TWI719160B - 電漿蝕刻方法 - Google Patents
電漿蝕刻方法 Download PDFInfo
- Publication number
- TWI719160B TWI719160B TW106107824A TW106107824A TWI719160B TW I719160 B TWI719160 B TW I719160B TW 106107824 A TW106107824 A TW 106107824A TW 106107824 A TW106107824 A TW 106107824A TW I719160 B TWI719160 B TW I719160B
- Authority
- TW
- Taiwan
- Prior art keywords
- gas
- etching
- processing
- film
- processed
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 90
- 238000001020 plasma etching Methods 0.000 title claims abstract description 57
- 239000007789 gas Substances 0.000 claims abstract description 330
- 238000012545 processing Methods 0.000 claims abstract description 244
- 238000005530 etching Methods 0.000 claims abstract description 220
- 230000008021 deposition Effects 0.000 claims abstract description 86
- 239000000758 substrate Substances 0.000 claims abstract description 79
- 125000001153 fluoro group Chemical group F* 0.000 claims abstract description 68
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 67
- 239000010409 thin film Substances 0.000 claims abstract description 43
- 239000010408 film Substances 0.000 claims description 187
- YBMDPYAEZDJWNY-UHFFFAOYSA-N 1,2,3,3,4,4,5,5-octafluorocyclopentene Chemical compound FC1=C(F)C(F)(F)C(F)(F)C1(F)F YBMDPYAEZDJWNY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052731 fluorine Inorganic materials 0.000 abstract description 9
- 238000000151 deposition Methods 0.000 description 81
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 31
- 230000000052 comparative effect Effects 0.000 description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 25
- 229910052814 silicon oxide Inorganic materials 0.000 description 25
- 229910052581 Si3N4 Inorganic materials 0.000 description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 18
- 229920002120 photoresistant polymer Polymers 0.000 description 16
- 230000015572 biosynthetic process Effects 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 11
- 229910052799 carbon Inorganic materials 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- 230000001681 protective effect Effects 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 8
- 238000002156 mixing Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 238000002360 preparation method Methods 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000009825 accumulation Methods 0.000 description 6
- 238000006116 polymerization reaction Methods 0.000 description 6
- 238000011282 treatment Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 239000001307 helium Substances 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- LGPPATCNSOSOQH-UHFFFAOYSA-N 1,1,2,3,4,4-hexafluorobuta-1,3-diene Chemical compound FC(F)=C(F)C(F)=C(F)F LGPPATCNSOSOQH-UHFFFAOYSA-N 0.000 description 3
- AWDCOETZVBNIIV-UHFFFAOYSA-N 1,3,3,4,4,5,5-heptafluorocyclopentene Chemical compound FC1=CC(F)(F)C(F)(F)C1(F)F AWDCOETZVBNIIV-UHFFFAOYSA-N 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 239000004341 Octafluorocyclobutane Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 description 3
- 235000019407 octafluorocyclobutane Nutrition 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 150000001721 carbon Chemical group 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 2
