TWI701856B - Single tension type welding apparatus for manufacturing amoled mobile mask frame assembly and manufacturing method of amoled mobile mask frame assembly using thereof - Google Patents

Single tension type welding apparatus for manufacturing amoled mobile mask frame assembly and manufacturing method of amoled mobile mask frame assembly using thereof Download PDF

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TWI701856B
TWI701856B TW107125251A TW107125251A TWI701856B TW I701856 B TWI701856 B TW I701856B TW 107125251 A TW107125251 A TW 107125251A TW 107125251 A TW107125251 A TW 107125251A TW I701856 B TWI701856 B TW I701856B
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frame
welding
air
tension
manufacturing
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TW201926762A (en
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崔英默
尹泳錫
吳世正
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南韓商漢松新科技股份有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67259Position monitoring, e.g. misposition detection or presence detection
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
    • H01L2021/60285Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving the use of mechanical auxiliary parts without the use of an alloying or soldering process, e.g. pressure contacts

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Abstract

本發明涉及用於製造AMOLED移動式遮罩框架元件的單張力型焊接裝置以及利用該裝置的AMOLED移動式遮罩框架元件的製造方法,通過控制氣浮與伺服馬達將框架精確地裝載於定心位置之後進行安裝,在該框架焊接分割遮罩之後檢測焊接品質時在台架具備三頭構成焊接及檢測裝置,以使焊接品質檢測裝置在已調整重量平衡的台架上移動,進而可無振動地進行精確的檢查。 The present invention relates to a single-tension welding device for manufacturing AMOLED movable mask frame elements and a method for manufacturing AMOLED movable mask frame elements using the device. The frame is accurately loaded on the fixed frame by controlling air flotation and a servo motor. After the center position is installed, the frame is equipped with a three-head welding and inspection device when inspecting the welding quality after the frame is welded with the split mask, so that the welding quality inspection device can be moved on the stage with the adjusted weight balance. Perform precise inspections vibratingly.

Description

製造AMOLED移動式遮罩框架元件的單張力型焊接裝置及利用該裝置的AMOLED移動式遮罩框架元件的製造方法 Single-tension welding device for manufacturing AMOLED movable mask frame element and manufacturing method of AMOLED movable mask frame element using the device

本發明涉及製造AMOLED移動式遮罩框架元件的單張力型焊接裝置以及利用該裝置的AMOLED移動式遮罩框架元件的製造方法,更詳細地說,涉及對為了製造遮罩框架元件而裝載的框架進行氣浮來精確地定心和對準(Align),在將分割遮罩焊接在框架上時降低振動,提高測量精度和焊接精度的裝置以及利用該裝置的遮罩框架元件製造方法。 The present invention relates to a single-tension welding device for manufacturing AMOLED movable mask frame elements and a method for manufacturing AMOLED movable mask frame elements using the device. More specifically, it relates to a method for manufacturing a mask frame element mounted on The frame is air floated to accurately center and align (align), reduce vibration when welding the split mask on the frame, improve the measurement accuracy and welding accuracy, and the manufacturing method of the mask frame component using the device.

近來,有機發光二極體(OLED)作為用於各種用途的顯示元件而備受關注,其反應速度比薄膜電晶體液晶顯示器(TFT LCD)快得多,並且在無需單獨的背光的情況下可自發光,而且與LCD相比結構簡單且部件少,使得製造時可大幅度降低相比LCD的厚度與重量,擁有寬視角和低功耗結構,因此是下一代顯示裝置。 Recently, organic light-emitting diodes (OLEDs) have attracted attention as display elements for various purposes. Their response speed is much faster than thin-film transistor liquid crystal displays (TFT LCDs), and they can be used without a separate backlight. It is self-luminous, and has a simpler structure and fewer components than LCDs, which can greatly reduce the thickness and weight of LCDs during manufacturing. It has a wide viewing angle and low power consumption structure, so it is the next generation display device.

該OLED分為主動模式(AM)和手動模式(PM)。特別是,AMOLED的每個像素都有TFT和電容,並且在功耗、壽命和解析度方面都非常出色,因此克服TFT的製造具有高製造成本的這一缺點,在各個領域正在嘗試積極開發和批量生產。 The OLED is divided into active mode (AM) and manual mode (PM). In particular, each pixel of AMOLED has TFT and capacitance, and is excellent in power consumption, lifetime and resolution. Therefore, it overcomes the shortcoming of high manufacturing cost in the manufacture of TFT, and is trying to actively develop and Mass production.

特別是,在最近AMOLED被用作各領域的顯示元件,其中最具代表性的領域是諸如TV的大型顯示裝置和諸如智慧手機的小型顯示裝置。特別 是,智慧手機領域是每年都會推出新產品且使用者的更換需求也很活躍的領域,因此其商業前景非常光明。 In particular, AMOLEDs have recently been used as display elements in various fields, among which the most representative fields are large display devices such as TVs and small display devices such as smart phones. especially Yes, the smart phone field is an area where new products are launched every year and the user's replacement demand is also active, so its business prospects are very bright.

然而,對於諸如智慧手機的小尺寸顯示領域,為了提供使用者所需的各種多媒體環境,對高解析度顯示面板的需求不斷增加,因此確保精確的遮罩框架元件的製造技術非常重要。 However, in the field of small-size display such as smart phones, in order to provide various multimedia environments required by users, the demand for high-resolution display panels is increasing. Therefore, it is very important to ensure the manufacturing technology of accurate mask frame elements.

概略說明現有之利用分割遮罩的遮罩框架元件製造方法的製造過程如下:通過運送裝置和升降台等裝載框架放置在基準點定心位置,然後將由抓取器抓取的分割遮罩運送至作業位置進行對準和夾持,然後基於位於分割遮罩下部的母玻璃拍攝分割遮罩影像來檢測像素位置精度(Pixel Position Accuracy,PPA),若檢測的分割遮罩形狀資訊在PPA允許的誤差範圍以內,則將分割遮罩焊接以及固定在框架,之後對於新的分割遮罩以相同的方法反復執行檢測、修正以及焊接步驟製造遮罩框架元件。 A brief description of the existing manufacturing method of the mask frame element using the split mask is as follows: the loading frame is placed at the centering position of the reference point by means of a conveyor and a lifting platform, and then the split mask grabbed by the gripper is transported to The working position is aligned and clamped, and then the segmented mask image is captured based on the mother glass under the segmented mask to detect the pixel position accuracy (PPA), if the detected segmented mask shape information is within the tolerance of the PPA Within the range, the segmented mask is welded and fixed to the frame, and then the new segmented mask is repeatedly inspected, corrected, and welded in the same method to manufacture the mask frame component.

但是,如上所述的現有的遮罩框架元件製造過程中,裝載框架並對準基準定心的製程是決定遮罩框架元件的產量的最重要的製程,而現有的框架的製程則存在製程不精確的結構問題。 However, in the manufacturing process of the existing mask frame components as described above, the process of loading the frame and aligning the reference and centering is the most important process that determines the output of the mask frame components, while the existing frame manufacturing process has different manufacturing processes. Precise structural issues.

具體地說,為了將框架裝載並對準到定心位置,現有技術利用球浮法,在由球支撐框架下部的狀態下利用氣缸對準定心位置,以使框架對準反作用力位置,但是該方法存在無法將框架對準至精確的位置的問題。 Specifically, in order to load and align the frame to the centering position, the prior art uses a ball float method, and uses a cylinder to align the centering position with the lower part of the frame supported by the ball to align the frame to the reaction force position. This method has a problem that the frame cannot be aligned to a precise position.

即,在利用氣缸移動框架的長邊或者短邊時,利用液壓或者氣壓的氣缸操作方式很難以精確的數值進行位置控制,即使在測量時準確對準框架的定心位置,若在接觸並支撐框架下部的球浮裝置下降而施加衝擊,則需會施加細微的變動,但是發生細微的位置變化的情況下,對於作為要求微米單位的誤差的精確的遮罩框架元件則存在無法保持高品質的問題。 That is, when using cylinders to move the long or short sides of the frame, it is difficult to control the position with precise values using hydraulic or pneumatic cylinder operation. Even if the centering position of the frame is accurately aligned during measurement, if it is in contact with and supported When the ball float at the lower part of the frame is lowered to apply an impact, a slight change is required. However, in the case of a slight position change, it is impossible to maintain high quality as an accurate mask frame element that requires an error in micrometers. problem.

另外,在現有技術中,將框架定心之後利用抓取器裝載分割遮罩之後對準位置,之後在焊接時進行用於檢測焊接位置以及確認焊接之後的焊接狀態的檢測,以確保焊接位置與焊接品質,此時若為實現精確的測量,則很難保障高品質遮罩框架元件。 In addition, in the prior art, after the frame is centered, a grabber is used to load the split mask and then the position is aligned, and then during welding, inspections for detecting the welding position and confirming the welding state after welding are performed to ensure the welding position and Welding quality, at this time, if it is to achieve accurate measurement, it is difficult to guarantee high-quality mask frame components.

