CN103077914A - Fully automatic crystal grain sorting equipment and fully automatic crystal grain sorting method - Google Patents
Fully automatic crystal grain sorting equipment and fully automatic crystal grain sorting method Download PDFInfo
- Publication number
- CN103077914A CN103077914A CN2013100074975A CN201310007497A CN103077914A CN 103077914 A CN103077914 A CN 103077914A CN 2013100074975 A CN2013100074975 A CN 2013100074975A CN 201310007497 A CN201310007497 A CN 201310007497A CN 103077914 A CN103077914 A CN 103077914A
- Authority
- CN
- China
- Prior art keywords
- axis
- sorting
- disc
- crystal grain
- transfer system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses fully automatic crystal grain sorting equipment and a fully automatic crystal grain sorting method. The equipment consists of seven main parts including a wafer work table, a sorting work table, a transportation conveying system, a wafer work table propelling device, a sorting work table propelling device, a swinging arm mechanism and a chip sorting material cabin. The traditional layout and mechanical structure in the prior art is improved, an optimized layout structure is provided on a machine body platform, disc sheets can freely go in or out to be taken and placed among the work table, the propelling device and the chip sorting material cabin through the transportation conveying system, the fully automatic crystal grain sorting is realized, meanwhile, a transportation system has two buffer region positions, the exchange time between the disc sheets to be sorted and the disc sheets completing the sorting can be reduced, and further, the crystal grain sorting time and the crystal grain sorting efficiency are accelerated and improved. The equipment and the method have the characteristics that the sheet exchange is efficient, the whole machine is small and exquisite, the structure is compact, the whole machine stability is good, and the chip sorting material cabin has good expansion performance.
Description
Technical field
The present invention relates to crystal grain sorting technology field, particularly relate to a kind of full-automatic crystal grain screening installation and full-automatic crystal grain method for separating.
Background technology
Light-emitting diode (Light Emitting Diode, LED) and semiconductor crystal wafer can use the device of crystal grain sorting function after cutting into crystal grain, for example the crystal grain separator carries out the action of crystal grain test and sorting (Bin).With LED, usually test and sorting for several key parameters such as dominant wavelength (peak length), luminous intensity (MCD), luminous flux (lumens), colour temperature (color temperature), operating voltage (Vf), reverse breakdown voltages (ImA), this step is having material impact aspect the crystal grain production of LED and the packaging cost.Crystal grain detects and the action of sorting and semiconductor grain also can carry out according to the demand of product.
Adopt the crystal grain separator to process and be placed in the assorting room of LED crystal grain in the wafer central, the crystal grain separator can automatically be divided in LED crystal grain in the different Riving Box (bin frame) according to the testing standard of setting.And in assorting room, need to change Riving Box or wafer central to continue the step of crystal grain sorting.
Electronic industry is more and more higher for the conforming requirement of LED polarimetry nature now, in early days can divide the separator of 32bin can not satisfy use, the existing ability of supporting minute 72bin even arriving 150bin of present commercial separator on the market is to satisfy industry for the strict demand of LED crystal grain wavelength and brightness uniformity.With a crystal grain separator, state in realization in the process of sorting, there are the following problems in the prior art: the crystal grain separator vision-based detection good except need possess with select the arranging system, because the bin kind number of its sorting is many, employed Riving Box number and the transmission that need carry out action is also a lot of in the assorting room, so the transfer rate of the holding structure capacity of board inside, the design of feeding-discharging mechanism and connecting gear has had influence on the overall efficiency of board, has the not high problem of efficient.
Therefore, need the technology that provides the high full-automatic crystal grain screening installation of a kind of efficiency of separation to reach efficiently full-automatic crystal grain method for separating badly and seem particularly important.
Summary of the invention
One of purpose of the present invention be to avoid weak point of the prior art and provide a kind of and change that sheet is efficient, complete machine is small and exquisite, compact conformation, full-automatic crystal grain screening installation that complete machine stability is good.
Two of purpose of the present invention is to avoid weak point of the prior art and the full-automatic crystal grain method for separating that a kind of efficiency of separation is high, can reduce the stand-by period is provided.
One of purpose of the present invention is achieved through the following technical solutions:
The invention provides a kind of full-automatic crystal grain screening installation, include the body platform, be provided with on the described body platform:
Two workbench are respectively wafer work platform and sorting work platform, and it is used for the carrying disc;
Oscillating arm mechanisms is carried out sorting by it to the wafer disc on the wafer work platform and the sorting disc on the sorting work platform;
Die grading material storehouse, it is used for depositing die grading card casket and chip die card casket, and wherein said die grading card casket is used for depositing the sorting disc, and described chip die card casket is used for the storing wafer disc;
The transportation transfer system, it can move along X-axis, Y-axis and Z-direction, described transportation transfer system has two buffer location, take out the disc for the treatment of sorting by described transportation transfer system corresponding position from described die grading material storehouse and place the first buffer location and wait, the disc that the needs through sorting that will be arranged in the second buffer location are returned to die grading material storehouse is returned to die grading material storehouse assigned address;
Two pushers are respectively wafer work platform pusher and sorting work platform pusher, and it is used for pushing to the disc on two workbench on the transportation transfer system or will transports disc picking and placing to two workbench on the transfer system;
Described die grading material lab setting is in a side of described body platform, the sorting work district that described wafer work platform, described sorting work platform and described two pushers form is arranged at and is positioned at the opposite side relative with described die grading material storehouse on the described body platform, described transportation transfer system is horizontally placed between described die grading material storehouse and the described sorting work district, and described wafer work platform and described sorting work platform are arranged at respectively the both sides of described oscillating arm mechanisms; Accordingly, described wafer work platform cooperates to realize wafer disc picking and placeing from described transportation transfer system with described wafer work platform pusher; Described sorting work platform cooperates to realize sorting disc picking and placeing from described transportation transfer system with described sorting work platform pusher.