- 238000007429 general method Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- -1 octafluoro-cyclopentene compound Chemical class 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 150000003377 silicon compounds Chemical class 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000006557 surface reaction Methods 0.000 description 2
- JPMVRUQJBIVGTQ-HNQUOIGGSA-N (3e)-1,1,2,3,4,5,5,5-octafluoropenta-1,3-diene Chemical compound FC(F)=C(F)C(\F)=C(/F)C(F)(F)F JPMVRUQJBIVGTQ-HNQUOIGGSA-N 0.000 description 1
- MZPZBRBIEBBNIA-UPHRSURJSA-N (z)-1,1,1,3,4,4,5,5,5-nonafluoropent-2-ene Chemical compound FC(F)(F)\C=C(/F)C(F)(F)C(F)(F)F MZPZBRBIEBBNIA-UPHRSURJSA-N 0.000 description 1
- DMUPYMORYHFFCT-UPHRSURJSA-N (z)-1,2,3,3,3-pentafluoroprop-1-ene Chemical compound F\C=C(/F)C(F)(F)F DMUPYMORYHFFCT-UPHRSURJSA-N 0.000 description 1
- YIFLMZOLKQBEBO-UHFFFAOYSA-N 1,1,1,2,4,4,4-heptafluorobut-2-ene Chemical compound FC(F)(F)C(F)=CC(F)(F)F YIFLMZOLKQBEBO-UHFFFAOYSA-N 0.000 description 1
- WDTCMFNXBZHCPK-UHFFFAOYSA-N 1,1,1,4,4,5,5,5-octafluoropent-2-yne Chemical compound FC(F)(F)C#CC(F)(F)C(F)(F)F WDTCMFNXBZHCPK-UHFFFAOYSA-N 0.000 description 1
- LGWNSTJNCWGDPH-UHFFFAOYSA-N 1,1,2,2,3,3,4-heptafluorocyclobutane Chemical compound FC1C(F)(F)C(F)(F)C1(F)F LGWNSTJNCWGDPH-UHFFFAOYSA-N 0.000 description 1
- KJXCOHSPZKKOBK-UHFFFAOYSA-N 1,1,2,3,3,4,5,5-octafluoropenta-1,4-diene Chemical compound FC(F)=C(F)C(F)(F)C(F)=C(F)F KJXCOHSPZKKOBK-UHFFFAOYSA-N 0.000 description 1
- QVHWOZCZUNPZPW-UHFFFAOYSA-N 1,2,3,3,4,4-hexafluorocyclobutene Chemical compound FC1=C(F)C(F)(F)C1(F)F QVHWOZCZUNPZPW-UHFFFAOYSA-N 0.000 description 1
- JRHNUZCXXOTJCA-UHFFFAOYSA-N 1-fluoropropane Chemical compound CCCF JRHNUZCXXOTJCA-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910018503 SF6 Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229950005499 carbon tetrachloride Drugs 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- YUCFVHQCAFKDQG-UHFFFAOYSA-N fluoromethane Chemical compound F[CH] YUCFVHQCAFKDQG-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WBCLXFIDEDJGCC-UHFFFAOYSA-N hexafluoro-2-butyne Chemical compound FC(F)(F)C#CC(F)(F)F WBCLXFIDEDJGCC-UHFFFAOYSA-N 0.000 description 1
- WMIYKQLTONQJES-UHFFFAOYSA-N hexafluoroethane Chemical compound FC(F)(F)C(F)(F)F WMIYKQLTONQJES-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- YWAKXRMUMFPDSH-UHFFFAOYSA-N pentene Chemical compound CCCC=C YWAKXRMUMFPDSH-UHFFFAOYSA-N 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
- H01L21/30655—Plasma etching; Reactive-ion etching comprising alternated and repeated etching and passivation steps, e.g. Bosch process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016054317 | 2016-03-17 | ||
JP2016-054317 | 2016-03-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201801178A TW201801178A (zh) | 2018-01-01 |
TWI719160B true TWI719160B (zh) | 2021-02-21 |
Family
ID=59851953
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106107824A TWI719160B (zh) | 2016-03-17 | 2017-03-09 | 電漿蝕刻方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10629447B2 (ko) |
EP (1) | EP3432346A4 (ko) |
JP (1) | JPWO2017159512A1 (ko) |
KR (1) | KR102411668B1 (ko) |
CN (1) | CN108780748B (ko) |
TW (1) | TWI719160B (ko) |
WO (1) | WO2017159512A1 (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102172031B1 (ko) * | 2018-01-31 | 2020-10-30 | 주식회사 히타치하이테크 | 플라스마 처리 방법, 및 플라스마 처리 장치 |
JP6874778B2 (ja) * | 2019-01-09 | 2021-05-19 | ダイキン工業株式会社 | シクロブタンの製造方法 |