這是因為在現有技術中檢測框架與分割遮罩之間的焊接品質時所使用的雙頭方式的檢測及焊接裝置一般構成是懸掛在一個傳送台架的兩個焊接裝置,且在兩個焊接裝置中的一個焊接裝置還設置有焊接品質檢測裝置。對 於這種結構的雙頭方式焊接及檢測裝置存在以下的具體問題:所述焊接裝置具備為了在焊接分割遮罩之後確認焊接品質的焊接品質檢測裝置,該焊接裝置在台架上移動發生微小的重量重心的變化,同時產生振動,因此在檢測時可降低精確度。 This is because the double-headed detection and welding device used in the prior art to detect the welding quality between the frame and the split mask is generally composed of two welding devices suspended on one transfer platform, and the two welding devices are A welding device in the device is also provided with a welding quality detection device. Correct The double-headed welding and inspection device with this structure has the following specific problems: the welding device is equipped with a welding quality inspection device for confirming the welding quality after welding the split mask, and the welding device moves on the gantry to produce a small amount of The change in the center of gravity of the weight also generates vibration, so the accuracy of the detection can be reduced.

因此,現實是解決該現有問題的AMOLED移動遮罩框架元件製造裝置的必要性正在增加。 Therefore, the reality is that the necessity of an AMOLED mobile mask frame element manufacturing device that solves this existing problem is increasing.

<現有技術文獻> <Prior Art Literature>

(專利文獻) (Patent Document)

(專利文獻1)韓國註冊專利公報註冊號10-1272299(2013.05.31) (Patent Document 1) Korean Registered Patent Publication Registration No. 10-1272299 (2013.05.31)

(專利文獻2)韓國註冊專利公報註冊號10-0941007(2010.02.01) (Patent Document 2) Korean Registered Patent Publication Registration No. 10-0941007 (2010.02.01)

(專利文獻3)韓國註冊專利公報註冊號10-0823943(2008.04.15) (Patent Document 3) Korean Registered Patent Publication Registration No. 10-0823943 (2008.04.15)

(專利文獻4)韓國註冊專利公報註冊號10-0397635(2003.08.28) (Patent Document 4) Korean Registered Patent Publication Registration No. 10-0397635 (2003.08.28)

用於解決如上所述問題之本發明的目的在於提供如下的製造AMOLED移動式遮罩框架元件的單張力型焊接裝置以及利用該裝置的AMOLED移動式遮罩框架元件的製造方法:通過控制氣浮與伺服馬達將框架精確地裝載於定心位置之後進行安裝,在該框架焊接以及檢測分割遮罩時構成三頭台架,以在調節重量平衡的台架上移動,進而能夠無振動地進行精確測量。 The purpose of the present invention for solving the above-mentioned problems is to provide the following single-tension welding device for manufacturing AMOLED movable mask frame elements and a method for manufacturing AMOLED movable mask frame elements using the device: Floating and servo motors accurately load the frame at the centering position and then install it. When the frame is welded and the split mask is detected, a three-headed gantry is formed to move on the weight-balanced gantry, thereby enabling vibration-free operation. Accurate measurement.

本發明的另一目的在於提供如下之製造AMOLED移動式遮罩框架元件的單張力型焊接裝置以及利用該裝置的AMOLED移動式遮罩框架元件的製造方法:通過分割的氣浮結構使均勻且獨立的空氣供應於框架下部,以實現穩定的氣浮。 Another object of the present invention is to provide a single-tension welding device for manufacturing AMOLED movable mask frame elements and a method for manufacturing AMOLED movable mask frame elements using the device: the split air floating structure makes uniform and Independent air is supplied to the lower part of the frame to achieve stable air floatation.

達成如上所述的目的並解決現有技術的缺點的本發明,提供一種製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,對運送至框架的分割遮罩進行位置測量和焊接,並檢測焊接品質,包括:框架位置對準部,以利用氣浮部而氣浮的狀態安置通過框架升降部已裝載的框架,進而利用框架位置調節部對準基準定心位置以提供對抗力;三頭方式焊接及檢測部,在精確安置的 框架上部通過夾持部以單張力方式夾持在裝載於遮罩架部中的分割遮罩中選出的分割遮罩來裝載於焊接位置,然後在降低振動的狀態下對準焊接位置之後進行焊接,並檢測焊接的焊接品質。 The present invention, which achieves the above-mentioned object and solves the shortcomings of the prior art, provides a single-tension welding device for manufacturing AMOLED movable mask frame elements, and performs position measurement and welding on the divided masks transported to the frame, and inspects Welding quality includes: the frame position alignment part, which uses the air-floating part to install the frame that has been loaded through the frame lifting part, and then uses the frame position adjustment part to align the reference centering position to provide resistance; three ends Way welding and testing department, in the precise placement The upper part of the frame is clamped by the clamping part to the divided mask selected from the divided masks loaded in the mask frame part in a single tension mode, and then loaded on the welding position, and then the welding position is aligned with the vibration reduced. Welding, and inspect the welding quality of welding.

作為較佳實施例,所述氣浮部可包括:氣孔部,接收並噴射壓縮空氣,並且分別設置在短邊與長邊方向;氣罩部,設置在氣孔部上部,並分別構成在短邊與長邊方向,進而以使接收到的空氣以均勻的壓力分割供應於框架下部面。 As a preferred embodiment, the air floating part may include: an air hole part, which receives and ejects compressed air, and is respectively arranged in the short side and the long side direction; the air cover part is arranged on the upper part of the air hole part and is respectively formed on the short side In the longitudinal direction, the received air is divided and supplied to the lower surface of the frame at a uniform pressure.

作為較佳實施例,所述氣孔部由凸出型支撐架和形成在該凸出型支撐架的多個氣孔構成;所述氣罩部上部面被加工成扁平狀,而在下部面向內側面方向形成插入所述凸出型支撐架的空氣腔室,空氣腔室的上部可形成有多個氣孔。 As a preferred embodiment, the air hole portion is composed of a protruding support frame and a plurality of air holes formed in the protruding support frame; the upper surface of the air cover portion is processed into a flat shape, and the lower part faces the inner surface The direction forms an air chamber inserted into the protruding support frame, and a plurality of air holes may be formed on the upper part of the air chamber.

作為較佳實施例,形成在所述長邊的氣罩部具有兩個空氣腔室,能夠以從位於其下部的兩個氣孔部接收空氣。 As a preferred embodiment, the air cover portion formed on the long side has two air chambers, which can receive air from the two air holes located at the lower part thereof.

作為較佳實施例,所述框架位置調節部可在短邊與長邊側分別形成一個以上的位置調節器,所述位置調節器包括:使接觸部精確地前進和後退的伺服馬達、根據伺服馬達的運作與框架接觸的接觸部。 As a preferred embodiment, the frame position adjusting part may respectively form more than one position adjuster on the short side and the long side, and the position adjuster includes: a servo motor for accurately advancing and retreating the contact part, according to the servo The contact part where the operation of the motor is in contact with the frame.

作為較佳實施例,所述框架升降部由四個角落升降器和四個框架長邊升降器構成,用連接桿連接位於一側長邊側的一個長邊升降器與一個角落升降器來配成對,進而可在連動的同時進行升降。 As a preferred embodiment, the frame lifting part is composed of four corner lifts and four frame long-side lifts, and a connecting rod is used to connect a long-side lifter and a corner lifter located on one long side. Paired, and then can be raised and lowered simultaneously.

作為較佳實施例,所述三頭方式焊接及檢測部可包括:設置形成在台架的台架軌道並以水平方向移動的兩個焊接器部;設置在焊接器部之間的焊接檢測儀部。 As a preferred embodiment, the three-head welding and inspection section may include: two welder sections formed on the platform rail of the gantry and movable in a horizontal direction; and a welding detector set between the welder sections unit.

作為較佳實施例,所述兩個焊接器部與焊接檢測儀部分別具有水平台車以及垂直台車,所述水平台車沿著形成在台架的台架軌道以水平方向移動,所述垂直台車沿著分別形成在水平台車的垂直軌道以上下方向移動。 As a preferred embodiment, the two welder parts and the welding detector part respectively have a water platform car and a vertical trolley, the water platform car moves in a horizontal direction along the platform rail formed on the platform, and the vertical trolley moves along the The vertical rails respectively formed on the water platform vehicles move up and down.

作為較佳實施例,在所述焊接器部的垂直台車分別設置有一對焊接器與焊接位置檢測儀,在所述焊接檢測儀部的垂直台車設置焊接品質檢測儀。 As a preferred embodiment, a pair of welders and a welding position detector are respectively provided on the vertical trolley of the welder part, and a welding quality detector is provided on the vertical trolley of the welder part.

