CN109312754B - 带有同轴的涡轮分子泵和增压泵的质谱检漏仪 - Google Patents

带有同轴的涡轮分子泵和增压泵的质谱检漏仪 Download PDF

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Publication number
CN109312754B
CN109312754B CN201780035452.5A CN201780035452A CN109312754B CN 109312754 B CN109312754 B CN 109312754B CN 201780035452 A CN201780035452 A CN 201780035452A CN 109312754 B CN109312754 B CN 109312754B
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CN
China
Prior art keywords
pump
stage
mass spectrometer
turbomolecular
pump stage
Prior art date
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CN201780035452.5A
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English (en)
Chinese (zh)
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CN109312754A (zh
Inventor
维尔纳·格罗塞·布莱
托马斯·博姆
亚尔马尔·布鲁恩斯
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Inficon GmbH Deutschland
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Inficon GmbH Deutschland
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Publication of CN109312754A publication Critical patent/CN109312754A/zh
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
CN201780035452.5A 2016-06-15 2017-06-13 带有同轴的涡轮分子泵和增压泵的质谱检漏仪 Active CN109312754B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102016210701.1A DE102016210701A1 (de) 2016-06-15 2016-06-15 Massenspektrometrischer Lecksucher mit Turbomolekularpumpe und Boosterpumpe auf gemeinsamer Welle
DE102016210701.1 2016-06-15
PCT/EP2017/064434 WO2017216173A1 (de) 2016-06-15 2017-06-13 Massenspektrometrischer lecksucher mit turbomolekularpumpe und boosterpumpe auf gemeinsamer welle

Publications (2)

Publication Number Publication Date
CN109312754A CN109312754A (zh) 2019-02-05
CN109312754B true CN109312754B (zh) 2021-05-04

Family

ID=59055219

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780035452.5A Active CN109312754B (zh) 2016-06-15 2017-06-13 带有同轴的涡轮分子泵和增压泵的质谱检漏仪

Country Status (9)

Country Link
US (1) US11009030B2 (https=)
EP (1) EP3472471B1 (https=)
JP (1) JP6883051B2 (https=)
KR (1) KR102430735B1 (https=)
CN (1) CN109312754B (https=)
DE (1) DE102016210701A1 (https=)
RU (1) RU2728446C2 (https=)
TW (1) TWI743137B (https=)
WO (1) WO2017216173A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
EP4407654A3 (en) * 2019-07-15 2024-10-30 Pfeiffer Vacuum GmbH Vacuum system
DE102020132896A1 (de) * 2020-12-10 2022-06-15 Inficon Gmbh Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
CN114046941B (zh) * 2021-11-28 2024-03-19 盛吉盛(宁波)半导体科技有限公司 一种基于涡轮分子泵薄膜生长设备的测漏阀门系统
DE102023133450B3 (de) * 2023-11-29 2025-01-30 Pfeiffer Vacuum Technology AG Vorrichtung und Verfahren zur Lecksuche
CN120120260B (zh) * 2025-05-15 2025-08-08 淄博华岩泵业有限公司 一种离心泵测试设备及测试方法

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Also Published As

Publication number Publication date
US20190162193A1 (en) 2019-05-30
RU2728446C2 (ru) 2020-07-30
TW201802444A (zh) 2018-01-16
EP3472471A1 (de) 2019-04-24
US11009030B2 (en) 2021-05-18
RU2019100225A (ru) 2020-07-15
JP6883051B2 (ja) 2021-06-02
KR102430735B1 (ko) 2022-08-08
WO2017216173A1 (de) 2017-12-21
KR20190019070A (ko) 2019-02-26
EP3472471B1 (de) 2022-02-23
RU2019100225A3 (https=) 2020-07-15
CN109312754A (zh) 2019-02-05
TWI743137B (zh) 2021-10-21
JP2019523882A (ja) 2019-08-29
DE102016210701A1 (de) 2017-12-21

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