EP3985714A4 (en) * | 2019-06-13 | 2023-07-19 | Tokyo Electron Limited | ETCHING PROCESS AND ETCHING DEVICE |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080085605A1 (en) * | 2006-10-04 | 2008-04-10 | Nobuyuki Negishi | Dry etching method of insulating film |
US20090233450A1 (en) * | 2008-02-07 | 2009-09-17 | Tokyo Electron Limited | Plasma etchimg method and plasma etching apparatus |
US20150235861A1 (en) * | 2012-09-18 | 2015-08-20 | Tokyo Electron Limited | Plasma etching method and plasma etching apparatus |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4241045C1 (de) | 1992-12-05 | 1994-05-26 | Bosch Gmbh Robert | Verfahren zum anisotropen Ätzen von Silicium |
DE10246063A1 (de) * | 2002-10-02 | 2004-04-22 | Robert Bosch Gmbh | Verfahren zum anisotropen Ätzen eines Siliziumsubstrates |
JP2007012819A (ja) | 2005-06-29 | 2007-01-18 | Toshiba Corp | ドライエッチング方法 |
WO2008020267A2 (en) * | 2006-08-16 | 2008-02-21 | Freescale Semiconductor, Inc. | Etch method in the manufacture of an integrated circuit |
EP2235742B1 (en) * | 2007-12-21 | 2020-02-12 | Solvay Fluor GmbH | Process for the production of microelectromechanical systems |
US20090191711A1 (en) * | 2008-01-30 | 2009-07-30 | Ying Rui | Hardmask open process with enhanced cd space shrink and reduction |
JP5398315B2 (ja) | 2009-03-13 | 2014-01-29 | 富士フイルム株式会社 | 圧電素子及びその製造方法並びにインクジェットヘッド |
WO2011057047A2 (en) | 2009-11-09 | 2011-05-12 | 3M Innovative Properties Company | Process for anisotropic etching of semiconductors |
US8617411B2 (en) | 2011-07-20 | 2013-12-31 | Lam Research Corporation | Methods and apparatus for atomic layer etching |
US8691698B2 (en) * | 2012-02-08 | 2014-04-08 | Lam Research Corporation | Controlled gas mixing for smooth sidewall rapid alternating etch process |
JP2015032597A (ja) | 2013-07-31 | 2015-02-16 | 日本ゼオン株式会社 | プラズマエッチング方法 |
JP6207947B2 (ja) * | 2013-09-24 | 2017-10-04 | 東京エレクトロン株式会社 | 被処理体をプラズマ処理する方法 |
JP6235981B2 (ja) * | 2014-07-01 | 2017-11-22 | 東京エレクトロン株式会社 | 被処理体を処理する方法 |
JP6315809B2 (ja) * | 2014-08-28 | 2018-04-25 | 東京エレクトロン株式会社 | エッチング方法 |
-
2017
- 2017-03-08 WO PCT/JP2017/009332 patent/WO2017159512A1/ja active Application Filing
- 2017-03-08 EP EP17766513.0A patent/EP3432346A4/en not_active Withdrawn
- 2017-03-08 CN CN201780015381.2A patent/CN108780748B/zh active Active
- 2017-03-08 KR KR1020187025390A patent/KR102411668B1/ko active IP Right Grant
- 2017-03-08 US US16/081,939 patent/US10629447B2/en active Active
- 2017-03-08 JP JP2018505865A patent/JPWO2017159512A1/ja active Pending
- 2017-03-09 TW TW106107824A patent/TWI719160B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080085605A1 (en) * | 2006-10-04 | 2008-04-10 | Nobuyuki Negishi | Dry etching method of insulating film |
US20090233450A1 (en) * | 2008-02-07 | 2009-09-17 | Tokyo Electron Limited | Plasma etchimg method and plasma etching apparatus |
US20150235861A1 (en) * | 2012-09-18 | 2015-08-20 | Tokyo Electron Limited | Plasma etching method and plasma etching apparatus |
Also Published As
Publication number | Publication date |
---|---|
EP3432346A4 (en) | 2019-10-16 |
EP3432346A1 (en) | 2019-01-23 |
CN108780748A (zh) | 2018-11-09 |
CN108780748B (zh) | 2023-02-17 |
KR102411668B1 (ko) | 2022-06-20 |
TW201801178A (zh) | 2018-01-01 |
KR20180123668A (ko) | 2018-11-19 |
US20190096689A1 (en) | 2019-03-28 |
US10629447B2 (en) | 2020-04-21 |
JPWO2017159512A1 (ja) | 2019-01-24 |
WO2017159512A1 (ja) | 2017-09-21 |
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