TWI766680B - 鐘擺閥 - Google Patents

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TWI766680B
TWI766680B TW110116760A TW110116760A TWI766680B TW I766680 B TWI766680 B TW I766680B TW 110116760 A TW110116760 A TW 110116760A TW 110116760 A TW110116760 A TW 110116760A TW I766680 B TWI766680 B TW I766680B
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shaft
valve
lip seal
gate
pendulum
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TW110116760A
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TW202142797A (zh
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安熙俊
金湊澤
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南韓商福田股份有限公司
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0227—Packings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/02—Gearboxes; Mounting gearing therein
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F16K27/045—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members with pivotal obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/34—Arrangements for modifying the way in which the rate of flow varies during the actuation of the valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/041—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/53—Mechanical actuating means with toothed gearing
    • F16K31/535—Mechanical actuating means with toothed gearing for rotating valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/02—Spindle sealings with stuffing-box ; Sealing rings
    • F16K41/023—Spindle sealings with stuffing-box ; Sealing rings for spindles which only rotate, i.e. non-rising spindles
    • F16K41/026—Spindle sealings with stuffing-box ; Sealing rings for spindles which only rotate, i.e. non-rising spindles for rotating valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Microelectronics & Electronic Packaging (AREA)
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  • Sliding Valves (AREA)
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  • Details Of Valves (AREA)

Abstract

本發明揭示一種可調節氣體量的鐘擺閥，其安裝於半導體製程之蝕刻製程的連接管，該連接管則在乾式蝕刻裝置的腔室與真空幫浦之間連接真空幫浦，具體而言，本發明係關於一種鐘擺閥，結合於可調節氣體量之閘門的軸包含透過O形環緊密固定於閥殼的固定殼及結合到前述固定殼內部的旋轉軸（內部軸），從而使得和前述閥殼分離的旋轉軸僅以脣式密封件為軸旋轉而保持鐘擺閥的密封特性，且同時能抑制非必要的顆粒與硬化物質的排放。