Wherein, described transportation transfer system comprises:
X-axis guide rail, X-axis pedestal, and drive described X-axis pedestal along the reciprocating X-axis drive unit of described X-axis guide rail;
Y-axis guide rail, Y-axis pedestal, and drive described Y-axis pedestal along the reciprocating Y-axis drive unit of described Y-axis guide rail;
Z axis guide rail, Z axis pedestal, and drive described Z axis pedestal along the reciprocating Z axis drive unit of described Z axis guide rail, described Z axis guide rail is fixedly installed on the vertical plate of described X-axis pedestal, and described Y-axis guide rail is fixedly installed on described Z axis pedestal;
Be used for the fixture of clamping sorting disc or wafer disc and the grasping drive unit that the described fixture of control moves up and down, described fixture is connected with described Y-axis pedestal;
Described Z axis pedestal is provided with the first draw-in groove and the second draw-in groove.
Wherein, described grasping drive unit comprises the first gripper cylinder formula drive unit and the second gripper cylinder formula drive unit, and described the first gripper cylinder formula drive unit and described the second gripper cylinder formula drive unit all are arranged at described Y-axis pedestal.
Wherein, described X-axis drive unit comprises X-axis motor, X-axis screw mandrel and X-axis nut, described X-axis nut is arranged on the below of described X-axis pedestal, and described X-axis screw mandrel is connected with described X-axis nut thread, and the described X-axis pedestal of described X-axis motor-driven moves along described X-axis screw mandrel; Described Y-axis drive unit comprises y-axis motor, gear and tooth bar, described y-axis motor is fixedly installed on described Y-axis pedestal, the coaxial output shaft that is arranged at described y-axis motor of described gear, described tooth bar is arranged at the medial surface of described Y-axis pedestal, described gear and the engagement of described tooth bar; Described Z axis drive unit comprises Z axis motor, Z axis screw mandrel and Z axis nut, and described Z axis pedestal is connected with described Z axis wire rod thread, and described Z axis screw mandrel is connected with described Z axis nut thread, and the described Z axis pedestal of described Z axis motor-driven moves along described Z axis screw mandrel.
Wherein, described pusher comprises:
Fixed support;
Transfer driving device, its disc that is used for being transferred is transplanted on the transportation transfer system by workbench or is returned by the transportation transfer system and is transplanted on workbench, and described transfer driving device comprises the handover leading screw that is arranged at described support bracket fastened mount pad, is arranged at described mount pad, drive the motor that described handover leading screw rotates and the sliding seat that is spirally connected with described handover leading screw;
Clip claw mechanism, it be used for to clamp disc or unclamps disc, described upper clip and the clip claw mechanism that forms of the lower clamping piece driving clamping device that comprises the intermediate plate assembly and be used for driving described intermediate plate assembly clamping or unclamp by be arrangeding in parallel;
Lifting drive, it is fixed in described sliding seat by connector, is used for making described intermediate plate assembly rising to be in and dodges the position and make described intermediate plate assembly decline be in a folder position.
Wherein, described lifting drive comprises lift cylinder seat and lift cylinder, and the lift cylinder seat is fixedly connected with described connector, and described lift cylinder seat is provided with the riser guide groove; Described driving clamping device comprises clamping cylinder and clamping cylinder seat, and described clamping cylinder seat is provided with riser guide, and described riser guide and described riser guide groove are slidingly matched.
Wherein, described lift cylinder is provided with displacement transducer; Described sliding seat is provided with displacement transducer.
Wherein, described transfer driving device also comprises two slide bars, and described two slide bars are arranged at respectively the both sides of described handover leading screw, and an end of described slide bar is arranged at described mount pad, and the other end of described slide bar and described sliding seat are slidingly connected.
Wherein, described die grading material storehouse is the die grading material storehouse of integral type fixed structure.
