TWI735780B - 具有包含TaC 的塗層的碳材料及其製造方法 - Google Patents
具有包含TaC 的塗層的碳材料及其製造方法 Download PDFInfo
- Publication number
- TWI735780B TWI735780B TW107114495A TW107114495A TWI735780B TW I735780 B TWI735780 B TW I735780B TW 107114495 A TW107114495 A TW 107114495A TW 107114495 A TW107114495 A TW 107114495A TW I735780 B TWI735780 B TW I735780B
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- Prior art keywords
- tac
- coating
- coating containing
- carbon
- carbon material
- Prior art date
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- 239000003575 carbonaceous material Substances 0.000 title claims abstract description 66
- 239000011247 coating layer Substances 0.000 title claims description 33
- 238000004519 manufacturing process Methods 0.000 title abstract description 11
- 238000000576 coating method Methods 0.000 claims abstract description 174
- 239000011248 coating agent Substances 0.000 claims abstract description 172
- 239000000758 substrate Substances 0.000 claims abstract description 133
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 123
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 121
- 239000013078 crystal Substances 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims description 29
- 238000002441 X-ray diffraction Methods 0.000 claims description 19
- 238000012360 testing method Methods 0.000 claims description 10
- 238000005229 chemical vapour deposition Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000010410 layer Substances 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 5
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 abstract description 206
- 229910003468 tantalcarbide Inorganic materials 0.000 abstract description 206
- 239000000463 material Substances 0.000 description 19
- 239000011148 porous material Substances 0.000 description 13
- 230000008569 process Effects 0.000 description 10
- 230000000704 physical effect Effects 0.000 description 9
- 238000001878 scanning electron micrograph Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- 230000011514 reflex Effects 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 6
- 238000001465 metallisation Methods 0.000 description 6
- 239000000470 constituent Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000005470 impregnation Methods 0.000 description 2
- 238000001802 infusion Methods 0.000 description 2
- 238000012886 linear function Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000007542 hardness measurement Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000012887 quadratic function Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000007655 standard test method Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/0051—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/0093—Other features
- C04B38/0096—Pores with coated inner walls
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/0063—Cooling, e.g. freezing
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/0072—Heat treatment
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
- C04B41/4529—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied from the gas phase
- C04B41/4531—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied from the gas phase by C.V.D.
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
- C04B41/5057—Carbides
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00241—Physical properties of the materials not provided for elsewhere in C04B2111/00
- C04B2111/0025—Compositions or ingredients of the compositions characterised by the crystal structure
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/963—Surface properties, e.g. surface roughness
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ??10-2017-0054799 | 2017-04-28 | ||
| KR10-2017-0054799 | 2017-04-28 | ||
| KR1020170054799A KR101907900B1 (ko) | 2017-04-28 | 2017-04-28 | TaC를 포함하는 코팅층을 갖는 탄소 재료 및 그 제조방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201902858A TW201902858A (zh) | 2019-01-16 |
| TWI735780B true TWI735780B (zh) | 2021-08-11 |
Family
ID=63919830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107114495A TWI735780B (zh) | 2017-04-28 | 2018-04-27 | 具有包含TaC 的塗層的碳材料及其製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10883170B2 (enExample) |