作為較佳實施例,設置在所述焊接器部中某一側的焊接器及焊接位置檢測儀跨過焊接檢測儀部而相鄰的另一側焊接器部的焊接器及焊接位置檢測儀可對稱設置,以調整重量平衡。 As a preferred embodiment, the welder and welding position detector arranged on one side of the welder part straddles the welding detector part and the welder and welding position detector on the other adjacent welder part may Set symmetrically to adjust the weight balance.

作為較佳實施例,所述焊接器可在焊接時台架停滯的狀態下,沿著由與台架的移動方向相同的軸方向構成的焊接器軌道移動的同時進行焊接。 As a preferred embodiment, the welder can perform welding while moving along the welder track constituted by the same axial direction as the moving direction of the platform when the platform is stagnant during welding.

作為較佳實施例,所述焊接檢測儀部兩側端可設置有懸掛在台架的兩個焊接器部起到平衡重量的作用,在這一狀態下,所述焊接檢測儀部在水平移動台架的同時檢測焊接在框架的遮罩的焊接品質。 As a preferred embodiment, two welder parts suspended on the platform can be provided at both ends of the welding detector part to balance the weight. In this state, the welding detector part moves horizontally. Test the welding quality of the shield welded on the frame at the same time of the bench.

根據另一實施例,提供一種利用單張力型焊接裝置的AMOLED移動式遮罩框架元件的製造方法,包括:步驟S100,使框架升降部上升而裝載運送的框架之後下降,之後安置在框架位置對準部的氣罩部;步驟S200,被分割成四個部分的氣罩部均勻地噴射從氣浮部供應的氣體來氣浮框架;步驟S300,使框架位置對準部的框架位置調節部接觸的框架前進和後退,以按照基準定心對準氣浮狀態的框架;步驟S400,若框架的定心對準結束,則夾持部夾持分割遮罩之後移動至框架上的焊接位置,之後以施加張力的狀態定位分割遮罩;步驟S500,三頭方式焊接及檢測部移動來檢查運送的分割遮罩是否對準框架的焊接位置後進行焊接,其中,所述三頭方式焊接及檢測部由設置在台架的兩個焊接器部與焊接品質檢測儀構成;步驟S600,焊接結束之後,焊接品質檢測儀在調整重量平衡的狀態下檢測焊接品質;步驟S700,反復執行運送並焊接所述分割遮罩後檢測焊接品質的步驟,若完成遮罩框架元件的製造,則由框架升降部上升遮罩框架元件。 According to another embodiment, there is provided a method for manufacturing AMOLED movable mask frame elements using a single-tension type welding device, including: step S100, raising the frame lifting part to load the transported frame and then descending, and then placing it at the frame position Align the gas hood part of the alignment part; step S200, the gas hood part divided into four parts evenly sprays the gas supplied from the air floatation part to float the frame; step S300, make the frame position adjustment part of the frame position alignment part The contacted frame advances and retreats to center the frame in the air-floating state according to the reference; step S400, if the centering and alignment of the frame is finished, the clamping part moves to the welding position on the frame after clamping the split mask, Afterwards, the segmentation mask is positioned with tension applied; step S500, the three-head welding and detection unit moves to check whether the delivered segmentation mask is aligned with the welding position of the frame before welding, wherein the three-head welding and detection The section is composed of two welder sections and a welding quality tester installed on the gantry; step S600, after the welding is completed, the welding quality tester detects the welding quality while adjusting the weight balance; step S700, repeats the transportation and welding In the step of detecting the welding quality after dividing the mask, if the manufacturing of the mask frame element is completed, the mask frame element is raised by the frame lifting part.

作為較佳實施例,可包括以下步驟:所述框架升降部為了製作而運送的框架的下降或者焊接完成遮罩框架元件上升時,所述框架升降部以同時支撐框架的下部面角落與長邊的狀態進行升降。 As a preferred embodiment, the method may include the following steps: when the frame lifting part is used to lower the frame conveyed for manufacturing or when the welding is completed, the shield frame element is raised, the frame lifting part simultaneously supports the lower corners and long sides of the frame The state is raised and lowered.

作為較佳實施例,可包括以下步驟:所述框架位置分別對應於短邊與長邊側設置由伺服馬達與接觸部構成而驅動的位置調節器,在使接觸部接觸於框架的狀態下運作伺服馬達細微地調節前進和後退。 As a preferred embodiment, it may include the following steps: the position of the frame corresponds to the short side and the long side, respectively, with a position adjuster driven by a servo motor and a contact portion, and operates in a state where the contact portion is in contact with the frame The servo motor finely adjusts forward and backward.

作為較佳實施例,所述步驟S500包括如下的步驟:構成各個焊接器部的焊接位置檢測儀檢查裝載的分割遮罩與框架的焊接位置是否對準;然後,在焊接位置對準的情況下,構成各個焊接器部的焊接器在台架停滯的狀態下沿著焊接軌道移動的同時進行精確的焊接,其中所述焊接軌道由以與台架的移動方向相同的軸方向構成。 As a preferred embodiment, the step S500 includes the following steps: the welding position detector constituting each welder part checks whether the welding position of the loaded split mask and the frame are aligned; then, when the welding position is aligned , The welder constituting each welder part performs precise welding while moving along the welding track in a state where the stage is stagnant, wherein the welding track is composed of the same axial direction as the moving direction of the stage.

作為較佳實施例,所述步驟S600可以在懸掛在台架的兩個焊接器部位於兩側端起到平衡重量的狀態下,焊接檢測儀部在水平移動台架的同時確認分割遮罩的焊接品質。 As a preferred embodiment, in the step S600, when the two welder parts hung on the gantry are positioned at both ends to balance the weight, the welding detector part moves the gantry horizontally while checking the split mask. Welding quality.

具有上述特徵的本發明的單張力焊接裝置作為具有以下的優點的發明,是一種非常期待在工業中使用的發明:在製造AMOLED移動式遮罩框架元件時,在將框架氣浮的狀態下,通過伺服馬達精確地調節位置,進而可在基準的5μm範圍內對準定心位置;另外,在對框架進行氣浮時提供分離式的氣浮方式,以使均勻且獨立地空氣供應於框架下部,以實現穩定的氣浮;另外,將利用夾持器以單張力方式夾持之後裝載於框架上部的分割遮罩焊接於框架,之後檢測焊接品質時,此時在三頭方式焊接及檢測部中懸掛在台架的兩個焊接部起到平衡重量的作用,以在調整好重量平衡的台架上移動,進而可實現無振動地精確調節;另外,在台架以三頭方式構成的焊接及檢測部中兩個焊接部起到平衡重量的作用的同時在台架停滯的狀態下個別焊接器沿著單獨的軸獨立移動,進而能夠精確地檢測焊接位置以及進行焊接。 The single-tension welding device of the present invention having the above-mentioned characteristics is an invention that is highly expected to be used in the industry as an invention having the following advantages: When manufacturing AMOLED movable mask frame elements, the frame is air-floated , The position can be precisely adjusted by the servo motor, and then the centering position can be aligned within the range of 5μm of the reference; in addition, a separate air floatation method is provided when the frame is air floated, so that the air is supplied to the frame uniformly and independently The lower part is used to achieve stable air floatation; in addition, the split mask mounted on the upper part of the frame after being clamped by a clamp with a single tension is welded to the frame, and then when the welding quality is checked, the three-head welding and The two welded parts suspended on the platform in the detection part play a role in balancing the weight, so as to move on the platform with a well-balanced weight, and then achieve precise adjustment without vibration; in addition, the platform is composed of three heads The two welding parts of the welding and detection part play the role of balancing the weight. At the same time, the individual welders move independently along a separate axis when the platform is stagnant, so as to accurately detect the welding position and perform welding.

