TWI743137B - 在共同的幫浦軸上具有渦輪分子幫浦和升壓幫浦的質譜檢漏器 - Google Patents

在共同的幫浦軸上具有渦輪分子幫浦和升壓幫浦的質譜檢漏器 Download PDF

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Publication number
TWI743137B
TWI743137B TW106119828A TW106119828A TWI743137B TW I743137 B TWI743137 B TW I743137B TW 106119828 A TW106119828 A TW 106119828A TW 106119828 A TW106119828 A TW 106119828A TW I743137 B TWI743137 B TW I743137B
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TW
Taiwan
Prior art keywords
pump
stage
mass spectrometer
turbomolecular
pump stage
Prior art date
Application number
TW106119828A
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English (en)
Chinese (zh)
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TW201802444A (zh
Inventor
維爾納 葛瑞布利
湯瑪士 玻姆
傑瑪 布朗
Original Assignee
德商英飛康股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 德商英飛康股份有限公司 filed Critical 德商英飛康股份有限公司
Publication of TW201802444A publication Critical patent/TW201802444A/zh
Application granted granted Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
TW106119828A 2016-06-15 2017-06-14 在共同的幫浦軸上具有渦輪分子幫浦和升壓幫浦的質譜檢漏器 TWI743137B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102016210701.1A DE102016210701A1 (de) 2016-06-15 2016-06-15 Massenspektrometrischer Lecksucher mit Turbomolekularpumpe und Boosterpumpe auf gemeinsamer Welle
??102016210701.1 2016-06-15
DE102016210701.1 2016-06-15

Publications (2)

Publication Number Publication Date
TW201802444A TW201802444A (zh) 2018-01-16
TWI743137B true TWI743137B (zh) 2021-10-21

Family

ID=59055219

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106119828A TWI743137B (zh) 2016-06-15 2017-06-14 在共同的幫浦軸上具有渦輪分子幫浦和升壓幫浦的質譜檢漏器

Country Status (9)

Country Link
US (1) US11009030B2 (https=)
EP (1) EP3472471B1 (https=)
JP (1) JP6883051B2 (https=)
KR (1) KR102430735B1 (https=)
CN (1) CN109312754B (https=)
DE (1) DE102016210701A1 (https=)
RU (1) RU2728446C2 (https=)
TW (1) TWI743137B (https=)
WO (1) WO2017216173A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
EP4407654A3 (en) * 2019-07-15 2024-10-30 Pfeiffer Vacuum GmbH Vacuum system
DE102020132896A1 (de) * 2020-12-10 2022-06-15 Inficon Gmbh Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
CN114046941B (zh) * 2021-11-28 2024-03-19 盛吉盛(宁波)半导体科技有限公司 一种基于涡轮分子泵薄膜生长设备的测漏阀门系统
DE102023133450B3 (de) * 2023-11-29 2025-01-30 Pfeiffer Vacuum Technology AG Vorrichtung und Verfahren zur Lecksuche
CN120120260B (zh) * 2025-05-15 2025-08-08 淄博华岩泵业有限公司 一种离心泵测试设备及测试方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3616680A (en) * 1969-10-27 1971-11-02 Sargent Welch Scientific Co Leak detector
US4180370A (en) * 1975-03-22 1979-12-25 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Turbomolecular pump
US4779449A (en) * 1987-03-27 1988-10-25 Leybold-Heraeus Gmbh Leak detector and leak detection method
US6705844B2 (en) * 2000-02-01 2004-03-16 Leybold Vakuum Gmbh Dynamic seal
WO2011132365A1 (ja) * 2010-04-22 2011-10-27 株式会社アルバック 漏洩検知方法及び真空処理装置
US20160116365A1 (en) * 2013-05-07 2016-04-28 Luedolph Management GmbH Leak test arrangement and leak test method