Two of purpose of the present invention is achieved through the following technical solutions:
The present invention also provides a kind of full-automatic crystal grain method for separating that adopts a kind of full-automatic crystal grain screening installation described above, includes following steps:
Step 1 is placed on the wafer disc on the wafer work platform, and the sorting disc is placed on the sorting work platform, carries out sorting by oscillating arm mechanisms; At the same time, the transportation transfer system takes out the next disc for the treatment of sorting and puts to the first buffer location and wait from die grading material storehouse;
Beneficial effect of the present invention:
A kind of full-automatic crystal grain screening installation of the present invention, this equipment transports transfer system, wafer work platform pusher, sorting work platform pusher, oscillating arm mechanisms, die grading material storehouse by wafer work platform and sorting work platform, and above-mentioned seven major parts form.The present invention has improved conventional in layout of the prior art and mechanical structure, provide a kind of preferred layout structure at the body platform, by the transportation transfer system with disc between workbench, pusher and die grading material storehouse three freely the turnover pick and place, realized full-automatic crystal grain sorting, transport simultaneously transfer system and have two buffer location, the swap time between the disc after sorting disc and the sorting end be can reduce, and then crystal grain sorting time and efficient accelerated.To sum up, the present invention have change that sheet is efficient, complete machine is small and exquisite, compact conformation, good, the good characteristics of die grading material storehouse extendible capacity of complete machine stability.Full-automatic crystal grain method for separating of the present invention adopts above-mentioned full-automatic crystal grain screening installation so that die grading efficient high, can reduce the stand-by period.
Description of drawings
Utilize accompanying drawing that invention is described further, but the embodiment in the accompanying drawing does not consist of any limitation of the invention, for those of ordinary skill in the art, under the prerequisite of not paying creative work, can also obtain according to the following drawings other accompanying drawing.
Fig. 1 is the layout structure schematic diagram of a kind of full-automatic crystal grain screening installation of the present invention.
Fig. 2 is the structural representation of the transportation transfer system of a kind of full-automatic crystal grain screening installation of the present invention.
Fig. 3 is that " A " locates the structure for amplifying schematic diagram among Fig. 2.
Fig. 4 is the structural representation of the pusher of a kind of full-automatic crystal grain screening installation of the present invention.
In Fig. 1, include:
100-body platform, 110-wafer work platform, 120-sorting work platform, 130-transportation transfer system, 140---wafer work platform pusher, 150-sorting work platform pusher, 160-oscillating arm mechanisms, 170-die grading material storehouse;
In Fig. 2 and Fig. 3, include:
400---X-axis guide rail, 401---X-axis drive unit, 4011---X-axis motor, 4012---X-axis screw mandrel, 402---X-axis pedestals;
500---Y-axis guide rail, 501---Y-axis drive unit, 5011---y-axis motor, 5012---tooth bar, 5013---gear, 502---Y-axis pedestals;
600---Z axis guide rail, 601---Z axis drive unit, 6011---Z axis motor, 602---Z axis pedestals;
700---fixture, 702---grasping drive unit, 7021---the first gripper cylinder formula drive unit, 7022---the second gripper cylinder formula drive unit, 703---first draw-in grooves, 704---the second draw-in grooves;
In Fig. 4, include:
1---fixed support;
2---transfer driving device, 21---mount pad, 22---handover leading screw, 23---sliding seat, 24---slide bars;
3---lifting drive, 31---lift cylinder seat, 311---riser guide grooves;
4---clip claw mechanism, 41---intermediate plate assembly, 42---clamping cylinder, 43---clamping cylinder seats;
5---the first connector;
6---the second connector;
7---connector guide rail bar.
Embodiment
The present invention is described in further detail below in conjunction with embodiment and accompanying drawing, but embodiments of the present invention are not limited to this.
Embodiment 1.
One of embodiment of a kind of full-automatic crystal grain screening installation of the present invention includes body platform 100, is provided with on the described body platform 100:
Two workbench are respectively wafer work platform 110 and sorting work platform 120, and it is used for the carrying disc;
Die grading material storehouse 170, it is used for depositing die grading card casket and chip die card casket, and wherein said die grading card casket is used for depositing the sorting disc, and described chip die card casket is used for the storing wafer disc;
Transportation transfer system 130, it can move along X-axis, Y-axis and Z-direction, described transportation transfer system 130 has two buffer location, take out the disc for the treatment of sorting by described transportation transfer system 130 corresponding position from described die grading material storehouse 170 and place the first buffer location and wait, the disc that the needs through sorting that will be arranged in the second buffer location are returned to die grading material storehouse 170 is returned to die grading material storehouse 170 assigned addresses;
Two pushers, be respectively wafer work platform pusher 140 and sorting work platform pusher 150, it is used for pushing to the disc on two workbench on the transportation transfer system 130 or will transports disc picking and placing to two workbench on the transfer system 130;
Described die grading material storehouse 170 is arranged at a side of described body platform 100, the sorting work district that described wafer work platform 110, described sorting work platform 120 and described two pushers form is arranged at and is positioned at the opposite side relative with described die grading material storehouse 170 on the described body platform 100, described transportation transfer system 130 is horizontally placed between described die grading material storehouse 170 and the described sorting work district, and described wafer work platform 110 and described sorting work platform 120 are arranged at respectively the both sides of described oscillating arm mechanisms 160; Accordingly, described wafer work platform 110 cooperates to realize wafer disc picking and placeing from described transportation transfer system 130 with described wafer work platform pusher 140; Described sorting work platform 120 cooperates to realize sorting disc picking and placeing from described transportation transfer system 130 with described sorting work platform pusher 150.