| EP (1) | EP3617175A4 (enExample) |
| JP (1) | JP6833068B2 (enExample) |
| KR (1) | KR101907900B1 (enExample) |
| CN (1) | CN110582476B (enExample) |
| TW (1) | TWI735780B (enExample) |
| WO (1) | WO2018199676A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114807834A (zh) * | 2021-01-18 | 2022-07-29 | 重庆理工大学 | 一种低摩擦系数高耐磨的CrAlN/CrAlSiN/TaC复合涂层及其制备方法 |
| JP7213399B1 (ja) * | 2021-06-15 | 2023-01-26 | 三井金属鉱業株式会社 | 耐火部材およびその製造方法 |
| CN115198253A (zh) * | 2022-07-05 | 2022-10-18 | 苏州步科斯新材料科技有限公司 | 一种石墨基体表面碳化钽涂层的制备方法 |
| CN118703979B (zh) * | 2024-08-30 | 2024-12-10 | 湖南德智新材料股份有限公司 | 复合材料及其制备方法和应用 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200636100A (en) * | 2005-02-14 | 2006-10-16 | Toyo Tanso Co | Tantalum carbide-coated carbon material and method for fabricating the same |
| TW201139717A (en) * | 2009-12-28 | 2011-11-16 | Toyo Tanso Co | Tantalum carbide-coated carbon material and manufacturing method for same |
| CN106298448A (zh) * | 2016-08-08 | 2017-01-04 | 中国人民解放军国防科学技术大学 | 碳基体表面TaC涂层及其制备方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5696074A (en) * | 1979-12-28 | 1981-08-03 | Seiko Epson Corp | Hard exterior decorative parts for watch |
| JP3938361B2 (ja) | 2002-06-28 | 2007-06-27 | イビデン株式会社 | 炭素複合材料 |
| US20050064247A1 (en) * | 2003-06-25 | 2005-03-24 | Ajit Sane | Composite refractory metal carbide coating on a substrate and method for making thereof |
| US7463614B2 (en) * | 2004-12-16 | 2008-12-09 | Utstarcom, Inc. | Method and apparatus to facilitate provision of an IPv6 prefix |
| JP3779314B1 (ja) * | 2005-02-14 | 2006-05-24 | 東洋炭素株式会社 | 炭化タンタル被覆炭素材料およびその製造方法 |
| CN100450978C (zh) * | 2005-02-14 | 2009-01-14 | 东洋炭素株式会社 | 碳化钽被覆碳材料及其制造方法 |
| CN100338254C (zh) * | 2006-04-12 | 2007-09-19 | 华北电力大学 | 一种原位生成超细晶碳化物金属陶瓷涂层的制备方法 |
| JP4641536B2 (ja) * | 2007-07-27 | 2011-03-02 | 東洋炭素株式会社 | 還元性雰囲気炉用炭素複合材料及びその製造方法 |
| JP4641535B2 (ja) * | 2007-07-27 | 2011-03-02 | 東洋炭素株式会社 | 還元性雰囲気炉用炭素複合材料及びその製造方法 |
| JP2009137789A (ja) * | 2007-12-05 | 2009-06-25 | Sumitomo Electric Ind Ltd | 炭化タンタル焼結体およびその製造方法ならびに成形用型およびターゲット材 |
| US20100179045A1 (en) * | 2009-01-12 | 2010-07-15 | Goodrich Corporation | Methods and apparatus relating to a composite material |
| JP5267709B2 (ja) * | 2011-09-14 | 2013-08-21 | 株式会社豊田中央研究所 | 高耐熱部材、その製造方法、黒鉛ルツボおよび単結晶インゴットの製造方法 |
| JP5696074B2 (ja) | 2012-03-16 | 2015-04-08 | 株式会社東芝 | 半導体装置 |
| KR20170133191A (ko) * | 2016-05-25 | 2017-12-05 | 주식회사 티씨케이 | 고경도 TaC 코팅 탄소 재료 및 그 제조방법 |
| KR101824883B1 (ko) * | 2016-05-25 | 2018-02-02 | 주식회사 티씨케이 | 탄화탄탈 코팅 탄소 재료 |
| KR20190073788A (ko) * | 2017-12-19 | 2019-06-27 | 주식회사 티씨케이 | CVD를 이용한 TaC 코팅층의 제조방법 및 그를 이용하여 제조한 TaC의 물성 |
-
2017
- 2017-04-28 KR KR1020170054799A patent/KR101907900B1/ko active Active
-
2018
- 2018-04-27 JP JP2019558359A patent/JP6833068B2/ja active Active
- 2018-04-27 WO PCT/KR2018/004901 patent/WO2018199676A1/ko not_active Ceased
- 2018-04-27 US US16/607,490 patent/US10883170B2/en active Active
- 2018-04-27 CN CN201880028003.2A patent/CN110582476B/zh active Active
- 2018-04-27 EP EP18791723.2A patent/EP3617175A4/en active Pending
- 2018-04-27 TW TW107114495A patent/TWI735780B/zh active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200636100A (en) * | 2005-02-14 | 2006-10-16 | Toyo Tanso Co | Tantalum carbide-coated carbon material and method for fabricating the same |
| TW201139717A (en) * | 2009-12-28 | 2011-11-16 | Toyo Tanso Co | Tantalum carbide-coated carbon material and manufacturing method for same |
| CN106298448A (zh) * | 2016-08-08 | 2017-01-04 | 中国人民解放军国防科学技术大学 | 碳基体表面TaC涂层及其制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3617175A1 (en) | 2020-03-04 |
| CN110582476B (zh) | 2022-05-24 |
| US10883170B2 (en) | 2021-01-05 |
| JP2020517571A (ja) | 2020-06-18 |
| JP6833068B2 (ja) | 2021-02-24 |
| CN110582476A (zh) | 2019-12-17 |
| KR101907900B1 (ko) | 2018-10-16 |
| EP3617175A4 (en) | 2020-04-22 |
| US20200140997A1 (en) | 2020-05-07 |
| WO2018199676A1 (ko) | 2018-11-01 |
| TW201902858A (zh) | 2019-01-16 |
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