1‧‧‧框架位置對準部 1‧‧‧Frame position alignment part

2‧‧‧焊接及檢測部 2‧‧‧Welding and Inspection Department

3‧‧‧夾持部 3‧‧‧Clamping part

4‧‧‧遮罩架部 4‧‧‧Mask frame

5‧‧‧框架 5‧‧‧Frame

6‧‧‧分割遮罩 6‧‧‧Segmentation mask

20‧‧‧台架 20‧‧‧Bench

21‧‧‧軌道 21‧‧‧Orbit

110‧‧‧氣浮部 110‧‧‧Air Flotation Department

111‧‧‧氣孔部 111‧‧‧Stomata

111a‧‧‧凸出型支撐架 111a‧‧‧Protruding support frame

111b‧‧‧氣孔 111b‧‧‧Stomata

112‧‧‧氣罩部 112‧‧‧Air shield

112a‧‧‧空氣腔室 112a‧‧‧Air Chamber

112b‧‧‧氣孔 112b‧‧‧Stomata

113‧‧‧支撐槽 113‧‧‧Support groove

120‧‧‧框架位置調節部 120‧‧‧Frame position adjustment part

121‧‧‧位置調節器 121‧‧‧Position regulator

122‧‧‧伺服馬達 122‧‧‧Servo motor

123‧‧‧接觸部 123‧‧‧Contact

130‧‧‧框架升降部 130‧‧‧Frame lifting part

131‧‧‧角落升降器 131‧‧‧Corner Lift

132‧‧‧長邊升降器 132‧‧‧Long side lifter

133‧‧‧連接桿 133‧‧‧Connecting rod

134‧‧‧彈簧 134‧‧‧Spring

135‧‧‧接觸支撐部 135‧‧‧Contact support

136‧‧‧接觸支撐部 136‧‧‧Contact support

201‧‧‧台架軌道 201‧‧‧Bench rail

210‧‧‧焊接器部 210‧‧‧Welder Department

211‧‧‧水平台車 211‧‧‧Water Platform Truck

212‧‧‧垂直台車 212‧‧‧Vertical Trolley

213‧‧‧垂直軌道 213‧‧‧Vertical Track

214‧‧‧焊接器 214‧‧‧welding machine

215‧‧‧焊接位置檢測儀 215‧‧‧Welding position detector

216‧‧‧焊接器軌道 216‧‧‧Welding Machine Track

220‧‧‧焊接器部 220‧‧‧Welder Department

221‧‧‧水平台車 221‧‧‧Water Platform Truck

222‧‧‧垂直台車 222‧‧‧Vertical Trolley

223‧‧‧垂直軌道 223‧‧‧Vertical Track

224‧‧‧焊接器 224‧‧‧welding machine

225‧‧‧焊接位置檢測儀 225‧‧‧Welding position detector

226‧‧‧焊接器軌道 226‧‧‧Welding Machine Track

230‧‧‧焊接檢測儀部 230‧‧‧Welding Detector Department

231‧‧‧水平台車 231‧‧‧Water Platform Truck

232‧‧‧垂直台車 232‧‧‧Vertical Trolley

233‧‧‧垂直軌道 233‧‧‧Vertical Track

234‧‧‧焊接品質檢測儀 234‧‧‧Welding quality tester

S100‧‧‧步驟 S100‧‧‧Step

S200‧‧‧步驟 S200‧‧‧Step

S300‧‧‧步驟 S300‧‧‧Step

S400‧‧‧步驟 S400‧‧‧Step

S500‧‧‧步驟 S500‧‧‧Step

S600‧‧‧步驟 S600‧‧‧Step

S700‧‧‧步驟 S700‧‧‧Step

圖1是示出本發明一實施例之單張力焊接裝置整體結構的立體圖。 Fig. 1 is a perspective view showing the overall structure of a single tension welding device according to an embodiment of the present invention.

圖2是示出本發明一實施例之具有區域被分割的氣孔的框架位置對準部的示例圖。 Fig. 2 is a diagram showing an example of a frame position aligning part having air holes in which regions are divided according to an embodiment of the present invention.

圖3是示出在本發明一實施例的框架位置對準部安置的個別氣罩的立體圖。 Fig. 3 is a perspective view showing individual gas hoods arranged in a frame position alignment part of an embodiment of the present invention.

圖4是示出在本發明一實施例的框架位置對準部安置的個別氣罩的後視圖。 Fig. 4 is a rear view showing individual gas hoods arranged in a frame position alignment part of an embodiment of the present invention.

圖5是示出本發明一實施例之安置有單獨的氣罩部的框架位置對準部的示例圖。 Fig. 5 is a diagram showing an example of a frame position aligning part provided with a separate hood part according to an embodiment of the present invention.

圖6是示出本發明一實施例之框架位置對準部裝載框架並對準框架的狀態的示例圖。 6 is a diagram showing an example of a state in which a frame is loaded and aligned with a frame by a frame position alignment part according to an embodiment of the present invention.

圖7是示出本發明一實施例之在台架設置的三頭方式焊接及檢測部的示例圖。 Fig. 7 is a diagram showing an example of a three-head welding and inspection part installed on a stand according to an embodiment of the present invention.

圖8是示出根據本發明一實施例在台架設置三頭方式焊接及檢測部的個別焊接裝置與檢測裝置結構的示例圖。 FIG. 8 is a diagram showing an example of the structure of an individual welding device and a detection device in which a three-head welding and detection section is provided on a stand according to an embodiment of the present invention.

圖9是根據本發明一實施例之利用單張力焊接裝置的AMOLED移動式遮罩框架元件的製造流程圖。 FIG. 9 is a manufacturing flow chart of an AMOLED movable mask frame element using a single tension welding device according to an embodiment of the present invention.

以下,在參照附圖如下詳細說明本發明的實施例的結構與其作用。另外,在說明本發明時,若判斷對於相關的公知功能或者結構的具體說明不必要地使本發明的要點不清楚的情況下,將省略其詳細說明。 Hereinafter, the structure and function of the embodiment of the present invention will be described in detail below with reference to the drawings. In addition, when describing the present invention, if it is judged that the detailed description of the related well-known function or structure unnecessarily makes the main point of the present invention unclear, the detailed description will be omitted.

圖1是示出本發明一實施例之單張力焊接裝置整體結構的立體圖。 Fig. 1 is a perspective view showing the overall structure of a single tension welding device according to an embodiment of the present invention.

如圖所示,本發明的製造遮罩框架元件的單張力焊接裝置包括:框架位置對準部1,以利用氣浮部110而被氣浮的狀態安置已裝載的框架5,進而利用框架位置調節部120對準基準定心位置提供對抗力(施加張力);三頭方式焊接及檢測部2,在精確安置的框架上部以單張力方式用夾持部3夾持在裝載於遮罩架部4中的分割遮罩6中選出的分割遮罩來裝載於焊接位置,之後在降低振動的狀態下對準焊接位置之後進行焊接,並檢測焊接的焊接品質。 As shown in the figure, the single-tension welding device for manufacturing mask frame elements of the present invention includes: a frame position aligning part 1 for installing the loaded frame 5 in a state of being air-floated by the air-floating part 110, and then using the frame The position adjustment part 120 is aligned with the reference centering position to provide an opposing force (tension is applied); the three-head welding and detection part 2 is clamped on the cover by the clamping part 3 in a single tension method on the upper part of the precisely placed frame The divided masks selected from the divided masks 6 in the frame portion 4 are mounted on the welding position, and after the welding position is aligned with the vibration reduced, the welding is performed, and the welding quality of the welding is inspected.

具有上述框架位置對準部1的單張力焊接裝置,在製造AMOLED移動式遮罩框架元件時,在對框架5進行氣浮的狀態下由各個框架位置調節部120精確地調節位置,該框架位置調節部120分別與框架的短邊和長邊相互面對面設置,之後由氣浮部110解除氣浮狀態,進而在定心位置基準5μm範圍內精確地調節框架。此時,框架位置對準部具有在對框架進行定心之後將框架與攝像機軸一體化的對齊功能,同時也是兼顧用於在對齊之後對遮罩提供張力後進行焊接時補償框架的變形的對抗力作用的裝置。 The single-tension welding device with the frame position alignment part 1 described above is used to accurately adjust the position of each frame position adjustment part 120 in the state of air-floating the frame 5 when manufacturing the AMOLED movable mask frame element. The position adjusting part 120 is arranged to face each other with the short side and the long side of the frame, and then the air floating part 110 is used to release the air floating state, and then the frame is accurately adjusted within the range of the centering position reference 5 μm. At this time, the frame position alignment part has an alignment function that integrates the frame and the camera axis after the frame is centered, and it also takes into account the resistance to the deformation of the frame when the mask is welded after the alignment is provided with tension. Force acting device.

另外,氣浮部110由對框架5進行氣浮時獨立分割對應於框架短邊和長邊的區域的氣浮部110構成,因此均勻且獨立噴射的空氣穩定地供應於框架下部的短邊和長邊的下部面,以穩定地消除氣浮,若消除氣浮,則在被氣浮的狀態下精確對準位置的框架無衝擊地安置在平台,以實現精確的定心對準。 In addition, the air-floating portion 110 is composed of the air-floating portion 110 that independently divides the regions corresponding to the short sides and the long sides of the frame when the frame 5 is air-floated, so uniform and independent spray air is stably supplied to the short sides and The lower surface of the long side can stably eliminate air flotation. If air flotation is eliminated, the frame accurately aligned in the air-floated state is placed on the platform without impact to achieve precise centering alignment.

