TWI810662B - 送風器及電子零件的安裝裝置 - Google Patents

送風器及電子零件的安裝裝置 Download PDF

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Publication number
TWI810662B
TWI810662B TW110135792A TW110135792A TWI810662B TW I810662 B TWI810662 B TW I810662B TW 110135792 A TW110135792 A TW 110135792A TW 110135792 A TW110135792 A TW 110135792A TW I810662 B TWI810662 B TW I810662B
Authority
TW
Taiwan
Prior art keywords
chamber
ventilation
plate
thickness
vent
Prior art date
Application number
TW110135792A
Other languages
English (en)
Chinese (zh)
Other versions
TW202212742A (zh
Inventor
伊凡 沛託 葛納契夫
羽根洋祐
Original Assignee
日商芝浦機械電子裝置股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商芝浦機械電子裝置股份有限公司 filed Critical 日商芝浦機械電子裝置股份有限公司
Publication of TW202212742A publication Critical patent/TW202212742A/zh
Application granted granted Critical
Publication of TWI810662B publication Critical patent/TWI810662B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
    • F24F13/082—Grilles, registers or guards
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/20—Casings or covers
    • F24F2013/205—Mounting a ventilator fan therein

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Ventilation (AREA)
  • Duct Arrangements (AREA)
  • Wire Bonding (AREA)
  • Motor Or Generator Cooling System (AREA)
TW110135792A 2020-09-29 2021-09-27 送風器及電子零件的安裝裝置 TWI810662B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-164025 2020-09-29
JP2020164025A JP7555774B2 (ja) 2020-09-29 2020-09-29 送風器及び電子部品の実装装置

Publications (2)

Publication Number Publication Date
TW202212742A TW202212742A (zh) 2022-04-01
TWI810662B true TWI810662B (zh) 2023-08-01

Family

ID=80999037

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110135792A TWI810662B (zh) 2020-09-29 2021-09-27 送風器及電子零件的安裝裝置

Country Status (4)

Country Link
JP (1) JP7555774B2 (ko)
KR (1) KR102659557B1 (ko)
CN (2) CN118368863A (ko)
TW (1) TWI810662B (ko)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI279832B (en) * 2004-07-01 2007-04-21 Samsung Electronics Co Ltd Grating and clean room system comprising the same
TWI284189B (en) * 2003-06-28 2007-07-21 Lg Philips Lcd Co Ltd Clean room system
TW201311029A (zh) * 2011-06-21 2013-03-01 Shibaura Mechatronics Corp 加熱單元、風扇過濾單元及基板處理裝置
CN206001645U (zh) * 2016-08-29 2017-03-08 珠海格力电器股份有限公司 送风设备及其多孔板
CN207649056U (zh) * 2017-11-09 2018-07-24 珠海格力电器股份有限公司 过滤组件安装结构和空调
CN209459123U (zh) * 2019-01-10 2019-10-01 阴辰佳 一种新型多功能空气净化器

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5758577B2 (ko) * 1973-10-15 1982-12-10 Sanko Air Plant
JPS6231683A (ja) * 1985-07-30 1987-02-10 株式会社ダイフク クリ−ンル−ム間の搬送方法
JPS62288433A (ja) 1986-06-09 1987-12-15 Takasago Thermal Eng Co Ltd クリ−ンル−ム用の空気吹き出し設備
JPH0666439A (ja) * 1992-08-13 1994-03-08 Kawasaki Steel Corp クリーンルーム及びエアサプライユニット
JP3005521U (ja) * 1994-06-22 1995-01-10 ホソカワミクロン株式会社 清浄空気吹出装置
JPH09159239A (ja) * 1995-12-07 1997-06-20 Hitachi Ltd クリーンルーム
JPH09264575A (ja) * 1996-03-28 1997-10-07 Matsushita Electric Ind Co Ltd 製造装置及び清浄方法
JPH11347937A (ja) * 1998-06-05 1999-12-21 Speedfam-Ipec Co Ltd 研磨加工室の換気構造
JP2002228220A (ja) 2001-01-26 2002-08-14 Ishikawajima Harima Heavy Ind Co Ltd クリーンルーム
JP4038352B2 (ja) * 2001-08-24 2008-01-23 株式会社日立産機システム クリーンルーム
JP2004116987A (ja) 2002-09-03 2004-04-15 Tokyo Electron Ltd 空気清浄装置及び処理装置
TW200405406A (en) * 2002-09-03 2004-04-01 Tokyo Electron Ltd Gas purifying device for semiconductor processing system
TWI289645B (en) * 2003-07-29 2007-11-11 Alps Electric Co Ltd Clean bench
JP4755307B1 (ja) 2010-10-28 2011-08-24 株式会社朝日工業社 クリーンルーム
CN203349640U (zh) * 2013-06-26 2013-12-18 Ngk（苏州）环保陶瓷有限公司 蜂窝结构体用载置板及蜂窝结构体用多层结构载置板
JP6266127B2 (ja) * 2014-11-17 2018-01-24 株式会社日立産機システム クリーンエア装置および塵埃点検方法
JP6731379B2 (ja) * 2017-06-06 2020-07-29 株式会社日立産機システム ファンフィルタユニット、無菌装置およびクリーンルーム
JP6712585B2 (ja) 2017-12-04 2020-06-24 三宝電機株式会社 気流整流装置および気流整流システム
CN111649404B (zh) * 2020-06-10 2021-08-06 东北大学 一种内部气流自调节型洁净室及气流调节方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI284189B (en) * 2003-06-28 2007-07-21 Lg Philips Lcd Co Ltd Clean room system
TWI279832B (en) * 2004-07-01 2007-04-21 Samsung Electronics Co Ltd Grating and clean room system comprising the same
TW201311029A (zh) * 2011-06-21 2013-03-01 Shibaura Mechatronics Corp 加熱單元、風扇過濾單元及基板處理裝置
CN206001645U (zh) * 2016-08-29 2017-03-08 珠海格力电器股份有限公司 送风设备及其多孔板
CN207649056U (zh) * 2017-11-09 2018-07-24 珠海格力电器股份有限公司 过滤组件安装结构和空调
CN209459123U (zh) * 2019-01-10 2019-10-01 阴辰佳 一种新型多功能空气净化器

Also Published As

Publication number Publication date
JP2022056167A (ja) 2022-04-08
KR102659557B1 (ko) 2024-04-23
JP7555774B2 (ja) 2024-09-25
KR20220043878A (ko) 2022-04-05
CN118368863A (zh) 2024-07-19
CN114322124A (zh) 2022-04-12
TW202212742A (zh) 2022-04-01

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