互對稱。 依據本創作的一實施例，第一路徑包括一自第一交 M426867 換位置至一第一等待位置的滑移路徑、以及一自第一等 待位置至晶片分選位置的更替路徑。 依據本創作的一實施例，第二路徑包括一自第二交 換位置至一第二等待位置的滑移路徑、以及一自第二等 待位置至晶片分選位置的更替路徑。 依據本創作的一實施例，第一搬送滑台或第二搬送 滑台往返於晶片分選位置與第一交換位置或第二交換 位置之間的往返時間加上分類收料片交換作業的執行 時間短於單一分類收料片的晶片分選作業的執行時間。 依據本創作的一實施例，雙平台分類收料片更替裝 置更包括一分類收料片替補機構，設置鄰近於待換位 置，以將經交換位置後之分類收料片自待換位置替換 出，並且補充另一分類收料片至待換位置。 依據本創作的一實施例，上述分類收料片替補機構 替補經交換位置後之分類收料片與分類收料片所需的 替補時間短於單一分類收料片的晶片分選作業的執行 時間與第一搬送滑台或第二搬送滑台自一等待位置移 入晶片分選位置的移入時間的總和的一半。 本創作對照先前技術之功效 經由本創作所採用之技術手段，第一搬送滑台與第 二搬送滑台輪流地將分類收料片更替至晶片分選位 置，以及將執行分選作業後的分類收料片送出。藉由此 種方式，使得晶片分選位置幾乎於每個時間點都存在有 分類收料片。亦即，晶片分選作業能夠近乎不間斷的執 行。在本創作的較佳實施例中，無法執行晶片分選作業 的空窗期僅有習知技術中出現的空窗期時間的1/10或 更少。因此，藉由本創作所提供的雙平台分類收料片更 替裝置，能夠大幅減短更替分類收料片的空窗期，有效 5 M426867 提升整體製程效率。 本創作所採用的具體實施例，將藉由以下之實施例 及附呈圖式作進一步之說明。 【實施方式】 請參閲第1圖，其係顯示依據本創作之一實施例的 雙平台分類收料片更替裝置的示意圖。如圖所示，依據 本創作之一實施例的一雙平台分類收料片更替裝置100 包括一第一搬送滑台1、一第二搬送滑台2、一分類收 料片搬送機構3、以及一分類收料片替補機構4。 • 第一搬送滑台1滑設於一第一路徑R1上，第一路 徑R1為一連接在一晶片分選位置P1與一第一交換位 置P12之間的路徑。具體而言，第一搬送滑台1利用滑 軌或機械臂之類的機構而能夠沿著第一路徑R1移動， 而往返於晶片分選位置P1與第一交換位置P12。藉此， 使第一搬送滑台1能夠將分類收料片在晶片分選位置 P1與第一交換位置P12之間進行搬送。第一路徑R1並 不限於直線或曲線路徑，其亦可包括二軸向或三軸向的 路徑。在此一實施例中，第一路徑R1包括一 X軸向的 * 更替路徑R11與一 Y軸向的滑移路徑R12。更替路徑 R11為自晶片分選位置P1至一第一等待位置P11的路 徑、以及滑移路徑R12為自第一等待位置P11至第一交 換位置P12的路徑。 第二搬送滑台2相似於第一搬送滑台1，滑設於一 第二路徑R2上，第二路徑R2為一連接在晶片分選位 置P1與一第二交換位置P22之間的路徑。藉此，第二 搬送滑台2能夠沿著第二路徑R2移動，而將分類收料 片在晶片分選位置P1與第二交換位置P22之間進行搬 6 M426867 送。較佳地，第二路徑R2與第一路徑R1相互對稱， 包括一自晶片分選位置P1至一第二等待位置P21的更 替路徑R21、以及一自第二等待位置P21至第二交換位 置P22的滑移路徑R22。 分類收料片搬送機構3設置鄰近於第一交換位置 P12與第二交換位置P22。在此一實施例中，分類收料 片搬送機構3的數量為二個，但本創作並不以此為限， 分類收料片搬送機構3的數量亦可為一個或二個以 上。分類收料片搬送機構3用以在第一搬送滑台1滑移 至第一交換位置P12或第二搬送滑台2滑移至第二交換 位置22時，將第一搬送滑台1或第二搬送滑台2所搬 送的分類收料片與位在一待換位置P3的另一分類收料 片予以交換位置。 分類收料片替補機構4設置鄰近於待換位置P3， 用以執行一將經交換位置後之分類收料片自待換位置 P3替換出、以及補充另一分類收料片至待換位置P3的 分類收料片替補作業。 請參閱第2圖至第8圖，其係顯示依據本創作之一 實施例的雙平台分類收料片更替裝置於運作過程中各 個時間點的狀態的示意圖，並配合前述第1圖對依據本 創作之一實施例的雙平台分類收料片更替裝置的運作 方式作一說明如下。 如第2圖所示，於晶片分選位置P1執行晶片分選 作業於一分類收料片B1後，第一搬送滑台1將分類收 料片B1自晶片分選位置P1移出至第一等待位置P11。 與此同時，原本位在第二等待位置P21的第二搬送滑台 2則將未經晶片分選作業的一分類收料片B2移入晶片 分選位置P1。 7 M426867 由於在此一實施例中，第一路徑R1與第二路徑R2 相互對稱，故分類收料片B1移出至第一等待位置P11 與分類收料片B2移入晶片分選位置P1的時間是相同 的。分類收料片B2移入晶片分選位置P1後即開始執 行晶片分選作業。第一搬送滑台1則載著分類收料片 B1自第一等待位置P11滑移向第一交換位置P12，如 第3圖所示。 在第一搬送滑台1到達第一交換位置P12時，分類 收料片搬送機構3將第一搬送滑台1所搬送的分類收料 片B1與位在待換位置P3的一分類收料片B3予以交換 位置，如第4圖所示。 如第5圖及第6圖所示，經交換位置後，分類收料 片B3則由第一搬送滑台1向著晶片分選位置P1搬送。 較佳地，第一搬送滑台1往返於晶片分選位置P1與第 一交換位置P12的往返時間加上分類收料片交換作業 的執行時間短於單一分類收料片（即，分類收料片B2) 的晶片分選作業的執行時間。亦即，當第一搬送滑台1 載著分類收料片B3返回晶片分選位置P1時，分類收 料片B2的晶片分選作業尚未完成。在這種情況下，第 一搬送滑台1則可暫待於第一等待位置P11，直至分類 收料片B2的晶片分選作業完成。 與此同時，分類收料片替補機構4將分類收料片 B1自待換位置替換出，並且補充另一分類收料片B4至 待換位置P3。較佳地，分類收料片替補機構4替補經 交換位置後之分類收料片B1與分類收料片B4所需的 替補時間短於單一分類收料片（即，分類收料片B2)的晶 片分選作業的執行時間與第一搬送滑台1自第一等待 位置P11移入晶片分選位置P1的移入時間的總和的一 8 M426867 半。亦即，分類收料片替補機構4替補分類收料片所需 的替補時間極短，當第一搬送滑台1滑移至第一交換位 置P12或是第二搬送滑台2滑移至第二交換位置P22 時，待換位置P3上會已備妥好待換的分類收料片，而 能夠立即執行分類收料片交換作業，無需等待。 如第7圖所示，在分類收料片B2的晶片分選作業 完成後，第二搬送滑台2載著分類收料片B2自晶片分 選位置P1移出至第二等待位置P21。與此同時，位在 第一等待位置P11的第一搬送滑台2則將分類收料片 B3移入晶片分選位置P1，以銜接執行晶片分選作業。 如第8圖所示，當第一搬送滑台1將經交換位置後 之分類收料片B3自第一交換位置P12送至晶片分選位 置P1時，第二搬送滑台2係滑移向第二交換位置P22 執行分類收料片交換作業。第二搬送滑台2之後的運作 流程以及分類收料片B2的搬送與前述第一搬送滑台1 以及分類收料片B1的動作相同，故不再贅述。 承上所述，於本創作的雙平台分類收料片更替裝置 100中，第一搬送滑台1與第二搬送滑台2輪流地將分 類收料片更替至晶片分選位置P1，以及將執行分選作 業後的分類收料片送出。藉由此種方式，使得晶片分選 位置P1幾乎於每個時間點（如第1圖至第8圖所示）都 存在有分類收料片。亦即，晶片分選作業能夠近乎不間 斷的執行。詳細而言，在本創作的較佳實施例中，無法 執行晶片分選作業的空窗期僅發生在將經晶片分選作 業的分類收料片自晶片分選位置P1移出（等同於自等待 位置將另一分類收料片移入晶片分選位置P1)的時間。 這段時間極短，實際上約只有習知技術中出現的空窗期 時間的1/10或更少。因此，藉由本創作所提供的雙平 9 M426867 台分類收料片更替裝置，能夠大幅減短更替分類收料片 的空窗期，有效提升整體製程效率。 由以上之實施例可知，本創作所提供之雙平台分類 收料片更替裝置確具產業上之利用價值，故本創作業已 符合於專利之要件。惟以上之敘述僅為本創作之較佳實 施例說明，凡精於此項技藝者當可依據上述之說明而作 其它種種之改良，惟這些改變仍屬於本創作之創作精神 及以下所界定之專利範圍中。 