另外,具有三頭方式焊接及檢測部2的單張力焊接裝置,利用夾持部3的夾持器以單張力方式夾持裝載於遮罩架部4的分割遮罩6,之後裝載到 框架5上部來對準焊接位置,之後利用懸掛在台架20的兩個焊接器部210、220焊接框架與分割遮罩之間,之後利用位於中央的焊接檢測儀部230檢測焊接品質,此時懸掛在台架的兩個焊接器部210、220起到平衡重量的作用,之後在均衡地調整台架重量平衡的狀態下,只有焊接檢測儀部230在台架上移動來進行檢測,進而不會發生急劇的重量變動,由此在抑制振動發生的狀態下,實現精確的檢測。 In addition, a single-tension welding device with a three-head welding and detection unit 2 uses the clamp of the clamping unit 3 to clamp the divided mask 6 loaded on the mask frame portion 4 in a single-tension mode, and then load it into The upper part of the frame 5 is aligned with the welding position, and then the two welder parts 210 and 220 suspended on the gantry 20 are used to weld the frame and the split mask, and then the welding inspection part 230 located in the center is used to detect the welding quality. The two welder parts 210 and 220 suspended on the gantry play a role in balancing the weight. Then, while the weight balance of the gantry is adjusted in a balanced manner, only the welding tester part 230 moves on the gantry for inspection, and no Sudden weight changes will occur, thereby achieving accurate detection while suppressing vibration.

另外,具有三頭方式焊接及檢測部2的單張力焊接裝置,在製造AMOLED移動遮罩框架元件時,在台架20由三頭方式構成的兩個焊接器部210、220不僅起到平衡重量的作用,在焊接時停滯台架的狀態下使焊接器在以與台架的移動方向相同軸方向構成的焊接軌道獨立精確地移動,進而在未發生於台架移動時出現振動的狀態下實現焊接位置的精確檢測和焊接。 In addition, the single-tension welding device with three-head welding and detection unit 2 is used to make AMOLED movable mask frame components. The two welder parts 210 and 220 composed of three-heads on the stand 20 are not only balanced The weight is used to make the welder move independently and accurately in the welding track formed in the same axial direction as the moving direction of the gantry while the gantry is stagnant during welding, so that vibration does not occur when the gantry moves. Realize precise detection and welding of welding position.

夾持部3是遮罩框架元件裝置通常使用的分割遮罩的夾持及運送工具,設置一對所述夾持部3,以分別沿著形成在單張力焊接裝置的兩個夾持器運送軌道移動;各個側面的夾持部用各個夾持器夾持裝載於遮罩架部的任意的分割遮罩的兩側端,運送於已對準位置的框架上的焊接位置。另外,在夾持部具有液壓或者氣壓施加工具以及伺服馬達,該液壓或者氣壓施加工具提供夾持分割遮罩的夾持力,該伺服馬達使夾持器前進和後退以施加精確的張力。對於夾持部的詳細的結構是在該領域公知的結構,因此省略其詳細說明。 The clamping part 3 is a tool for clamping and transporting the divided mask usually used in the mask frame element device. A pair of the clamping parts 3 are provided to respectively follow the two clamps formed in the single-tension welding device. The conveying rail moves; the clamping parts on each side clamp the two side ends of any divided mask loaded on the mask frame part with respective clampers, and convey it to the welding position on the aligned frame. In addition, the clamping part is provided with a hydraulic or pneumatic application tool and a servo motor that provides a clamping force for clamping the split mask, and the servo motor advances and retreats the clamp to apply precise tension. The detailed structure of the clamping part is a structure well-known in this field, so the detailed description is abbreviate|omitted.

所述遮罩架部是裝載排列成多個的分割遮罩,進而能夠縮短在製作遮罩框架元件時所需的製程時間的工具,以上下多層段結構構成每層裝載有多個分割遮罩的載體,並依次供應該載體。更詳細地說,遮罩架部的結構並不是本發明的核心結構,而是具備公知的一般遮罩架部的結構,因此省略其詳細說明。 The mask frame part is a tool for loading multiple divided masks arranged in multiples, which can shorten the process time required when manufacturing mask frame elements. The upper and lower multi-layer structure is composed of multiple divided masks on each layer. And supply the carrier in turn. In more detail, the structure of the mask frame is not the core structure of the present invention, but is a structure provided with a well-known general mask frame, so the detailed description is omitted.

以下,詳細說明本發明的框架位置對準部1與三頭方式焊接及檢測部2。 Hereinafter, the frame alignment part 1 and the three-head welding and detection part 2 of the present invention will be described in detail.

圖2是示出本發明一實施例之具有區域被分割的氣孔的框架位置對準部的示例圖;圖3是示出在本發明一實施例的框架位置對準部安置的個別氣罩的立體圖;圖4是示出在本發明一實施例的框架位置對準部安置的個別氣罩的後視圖;圖5是示出本發明一實施例之安置有單獨的氣罩部的框架位置對 準部的示例圖;圖6是示出本發明一實施例之框架位置對準部裝載框架並對準框架的狀態的示例圖。 2 is a diagram showing an example of a frame position aligning part having air holes in which regions are divided according to an embodiment of the present invention; FIG. 3 is a diagram showing an individual gas hood placed in the frame position aligning part of an embodiment of the present invention 3D perspective view; Figure 4 is a rear view showing the individual gas hoods installed in the frame position alignment portion of an embodiment of the present invention; Figure 5 is a diagram showing the position of the frame in which the individual gas hoods are installed in an embodiment of the present invention Fig. 6 is an exemplary diagram showing a state in which the frame is loaded and aligned with the frame by the frame position alignment part of an embodiment of the present invention.

本發明的框架位置對準部1大致包括:將裝載的框架提升至預定高度後下降的氣浮部110;按照基準定心精確調節氣浮的框架的位置的框架位置調節部120;若將運送的框架放置在框架位置對準部1的上部,並在框架焊接分割遮罩後進行升降的框架升降部130。 The frame position alignment part 1 of the present invention roughly includes: an air-floating part 110 that lowers the loaded frame to a predetermined height; a frame position adjusting part 120 that accurately adjusts the position of the air-floating frame according to a reference; The frame is placed on the upper part of the frame position alignment part 1, and the frame lifting part 130 is lifted and lowered after the frame is welded and divided.

首先,氣浮部110由多個氣孔部111與設置在氣孔部上部的多個氣罩部112構成。若框架升降部130裝載框架後下降,則氣浮部110噴射空氣使框架保持均衡漂浮的狀態。在如此保持漂浮的狀態下,若框架位置調節部120精確的對準定心位置,則逐漸解除對被氣浮的框架提供空氣,則保持對準的狀態來安置在氣罩部112的上部面。 First, the air floating part 110 is composed of a plurality of air hole parts 111 and a plurality of air cover parts 112 provided on the upper part of the air hole part. If the frame lifting part 130 is lowered after loading the frame, the air float part 110 sprays air to keep the frame in a balanced floating state. In such a floating state, if the frame position adjusting portion 120 is accurately aligned with the centering position, the air supply to the air-floated frame is gradually released, and the aligned state is maintained and placed on the upper surface of the air cover portion 112 .

氣孔部111通過與未示出的空氣壓縮器連接的空氣壓縮線來接收壓縮空氣後噴射該壓縮空氣,尤其是氣孔部111由凸出型支撐架111a與形成在該凸出型支撐架的多個氣孔111b構成,放置在氣孔部111上部的氣罩部112的下部形成的空氣腔室112a插入於凸出型支撐架111a而被支撐的狀態下,空氣通過氣孔被供應於空氣腔室內部空間部。 The air hole 111 receives compressed air through an air compression line connected to an unshown air compressor, and then injects the compressed air. In particular, the air hole 111 is composed of a protruding support frame 111a and a plurality of protruding support frames. Two air holes 111b are formed, and the air chamber 112a formed at the lower part of the hood 112 placed on the upper part of the air hole 111 is inserted into the protruding support frame 111a to be supported, and air is supplied to the inner space of the air chamber through the air holes unit.

另外,氣孔部111為多個且獨立的結構,對個別框架供應壓縮空氣。即,由短邊和長邊構成的單一直角四邊形結構的框架的各個邊個別對應氣孔部來供應壓縮空氣。較佳地為,框架的每個短邊具有一個氣孔部,而框架的每個長邊對應兩個氣孔部以供應壓縮空氣。 In addition, the air hole 111 has a plurality of independent structures and supplies compressed air to individual frames. That is, each side of the frame of a single right-angled quadrilateral structure composed of short sides and long sides corresponds to the air hole portion to supply compressed air. Preferably, each short side of the frame has one air hole, and each long side of the frame corresponds to two air holes to supply compressed air.

如上所述,具備空氣噴射區域被獨立分割的多個氣孔部的理由如下:若由分為四塊的結構構成單一氣孔部,則無法使壓縮空氣均勻地供應於框架下部,若偏重於某一側面供應壓縮空氣,則無法實現穩定且均勻的氣浮,進而框架向一側方向傾斜很難提供精確的定心對準。 As mentioned above, the reason for having a plurality of air holes in which the air injection area is divided independently is as follows: If a single air hole is formed of a structure divided into four parts, the compressed air cannot be uniformly supplied to the lower part of the frame. If compressed air is supplied from the side, stable and uniform air floatation cannot be achieved, and it is difficult to provide precise centering and alignment when the frame is inclined to one side.