This equipment is by wafer work platform 110, sorting work platform 120, transportation transfer system 130, wafer work platform pusher 140, sorting work platform pusher 150, oscillating arm mechanisms 160, die grading material storehouse 170, and above-mentioned seven major parts form.The present invention has improved conventional in layout of the prior art and mechanical structure, provide a kind of preferred layout structure at body platform 100, by the transportation transfer system 130 with disc between workbench, pusher and die grading material storehouse 170 threes freely the turnover pick and place, realized full-automatic crystal grain sorting, transport simultaneously transfer system 130 and have two buffer location, the swap time between the disc after sorting disc and the sorting end be can reduce, and then crystal grain sorting time and efficient accelerated.To sum up, the present invention have change that sheet is efficient, complete machine is small and exquisite, compact conformation, good, the good characteristics of die grading material storehouse 170 extendible capacities of complete machine stability.
Concrete, described die grading material storehouse 170 is the die grading material storehouse 170 of integral type fixed structure.Die grading material storehouse 170 is horizontally placed on the top side of body platform 100, and its length is between two pushers, adopt simultaneously the material storehouse of integral type fixed structure to make things convenient for dilatation, and stability better, corresponding driving mechanism can be reduced, only picking and placeing from die grading material storehouse 170 can be finished by transportation transfer system 130.
In addition, above-mentioned transportation transfer system 130 can be set to two, and parallel motion, one of them corresponding sorting work platform 120, and another corresponding wafer work platform 110 can further improve operating efficiency.
The present invention says from integral layout, simple in structure, and pusher and transportation transfer system 130 can modularization productions, so that the installation of whole body is comparatively simple and easy, for example: pusher namely can use with 110 collocation of wafer work platform, also can use with 120 collocation of sorting work platform; Moreover transportation transfer system 130 can be taken into account picking and placeing between wafer work platform 110,120 2 workbench of sorting work platform and the die grading material storehouse 170, saving cost and can satisfying the marketization producing on a large scale.
Two of the embodiment of a kind of full-automatic crystal grain screening installation of the present invention, the main technical schemes of present embodiment is identical with embodiment 1, and unaccounted feature adopts the explanation among the embodiment 1 in the present embodiment, no longer gives unnecessary details at this.
The difference of present embodiment and embodiment 1 is that described transportation transfer system 130 comprises:
Y-axis guide rail 500, Y-axis pedestal 502, and drive described Y-axis pedestal 502 along described Y-axis guide rail 500 reciprocating Y-axis drive units 501;
Z axis guide rail 600, Z axis pedestal 602, and drive described Z axis pedestal 602 along described Z axis guide rail 600 reciprocating Z axis drive units 601, described Z axis guide rail 600 is fixedly installed on the vertical plate of described X-axis pedestal 402, and described Y-axis guide rail 500 is fixedly installed on described Z axis pedestal 602;
Be used for the fixture 700 of clamping sorting disc or wafer disc and the grasping drive unit 702 that the described fixture 700 of control moves up and down, described fixture 700 is connected with described Y-axis pedestal 502;
Described Z axis pedestal 602 is provided with the first draw-in groove 703 and the second draw-in groove 704.The first draw-in groove 703 is the first buffer location, and the second draw-in groove 704 is the second buffer location.
Concrete, described grasping drive unit 702 comprises the first gripper cylinder formula drive unit 7021 and the second gripper cylinder formula drive unit 7022, and described the first gripper cylinder formula drive unit 7021 and described the second gripper cylinder formula drive unit 7022 all are arranged at described Y-axis pedestal 502.
Concrete, described X-axis drive unit 401 comprises X-axis motor 4011, X-axis screw mandrel 4012 and X-axis nut, described X-axis nut is arranged on the below of described X-axis pedestal 402, described X-axis screw mandrel 4012 is connected with described X-axis nut thread, and described X-axis motor 4011 drives described X-axis pedestal 402 and moves along described X-axis screw mandrel 4012; Described Y-axis drive unit 501 comprises y-axis motor 5011, gear 5013 and tooth bar 5012, described y-axis motor 5011 is fixedly installed on described Y-axis pedestal 502, the described gear 5013 coaxial output shafts that are arranged at described y-axis motor 5011, described tooth bar 5012 is arranged at the medial surface of described Y-axis pedestal 502, described gear 5013 and described tooth bar 5012 engagements; Described Z axis drive unit 601 comprises Z axis motor 6011, Z axis screw mandrel and Z axis nut, described Z axis pedestal 602 is connected with described Z axis wire rod thread, described Z axis screw mandrel is connected with described Z axis nut thread, and described Z axis motor 6011 drives described Z axis pedestal 602 and moves along described Z axis screw mandrel.