Description

鐘擺閥
本發明揭示一種安裝於半導體製程的蝕刻生產線（etching line）的連接管，並可調節氣體量的鐘擺閥，該連接管則在乾式蝕刻裝置的腔室與真空幫浦之間連接真空幫浦，具體而言，本發明揭示一種鐘擺閥，結合於可調節氣體量之閘門的軸，包含透過O形環緊密固定於閥殼的固定殼及結合於前述固定殼內部的旋轉軸（內部軸），從而使得和前述閥殼分離的旋轉軸僅以脣式密封件為軸旋轉而保持鐘擺閥的密封特性，且同時能抑制非必要的顆粒與硬化物質的排放。
半導體製程中蝕刻裝置通常具有進行蝕刻製程的腔室及使腔室真空或將腔室中剩餘氣體排放至外部的真空幫浦的連接結構，鐘擺閥通常安裝於連接管，該連接管則連接腔室及真空幫浦。
鐘擺閥包含：閥殼，設有流入口與流出口；閘門，位於閥殼的內部空間，連接於支持臂，該支持臂堅固地連接於軸。軸能繞長度方向的軸旋轉，亦可以在上下軸的方向移動。
圖1係示出先前技術的鐘擺閥的頂視圖，圖2係剖視圖。在此，圖2係沿着圖1所示I-Ⅱ截取線切割的剖視圖。
請參閱圖1與圖2，將先前技術的鐘擺閥50安裝於乾式蝕刻裝置的腔室與真空幫浦之間連接真空幫浦的連接管40後開閉，基本包含安裝於連接管40的閥殼10、緊固於閥殼10的蓋20、開閉連接管40的開閉機構30。
閥殼10以垂直貫穿的方式形成空氣通路37以便和前述腔室及前述真空幫浦連通，和空氣通路37連通地在內部水平地形成稼動腔12。而且，開閉機構30包含圓盤狀閘門31、驅使閘門31進行鐘擺運動而開閉連接管40的驅動部33，驅動部33包含步進馬達32及以齒輪36連接於步進馬達的軸34的一端的軸38，此時，閘門31的一端連接於軸38的另一端。
步進馬達32獨立安裝於閥殼10的下部，驅使其上部突出於稼動腔12所安裝的軸38旋轉。憑此，閘門31一端連接於軸38的上部後進行旋轉而使空氣通路37開閉。密封件39以接觸空氣通路37的方式安裝於稼動腔12的上部，內面結合密封環39a、39b以便藉由氣缸25的動作而往下運動後堅固地密封閘門31。步進馬達32透過電訊號進行動作，齒輪36則發揮將步進馬達32的動力傳遞到軸38的功能。
以下說明如此構成的先前技術的鐘擺閥50的動作特性。
圖3與圖4係說明先前技術的鐘擺閥的動作特性的截面，圖3係連接管開放的狀態，圖4係連接管閉鎖的狀態。
首先，以下結合圖3說明連接管開放過程。
如圖3所示，將閥殼10的空氣通路37安裝於前述腔室與真空幫浦之間後，向步進馬達32傳送控制訊號控制步進馬達32。此時，步進馬達32用於初始運行，其對應安裝於半導體元件製造設備中的軟體所預設的設定值進行旋轉。
步進馬達32的旋轉力透過齒輪36傳遞到軸38。軸38藉由透過齒輪36傳遞的步進馬達32的旋轉力旋轉，閘門31以軸38為軸進行旋轉而使得形成於閥殼10的空氣通路37開放，從而讓空氣透過空氣通路37流入或流出。此時，密封件39則藉由氣缸25往上移動而和閘門31間隔一定間距。
以下結合圖4說明閉鎖連接管的過程。
如圖4所示，若藉由安裝於鐘擺閥50的控制部的電訊號而使得步進馬達32以相反於圖3所示之旋轉方向進行旋轉，其旋轉力以齒輪36為媒介驅使軸38旋轉，此時的旋轉則和前述的旋轉方向相反而使得閘門31往相反方向旋轉，進而密封閥殼10的空氣通路37，之後，以埋入方式安裝於閥殼10之預設位置的氣缸25進行運作。該氣缸25和步進馬達32一樣根據軟體的電訊號值而按照一定週期進行運作。
然而，在先前技術的鐘擺閥50中，在軸38與閥殼10之間安裝O形環41，軸38的反復旋轉導致O形環41承受壓力而容易扭曲，隨着時間增加使得機械強度變弱而使得密封能力降低。尤其是，軸38與閥殼10之間頻繁摩擦導致材料粉碎而產生微小如污泥的顆粒（particle）。
為了防止該問題而將油脂型潤滑劑塗抹到O形環41時，在蝕刻製程中產生的電漿氣體容易和潤滑劑反應而發生硬化的問題。此等硬化的物質則因O形環41的移動而被粉碎導致顆粒產生。亦即，潤滑劑因旋轉所致之熱量、腐蝕性氣體的接觸、周邊熱量而硬化生成顆粒後黏附在晶圓，進一步影響旋轉，據此可知塗抹潤滑劑無法解決該問題。 ［先前技術文獻］ ［專利文獻］
［專利文獻1］KR 10-2006-0013810 A，2006.02.14. ［專利文獻2］KR 10-2003-0017204 A，2003.03.03. ［專利文獻3］KR 20-2019-0002255 U，2019.09.05.
因此，本發明旨在解決前述的問題，本發明係為了提供一種鐘擺閥，以雙重結構構成結合於調節氣體量的閘門的軸，固定殼透過O形環緊密地固定於閥殼，結合於前述固定殼內部的旋轉軸（內部軸）則能以脣式密封件（lip seal）為媒介旋轉地安裝，從而只允許前述旋轉軸旋轉而保持鐘擺閥的密封特性，進一步能抑制非必要的顆粒與硬化物質的排放。
為達到所述目的，本發明揭示一種安裝於用於進行製程的腔室與真空幫浦之間的半導體元件製造設備的鐘擺閥，本發明包含：閥殼，以連通於前述腔室與前述真空幫浦的方式貫穿地形成空氣通路，以連通前述空氣通路的方式形成稼動腔；閘門，安裝於前述閥殼的內部並且透過鐘擺運動開閉前述空氣通路；軸，結合於前述閘門的一端，驅使前述閘門旋轉；馬達，驅使前述軸旋轉；以及，齒輪箱，將前述馬達的驅動力傳遞至前述軸；前述軸包含：固定殼，貫穿前述閥殼的下部並結合固定；脣式密封件，設於前述固定殼的內部；以及，旋轉軸，以貫穿前述脣式密封件中央的方式結合於前述脣式密封件的內部，一端結合於前述齒輪箱而另一端則結合於前述閘門的一端，藉由透過前述齒輪箱傳遞的驅動力以前述脣式密封件為軸進行旋轉而驅使前述閘門旋轉。
理想地，前述軸進一步可以包含允許所述旋轉軸的端部以貫穿結合的方式各自結合於前述固定殼的兩側的第一罩及第二罩。
理想地，前述軸進一步可以包含軸襯，在前述固定殼內部之該軸襯安裝於前述脣式密封件的兩側以阻止前述脣式密封件從前述固定殼脫離。
理想地，在緊貼前述閥殼下部的前述固定殼的軸肩部可進一步為了進行真空密封而安裝O形環。
如前所述，如本發明的鐘擺閥，結合於調節氣體量的閘門的軸包含透過O形環緊密固定於閥殼的固定殼及結合於前述固定殼內部的旋轉軸（內部軸），從而使得與前述閥殼分離的旋轉軸僅以脣式密封件為軸旋轉而保持鐘擺閥的密封特性，與此同時，進一步能抑制非必要的顆粒與硬化物質的排放。
以下結合圖式詳細說明的下述實施例將有助於明確了解本發明的優點、特徵及其實現方法。但，本發明不限於以下所揭示的實施例，本發明可以透過各種互不相同的形態實現。
此等實施例僅有助於本發明的完整揭示，其主要係為了向本發明所屬技術領域中具有通常知識者完整說明本發明的範疇，本發明的範疇僅能以申請專利範圍定義。 因此，為了避免針對本發明的說明被模糊化，在若干個實施例中將不具體說明習知的要素、習知的動作及習知的技術。
而且，本說明書中具有同一符號者代表同一要素。本說明書中使用（提及）的術語僅為說明實施例，不得因此侷限本發明。本說明書中，除非在句子中特別提及，否則單數表現方式亦包含複數的情形。而且，被提到「包含（或具有）」的要素及動作並不排除一個以上的其它要素及動作的存在或添加。
除非另外給予相異的定義，否則此處所使用的一切術語（包含技術或科學術語）所表示的意義和本發明所屬技術領域中具有通常知識者共同了解的意義相同。除非在本發明中明確地給予定義，否則不得異常地或過度地解釋一般辭典中有所定義的術語的意義。
以下結合圖式具體說明本發明的技術特徵。在此，本實施例以透過圖1至圖4說明的鐘擺閥為基礎，因此，重複的結構將以前述內容替代，以下僅針對作為本發明技術特徵的軸結構進行具體說明。
圖5係說明本發明實施例的鐘擺閥的剖視圖。
請參閱圖5，本發明實施例的鐘擺閥包含閥殼10、蓋20及開閉機構130。此時，閥殼10與蓋20和圖1至圖4所示鐘擺閥50相同，開閉機構130則在結構上存在着差異。
開閉機構130包含圓盤狀閘門131、驅使閘門131旋轉而使連接管40開閉的驅動部。前述驅動部包含生成驅動力的馬達132、結合於馬達132的軸132a的一端並傳遞馬達132驅動力的齒輪箱133、結合於閘門131的一端並且透過來自齒輪箱133的旋轉力驅使閘門131旋轉而使連接管40開閉的軸134。此時，齒輪箱133可以包含小齒輪與減速齒輪。
如圖5所示，馬達132獨立安裝於閥殼10的下部，軸134貫穿閥殼10下部並突出地安裝於稼動腔12的內部。
而且，軸134以齒輪箱133為媒介接受馬達132的驅動力後旋轉而驅使閘門131旋轉。藉此，開閉空氣通路37 。
圖6係說明本發明的軸的剖視圖。
請參閱圖5與圖6，本發明的軸134藉由馬達132的驅動力旋轉，包含貫穿閥殼10下部地結合並固定的固定殼134a、設於固定殼134a內部的脣式密封件（lip seal）134b。
脣式密封件134b的內部以貫穿脣式密封件134b中央的方式結合旋轉軸134c。此外，旋轉軸134c的一端結合在齒輪箱133而另一端則結合在閘門131的一端並且藉由透過齒輪箱133傳遞的驅動力以脣式密封件134b為軸旋轉進而驅使結合於上部的閘門131旋轉。
如圖6所示，為密封固定殼134a的兩側而在固定殼134a的一側以螺紋方式結合第一罩134d，旋轉軸134c的一端則貫穿地結合於第一罩134d，另一側以螺紋方式結合第二罩134e，旋轉軸134c另一端則貫穿地結合於第二罩134e。
此外，在固定殼134a的內部可以將軸襯134f安裝於脣式密封件134b的兩側。該軸襯134f固定脣式密封件134b以阻止脣式密封件134b從固定殼134a的內部脫離到外部，此外，進一步可以密封脣式密封件134b的內部。
為了進行真空密封而在固定殼134a的軸肩部d安裝O形環134g。
以下說明如此構成的本發明實施例的鐘擺閥的動作特性。
圖7與圖8係說明本發明實施例的鐘擺閥的動作特性的截面，圖7係連接管開放的狀態，圖8係連接管閉鎖的狀態。
以下結合圖7說明連接管的開放過程。
如圖7所示，若稼動馬達132使馬達132的軸132a往一個方向旋轉，馬達132的旋轉力可透過齒輪箱133傳遞到軸134。之後，軸134的旋轉軸134c透過齒輪箱133接受馬達132的驅動力後旋轉，在形成於固定殼134a內部的脣式密封件134b的內部，以脣式密封件134b為軸進行旋轉。藉此，結合於旋轉軸134c的閘門131旋轉而使得形成於閥殼10的空氣通路37開放，進而讓空氣出入。此時，密封件39藉由氣缸25往上移動而和閘門131隔離。
以下結合圖8說明連接管閉鎖的過程。
如圖8所示，若使馬達132往相反方向旋轉，其旋轉力透過齒輪箱133傳遞到軸134。此時，軸134的旋轉軸134c以相反於圖7的旋轉方向（連接管開放時）旋轉而使得閘門131逆向旋轉，進而密封閥殼10的空氣通路37，密封件39則藉由氣缸25往空氣通路37下降而使空氣通路37更加緊密地密封。
前文以理想實施例具體說明本發明的技術精神，但所述理想實施例僅僅用於說明而非限制。所屬技術領域中具有通常知識者應該了解在不脫離本發明的技術精神範圍的情形下，可透過本發明的實施例的結合實現各種實施例。
10:閥殼 12:稼動腔 130:開閉機構 131:閘門 132:馬達 132a:馬達的軸 133:齒輪箱 134:軸 134a:固定殼 134b:脣式密封件 134c:旋轉軸（內軸） 134d:第一罩 134e:第二罩 134f:軸襯 134g:O形環 20:蓋 25:氣缸 30:開閉機構 31:閘門 32:步進馬達 34:步進馬達的軸 36:齒輪 37:空氣通路 38:軸 39:密封件 39a:密封環 39b:密封環 40:連接管 50:鐘擺閥 d:軸肩部
〔圖1〕係示出先前技術的鐘擺閥的頂視圖。 〔圖2〕係圖1所示之鐘擺閥的剖視圖。 〔圖3〕係說明先前技術的鐘擺閥的動作特性的截面。 〔圖4〕係說明先前技術的鐘擺閥的動作特性的截面。 〔圖5〕係示出本發明實施例的鐘擺閥的剖視圖。 〔圖6〕係示出本發明的軸的剖視圖。 〔圖7〕係說明本發明實施例的鐘擺閥的動作特性的截面。 〔圖8〕係說明本發明實施例的鐘擺閥的動作特性的截面。
10:閥殼
12:稼動腔
130:開閉機構
131:閘門
132:馬達
132a:馬達的軸
133:齒輪箱
134:軸
134a:固定殼
134b:脣式密封件
134c:旋轉軸(內軸)
134d:第一罩
134g:O形環
20:蓋
25:氣缸
37:空氣通路
39:密封件