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2872102A (en) * 1955-12-19 1959-02-03 Stempel Hermetik Gmbh Compressor
DE1648648C3 (de) * 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US3520173A (en) * 1967-05-02 1970-07-14 Mobil Oil Corp Automated test apparatus
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
JPS5125158A (en) * 1974-08-26 1976-03-01 Nippon Kuatsu System Co Ryutaijikukeryono ryuryokei
US4527805A (en) * 1984-05-03 1985-07-09 Ferrofluidics Corporation High-pressure ferrofluid seal apparatus
EP0344345B1 (de) 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
RU2016255C1 (ru) * 1990-08-23 1994-07-15 Специальное конструкторско-технологическое бюро прецизионного оборудования "Вектор" Молекулярный вакуумный насос
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
DE4343912A1 (de) * 1993-12-22 1995-06-29 Leybold Ag Verfahren zum Betrieb eines mit einer Schnüffelleitung ausgerüsteten Testgaslecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Testgaslecksucher
DE4408877A1 (de) * 1994-03-16 1995-09-21 Leybold Ag Testgaslecksucher
DE19504278A1 (de) * 1995-02-09 1996-08-14 Leybold Ag Testgas-Lecksuchgerät
US5703281A (en) * 1996-05-08 1997-12-30 Southeastern Univ. Research Assn. Ultra high vacuum pumping system and high sensitivity helium leak detector
JP3675983B2 (ja) * 1996-09-12 2005-07-27 株式会社アルバック ヘリウムリークディテクター
DE19735250A1 (de) 1997-08-14 1999-02-18 Leybold Vakuum Gmbh Verfahren zum Betrieb eines Heliumlecksuchers und für die Durchführung dieses Verfahrens geeigneter Heliumlecksucher
DE10004271A1 (de) 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe
US7082404B2 (en) * 2001-06-29 2006-07-25 International Business Machines Corporation System and method for improved matrix management of personnel planning factors
DE10156205A1 (de) * 2001-11-15 2003-06-05 Inficon Gmbh Testgaslecksuchgerät
DE10308420A1 (de) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät
DE10319633A1 (de) 2003-05-02 2004-11-18 Inficon Gmbh Lecksuchgerät
RU2240524C1 (ru) * 2003-07-15 2004-11-20 Открытое акционерное общество "Завод "Измеритель" Течеискатель
DE10334455B4 (de) * 2003-07-29 2013-01-31 Pfeiffer Vacuum Gmbh Lecksuchverfahren und Lecksuchanordnung zur Durchführung des Verfahrens
RU39658U1 (ru) * 2004-03-15 2004-08-10 Открытое акционерное общество "Завод "Измеритель" Турбомолекулярный насос
DE102005021909A1 (de) * 2005-05-12 2006-11-16 Inficon Gmbh Schnüffellecksucher mit Quarzfenstersensor
JP2011069834A (ja) * 2010-11-18 2011-04-07 Shimadzu Corp ヘリウムリークデテクタ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3616680A (en) * 1969-10-27 1971-11-02 Sargent Welch Scientific Co Leak detector
US4180370A (en) * 1975-03-22 1979-12-25 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Turbomolecular pump
US4779449A (en) * 1987-03-27 1988-10-25 Leybold-Heraeus Gmbh Leak detector and leak detection method
US6705844B2 (en) * 2000-02-01 2004-03-16 Leybold Vakuum Gmbh Dynamic seal
WO2011132365A1 (ja) * 2010-04-22 2011-10-27 株式会社アルバック 漏洩検知方法及び真空処理装置
US20160116365A1 (en) * 2013-05-07 2016-04-28 Luedolph Management GmbH Leak test arrangement and leak test method

Also Published As

Publication number Publication date
US20190162193A1 (en) 2019-05-30
RU2728446C2 (ru) 2020-07-30
TW201802444A (zh) 2018-01-16
EP3472471A1 (de) 2019-04-24
CN109312754B (zh) 2021-05-04
US11009030B2 (en) 2021-05-18
RU2019100225A (ru) 2020-07-15
JP6883051B2 (ja) 2021-06-02
KR102430735B1 (ko) 2022-08-08
WO2017216173A1 (de) 2017-12-21
KR20190019070A (ko) 2019-02-26
EP3472471B1 (de) 2022-02-23
RU2019100225A3 (https=) 2020-07-15
CN109312754A (zh) 2019-02-05
JP2019523882A (ja) 2019-08-29
DE102016210701A1 (de) 2017-12-21

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