The course of work of the transportation transfer system 130 of present embodiment: at first under X-axis motor 4011 and 6011 drivings of Z axis motor, move to die grading material storehouse 170, make the first draw-in groove 703 of transportation transfer system 130 aim at the draw-in groove of the card casket setting for the treatment of sorting disc place; Then, y-axis motor 5011 drives fixture 700 and advances to clip position, then fixture 700 clamps disc, y-axis motor 5011 drives fixture 700 and retreats, position with disk sheet transferring to the first draw-in groove 703, after the disc motion puts in place, fixture 700 unclamps, and (there is the spacing about 5mm at the edge that this position is in the jaw edge of fixture 700 and disc to continue to move to a home under y-axis motor 5011 drives, be convenient to the lifting of fixture 700), then the first gripper cylinder formula drive unit 7021 and the second gripper cylinder formula drive unit 7022 drive fixtures 700 and rise to and pick and place the platform top and dodge action to finish, and the pusher of being convenient to be arranged in workbench one side is loaded into disc on the workbench from the first draw-in groove 703 that transports transfer system 130.After the disc sorting finishes, pusher will at first be offloaded to disc the second draw-in groove 704 of transportation transfer system 130 from workbench, then transporting transfer system 130 moves under the driving of X-axis motor 4011 and Z axis motor 6011 with the second draw-in groove 704 and this disc warehouse-in draw-in groove and aligns, then the fixture 700 that transports transfer system 130 moves to above-mentioned home under the driving of y-axis motor 5011, and under the first gripper cylinder formula drive unit 7021 and 7022 drivings of the second gripper cylinder formula drive unit, fixture 700 is alignd with the second draw-in groove 704, then y-axis motor 5011 drives fixture 700 and advances to clip position, (this position jaw and disc have about 5mm overlapping), the jaw of fixture 700 clamps, y-axis motor 5011 works on, until disc is sent in the card casket, the jaw of last fixture 700 unclamps and retreats under y-axis motor 5011 drives, to finish the warehouse-in action of disc; Meanwhile, under X-axis motor 4011 and 6011 drivings of Z axis motor, move to die grading material storehouse 170, make the second draw-in groove 704 of transportation transfer system 130 aim at the draw-in groove of the card casket setting of next time treating sorting disc place; Then, y-axis motor 5011 drives fixture 700 and advances to clip position, then fixture 700 clamps the disc of next time treating sorting, and y-axis motor 5011 drives fixture 700 and retreats, and the buffer position of next time treating disk sheet transferring to the first draw-in groove 703 of sorting is waited.
Embodiment 3
Three of the embodiment of a kind of full-automatic crystal grain screening installation of the present invention, the main technical schemes of present embodiment is identical with embodiment 1, and unaccounted feature adopts the explanation among the embodiment 1 in the present embodiment, no longer gives unnecessary details at this.
The difference of present embodiment and embodiment 1 is that described pusher comprises:
Fixed support 1;
Clip claw mechanism 4, it be used for to clamp disc or unclamps disc, described upper clip and the clip claw mechanism 4 that forms of the lower clamping piece driving clamping device that comprises intermediate plate assembly 41 and be used for driving described intermediate plate assembly 41 clampings or unclamp by be arrangeding in parallel;
Lifting drive 3, it is fixed in described sliding seat 23 by connector, is used for making described intermediate plate assembly 41 risings to be in and dodges the position and make described intermediate plate assembly 41 declines be in a folder position.
Concrete, described lifting drive 3 comprises lift cylinder seat 31 and lift cylinder, and lift cylinder seat 31 is fixedly connected with described connector, and described lift cylinder seat 31 is provided with riser guide groove 311; Described driving clamping device comprises clamping cylinder 42 and clamping cylinder seat 43, and described clamping cylinder seat 43 is provided with riser guide, and described riser guide and described riser guide groove 311 are slidingly matched.
Concrete, described lift cylinder is provided with displacement transducer; Described sliding seat 23 is provided with displacement transducer.The displacement transducer of lift cylinder setting is used for 41 risings of control intermediate plate assembly and is in dodging the position and making 41 declines of intermediate plate assembly be in a folder position of limit inferior of limes superiors; The displacement transducer that sliding seat 23 arranges is used for control sliding seat 23 and moves back and forth between workbench and transportation transfer system 130.
Concrete, described transfer driving device 2 also comprises two slide bars 24, described two slide bars 24 are arranged at respectively the both sides of described handover leading screw 22, and an end of described slide bar 24 is arranged at described mount pad 21, and the other end of described slide bar 24 and described sliding seat 23 are slidingly connected.
In the present embodiment, connector comprises the first connector 5 and the second connector 6, it is affixed that one end of the first connector 5 is fixed in an end of the other end of sliding seat 23, the first connectors 5 and the second connector 6, and the other end of the second connector 6 is fixed in lift cylinder seat 31.
The operation principle of the pusher of present embodiment is as follows:
When needs are changed disc, lifting drive 3 drives intermediate plate assembly 41 and drops near the limit inferior position for brilliant workbench, then clamping cylinder 42 driving intermediate plate assemblies 41 open, the disk sheet transferring that pusher need to be changed workbench is to intermediate plate assembly 41, clamping cylinder 42 drives intermediate plate assembly 41 closures and disc is clamped at this moment, then transfer driving device 2 driving sliding seats 23 make intermediate plate assembly 41 be transferred to transportation transfer system 130 by workbench, clamping cylinder 42 drives intermediate plate assembly 41 again and opens, make disc be transferred to the second working position, last transfer driving device 2 makes sliding seat 23 be back to workbench again, and clamping cylinder 42 makes intermediate plate assembly 41 closures, and lifting drive 3 makes intermediate plate assembly 41 rise to limes superiors and dodges the position; When not needing to change disc, intermediate plate assembly 41 rises to limes superiors and dodges the position and can not affect the work that supplies brilliant workbench.This pusher is simple in structure, can change quickly and accurately disc, realizes automation control, failure rate is low, and when not needing to change disc, intermediate plate assembly 41 rises to limes superiors and dodges the position and can not affect the work that supplies brilliant workbench.
