TWI743737B - 高壓流體吐出裝置 - Google Patents

高壓流體吐出裝置 Download PDF

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Publication number
TWI743737B
TWI743737B TW109111987A TW109111987A TWI743737B TW I743737 B TWI743737 B TW I743737B TW 109111987 A TW109111987 A TW 109111987A TW 109111987 A TW109111987 A TW 109111987A TW I743737 B TWI743737 B TW I743737B
Authority
TW
Taiwan
Prior art keywords
pressure fluid
valve
chamber
air
discharge device
Prior art date
Application number
TW109111987A
Other languages
English (en)
Chinese (zh)
Other versions
TW202042912A (zh
Inventor
土居義忠
大島雅之
佐佐木章
Original Assignee
日商Ｓｍｃ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商Ｓｍｃ股份有限公司 filed Critical 日商Ｓｍｃ股份有限公司
Publication of TW202042912A publication Critical patent/TW202042912A/zh
Application granted granted Critical
Publication of TWI743737B publication Critical patent/TWI743737B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
    • F15B21/12—Fluid oscillators or pulse generators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/005—Nozzles or other outlets specially adapted for discharging one or more gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
    • B05B1/32—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages in which a valve member forms part of the outlet opening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/02—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery
    • B05B12/06—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery for effecting pulsating flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/36—Actuating devices; Operating means; Releasing devices actuated by fluid in which fluid from the circuit is constantly supplied to the fluid motor
    • F16K31/38—Actuating devices; Operating means; Releasing devices actuated by fluid in which fluid from the circuit is constantly supplied to the fluid motor in which the fluid works directly on both sides of the fluid motor, one side being connected by means of a restricted passage and the motor being actuated by operating a discharge from that side
    • F16K31/385—Actuating devices; Operating means; Releasing devices actuated by fluid in which fluid from the circuit is constantly supplied to the fluid motor in which the fluid works directly on both sides of the fluid motor, one side being connected by means of a restricted passage and the motor being actuated by operating a discharge from that side the fluid acting on a diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Fluid-Driven Valves (AREA)
  • Nozzles (AREA)
  • Reciprocating Pumps (AREA)
TW109111987A 2019-04-18 2020-04-09 高壓流體吐出裝置 TWI743737B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2019079011 2019-04-18
JP2019-079011 2019-04-18
JP2019198077 2019-10-31
JP2019-198077 2019-10-31

Publications (2)

Publication Number Publication Date
TW202042912A TW202042912A (zh) 2020-12-01
TWI743737B true TWI743737B (zh) 2021-10-21

Family

ID=72838189

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109111987A TWI743737B (zh) 2019-04-18 2020-04-09 高壓流體吐出裝置

Country Status (7)

Country Link
US (1) US12305674B2 (https=)
EP (1) EP3957402B1 (https=)
JP (1) JP7537428B2 (https=)
KR (1) KR102729053B1 (https=)
CN (1) CN113710369B (https=)
TW (1) TWI743737B (https=)
WO (1) WO2020213248A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113984485A (zh) * 2021-09-30 2022-01-28 深圳中科飞测科技股份有限公司 清洁方法及相关装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003034429A (ja) * 2001-07-23 2003-02-07 Kanekita Kk エアパルサおよびそのエアパルサを利用する装置
TW200628237A (en) * 2004-09-15 2006-08-16 Akrion Inc System and method of powering a sonic energy source and use of the same to process substrates

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US4284260A (en) * 1977-09-15 1981-08-18 Nicolas Baranoff Automatic discharge valve for liquids
GB2091451B (en) * 1981-01-07 1985-04-17 Reed Irrigation Systems Filter backwash means
JPS60186875U (ja) * 1984-05-22 1985-12-11 富士化工株式会社 電刷子
JPH03624Y2 (https=) * 1985-05-13 1991-01-10
JP2554561B2 (ja) * 1991-04-25 1996-11-13 株式会社ヨシタケ パイロット型電磁弁
US5169117A (en) * 1992-02-27 1992-12-08 Huang Chi King Low power type, motor-controlled magnetic valve
JPH08128389A (ja) * 1994-11-01 1996-05-21 Hitachi Ltd バルブ駆動制御方法およびバルブ駆動制御装置ならびに流動体供給制御装置
DE29705703U1 (de) * 1996-06-03 1997-05-22 Geberit Technik Ag, Jona Servogesteuertes Wasserventil
JPH10165844A (ja) * 1996-12-12 1998-06-23 Ckd Corp エア噴射システム
AUPO524997A0 (en) * 1997-02-21 1997-03-20 Yoothapina Pty Ltd Filling stop valve
JP3329720B2 (ja) * 1998-01-19 2002-09-30 東京エレクトロン株式会社 塗布装置
US6780170B2 (en) * 2002-05-15 2004-08-24 Liebel-Flarsheim Company Hydraulic remote for a medical fluid injector
JP3875959B2 (ja) * 2003-03-27 2007-01-31 泰彦 渡辺 流量制御弁
US7080817B2 (en) * 2004-02-17 2006-07-25 Y. Stern Engineering (1989) Ltd. Electromagnetic valve
JP2005291493A (ja) 2004-03-11 2005-10-20 Kanekita Kk エアパルサ
US7647941B2 (en) * 2006-04-03 2010-01-19 Masao Onoe Air pulser
BRPI0807862B8 (pt) * 2007-01-24 2023-01-31 I2O Water Ltd Controlador e sistema de controle para uma válvula redutora de pressão
JP2009275747A (ja) * 2008-05-13 2009-11-26 Nippon Spindle Mfg Co Ltd ダイヤフラムバルブ及び集塵機
JP5728288B2 (ja) 2011-04-28 2015-06-03 Ckd株式会社 給排気調整装置、給排気調整システム
JP5551224B2 (ja) 2012-10-26 2014-07-16 本田技研工業株式会社 間欠エアブローガン
JP6047796B2 (ja) * 2015-03-03 2016-12-21 有限会社浜インターナショナル スピードコントローラ
JP6230517B2 (ja) 2014-10-08 2017-11-15 クロダニューマティクス株式会社 間歇エア発生装置
KR200480920Y1 (ko) * 2014-12-19 2016-07-22 김성곤 분사밸브, 분사밸브 배출 장비 및 분사 장비 유닛
JP6591686B2 (ja) * 2016-08-29 2019-10-16 株式会社コガネイ 切換弁および間欠エアブローガン

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003034429A (ja) * 2001-07-23 2003-02-07 Kanekita Kk エアパルサおよびそのエアパルサを利用する装置
TW200628237A (en) * 2004-09-15 2006-08-16 Akrion Inc System and method of powering a sonic energy source and use of the same to process substrates

Also Published As

Publication number Publication date
JPWO2020213248A1 (https=) 2020-10-22
KR102729053B1 (ko) 2024-11-13
CN113710369B (zh) 2022-11-25
EP3957402B1 (en) 2025-01-22
EP3957402A1 (en) 2022-02-23
US20220205467A1 (en) 2022-06-30
KR20210149174A (ko) 2021-12-08
TW202042912A (zh) 2020-12-01
US12305674B2 (en) 2025-05-20
JP7537428B2 (ja) 2024-08-21
EP3957402A4 (en) 2023-01-18
WO2020213248A1 (ja) 2020-10-22
CN113710369A (zh) 2021-11-26

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