TWI755470B - 導電薄膜、光電半導體裝置及其製造方法 - Google Patents
導電薄膜、光電半導體裝置及其製造方法 Download PDFInfo
- Publication number
- TWI755470B TWI755470B TW107101582A TW107101582A TWI755470B TW I755470 B TWI755470 B TW I755470B TW 107101582 A TW107101582 A TW 107101582A TW 107101582 A TW107101582 A TW 107101582A TW I755470 B TWI755470 B TW I755470B
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- Prior art keywords
- film layer
- film
- micro
- conductive
- matrix circuit
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 93
- 230000005693 optoelectronics Effects 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 239000011159 matrix material Substances 0.000 claims abstract description 98
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 239000002245 particle Substances 0.000 claims abstract description 48
- 239000011810 insulating material Substances 0.000 claims abstract description 27
- 239000010408 film Substances 0.000 claims description 174
- 239000000463 material Substances 0.000 claims description 25
- 239000010409 thin film Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 5
- 229920001187 thermosetting polymer Polymers 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 18
- 230000005496 eutectics Effects 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000017105 transposition Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000004800 polyvinyl chloride Substances 0.000 description 3
- 229920000915 polyvinyl chloride Polymers 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229920002313 fluoropolymer Polymers 0.000 description 2
- 239000004811 fluoropolymer Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- -1 Polyethylene Polymers 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 229920006335 epoxy glue Polymers 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
- H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0066—Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Led Device Packages (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Wire Bonding (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW107101582A TWI755470B (zh) | 2018-01-16 | 2018-01-16 | 導電薄膜、光電半導體裝置及其製造方法 |
CN201811298368.5A CN110047990B (zh) | 2018-01-16 | 2018-11-02 | 导电薄膜、光电半导体装置及其制造方法 |
JP2018231392A JP6688374B2 (ja) | 2018-01-16 | 2018-12-11 | 導電性フィルム、光電半導体装置及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW107101582A TWI755470B (zh) | 2018-01-16 | 2018-01-16 | 導電薄膜、光電半導體裝置及其製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201933580A TW201933580A (zh) | 2019-08-16 |
TWI755470B true TWI755470B (zh) | 2022-02-21 |
Family
ID=67273170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW107101582A TWI755470B (zh) | 2018-01-16 | 2018-01-16 | 導電薄膜、光電半導體裝置及其製造方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6688374B2 (ja) |
CN (1) | CN110047990B (ja) |
TW (1) | TWI755470B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI848035B (zh) * | 2019-12-25 | 2024-07-11 | 南韓商樂金顯示科技股份有限公司 | 電子裝置及其製造方法 |
CN115312637B (zh) * | 2022-10-11 | 2022-12-16 | 罗化芯显示科技开发(江苏)有限公司 | 一种Micro-LED显示装置及其制造方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003204142A (ja) * | 2002-01-08 | 2003-07-18 | Sumitomo Metal Micro Devices Inc | 電子部品実装方法及び電子部品実装装置 |
JP2008210908A (ja) * | 2007-02-26 | 2008-09-11 | Tokai Rubber Ind Ltd | 電子部品の実装方法 |
TW201129994A (en) * | 2009-09-30 | 2011-09-01 | Sony Chem & Inf Device Corp | Anisotropic conducting film and method for manufacturing the same |
CN103069565A (zh) * | 2010-08-25 | 2013-04-24 | 罗伯特·博世有限公司 | 用于制造电路的方法和电路 |
TW201705618A (zh) * | 2015-03-09 | 2017-02-01 | Hitachi Chemical Co Ltd | 連接結構體的製造方法 |
CN107026124A (zh) * | 2014-11-27 | 2017-08-08 | 广州硅芯电子科技有限公司 | 制造微型led显示器的方法和微型led显示器 |
TW201735391A (zh) * | 2016-03-02 | 2017-10-01 | 迪睿合股份有限公司 | 顯示裝置及其製造方法、以及發光裝置及其製造方法 |
CN107527930A (zh) * | 2016-06-17 | 2017-12-29 | 优显科技股份有限公司 | 光电半导体装置 |
TW201800478A (zh) * | 2016-02-22 | 2018-01-01 | 迪睿合股份有限公司 | 異向性導電膜 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4880533B2 (ja) * | 2007-07-03 | 2012-02-22 | ソニーケミカル&インフォメーションデバイス株式会社 | 異方性導電膜及びその製造方法、並びに接合体 |
JP5685473B2 (ja) * | 2011-04-06 | 2015-03-18 | デクセリアルズ株式会社 | 異方性導電フィルム、接合体の製造方法、及び接合体 |
-
2018
- 2018-01-16 TW TW107101582A patent/TWI755470B/zh active
- 2018-11-02 CN CN201811298368.5A patent/CN110047990B/zh active Active
- 2018-12-11 JP JP2018231392A patent/JP6688374B2/ja active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003204142A (ja) * | 2002-01-08 | 2003-07-18 | Sumitomo Metal Micro Devices Inc | 電子部品実装方法及び電子部品実装装置 |
JP2008210908A (ja) * | 2007-02-26 | 2008-09-11 | Tokai Rubber Ind Ltd | 電子部品の実装方法 |
TW201129994A (en) * | 2009-09-30 | 2011-09-01 | Sony Chem & Inf Device Corp | Anisotropic conducting film and method for manufacturing the same |
CN103069565A (zh) * | 2010-08-25 | 2013-04-24 | 罗伯特·博世有限公司 | 用于制造电路的方法和电路 |
CN107026124A (zh) * | 2014-11-27 | 2017-08-08 | 广州硅芯电子科技有限公司 | 制造微型led显示器的方法和微型led显示器 |
TW201705618A (zh) * | 2015-03-09 | 2017-02-01 | Hitachi Chemical Co Ltd | 連接結構體的製造方法 |
TW201800478A (zh) * | 2016-02-22 | 2018-01-01 | 迪睿合股份有限公司 | 異向性導電膜 |
TW201735391A (zh) * | 2016-03-02 | 2017-10-01 | 迪睿合股份有限公司 | 顯示裝置及其製造方法、以及發光裝置及其製造方法 |
CN107527930A (zh) * | 2016-06-17 | 2017-12-29 | 优显科技股份有限公司 | 光电半导体装置 |
Also Published As
Publication number | Publication date |
---|---|
CN110047990B (zh) | 2022-04-29 |
TW201933580A (zh) | 2019-08-16 |
JP2019125780A (ja) | 2019-07-25 |
CN110047990A (zh) | 2019-07-23 |
JP6688374B2 (ja) | 2020-04-28 |
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