Embodiment 4.
A kind of full-automatic crystal grain method for separating that adopts a kind of full-automatic crystal grain screening installation described in above-described embodiment 1 to embodiment 3 includes following steps:
Step 1 is placed on the wafer disc on the wafer work platform 110, and the sorting disc is placed on the sorting work platform 120, carries out sorting by oscillating arm mechanisms 160; At the same time, transportation transfer system 130 takes out the next disc for the treatment of sorting and puts to the first buffer location and wait from die grading material storehouse 170;
Adopt above-mentioned full-automatic crystal grain screening installation, so that full-automatic crystal grain method for separating of the present invention has the advantage that die grading efficient is high, can reduce the stand-by period.
Should be noted that at last; above embodiment is only in order to illustrate technical scheme of the present invention; but not limiting the scope of the invention; although with reference to preferred embodiment the present invention has been done to explain; those of ordinary skill in the art is to be understood that; can make amendment or be equal to replacement technical scheme of the present invention, and not break away from essence and the scope of technical solution of the present invention.
Claims (10)
1. a full-automatic crystal grain screening installation includes the body platform, it is characterized in that, is provided with on the described body platform:
Two workbench are respectively wafer work platform and sorting work platform, and it is used for the carrying disc;
Oscillating arm mechanisms is carried out sorting by it to the wafer disc on the wafer work platform and the sorting disc on the sorting work platform;
Die grading material storehouse, it is used for depositing die grading card casket and chip die card casket, and wherein said die grading card casket is used for depositing the sorting disc, and described chip die card casket is used for the storing wafer disc;
The transportation transfer system, it can move along X-axis, Y-axis and Z-direction, described transportation transfer system has two buffer location, take out the disc for the treatment of sorting by described transportation transfer system corresponding position from described die grading material storehouse and place the first buffer location and wait, the disc that the needs through sorting that will be arranged in the second buffer location are returned to die grading material storehouse is returned to die grading material storehouse assigned address;
Two pushers are respectively wafer work platform pusher and sorting work platform pusher, and it is used for pushing to the disc on two workbench on the transportation transfer system or will transports disc picking and placing to two workbench on the transfer system;
Described die grading material lab setting is in a side of described body platform, the sorting work district that described wafer work platform, described sorting work platform and described two pushers form is arranged at and is positioned at the opposite side relative with described die grading material storehouse on the described body platform, described transportation transfer system is horizontally placed between described die grading material storehouse and the described sorting work district, and described wafer work platform and described sorting work platform are arranged at respectively the both sides of described oscillating arm mechanisms; Accordingly, described wafer work platform cooperates to realize wafer disc picking and placeing from described transportation transfer system with described wafer work platform pusher; Described sorting work platform cooperates to realize sorting disc picking and placeing from described transportation transfer system with described sorting work platform pusher.
2. a kind of full-automatic crystal grain screening installation according to claim 1, it is characterized in that: described transportation transfer system comprises:
X-axis guide rail, X-axis pedestal, and drive described X-axis pedestal along the reciprocating X-axis drive unit of described X-axis guide rail;
Y-axis guide rail, Y-axis pedestal, and drive described Y-axis pedestal along the reciprocating Y-axis drive unit of described Y-axis guide rail;
Z axis guide rail, Z axis pedestal, and drive described Z axis pedestal along the reciprocating Z axis drive unit of described Z axis guide rail, described Z axis guide rail is fixedly installed on the vertical plate of described X-axis pedestal, and described Y-axis guide rail is fixedly installed on described Z axis pedestal;
Be used for the fixture of clamping sorting disc or wafer disc and the grasping drive unit that the described fixture of control moves up and down, described fixture is connected with described Y-axis pedestal;
Described Z axis pedestal is provided with the first draw-in groove and the second draw-in groove.
3. a kind of full-automatic crystal grain screening installation according to claim 2, it is characterized in that: described grasping drive unit comprises the first gripper cylinder formula drive unit and the second gripper cylinder formula drive unit, and described the first gripper cylinder formula drive unit and described the second gripper cylinder formula drive unit all are arranged at described Y-axis pedestal.
4. a kind of full-automatic crystal grain screening installation according to claim 2, it is characterized in that: described X-axis drive unit comprises X-axis motor, X-axis screw mandrel and X-axis nut, described X-axis nut is arranged on the below of described X-axis pedestal, described X-axis screw mandrel is connected with described X-axis nut thread, and the described X-axis pedestal of described X-axis motor-driven moves along described X-axis screw mandrel; Described Y-axis drive unit comprises y-axis motor, gear and tooth bar, described y-axis motor is fixedly installed on described Y-axis pedestal, the coaxial output shaft that is arranged at described y-axis motor of described gear, described tooth bar is arranged at the medial surface of described Y-axis pedestal, described gear and the engagement of described tooth bar; Described Z axis drive unit comprises Z axis motor, Z axis screw mandrel and Z axis nut, and described Z axis pedestal is connected with described Z axis wire rod thread, and described Z axis screw mandrel is connected with described Z axis nut thread, and the described Z axis pedestal of described Z axis motor-driven moves along described Z axis screw mandrel.