氣罩部112上部被加工成扁平狀,而在下部面以內側面方向形成空氣腔室112a,該空氣腔室112a是能夠插入凸出型支撐架111a的槽。空氣腔室112a是使通過向內側空間插入的凸出型支撐架111a的氣孔111b供應的空氣通過貫通空氣腔室112a上部的多個氣孔112b以均勻的壓力噴射於框架5下部面。另外,氣罩部112在長邊具備兩個,從分別與位於該長邊下部的凸出型支 撐架111a的氣孔111b接收均勻的壓縮空氣,以使空氣均勻地噴射於位於長邊的框架5的下部面。 The upper part of the hood portion 112 is processed into a flat shape, and an air chamber 112a is formed in the inner side direction of the lower surface, and the air chamber 112a is a groove into which the protruding support frame 111a can be inserted. In the air chamber 112a, air supplied through the air holes 111b of the protruding support frame 111a inserted into the inner space is sprayed on the lower surface of the frame 5 at a uniform pressure through a plurality of air holes 112b penetrating the upper part of the air chamber 112a. In addition, the hood 112 is provided with two on the long side. The air holes 111b of the support 111a receive uniform compressed air so that the air is evenly sprayed on the lower surface of the frame 5 located on the long side.

如上所述,構成在下部具備空氣腔室112a的多個氣罩部112和在長邊側氣罩部下部具備兩個空氣腔室的理由如下:使接收的空氣均勻地填充於空氣腔室內部之後以均勻的壓力通過氣孔供應於框架下部,進而以均勻的高度氣浮框架,以實現精確的定心。 As described above, the reason for configuring the plurality of air hood portions 112 with air chambers 112a in the lower part and the two air chambers in the lower part of the long side air hood is as follows: the received air is uniformly filled in the air chamber. After that, it is supplied to the lower part of the frame with uniform pressure through the air holes, and then the frame is air-floated with a uniform height to achieve precise centering.

另一方面,長邊側氣罩部外側形成支撐槽113,由框架升降部130支撐框架下部面來上升或者下降。 On the other hand, a support groove 113 is formed on the outer side of the hood portion on the long side, and the lower surface of the frame is supported by the frame lifting portion 130 to rise or fall.

框架位置調節部120在短邊與長邊側構成位置調節器121,該位置調節器121由伺服馬達122與接觸部123構成。根據一實施例,較佳地為在每個短邊各形成兩個以及每個長邊各形成三個位置調節器121。若如此構成,則位於相互面對面的短邊與短邊以及長邊與長邊而相互面對面的各個位置調節器精確地前進和後退來進行調整,以在由接觸部123接觸氣浮的框架的各個側面的狀態下定位定心位置。如此的位置調節器以定心位置基準在5μm範圍內對準框架的定心位置。 The frame position adjusting portion 120 constitutes a position adjuster 121 on the short side and the long side, and the position adjuster 121 is composed of a servo motor 122 and a contact portion 123. According to an embodiment, it is preferable to form two position adjusters 121 on each short side and three position adjusters 121 on each long side. With this configuration, the position adjusters located on the short and short sides facing each other and the long and long sides facing each other accurately advance and retreat to adjust so that the contact portions 123 contact each of the air-floating frame. Position the centering position in the side state. Such a position adjuster is aligned with the centering position of the frame within 5 μm based on the centering position reference.

在現有技術中,為了對框架定心而使用氣缸,但是氣缸無法向精確的位置前進以及後退,很難精確地調整框架的位置,進而無法以μm的單位水準精確地將遮罩定位在框架而無法焊接,因此存在通過由此製造出遮罩框架元件製造的AMOLED面板品質降低的問題。但是利用這種現有技術的遮罩框架元件製造出的移動用AMOLED面板是低解析度畫面,雖然微小的差異對產品整體未造成很大的影響,但是像本發明一樣高解析度移動用AMOLED中若使用諸如現有技術的精確的遮罩框架元件,則很難滿足高品質的產量。 In the prior art, an air cylinder is used to center the frame, but the air cylinder cannot advance and retreat to a precise position, and it is difficult to accurately adjust the position of the frame, and thus it is impossible to accurately position the mask on the frame in a μm unit level. It cannot be soldered, so there is a problem that the quality of the AMOLED panel manufactured by manufacturing the mask frame element is reduced. However, the mobile AMOLED panel manufactured by using the mask frame element of the prior art has a low-resolution screen. Although the slight difference does not have a significant impact on the overall product, the high-resolution mobile AMOLED like the present invention If an accurate mask frame element such as the prior art is used, it is difficult to meet high-quality output.

但是,像本發明一樣,利用由伺服馬達122與接觸部123構成而驅動的位置調節器121調節被氣浮的框架,則能夠製造精確的遮罩框架元件,因此利用該遮罩框架元件的移動用AMOLED面板生產高品質的面板的同時還提高批量生產產量。 However, like the present invention, the position regulator 121 driven by the servo motor 122 and the contact portion 123 is used to adjust the air-floated frame, so that accurate mask frame elements can be manufactured, and therefore, the movement of the mask frame elements can be used. Use AMOLED panels to produce high-quality panels while also increasing mass production output.

伺服馬達122使伺服馬達軸精確地旋轉的同時以μm單位水準移動與框架外側接觸的接觸部123的前進和後退。因此,不會因接觸部而發生框架的過度移動。若產生過大的力,則不強制夾持,而是氣浮的框架過度移動而 很難定位,但是本發明使用伺服馬達並且相互面對面的兩側短的位置調節器精確地前進以及後退,因此能夠精確的定心對齊。 The servo motor 122 accurately rotates the servo motor shaft while horizontally moving the contact portion 123 in contact with the outside of the frame forward and backward in a μm unit. Therefore, the frame does not move excessively due to the contact portion. If excessive force is generated, it is not forced to clamp, but the air-floating frame moves excessively. It is difficult to position, but the present invention uses a servo motor and the short position adjusters on both sides facing each other accurately advance and retreat, and therefore can be accurately centered and aligned.

在定心對準框架時,與框架的短邊或者長邊面對面設置的各個位置調節器121,在某一側的接觸部123接觸於框架的狀態下,該一側前進來調整框架位置,之後位於該位置調整程度,對應的另一側位置調節器接觸於框架來校正位置,進而調整定心以進行所述對準。 When centering and aligning the frame, each position adjuster 121 arranged face to face with the short side or the long side of the frame, when the contact portion 123 on one side is in contact with the frame, the side moves forward to adjust the frame position, and then At this position adjustment level, the corresponding position adjuster on the other side contacts the frame to correct the position, and then adjust the centering to perform the alignment.

其他一方法,相互面對面的位置調節器121同時接觸於框架,若其中某一側前進,則控制對面側的位置調節器後退的同時調整框架的位置,按照定心來進行該對準。 In another method, the position adjusters 121 facing each other are in contact with the frame at the same time. If one side moves forward, the position adjuster on the opposite side is controlled to move backward while adjusting the position of the frame to perform the alignment according to centering.

同樣地,在對準短邊框架時,位於長邊的位置調節器121可通過上述的兩種方法調節定心,也可在短邊的位置對準結束之後進行調節上述短邊框架。 Similarly, when aligning the short-side frame, the position adjuster 121 on the long-side can adjust the centering by the above two methods, or adjust the short-side frame after the alignment of the short-side position is completed.

在上述中接觸於短邊的位置調節器的對準是對準框架的長邊框架,而接觸於長邊的位置調節器的對準則對準框架的短邊方向。 In the above, the alignment of the position adjuster in contact with the short side is aligned with the long side frame of the frame, and the alignment criterion of the position adjuster in contact with the long side is aligned with the short side direction of the frame.

另外,在本發明中在對準框架短邊或者長邊的位置時,不指定應該首先對準哪一方向的順序。根據需要,選擇性地執行首先對準某一方向或者同時對準。另外,接觸於各個短邊或者長邊的位置調節器121首先對準一側或者同時接觸來執行對準也是選擇調整的,並不指定順序。 In addition, in the present invention, when aligning the positions of the short side or the long side of the frame, the order in which direction should be aligned first is not specified. According to needs, the first alignment in a certain direction or simultaneous alignment is selectively performed. In addition, the position adjuster 121 contacting each short side or the long side first aligns one side or simultaneously contacts to perform alignment is also optional adjustment, and the order is not specified.

框架升降部130在將運送的框架放在框架位置對準部1的上部之後在框架焊接分割遮罩,之後框架升降部130起到升降地作用。 The frame lifting part 130 welds the divided mask to the frame after placing the conveyed frame on the upper part of the frame position alignment part 1, and then the frame lifting part 130 plays a role of lifting.

