TWI813871B - 圖像處理程式、圖像處理裝置及圖像處理方法 - Google Patents

圖像處理程式、圖像處理裝置及圖像處理方法 Download PDF

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Publication number
TWI813871B
TWI813871B TW109111264A TW109111264A TWI813871B TW I813871 B TWI813871 B TW I813871B TW 109111264 A TW109111264 A TW 109111264A TW 109111264 A TW109111264 A TW 109111264A TW I813871 B TWI813871 B TW I813871B
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image
input data
image processing
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TW109111264A
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TW202046246A (zh
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大内将記
篠田伸一
豊田康隆
弓場竜
新藤博之
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日商日立全球先端科技股份有限公司
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T9/00—Image coding
    • G06T9/005—Statistical coding, e.g. Huffman, run length coding
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/40—Extraction of image or video features
    • G06V10/46—Descriptors for shape, contour or point-related descriptors, e.g. scale invariant feature transform [SIFT] or bags of words [BoW]; Salient regional features
    • G06V10/469—Contour-based spatial representations, e.g. vector-coding
    • G06V10/476—Contour-based spatial representations, e.g. vector-coding using statistical shape modelling, e.g. point distribution models
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10056—Microscopic image
    • G06T2207/10061—Microscopic image from scanning electron microscope
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20081—Training; Learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20084—Artificial neural networks [ANN]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30141—Printed circuit board [PCB]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • Quality & Reliability (AREA)
  • Software Systems (AREA)
  • Probability & Statistics with Applications (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Evolutionary Biology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Analysis (AREA)
  • Image Processing (AREA)
  • Artificial Intelligence (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Processing Or Creating Images (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Closed-Circuit Television Systems (AREA)
TW109111264A 2019-06-13 2020-04-01 圖像處理程式、圖像處理裝置及圖像處理方法 TWI813871B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2019/023447 WO2020250373A1 (ja) 2019-06-13 2019-06-13 画像処理プログラム、画像処理装置および画像処理方法
WOPCT/JP2019/023447 2019-06-13

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TW202046246A TW202046246A (zh) 2020-12-16
TWI813871B true TWI813871B (zh) 2023-09-01

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TW109111264A TWI813871B (zh) 2019-06-13 2020-04-01 圖像處理程式、圖像處理裝置及圖像處理方法
TW112148609A TWI883705B (zh) 2019-06-13 2020-04-01 圖像處理程式、圖像處理裝置、圖像處理方法及缺陷檢測系統
TW112115907A TWI861845B (zh) 2019-06-13 2020-04-01 圖像處理程式、圖像處理裝置及圖像處理方法

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TW112115907A TWI861845B (zh) 2019-06-13 2020-04-01 圖像處理程式、圖像處理裝置及圖像處理方法

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US (2) US12394038B2 (https=)
JP (2) JP7162134B2 (https=)
KR (2) KR20250069987A (https=)
CN (1) CN113994368A (https=)
TW (3) TWI813871B (https=)
WO (1) WO2020250373A1 (https=)

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US11854184B2 (en) * 2021-01-14 2023-12-26 Applied Materials Israel Ltd. Determination of defects and/or edge roughness in a specimen based on a reference image
WO2023127081A1 (ja) * 2021-12-28 2023-07-06 株式会社日立ハイテク 画像検査装置、画像処理方法
JP7728711B2 (ja) * 2022-01-14 2025-08-25 株式会社日立ハイテク プロセッサシステム、半導体検査システム、およびプログラム
JP7829415B2 (ja) 2022-06-13 2026-03-13 株式会社日立ハイテク 欠陥検査装置
CN115454560A (zh) * 2022-10-18 2022-12-09 上海鼎捷移动科技有限公司 界面布局系统以及界面布局方法
JP2024128511A (ja) * 2023-03-10 2024-09-24 キヤノン株式会社 画像処理装置、画像処理システム、画像処理方法、およびプログラム
CN121773325A (zh) * 2023-08-23 2026-03-31 东京毅力科创株式会社 基片检查装置、基片检查方法和存储介质
TWI905565B (zh) * 2023-10-31 2025-11-21 英屬維爾京群島商威爾德嘉德有限公司 影像處理系統、影像處理方法、裝置及相關設備
CN121169823B (zh) * 2025-08-27 2026-04-03 东莞理工学院 一种基于小样本微调和可控扩散模型的工业缺陷样本生成方法

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Also Published As

Publication number Publication date
JP7427744B2 (ja) 2024-02-05
US20220318975A1 (en) 2022-10-06
JP2023002652A (ja) 2023-01-10
JPWO2020250373A1 (https=) 2020-12-17
TW202333106A (zh) 2023-08-16
KR20220002572A (ko) 2022-01-06
TW202046246A (zh) 2020-12-16
US12394038B2 (en) 2025-08-19
TWI861845B (zh) 2024-11-11
KR20250069987A (ko) 2025-05-20
WO2020250373A1 (ja) 2020-12-17
TWI883705B (zh) 2025-05-11
KR102808073B1 (ko) 2025-05-16
US20240404043A1 (en) 2024-12-05
TW202418220A (zh) 2024-05-01
JP7162134B2 (ja) 2022-10-27
CN113994368A (zh) 2022-01-28

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