5. a kind of full-automatic crystal grain screening installation according to claim 1, it is characterized in that: described pusher comprises:
Fixed support;
Transfer driving device, its disc that is used for being transferred is transplanted on the transportation transfer system by workbench or is returned by the transportation transfer system and is transplanted on workbench, and described transfer driving device comprises the handover leading screw that is arranged at described support bracket fastened mount pad, is arranged at described mount pad, drive the motor that described handover leading screw rotates and the sliding seat that is spirally connected with described handover leading screw;
Clip claw mechanism, it be used for to clamp disc or unclamps disc, described upper clip and the clip claw mechanism that forms of the lower clamping piece driving clamping device that comprises the intermediate plate assembly and be used for driving described intermediate plate assembly clamping or unclamp by be arrangeding in parallel;
Lifting drive, it is fixed in described sliding seat by connector, is used for making described intermediate plate assembly rising to be in and dodges the position and make described intermediate plate assembly decline be in a folder position.
6. a kind of full-automatic crystal grain screening installation according to claim 5, it is characterized in that: described lifting drive comprises lift cylinder seat and lift cylinder, the lift cylinder seat is fixedly connected with described connector, and described lift cylinder seat is provided with the riser guide groove; Described driving clamping device comprises clamping cylinder and clamping cylinder seat, and described clamping cylinder seat is provided with riser guide, and described riser guide and described riser guide groove are slidingly matched.
7. a kind of full-automatic crystal grain screening installation according to claim 6, it is characterized in that: described lift cylinder is provided with displacement transducer; Described sliding seat is provided with displacement transducer.
8. a kind of full-automatic crystal grain screening installation according to claim 5, it is characterized in that: described transfer driving device also comprises two slide bars, described two slide bars are arranged at respectively the both sides of described handover leading screw, one end of described slide bar is arranged at described mount pad, and the other end of described slide bar and described sliding seat are slidingly connected.
9. a kind of full-automatic crystal grain screening installation according to claim 1, it is characterized in that: described die grading material storehouse is the die grading material storehouse of integral type fixed structure.
10. full-automatic crystal grain method for separating that adopts the described a kind of full-automatic crystal grain screening installation of any one in the claim 1 to 9 is characterized in that: include following steps:
Step 1 is placed on the wafer disc on the wafer work platform, and the sorting disc is placed on the sorting work platform, carries out sorting by oscillating arm mechanisms; At the same time, the transportation transfer system takes out the next disc for the treatment of sorting and puts to the first buffer location and wait from die grading material storehouse;
Step 2 after sorting finishes, pushes to the second buffer location in the transportation transfer system with the pusher of disc by its corresponding matching; Meanwhile, the disc that will wait in the first buffer location by pusher takes out, and is placed on the workbench, proceeds sorting; At the same time, the transportation transfer system disc that is returned to die grading material storehouse through the needs of sorting that will be arranged in the second buffer location is returned to die grading material storehouse assigned address; And take out the disc for the treatment of sorting next time from die grading material storehouse by the transportation transfer system and put to the first buffer location and wait; So repeat until finish separation operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310007497.5A CN103077914B (en) | 2013-01-09 | 2013-01-09 | A kind of full-automatic crystal grain screening installation and full-automatic crystal grain method for separating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310007497.5A CN103077914B (en) | 2013-01-09 | 2013-01-09 | A kind of full-automatic crystal grain screening installation and full-automatic crystal grain method for separating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103077914A true CN103077914A (en) | 2013-05-01 |
| CN103077914B CN103077914B (en) | 2015-09-02 |
Family
ID=48154404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310007497.5A Expired - Fee Related CN103077914B (en) | 2013-01-09 | 2013-01-09 | A kind of full-automatic crystal grain screening installation and full-automatic crystal grain method for separating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103077914B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103871939A (en) * | 2014-04-01 | 2014-06-18 | 海迪科（苏州）光电科技有限公司 | Sorting method used for patterned sapphire substrate production |