框架升降部130按照分割為四個部分的氣罩部112結構由四個角落升降器131和四個框架長邊升降器132構成,位於一側長邊側的長邊升降器與一個角落升降器通過連接桿133連接來配成對,並且在連動的同時進行升降。以垂直方向升降角落升降器與長邊升降器的驅動源是利用液壓或者氣壓方式或者伺服馬達的升降方式進行升降。 The frame lifter 130 is composed of four corner lifters 131 and four frame long-side lifters 132 according to the structure of the air hood 112 divided into four parts. The long-side lifter and one corner lifter are located on one long side. They are connected by connecting rods 133 to form a pair, and move up and down at the same time. The driving source for vertical lifting of the corner lifter and the long-side lifter is hydraulic or pneumatic or servo motor lifting.

另外,角落升降器以及長邊升降器以垂直方向構成彈簧134來提供緩衝力。 In addition, the corner lifter and the long-side lifter form a spring 134 in a vertical direction to provide cushioning force.

另外,根據分割成四個部分的氣罩部112的結構特性,長邊升降器與角落升降器的上部的接觸支撐部135的設置位置(在位於角落部的角落升降器的上部的角落的接觸支撐部135的位置)設置在相比於位於上部的框架以 對角線方向進一步向內側的位置,同樣地位於長邊的長邊升降器的上部的接觸支撐部136的位置也是設置在相比於位於上部的框架進一步向內側的位置。 In addition, according to the structural characteristics of the hood 112 divided into four parts, the position of the contact support part 135 between the long side lifter and the upper part of the corner lifter (the contact at the upper corner of the corner lifter located at the corner) The position of the support portion 135) is arranged at a higher level than the frame located at the upper part The position further inward in the diagonal direction is similarly located at the position of the contact support portion 136 on the upper part of the long side lifter on the long side, which is also provided at a position further inward than the upper frame.

與現有技術不同,通過上述結構,從內側支撐角落與長邊,進而在重量重心穩定的狀態下上升或者下降框架的下部。 Different from the prior art, the above structure supports the corners and long sides from the inside, and then raises or lowers the lower part of the frame in a state where the weight is stable.

圖7是示出本發明一實施例在台架設置的三頭方式焊接及檢測部的示例圖;圖8是示出根據本發明一實施例在台架設置三頭方式焊接及檢測部的個別焊接裝置與檢測裝置結構的示例圖。 Figure 7 is a diagram showing an example of a three-head welding and inspection part set on a stand according to an embodiment of the present invention; Figure 8 is a diagram showing an example of a three-head welding and inspection part set on the stand according to an embodiment of the present invention An example diagram of the structure of the welding device and the inspection device.

本發明的三頭方式焊接及檢測部2包括:懸掛在台架軌道201並且以水平方向移動的兩個焊接器部210、220;設置在焊接器部之間的焊接檢測儀部230,其中,台架軌道201形成在台架20,台架20沿著並排設置在單張力焊接裝置的兩個軌道21。 The three-head welding and inspection part 2 of the present invention includes: two welder parts 210 and 220 that are suspended on the platform rail 201 and move in a horizontal direction; and a welding detector part 230 arranged between the welder parts, wherein, The gantry rail 201 is formed on the gantry 20, and the gantry 20 is arranged side by side along the two rails 21 of the single tension welding device.

所述兩個焊接器部210、220與焊接檢測儀部230分別具有水平台車211、221、231以及垂直台車212、222、232,水平台車211、221、231沿著形成在台架20的台架軌道201以水平方向移動,垂直台車212、222、232沿著形成在各個水平台車211、221、231的垂直軌道213、223、233以上下方向移動。 The two welder parts 210, 220 and the welding detector part 230 respectively have a water platform cart 211, 221, 231 and a vertical platform cart 212, 222, 232, and the water platform cart 211, 221, 231 runs along the platform formed on the platform 20 The rack rail 201 moves in the horizontal direction, and the vertical trolleys 212, 222, and 232 move in the up and down direction along the vertical rails 213, 223, and 233 formed on the respective water platform vehicles 211, 221, and 231.

另外,焊接器部210、220的垂直台車212、222分別設置有一對焊接器214、224與焊接位置檢測儀215、225,在焊接檢測儀部230的垂直台車232設置有焊接品質檢測儀234。此時,設置在焊接器部210、220中的某一側的焊接器及焊接位置檢測儀與跨過焊接檢測儀部230而相鄰的另一側焊接器部的焊接器及焊接位置檢測儀對稱設置,以調整重量平衡。 In addition, the vertical carts 212 and 222 of the welder parts 210 and 220 are respectively provided with a pair of welders 214 and 224 and welding position detectors 215 and 225, and the vertical cart 232 of the welding detector part 230 is provided with a welding quality detector 234. At this time, the welder and welding position detector installed on one side of the welder parts 210 and 220 and the welder and welding position detector on the other side adjacent to the welding detector part 230 Set symmetrically to adjust the weight balance.

另外,焊接器214、224在焊接時台架處於停滯的狀態,在這一狀態下沿著焊接器軌道216、226移動的同時能夠進行精確的焊接,焊接器軌道216、226由與台架的移動方向相同的軸方向構成。 In addition, the welders 214 and 224 are in a stagnant state during welding. In this state, they can be accurately welded while moving along the welder rails 216 and 226. The welder rails 216 and 226 are connected to the stand. Consisting of axis directions with the same moving direction.

通過上述結構,具有三頭方式焊接及檢測部2的單張力焊接裝置利用夾持部3的夾持器以單張力方式夾持裝載於遮罩架部4的分割遮罩6,之後裝載到框架5上部,之後對準焊接位置,之後利用兩個焊接器部210、220確認框架與分割遮罩之間待焊接的位置之後進行焊接,之後對於結束焊接的框架與分割遮罩之間的焊接部位利用位於兩個焊接器部210、220之間的中央的焊接檢測儀部230檢測焊接品質,其中,所述兩個焊接器部210、220懸掛在台架20,台架20沿著軌道21以框架的長邊方向移動。 With the above structure, the single-tension welding device with the three-head welding and detection unit 2 uses the clamp of the clamping unit 3 to clamp the divided mask 6 loaded on the mask frame portion 4 in a single-tension manner, and then load it Go to the upper part of the frame 5, then align the welding position, and then use the two welder parts 210, 220 to confirm the position to be welded between the frame and the split mask, and then perform the welding. The welding part uses the welding detector 230 located in the center between the two welder parts 210 and 220 to detect the welding quality, wherein the two welder parts 210 and 220 are suspended on the stand 20, and the stand 20 is along the rail 21 Move in the direction of the long side of the frame.

此時,懸掛在台架的兩個焊接器部210、220位於兩側端並且在不移動的停滯的狀態下起到平衡重量的作用。如此,在通過兩個焊接器部210、220均衡地調整台架重量平衡的狀態下只有焊接檢測儀部230在台架上水平移動,以檢測焊接於框架的分割遮罩的焊接品質,進而不會發生由移動引起的重量變動,因此在抑制振動發生的狀態佳實現對焊接品質精確的檢測。 At this time, the two welder parts 210 and 220 suspended on the gantry are located at both ends and play a role in balancing the weight in a stagnant state without moving. In this way, when the weight balance of the gantry is adjusted in a balanced manner by the two welder parts 210 and 220, only the welding detector part 230 moves horizontally on the gantry to detect the welding quality of the divided masks welded to the frame. There will be weight changes caused by movement, so the state of suppressing vibration is good to achieve accurate detection of welding quality.

另外,具有三頭方式焊接及檢測部2的單張力焊接裝置,在製造AMOLED移動式遮罩框架元件時在台架20由三頭方式構成的兩個焊接器部210、220起到平衡重量的作用,不僅如此在焊接時在台架停滯的狀態下用焊接位置檢測儀215、225確認位於框架的分割遮罩的位置,在確認焊接位置之後由個別焊接器部210、220的焊接器214、224沿著焊接器軌道216、226移動的同時能夠精確的焊接,其中焊接器軌道216、226以與台架的移動方向相同的軸方向來構成。因此,在未發生於台架沿著焊接部位移動時出現振動的狀態下可進行精確的焊接。 In addition, a single-tension welding device with three-head welding and inspection unit 2 is used to balance the weight of the two welder parts 210 and 220 composed of three-heads on the stage 20 when manufacturing AMOLED movable mask frame components. Not only that, when the stage is stagnant during welding, the welding position detectors 215 and 225 are used to confirm the position of the split mask in the frame. After the welding position is confirmed, the welder 214 of the individual welder parts 210 and 220 , 224 can be accurately welded while moving along the welder rails 216, 226, wherein the welder rails 216, 226 are formed in the same axial direction as the moving direction of the platform. Therefore, accurate welding can be performed without vibration occurring when the platform moves along the welding part.

