TWI778290B - 教師資料產生方法以及吐出狀態的判斷方法 - Google Patents

教師資料產生方法以及吐出狀態的判斷方法 Download PDF

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Publication number
TWI778290B
TWI778290B TW108130516A TW108130516A TWI778290B TW I778290 B TWI778290 B TW I778290B TW 108130516 A TW108130516 A TW 108130516A TW 108130516 A TW108130516 A TW 108130516A TW I778290 B TWI778290 B TW I778290B
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TW
Taiwan
Prior art keywords
discharge
image data
data
substrate
processing liquid
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TW108130516A
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English (en)
Chinese (zh)
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TW202012056A (zh
Inventor
沖田有史
猶原英司
増井達哉
角間央章
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日商斯庫林集團股份有限公司
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Publication of TW202012056A publication Critical patent/TW202012056A/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Ink Jet (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Manipulator (AREA)
  • Feedback Control In General (AREA)
TW108130516A 2018-08-27 2019-08-27 教師資料產生方法以及吐出狀態的判斷方法 TWI778290B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2018158343 2018-08-27
JP2018-158343 2018-08-27
JP2019149428A JP7219190B2 (ja) 2018-08-27 2019-08-16 教師データ生成方法および吐出状態の判定方法
JP2019-149428 2019-08-16

Publications (2)

Publication Number Publication Date
TW202012056A TW202012056A (zh) 2020-04-01
TWI778290B true TWI778290B (zh) 2022-09-21

Family

ID=69666456

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108130516A TWI778290B (zh) 2018-08-27 2019-08-27 教師資料產生方法以及吐出狀態的判斷方法

Country Status (4)

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JP (1) JP7219190B2 (ja)
KR (1) KR102524704B1 (ja)
CN (1) CN112601617A (ja)
TW (1) TWI778290B (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102403392B1 (ko) * 2020-06-26 2022-05-30 포항공과대학교 산학협력단 기계학습을 이용한 잉크젯 프린팅 구동 파형 조정 장치 및 방법
JP2022162709A (ja) 2021-04-13 2022-10-25 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、基板処理システム、及びデータ処理方法
KR20230099984A (ko) * 2021-12-28 2023-07-05 세메스 주식회사 노즐 검사 유닛 및 이를 포함하는 기판 처리 장치

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TW200745771A (en) * 2006-02-17 2007-12-16 Nikon Corp Adjustment method, substrate processing method, substrate processing apparatus, exposure apparatus, inspection apparatus, measurement and/or inspection system, processing apparatus, computer system, program and information recording medium
US20090085960A1 (en) * 2007-09-28 2009-04-02 Yasuko Yahiro Image forming method and inkjet recording apparatus
CN102529409A (zh) * 2010-12-21 2012-07-04 富士胶片株式会社 不良记录元件检测设备及检测方法和图像形成设备
CN102729621A (zh) * 2011-03-29 2012-10-17 富士胶片株式会社 记录位置误差测量设备和方法以及图像形成设备和方法
TW201413239A (zh) * 2012-09-28 2014-04-01 Dainippon Screen Mfg 指導資料驗證裝置、指導資料製作裝置、圖像分類裝置、指導資料驗證方法、指導資料製作方法及圖像分類方法
US20170158900A1 (en) * 2014-09-03 2017-06-08 Océ-Technologies B.V. Method of printing
TW201722565A (zh) * 2015-11-10 2017-07-01 斯庫林集團股份有限公司 吐出判定方法及吐出裝置

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JPH11176734A (ja) * 1997-12-16 1999-07-02 Sony Corp レジスト塗布装置
JP4132762B2 (ja) * 2001-09-27 2008-08-13 東京エレクトロン株式会社 基板の処理方法及び基板の処理装置
JP4435044B2 (ja) * 2005-07-29 2010-03-17 Ｔｄｋ株式会社 液体材料吐出装置及び方法
JP5470371B2 (ja) * 2009-03-19 2014-04-16 タツモ株式会社 基板用塗布装置
JP5960156B2 (ja) * 2011-11-07 2016-08-02 株式会社アルバック インクジェット装置及び液滴測定方法
KR102340465B1 (ko) * 2014-03-11 2021-12-16 가부시키가이샤 스크린 홀딩스 기판 처리 장치 및 기판 처리 방법
JP6278759B2 (ja) * 2014-03-11 2018-02-14 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6430228B2 (ja) * 2014-12-15 2018-11-28 株式会社Ｓｃｒｅｅｎホールディングス 画像分類装置および画像分類方法
JP2016122681A (ja) * 2014-12-24 2016-07-07 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6332095B2 (ja) * 2015-03-20 2018-05-30 東京エレクトロン株式会社 薬液供給装置の調整方法、記憶媒体及び薬液供給装置
JP6541491B2 (ja) 2015-07-29 2019-07-10 株式会社Ｓｃｒｅｅｎホールディングス 流下判定方法、流下判定装置および吐出装置
JP2017056402A (ja) * 2015-09-16 2017-03-23 セイコーエプソン株式会社 液滴吐出方法、液滴吐出プログラム、液滴吐出装置
JP6597972B2 (ja) * 2016-03-23 2019-10-30 株式会社Ｓｃｒｅｅｎホールディングス 画像処理装置および画像処理方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200745771A (en) * 2006-02-17 2007-12-16 Nikon Corp Adjustment method, substrate processing method, substrate processing apparatus, exposure apparatus, inspection apparatus, measurement and/or inspection system, processing apparatus, computer system, program and information recording medium
US20090085960A1 (en) * 2007-09-28 2009-04-02 Yasuko Yahiro Image forming method and inkjet recording apparatus
CN102529409A (zh) * 2010-12-21 2012-07-04 富士胶片株式会社 不良记录元件检测设备及检测方法和图像形成设备
CN102729621A (zh) * 2011-03-29 2012-10-17 富士胶片株式会社 记录位置误差测量设备和方法以及图像形成设备和方法
TW201413239A (zh) * 2012-09-28 2014-04-01 Dainippon Screen Mfg 指導資料驗證裝置、指導資料製作裝置、圖像分類裝置、指導資料驗證方法、指導資料製作方法及圖像分類方法
US20170158900A1 (en) * 2014-09-03 2017-06-08 Océ-Technologies B.V. Method of printing
TW201722565A (zh) * 2015-11-10 2017-07-01 斯庫林集團股份有限公司 吐出判定方法及吐出裝置

Also Published As

Publication number Publication date
JP7219190B2 (ja) 2023-02-07
CN112601617A (zh) 2021-04-02
KR20210031506A (ko) 2021-03-19
TW202012056A (zh) 2020-04-01
JP2020032409A (ja) 2020-03-05
KR102524704B1 (ko) 2023-04-21

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