| CN104576462A (en) * | 2015-01-21 | 2015-04-29 | 太仓思比科微电子技术有限公司 | Visualized automatic blank-jumping wafer picking machine and operating method thereof |
| CN106783685A (en) * | 2016-12-26 | 2017-05-31 | 珠海市中芯集成电路有限公司 | A kind of device for dotting and its control method for wafer |
| CN107899744A (en) * | 2017-12-10 | 2018-04-13 | 扬州扬杰电子科技股份有限公司 | A kind of full-automatic crystal grain selector and its method of work |
| CN109285796A (en) * | 2017-07-21 | 2019-01-29 | 应用材料公司 | The automation of rotary type sorting machine |
| CN113649297A (en) * | 2021-08-23 | 2021-11-16 | 深圳市优界科技有限公司 | High-precision wafer sorting machine |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101540291A (en) * | 2009-03-23 | 2009-09-23 | 常州新区爱立德电子有限公司 | Automatic sorting machine for semiconductor chip |
| CN101593715A (en) * | 2008-05-27 | 2009-12-02 | 旺硅科技股份有限公司 | Full-automatic inlet/outlet device and method thereof |
| KR20100107951A (en) * | 2009-03-27 | 2010-10-06 | (주)제이티 | Sorting apparatus for semiconductor device |
| WO2012144703A1 (en) * | 2011-04-21 | 2012-10-26 | 주식회사 이노비즈 | Led chip classifying apparatus |
| CN203134767U (en) * | 2013-01-09 | 2013-08-14 | 广东志成华科光电设备有限公司 | Full-automatic crystal grain sorting device |
-
2013
- 2013-01-09 CN CN201310007497.5A patent/CN103077914B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101593715A (en) * | 2008-05-27 | 2009-12-02 | 旺硅科技股份有限公司 | Full-automatic inlet/outlet device and method thereof |
| CN101540291A (en) * | 2009-03-23 | 2009-09-23 | 常州新区爱立德电子有限公司 | Automatic sorting machine for semiconductor chip |
| KR20100107951A (en) * | 2009-03-27 | 2010-10-06 | (주)제이티 | Sorting apparatus for semiconductor device |
| WO2012144703A1 (en) * | 2011-04-21 | 2012-10-26 | 주식회사 이노비즈 | Led chip classifying apparatus |
| CN203134767U (en) * | 2013-01-09 | 2013-08-14 | 广东志成华科光电设备有限公司 | Full-automatic crystal grain sorting device |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103871939A (en) * | 2014-04-01 | 2014-06-18 | 海迪科（苏州）光电科技有限公司 | Sorting method used for patterned sapphire substrate production |
| CN104576462A (en) * | 2015-01-21 | 2015-04-29 | 太仓思比科微电子技术有限公司 | Visualized automatic blank-jumping wafer picking machine and operating method thereof |
| CN104576462B (en) * | 2015-01-21 | 2018-03-02 | 太仓思比科微电子技术有限公司 | The automatic empty wafer of jumping of visualization chooses a machine and its operating method |
| CN106783685A (en) * | 2016-12-26 | 2017-05-31 | 珠海市中芯集成电路有限公司 | A kind of device for dotting and its control method for wafer |
| CN106783685B (en) * | 2016-12-26 | 2023-04-25 | 珠海市中芯集成电路有限公司 | Dotting device for wafer and control method thereof |
| CN109285796A (en) * | 2017-07-21 | 2019-01-29 | 应用材料公司 | The automation of rotary type sorting machine |
| CN107899744A (en) * | 2017-12-10 | 2018-04-13 | 扬州扬杰电子科技股份有限公司 | A kind of full-automatic crystal grain selector and its method of work |
| CN113649297A (en) * | 2021-08-23 | 2021-11-16 | 深圳市优界科技有限公司 | High-precision wafer sorting machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103077914B (en) | 2015-09-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103071627B (en) | Full automatic crystalline grain detection and sorting all-in-one machine | |
| CN203134767U (en) | Full-automatic crystal grain sorting device | |
| CN103077914A (en) | Fully automatic crystal grain sorting equipment and fully automatic crystal grain sorting method | |
| CN103639709B (en) | Commutator automatic production line | |
| CN209177550U (en) | A kind of multi-functional loading and unloading manipulator applied to automatic detection | |
| CN108723770B (en) | A kind of LED car lamp assembly device | |
| CN104175110A (en) | Full-automatic screw locking machine | |
| CN113275878B (en) | Elevator intelligent terminal ware rigging equipment of punching card | |
| CN103787075A (en) | Automatic moving and loading mechanism | |
| CN110039316A (en) | It is a kind of drilling, tapping Combined machining lathe | |
| CN108673659A (en) | A kind of carpenter's process equipment | |
| CN215878818U (en) | Automatic charging and discharging device for charging tray | |
| CN203124283U (en) | Full-automatic crystal grain detection and separation integrated equipment | |
| CN110040312A (en) | A kind of high speed circulating plate machine | |
| CN109877654A (en) | A kind of integrated machining production system of intelligence multi-robot | |
| CN107298306B (en) | Feeding device | |
| CN107671879A (en) | A kind of multi-functional grate robot clamp | |
| CN209242103U (en) | A kind of substrate feeding device for camera automatic assembling machine | |
| CN208781817U (en) | A kind of cell piece breaks sheet devices and cell piece string welding machine | |
| CN107225426A (en) | A kind of magazine | |
| CN203127743U (en) | Taking and placing mechanism of chip sorting bin | |
| CN210252953U (en) | SMD LED lamp point gum machine | |
| CN110491814B (en) | Automatic workpiece conveying device and automatic workpiece conveying method | |
| CN104625887A (en) | Automatic chamfering machining method for optical parts | |
| CN111063645A (en) | Automatic material receiving and discharging system and method for semiconductor substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150902 Termination date: 20160109 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |