TWI766645B

TWI766645B - 乙氧基/丙氧基改性的吡唑啉有機物、其應用、光固化組合物及光刻膠

乙氧基/丙氧基改性的吡唑啉有機物、其應用、光固化組合物及光刻膠 Download PDF

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Publication number: TWI766645B
Authority: TW; Taiwan
Prior art keywords: meth; pyrazoline; acrylate; ethoxy; modified
Prior art date: 2020-04-22

Application number

TW110113585A

Other languages

English (en)

Chinese (zh)

Other versions

TW202140428A (zh

Inventor

錢曉春

Original Assignee

大陸商常州強力電子新材料股份有限公司

大陸商常州強力先端電子材料有限公司

Priority date

2020-04-22

Filing date

2021-04-15

Publication date

2022-06-01

2021-04-15 Application filed by 大陸商常州強力電子新材料股份有限公司, 大陸商常州強力先端電子材料有限公司 filed Critical 大陸商常州強力電子新材料股份有限公司

2021-11-01 Publication of TW202140428A publication Critical patent/TW202140428A/zh

2022-06-01 Application granted granted Critical

2022-06-01 Publication of TWI766645B publication Critical patent/TWI766645B/zh

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-1 propoxy modified pyrazoline Chemical class 0.000 title claims abstract description 121
239000000203 mixture Substances 0.000 title claims abstract description 25
125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 title claims abstract description 19
229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 10
238000000016 photochemical curing Methods 0.000 claims abstract description 14
150000002894 organic compounds Chemical class 0.000 claims abstract description 5
125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 38
229920000642 polymer Polymers 0.000 claims description 36
229920005989 resin Polymers 0.000 claims description 35
239000011347 resin Substances 0.000 claims description 35
150000001875 compounds Chemical class 0.000 claims description 34
238000000576 coating method Methods 0.000 claims description 19
125000000217 alkyl group Chemical group 0.000 claims description 17
239000001257 hydrogen Substances 0.000 claims description 15
229910052739 hydrogen Inorganic materials 0.000 claims description 15
150000001252 acrylic acid derivatives Chemical class 0.000 claims description 14
IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims description 14
125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 14
PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 10
239000011248 coating agent Substances 0.000 claims description 9
125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 8
229920000058 polyacrylate Polymers 0.000 claims description 8
239000000975 dye Substances 0.000 claims description 7
125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 7
125000005119 alkyl cycloalkyl group Chemical group 0.000 claims description 6
150000001408 amides Chemical class 0.000 claims description 6
125000003118 aryl group Chemical group 0.000 claims description 6
125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 6
125000000609 carbazolyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3NC12)* 0.000 claims description 6
239000000945 filler Substances 0.000 claims description 6
125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 claims description 6
239000000852 hydrogen donor Substances 0.000 claims description 6
125000002883 imidazolyl group Chemical group 0.000 claims description 6
125000001624 naphthyl group Chemical group 0.000 claims description 6
239000005416 organic matter Substances 0.000 claims description 6
125000000168 pyrrolyl group Chemical group 0.000 claims description 6
JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims description 5
239000012752 auxiliary agent Substances 0.000 claims description 5
125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 5
150000002148 esters Chemical class 0.000 claims description 5
125000001041 indolyl group Chemical group 0.000 claims description 5
239000000049 pigment Substances 0.000 claims description 5
239000004014 plasticizer Substances 0.000 claims description 5
125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 5
239000003381 stabilizer Substances 0.000 claims description 5
150000007934 α,β-unsaturated carboxylic acids Chemical class 0.000 claims description 5
150000002430 hydrocarbons Chemical group 0.000 claims description 4
125000006737 (C6-C20) arylalkyl group Chemical group 0.000 claims description 3
XTFIVUDBNACUBN-UHFFFAOYSA-N 1,3,5-trinitro-1,3,5-triazinane Chemical compound [O-][N+](=O)N1CN([N+]([O-])=O)CN([N+]([O-])=O)C1 XTFIVUDBNACUBN-UHFFFAOYSA-N 0.000 claims description 3
KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 3
239000004593 Epoxy Substances 0.000 claims description 3
125000001931 aliphatic group Chemical group 0.000 claims description 3
229920000180 alkyd Polymers 0.000 claims description 3
125000002877 alkyl aryl group Chemical group 0.000 claims description 3
125000003710 aryl alkyl group Chemical group 0.000 claims description 3
125000001316 cycloalkyl alkyl group Chemical group 0.000 claims description 3
125000000753 cycloalkyl group Chemical group 0.000 claims description 3
239000003822 epoxy resin Substances 0.000 claims description 3
125000001072 heteroaryl group Chemical group 0.000 claims description 3
125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims description 3
229920001568 phenolic resin Polymers 0.000 claims description 3
239000005011 phenolic resin Substances 0.000 claims description 3
125000005498 phthalate group Chemical class 0.000 claims description 3
229920000647 polyepoxide Polymers 0.000 claims description 3
125000003226 pyrazolyl group Chemical group 0.000 claims description 3
SNOOUWRIMMFWNE-UHFFFAOYSA-M sodium;6-[(3,4,5-trimethoxybenzoyl)amino]hexanoate Chemical compound [Na+].COC1=CC(C(=O)NCCCCCC([O-])=O)=CC(OC)=C1OC SNOOUWRIMMFWNE-UHFFFAOYSA-M 0.000 claims description 3
125000001424 substituent group Chemical group 0.000 claims description 3
125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 claims description 3
125000006374 C2-C10 alkenyl group Chemical group 0.000 claims description 2
239000004814 polyurethane Substances 0.000 claims description 2
229920002635 polyurethane Polymers 0.000 claims description 2
150000005846 sugar alcohols Polymers 0.000 claims description 2
IMSODMZESSGVBE-UHFFFAOYSA-N 2-Oxazoline Chemical compound C1CN=CO1 IMSODMZESSGVBE-UHFFFAOYSA-N 0.000 claims 1
QGEWJOLUHARKDU-UHFFFAOYSA-N 2-ethoxycarbonyl-6-ethylbenzoic acid Chemical compound C(C)OC(C=1C(C(=O)O)=C(C=CC1)CC)=O QGEWJOLUHARKDU-UHFFFAOYSA-N 0.000 claims 1
150000001335 aliphatic alkanes Chemical class 0.000 claims 1
229910052738 indium Inorganic materials 0.000 claims 1
230000035945 sensitivity Effects 0.000 abstract description 23
150000003219 pyrazolines Chemical class 0.000 abstract description 15
230000006872 improvement Effects 0.000 abstract description 9
238000010521 absorption reaction Methods 0.000 abstract description 8
AZUHIVLOSAPWDM-UHFFFAOYSA-N 2-(1h-imidazol-2-yl)-1h-imidazole Chemical compound C1=CNC(C=2NC=CN=2)=N1 AZUHIVLOSAPWDM-UHFFFAOYSA-N 0.000 abstract description 6
239000007787 solid Substances 0.000 abstract description 6
NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 86
239000000047 product Substances 0.000 description 44
238000000034 method Methods 0.000 description 39
239000010408 film Substances 0.000 description 30
238000006243 chemical reaction Methods 0.000 description 28
239000011342 resin composition Substances 0.000 description 28
ATUOYWHBWRKTHZ-UHFFFAOYSA-N dimethylmethane Natural products CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 27
230000008569 process Effects 0.000 description 26
239000001294 propane Substances 0.000 description 25
239000010410 layer Substances 0.000 description 23
YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 21
HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 21
239000000758 substrate Substances 0.000 description 21
239000000243 solution Substances 0.000 description 19
OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 18
238000007747 plating Methods 0.000 description 18
238000002360 preparation method Methods 0.000 description 17
239000000178 monomer Substances 0.000 description 16
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 16
239000002253 acid Substances 0.000 description 15
238000011161 development Methods 0.000 description 14
230000018109 developmental process Effects 0.000 description 14
239000002994 raw material Substances 0.000 description 14
CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 11
239000012634 fragment Substances 0.000 description 11
238000004895 liquid chromatography mass spectrometry Methods 0.000 description 11
238000004949 mass spectrometry Methods 0.000 description 11
239000007864 aqueous solution Substances 0.000 description 10
239000004020 conductor Substances 0.000 description 10
ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 10
238000011156 evaluation Methods 0.000 description 10
150000002431 hydrogen Chemical class 0.000 description 10
230000001681 protective effect Effects 0.000 description 10
WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 9
UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 9
XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 9
ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 9
ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 9
238000004519 manufacturing process Methods 0.000 description 9
238000011282 treatment Methods 0.000 description 9
QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 8
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
238000005530 etching Methods 0.000 description 8
239000002904 solvent Substances 0.000 description 8
239000003513 alkali Substances 0.000 description 7
230000015572 biosynthetic process Effects 0.000 description 7
229910052802 copper Inorganic materials 0.000 description 7
239000010949 copper Substances 0.000 description 7
238000003475 lamination Methods 0.000 description 7
239000005020 polyethylene terephthalate Substances 0.000 description 7
229920000139 polyethylene terephthalate Polymers 0.000 description 7
RGHHSNMVTDWUBI-UHFFFAOYSA-N 4-hydroxybenzaldehyde Chemical compound OC1=CC=C(C=O)C=C1 RGHHSNMVTDWUBI-UHFFFAOYSA-N 0.000 description 6
ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 6
CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 6
244000028419 Styrax benzoin Species 0.000 description 6
235000000126 Styrax benzoin Nutrition 0.000 description 6
235000008411 Sumatra benzointree Nutrition 0.000 description 6
ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 6
229960002130 benzoin Drugs 0.000 description 6
238000001035 drying Methods 0.000 description 6
235000019382 gum benzoic Nutrition 0.000 description 6
BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 6
230000035484 reaction time Effects 0.000 description 6
239000004065 semiconductor Substances 0.000 description 6
239000007921 spray Substances 0.000 description 6
VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 6
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
239000002585 base Substances 0.000 description 5
DZBUGLKDJFMEHC-UHFFFAOYSA-N benzoquinolinylidene Natural products C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 5
125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 5
235000001671 coumarin Nutrition 0.000 description 5
229960000956 coumarin Drugs 0.000 description 5
LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
238000004128 high performance liquid chromatography Methods 0.000 description 5
238000005507 spraying Methods 0.000 description 5
238000003756 stirring Methods 0.000 description 5
238000001308 synthesis method Methods 0.000 description 5
238000003786 synthesis reaction Methods 0.000 description 5
YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 5
SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 4
YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 4
NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 4
VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 4
229910019142 PO4 Inorganic materials 0.000 description 4
239000004698 Polyethylene Substances 0.000 description 4
OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 4
WQDUMFSSJAZKTM-UHFFFAOYSA-N Sodium methoxide Chemical compound [Na+].[O-]C WQDUMFSSJAZKTM-UHFFFAOYSA-N 0.000 description 4
239000007983 Tris buffer Substances 0.000 description 4
229960000583 acetic acid Drugs 0.000 description 4
230000009286 beneficial effect Effects 0.000 description 4
239000011230 binding agent Substances 0.000 description 4
229920001577 copolymer Polymers 0.000 description 4
235000019441 ethanol Nutrition 0.000 description 4
239000011976 maleic acid Substances 0.000 description 4
WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 4
125000003356 phenylsulfanyl group Chemical group [*]SC1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 4
239000010452 phosphate Substances 0.000 description 4
229920000573 polyethylene Polymers 0.000 description 4
229920001451 polypropylene glycol Polymers 0.000 description 4
239000000126 substance Substances 0.000 description 4
YIKSHDNOAYSSPX-UHFFFAOYSA-N 1-propan-2-ylthioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C(C)C YIKSHDNOAYSSPX-UHFFFAOYSA-N 0.000 description 3
SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 3
KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
OAZWDJGLIYNYMU-UHFFFAOYSA-N Leucocrystal Violet Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 OAZWDJGLIYNYMU-UHFFFAOYSA-N 0.000 description 3
KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical group [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
MZVQCMJNVPIDEA-UHFFFAOYSA-N [CH2]CN(CC)CC Chemical group [CH2]CN(CC)CC MZVQCMJNVPIDEA-UHFFFAOYSA-N 0.000 description 3
PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 3
RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 3
239000012965 benzophenone Substances 0.000 description 3
239000004305 biphenyl Substances 0.000 description 3
239000003054 catalyst Substances 0.000 description 3
238000007796 conventional method Methods 0.000 description 3
238000001723 curing Methods 0.000 description 3
238000007772 electroless plating Methods 0.000 description 3
230000001804 emulsifying effect Effects 0.000 description 3
238000007667 floating Methods 0.000 description 3
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
229910052737 gold Inorganic materials 0.000 description 3
239000010931 gold Substances 0.000 description 3
238000011534 incubation Methods 0.000 description 3
VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 3
239000000463 material Substances 0.000 description 3
229910052751 metal Inorganic materials 0.000 description 3
239000002184 metal Substances 0.000 description 3
VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
239000003960 organic solvent Substances 0.000 description 3
229940059574 pentaerithrityl Drugs 0.000 description 3
NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 3
229910000027 potassium carbonate Inorganic materials 0.000 description 3
239000011241 protective layer Substances 0.000 description 3
DNXIASIHZYFFRO-UHFFFAOYSA-N pyrazoline Chemical compound C1CN=NC1 DNXIASIHZYFFRO-UHFFFAOYSA-N 0.000 description 3
UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 3
239000010802 sludge Substances 0.000 description 3
229910000029 sodium carbonate Inorganic materials 0.000 description 3
229910000679 solder Inorganic materials 0.000 description 3
125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 3
JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 3
150000003673 urethanes Chemical class 0.000 description 3
SUDVPELGFZKOMD-UHFFFAOYSA-N 1,2-di(propan-2-yl)thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=C(C(C)C)C(C(C)C)=CC=C3SC2=C1 SUDVPELGFZKOMD-UHFFFAOYSA-N 0.000 description 2
YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 2
AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 2
VKQJCUYEEABXNK-UHFFFAOYSA-N 1-chloro-4-propoxythioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C(OCCC)=CC=C2Cl VKQJCUYEEABXNK-UHFFFAOYSA-N 0.000 description 2
KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 2
BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 2
LCHAFMWSFCONOO-UHFFFAOYSA-N 2,4-dimethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC(C)=C3SC2=C1 LCHAFMWSFCONOO-UHFFFAOYSA-N 0.000 description 2
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