TWI836544B - 壓電振動器件及壓電振動器件的製造方法 - Google Patents

壓電振動器件及壓電振動器件的製造方法 Download PDF

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Publication number
TWI836544B
TWI836544B TW111129580A TW111129580A TWI836544B TW I836544 B TWI836544 B TW I836544B TW 111129580 A TW111129580 A TW 111129580A TW 111129580 A TW111129580 A TW 111129580A TW I836544 B TWI836544 B TW I836544B
Authority
TW
Taiwan
Prior art keywords
cover member
holding member
vibration device
piezoelectric vibration
sealing material
Prior art date
Application number
TW111129580A
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English (en)
Chinese (zh)
Other versions
TW202315310A (zh
Inventor
小笠原好清
Original Assignee
日商大真空股份有限公司
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Publication date
Application filed by 日商大真空股份有限公司 filed Critical 日商大真空股份有限公司
Publication of TW202315310A publication Critical patent/TW202315310A/zh
Application granted granted Critical
Publication of TWI836544B publication Critical patent/TWI836544B/zh

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
TW111129580A 2021-08-12 2022-08-05 壓電振動器件及壓電振動器件的製造方法 TWI836544B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021131778 2021-08-12
JP2021-131778 2021-08-12

Publications (2)

Publication Number Publication Date
TW202315310A TW202315310A (zh) 2023-04-01
TWI836544B true TWI836544B (zh) 2024-03-21

Family

ID=85200469

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111129580A TWI836544B (zh) 2021-08-12 2022-08-05 壓電振動器件及壓電振動器件的製造方法

Country Status (4)

Country Link
JP (1) JPWO2023017743A1 (ko)
CN (1) CN117280602A (ko)
TW (1) TWI836544B (ko)
WO (1) WO2023017743A1 (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7060520B2 (en) * 2002-03-25 2006-06-13 Seiko Epson Corporation Piezoelectric device and cover sealing method and apparatus therefor, cellular phone apparatus using piezoelectric device and electronic apparatus using piezoelectric device
TW201010272A (en) * 2008-02-18 2010-03-01 Seiko Instr Inc Method for fabricating piezoeledctric vibrator, piezoeledctric vibrator, oscillator, electronic apparatus and radio-controlled clock

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006049353A (ja) * 2004-07-30 2006-02-16 Kyocera Kinseki Corp パッケージの製造方法
JP2011228352A (ja) * 2010-04-15 2011-11-10 Daishinku Corp リッドおよびベースおよび電子部品用パッケージ
JP5508192B2 (ja) * 2010-08-24 2014-05-28 日本電波工業株式会社 圧電デバイスの製造方法及び圧電デバイス
JP2014038970A (ja) * 2012-08-18 2014-02-27 Seiko Epson Corp 電子デバイスの製造方法および電子デバイス
JP2014072883A (ja) * 2012-10-02 2014-04-21 Nippon Dempa Kogyo Co Ltd 圧電デバイス
KR102460754B1 (ko) * 2016-03-17 2022-10-31 삼성전기주식회사 소자 패키지 및 그 제조방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7060520B2 (en) * 2002-03-25 2006-06-13 Seiko Epson Corporation Piezoelectric device and cover sealing method and apparatus therefor, cellular phone apparatus using piezoelectric device and electronic apparatus using piezoelectric device
CN100407469C (zh) * 2002-03-25 2008-07-30 精工爱普生株式会社 压电器件的制造方法
TW201010272A (en) * 2008-02-18 2010-03-01 Seiko Instr Inc Method for fabricating piezoeledctric vibrator, piezoeledctric vibrator, oscillator, electronic apparatus and radio-controlled clock

Also Published As

Publication number Publication date
JPWO2023017743A1 (ko) 2023-02-16
TW202315310A (zh) 2023-04-01
CN117280602A (zh) 2023-12-22
WO2023017743A1 (ja) 2023-02-16

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