【圖式簡單說明】M426867 V. New description: [New technical field] This creation is about the design of a sorting and receiving sheet exchange device, especially for a dual platform sorting and receiving piece replacement device. [Prior Art] Wafer testing and sorting is a procedure in the semiconductor manufacturing process. Taking light emitting diodes (LEDs) as an example, with the advancement of LED technology, people are increasingly demanding the quality of LEDs. If an unsorted LED is used on a display, its display will be visually uneven due to the sensitivity of the human eye to color wavelength and brightness. Therefore, it is important to test and sort according to the parameters such as the wavelength, luminous intensity, luminous flux, color temperature, and operating voltage of the LED. The testing and sorting of the wafer is generally performed by an automated device, which transfers the sorted wafer to a Bin Table, and then shifts the classified receipt to a slide table, and then utilizes this. The slide returns the new sorted receipt to its original position for transfer to the new sorted receipt via the next stage of sorting. By sequentially cycling in this way, the wafers are sorted according to different specifications and grades and transferred to the corresponding classified receipt sheets to facilitate subsequent dispensing operations or for corresponding processes to be sent to the next stage. [New content] The technical problem to be solved by the present invention However, in the prior art, the wafer cannot be executed by the slide table when the sorting piece is moved and output until the new sorting piece is returned to the original position. Empty window period for sorting operations. In the more serious case, the time of the empty window 3 is even more than the time required for the wafer sorting operation, which causes a large delay in the overall process, which makes the process inefficiency. Therefore, the purpose of this creation is to provide a dual-platform sorting and receiving device replacement device to reduce the empty window period of the replacement sorting piece, thereby improving the overall process efficiency. The technical means for solving the problem in the present invention The technical means adopted for solving the problem of the prior art provides a dual-platform sorting and receiving device replacement device for replacing the sorted receiving piece to perform wafer sorting operation, dual platform classification The receiving piece replacing device comprises: a first conveying sliding table, slidingly disposed on a first path connected between a wafer sorting position and a first exchange position for conveying the classified receiving piece; a second The transporting slide is slidably disposed on a second path connected between the wafer sorting position and a second exchange position for transporting the sorted receipt sheet; and a sorting and receiving sheet conveying mechanism disposed adjacent to the first The exchange position and the second exchange position are carried out when the first transfer slide slides to the first exchange position or the second transfer slide slides to the second exchange position, and the first transfer slide or the second transfer slide is transported The classified receipt sheet is exchanged with another sorted receiving sheet at a position to be exchanged, wherein when the first conveying slide table sorts the receiving sheet or the sorted receiving sheet after the exchanged position, the first exchange is performed. When being sent to the wafer sorting position, the second transfer slide slips to perform the sorting and receiving sheet exchange operation to the second exchange position, wherein the second transfer slide table sorts the receipt sheets or the sorted receipts after the exchange position When the sheet is sent from the second exchange position to the wafer sorting position, the first transfer slide slips to perform the sorting and receiving sheet exchange operation to the first exchange position. According to an embodiment of the present invention, the first path and the second path are symmetrical to each other. According to an embodiment of the present invention, the first path includes a slip path from the first intersection M426867 to a first waiting position, and an alternate path from the first wait position to the wafer sorting position. According to an embodiment of the present invention, the second path includes a slip path from the second exchange position to a second wait position, and an alternate path from the second wait position to the wafer sorting position. According to an embodiment of the present invention, the first transfer slide or the second transfer slide travels to and from the wafer sorting position and the first exchange position or the second exchange position plus the execution of the sorted receipt exchange operation. The execution time of the wafer sorting operation is shorter than the single sorted receipt. According to an embodiment of the present invention, the dual platform classification receiving piece replacing device further comprises a sorting receiving piece replacement mechanism, which is disposed adjacent to the position to be changed, so as to replace the classified receiving piece after the exchanged position from the waiting position. And add another sort of receipt to the position to be changed. According to an embodiment of the present invention, the replacement time required for the classified receipt sheet and the classified receipt sheet after the sorted receiving sheet replacement mechanism is replaced by the exchange position is shorter than the execution time of the wafer sorting operation of the single classified receiving sheet. One half of the total of the shifting time from the first transfer slide or the second transfer slide to the wafer sorting position from a waiting position. According to the technical means adopted by the present invention, the first transfer slide and the second transfer slide alternately change the sorted receipt to the wafer sorting position, and the classification after performing the sorting operation. The receipt is sent out. In this way, the wafer sorting position is such that there is a sorted receipt sheet at almost every point in time. That is, the wafer sorting operation can be performed almost continuously. In the preferred embodiment of the present creation, the empty window period in which the wafer sorting operation cannot be performed is only 1/10 or less of the empty window period which occurs in the prior art. Therefore, with the dual platform classification receiving piece replacement device provided by this creation, the empty window period of the replacement classification receiving piece can be greatly shortened, and the effective efficiency of the overall process is improved by 5 M426867. Specific embodiments of the present invention will be further illustrated by the following examples and the accompanying drawings. [Embodiment] Referring to Figure 1, there is shown a schematic diagram of a dual platform sorting receipt replacement device in accordance with an embodiment of the present invention. As shown in the figure, a dual platform sorting receipt replacement device 100 according to an embodiment of the present invention includes a first transporting slide 1, a second transporting slide 2, a sorting and receiving sheet transporting mechanism 3, and A classified receipt is substituted for the institution 4. • The first transfer slide 1 is slidably disposed on a first path R1, and the first path R1 is a path connected between a wafer sorting position P1 and a first exchange position P12. Specifically, the first transporting slide table 1 can be moved along the first path R1 by means of a mechanism such as a slide rail or a robot arm, and travels to and from the wafer sorting position P1 and the first exchange position P12. Thereby, the first transporting slide table 1 can transport the sorted and received sheets between the wafer sorting position P1 and the first exchange position P12. The first path R1 is not limited to a straight or curved path, and may also include a biaxial or triaxial path. In this embodiment, the first path R1 includes an X-axis * replacement path R11 and a Y-axis slip path R12. The replacement path R11 is a path from the wafer sorting position P1 to a first waiting position P11, and the slip path R12 is a path from the first waiting position P11 to the first switching position P12. The second transfer slide 2 is similar to the first transfer slide 1, and is slidably disposed on a second path R2. The second path R2 is a path connected between the wafer sorting position P1 and a second exchange position P22. Thereby, the second transfer table 2 can be moved along the second path R2, and the sorted receipt sheet is transported between the wafer sorting position P1 and the second exchange position P22 by 6 M426867. Preferably, the second path R2 is symmetric with the first path R1, and includes an alternate path R21 from the wafer sorting position P1 to a second waiting position P21, and a second waiting position P21 to a second switching position P22. Slip path R22. The sorting receipt conveying mechanism 3 is disposed adjacent to the first exchange position P12 and the second exchange position P22. In this embodiment, the number of the classified receipt conveying mechanisms 3 is two, but the creation is not limited thereto, and the number of the classified receiving sheet conveying mechanisms 3 may be one or two or more. The sorting and receiving sheet conveying mechanism 3 is configured to move the first conveying table 1 or the first stage when the first conveying table 1 is slid to the first exchange position P12 or the second conveying table 2 is slid to the second exchange position 22. The classified receipt sheets conveyed by the transport slide table 2 are exchanged with another sorted receipt sheet positioned at the position P3 to be exchanged. The sorting receipt replacement mechanism 4 is disposed adjacent to the to-be-replaced position P3 for performing a replacement of the sorted receipt sheet after the exchanged position from the standby position P3, and supplementing another classified receipt to the position P3 to be exchanged. The classification of the receiving piece substitute work. Please refer to FIG. 2 to FIG. 8 , which are diagrams showing the state of the dual-platform classification receiving piece replacing device according to an embodiment of the present invention at various time points in the operation process, and matching the first FIG. One mode of operation of the dual platform classification receipt replacement device of one embodiment is described below. As shown in FIG. 2, after the wafer sorting operation is performed on the sorting tray B1 at the wafer sorting position P1, the first transporting slide table 1 removes the sorted receipt sheet B1 from the wafer sorting position P1 to the first waiting. Position P11. At the same time, the second transfer stage 2, which is originally at the second waiting position P21, moves a sorted receipt sheet B2 which has not been subjected to the wafer sorting operation to the wafer sorting position P1. 7 M426867 Since in this embodiment, the first path R1 and the second path R2 are symmetric with each other, the time when the sorted receipt sheet B1 is moved out to the first waiting position P11 and the sorted receipt sheet B2 is moved into the wafer sorting position P1 is identical. After the sorting receipt piece B2 is moved into the wafer sorting position P1, the wafer sorting operation is started. The first transfer table 1 slides the first and second waiting positions P11 from the first waiting position P11 to the first exchange position P12 as shown in Fig. 3. When the first transporting slide table 1 reaches the first exchange position P12, the sorting and receiving sheet conveying mechanism 3 conveys the sorted receipt sheet B1 conveyed by the first transporting slide table 1 and a sorted receiving sheet positioned at the position P3 to be exchanged. B3 is exchanged for position as shown in Figure 4. As shown in Fig. 5 and Fig. 6, after the exchange position, the sorting and receiving sheet B3 is transported by the first transporting table 1 toward the wafer sorting position P1. Preferably, the round trip time of the first transport slide 1 to and from the wafer sorting position P1 and the first exchange position P12 plus the execution time of the sorted receipt exchange operation is shorter than the single sorted receipt (ie, the classified receipt) Slice B2) The execution time of the wafer sorting operation. That is, when the first transporting slide table 1 carries the sorted receipt sheet B3 and returns to the wafer sorting position P1, the wafer sorting operation of the sorting stock sheet B2 is not completed yet. In this case, the first transport slide table 1 can be temporarily held at the first waiting position P11 until the wafer sorting operation for sorting the receipt sheet B2 is completed. At the same time, the sorting receipt replacement mechanism 4 replaces the sorted receipt sheet B1 from the standby position and replenishes another sorted receipt sheet B4 to the position P3 to be exchanged. Preferably, the replacement receipt time required by the classified receipt replacement mechanism 4 to replace the sorted receipt sheet B1 and the classified receipt sheet B4 after the exchange position is shorter than the single classification receipt sheet (ie, the classified receipt sheet B2) The execution time of the wafer sorting operation is half of the sum of 8 M426867 of the sum of the shifting time of the first transfer slide 1 moved from the first waiting position P11 to the wafer sorting position P1. That is, the replacement time required for the classified receipt replacement mechanism 4 to replace the classified receipt is extremely short, when the first transfer slide 1 slips to the first exchange position P12 or the second transfer slide 2 slips to the first When the position P22 is exchanged, the classified receipt piece to be exchanged is ready for the position P3 to be exchanged, and the classified receipt exchange operation can be performed immediately without waiting. As shown in Fig. 7, after the wafer sorting operation of the sorted receipt sheet B2 is completed, the second transfer table 2 carries the sorted take-up sheet B2 from the wafer sorting position P1 to the second waiting position P21. At the same time, the first transfer table 2 positioned at the first waiting position P11 moves the sorted receipt sheet B3 to the wafer sorting position P1 to engage the wafer sorting operation. As shown in FIG. 8, when the first transporting slide table 1 sends the sorted receipt sheet B3 after the exchange position from the first exchange position P12 to the wafer sorting position P1, the second transport slide 2 is slid toward The second exchange position P22 performs a classified receipt exchange operation. The operation flow after the second transfer slide table 2 and the transfer of the sorted receipt sheet B2 are the same as those of the first transfer slide table 1 and the sorted receipt sheet B1, and therefore will not be described again. As described above, in the dual platform classification receiving piece replacing device 100 of the present invention, the first conveying table 1 and the second conveying table 2 alternately replace the classified receiving sheets to the wafer sorting position P1, and The classified receipts after the sorting operation are executed are sent out. In this manner, the wafer sorting position P1 is such that there is a sorted receipt sheet at almost every time point (as shown in Figs. 1 to 8). That is, the wafer sorting operation can be performed almost continuously. In detail, in the preferred embodiment of the present invention, the window period in which the wafer sorting operation cannot be performed only occurs when the sorted stock sheet subjected to the wafer sorting operation is removed from the wafer sorting position P1 (equivalent to self-waiting) The time at which the position moves another sorted receipt into the wafer sorting position P1). This period of time is extremely short, and in fact only about 1/10 or less of the empty window period that occurs in conventional technology. Therefore, with the Shuangping 9 M426867 classification receiving piece replacement device provided by this creation, the empty window period of the replacement classification piece can be greatly shortened, and the overall process efficiency is effectively improved. It can be seen from the above embodiments that the dual-platform classification receiving piece replacement device provided by the present invention has industrial utilization value, so the original operation has been in conformity with the requirements of the patent. However, the above description is only for the preferred embodiment of the present invention, and those skilled in the art may make other improvements according to the above description, but these changes still belong to the creative spirit of the creation and the following definitions. In the scope of patents. [Simple description of the map]
第1圖係顯示本創作之一實施例的雙平台分類收料片 更替裝置的示意圖； 第2圖至第8圖係顯示依據本創作之一實施例的雙平台 分類收料片更替裝置於運作過程中各個時間點的狀態 的不意圖。 【主要元件符號說明】 100 雙平台分類收料片更替裝置 1 第一搬送滑台1 is a schematic diagram showing a dual-platform classification receiving piece replacing device of one embodiment of the present creation; FIGS. 2 to 8 are diagrams showing operation of a dual-platform classified receiving piece replacement device according to an embodiment of the present creation; The intent of the state at various points in the process. [Main component symbol description] 100 dual platform classification receiving piece replacement device 1 First conveying slide table
2 第二搬送滑台 3 分類收料片搬送機構 4 分類收料片替補機構 B1 分類收料片 B2 分類收料片 ‘ B3 分類收料片 B4 分類收料片 P1 晶片分選位置 10 M4268672 Second transfer slide table 3 Classification receiving piece conveying mechanism 4 Classification receiving piece replacement mechanism B1 Classification receiving piece B2 Classification receiving piece ‘ B3 classification receiving piece B4 Classification receiving piece P1 wafer sorting position 10 M426867
Pll 第一等待位置 P12 第一交換位置 P21 第二等待位置 P22 第二交換位置 P3 待換位置 R1 第一路徑 Rll 更替路徑 R12 滑移路徑 R2 第二路徑 R21 更替路徑 R22 滑移路徑P11 First waiting position P12 First exchange position P21 Second waiting position P22 Second exchange position P3 Waiting position R1 First path R11 Replacement path R12 Slip path R2 Second path R21 Replacement path R22 Slip path