Claims (3)

  1. 一種安裝於進行製程的腔室與真空幫浦之間的半導體元件製造設備之鐘擺閥，其特徵係包含：閥殼，以連通於該腔室與該真空幫浦的方式貫穿地形成空氣通路，以連通該空氣通路的方式形成稼動腔；閘門，安裝於該閥殼的內部並且透過鐘擺運動開關該空氣通路；軸，連接於該閘門的一端，驅使該閘門旋轉；馬達，驅使該軸旋轉；齒輪箱，將該馬達的驅動力傳遞至該軸；密封件，以接觸該空氣通路的方式安裝於該稼動腔的上部；以及，氣缸，位於該閥殼的下方；該軸包含：固定殼，貫穿該閥殼的下部並結合固定；脣式密封件，設於該固定殼的內部；旋轉軸，以貫穿該脣式密封件中央的方式結合於該脣式密封件的內部，一端結合於該齒輪箱而另一端則結合於該閘門的一端，透過該齒輪箱傳遞的驅動力以該脣式密封件為軸進行旋轉而驅使該閘門旋轉；以及，第一罩及第二罩，允許該旋轉軸之端部以貫穿結合的方式各自結合於該固定殼的兩側。
  2. 如請求項1所述之鐘擺閥，其中，該軸進一步包含軸襯，在該固定殼內部之該軸襯安裝於該脣式密封件的兩側以阻止該脣式密封件從該固定殼脫離。
  3. 如請求項1所述之鐘擺閥，其中，在緊貼該閥殼下部的該固定殼的軸肩部為進行真空密封而安裝O形環。
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