圖9是根據本發明一實施例之利用單張力焊接裝置的AMOLED移動式遮罩框架元件的製造流程圖。 FIG. 9 is a manufacturing flow chart of an AMOLED movable mask frame element using a single tension welding device according to an embodiment of the present invention.

根據具有在圖1至圖7揭露的結構的本發明的單張力焊接裝置的遮罩框架元件製造方法具有如下的製造過程。 The manufacturing method of the mask frame element according to the single tension welding device of the present invention having the structure disclosed in FIGS. 1 to 7 has the following manufacturing process.

步驟S100,使框架升降部130上升而裝載運送的框架之後下降,之後安置在框架位置對準部1的氣罩部112。 In step S100, the frame lifting part 130 is raised to load the conveyed frame and then descends, and then the frame is placed on the gas cover 112 of the frame position alignment part 1.

然後,步驟S200,被分割成四個部分的氣罩部112均勻地噴射從氣浮部110供應的氣體,以穩定地氣浮框架。 Then, in step S200, the gas hood portion 112 divided into four parts uniformly sprays the gas supplied from the air floatation portion 110 to stably float the frame.

然後,步驟S300,使框架位置對準部1的框架位置調節部120接觸的框架前進和後退,以按照基準定心對準氣浮狀態的框架。 Then, in step S300, the frame contacted by the frame position adjusting part 120 of the frame position alignment part 1 is moved forward and backward to align the frame in the air-floating state according to the reference.

然後,步驟S400,若框架的定心對準結束,則夾持部夾持分割遮罩之後移動至框架上的焊接位置,之後以施加張力的狀態定位分割遮罩的位置。 Then, in step S400, if the centering of the frame is finished, the clamping portion clamps the split mask and moves to the welding position on the frame, and then locates the position of the split mask while applying tension.

然後,步驟S500,三頭方式焊接及檢測部2移動來檢查運送的分割遮罩是否對準框架的焊接位置後進行焊接,其中,三頭方式焊接及檢測部2由設置在台架的兩個焊接器部210、220與焊接品質檢測儀234構成。 Then, in step S500, the three-head welding and detection unit 2 moves to check whether the transported split mask is aligned with the welding position of the frame before welding. Among them, the three-head welding and detection unit 2 consists of two The welder parts 210 and 220 and the welding quality detector 234 are constituted.

然後,步驟S600,焊接結束之後,焊接品質檢測儀234在調整重量平衡的狀態下檢測焊接品質。 Then, in step S600, after the welding is finished, the welding quality detector 234 detects the welding quality while adjusting the weight balance.

步驟S700,反復執行運送並焊接所述分割遮罩後檢測焊接品質的步驟,若完成遮罩框架元件的製造,則由框架升降部130上升遮罩框架元件。 In step S700, the step of inspecting the welding quality after transporting and welding the divided mask is repeated. If the manufacturing of the mask frame element is completed, the frame lifting part 130 raises the mask frame element.

還具有以下步驟:在為了製作而運送的框架的下降或者焊接已結束的遮罩框架元件上升時,所述框架升降部130以同時支撐框架的下部面角落與長邊的狀態下下降或者上升。 It also has the following step: when the frame to be transported is lowered or the mask frame element whose welding has been completed is raised, the frame lifting portion 130 descends or rises while supporting the lower corners and long sides of the frame at the same time.

具體地說,按照被四個部分分割的氣罩部112結構,所述框架升降部130由四個角落升降器131與四個框架的長邊升降器132構成,位於一側長邊側的一個長邊升降器與一個角落升降器通過連接桿133連接來配成對,進而該個長邊升降器與一個角落升降器連動的同時進行升降。 Specifically, according to the structure of the hood 112 divided by four parts, the frame lifting part 130 is composed of four corner lifters 131 and four long side lifters 132 of the four frames. The long-side lifter and a corner lifter are connected by a connecting rod 133 to form a pair, and then the long-side lifter is linked with a corner lifter for lifting at the same time.

以垂直方向升降角落升降器與長邊升降器的驅動源可通過液壓或者氣壓方式或者利用伺服馬達的升降方式執行升降。 The drive source for vertical lifting of the corner lifter and the long-side lifter can be carried out by hydraulic or pneumatic means or by means of a servo motor.

另外,角落升降器與長邊升降塊以垂直方向構成彈簧134,進而可提供緩衝力。 In addition, the corner lifter and the long-side lift block form a spring 134 in a vertical direction, thereby providing a cushioning force.

另外,根據分割成四個部分的氣罩部112的結構特性,長邊升降器與角落升降器上部的接觸支撐部135的設置位置(在位於角落部的角落升降器上部的角落的接觸支撐部135的位置)設置在相比於位於上部的框架以對角線方向進一步向內側的位置,同樣地位於長邊的長邊升降器上部的接觸支撐部136的位置也是設置在相比於位於上部的框架進一步向內側的位置。 In addition, according to the structural characteristics of the hood 112 divided into four parts, the position of the long side lifter and the upper contact support part 135 of the corner lifter (at the corner contact support part at the upper corner of the corner lifter 135) is set at a position further inward in the diagonal direction than the upper frame. Similarly, the position of the contact support portion 136 on the upper part of the long side lifter on the long side is also set at the position compared to the upper part. The frame is positioned further to the inside.

與現有技術不同,通過上述結構,從內側支撐角落與長邊,進而在重量重心穩定的狀態下上升或者下降框架的下部。 Different from the prior art, the above structure supports the corners and long sides from the inside, and then raises or lowers the lower part of the frame in a state where the weight is stable.

還具有以下步驟:框架位置調節部120分別對應於短邊與長邊側設置由伺服馬達122與接觸部123構成而驅動的位置調節器121,在使接觸部123接觸於框架的狀態下運作伺服馬達122細微地調節前進和後退。 It also has the following steps: the frame position adjusting portion 120 is provided with a position adjuster 121 driven by a servo motor 122 and a contact portion 123 corresponding to the short side and the long side, respectively, and operates the servo when the contact portion 123 is in contact with the frame The motor 122 finely adjusts forward and backward.

根據一實施例,較佳地為在每個短邊和每個長邊各形成兩個以及三個位置調節器121。若如此構成,則位於相互面對面的短邊與短邊以及長邊與長邊而相互面對面的各個位置調節器精確地前進和後退來進行調整,以在由接觸部123接觸氣浮的框架的各個側面的狀態下定位定心位置。如此的位置調節器以定心位置基準在5μm範圍內對準框架的定心位置。 According to an embodiment, it is preferable to form two and three position adjusters 121 on each short side and each long side. With this configuration, the position adjusters located on the short and short sides facing each other and the long and long sides facing each other accurately advance and retreat to adjust so that the contact portions 123 contact each of the air-floating frame. Position the centering position in the side state. Such a position adjuster is aligned with the centering position of the frame within 5 μm based on the centering position reference.

包括以下步驟,在調節所述框架位置時,在長邊與短邊與框架接觸的位置調節器同時移動,進行對準作業或者個別移動進行對準。 The method includes the following steps. When adjusting the position of the frame, the position adjusters that contact the frame on the long side and the short side move simultaneously to perform alignment operations or move individually for alignment.

在定心對準框架時,與框架的短邊或者長邊面對面設置的各個位置調節器121,在某一側的接觸部123接觸於框架的狀態下,該一側前進來調整框架位置,之後位於該位置調整程度,對應的另一側位置調節器接觸框架以校正位置,進而調整定心以進行該對準。 When centering and aligning the frame, each position adjuster 121 arranged face to face with the short side or the long side of the frame, when the contact portion 123 on one side is in contact with the frame, the side moves forward to adjust the frame position, and then At this position adjustment degree, the corresponding position adjuster on the other side contacts the frame to correct the position, and then adjust the centering to perform the alignment.

其他一方法,相互面對面的位置調節器121同時接觸於框架,若其中某一側前進,則控制對面側的位置調節器後退的同時調整框架的位置,按照定心以進行該對準。 In another method, the position adjusters 121 facing each other are in contact with the frame at the same time, and if one of the sides advances, the position adjuster on the opposite side is controlled to move backward while adjusting the position of the frame, and the alignment is performed according to the centering.

同樣地,在對準短邊框架時,位於長邊的位置調節器121可通過上述的兩種方法調節定心,也可在短邊的位置對準結束之後進行調節上述短邊框架。 Similarly, when aligning the short-side frame, the position adjuster 121 on the long-side can adjust the centering by the above two methods, or adjust the short-side frame after the alignment of the short-side position is completed.

在上述中接觸於短邊的位置調節器的對準是對準框架的長邊框架,而接觸於長邊的位置調節器的對準則對準框架的短邊方向。 In the above, the alignment of the position adjuster in contact with the short side is aligned with the long side frame of the frame, and the alignment criterion of the position adjuster in contact with the long side is aligned with the short side direction of the frame.

另外,在本發明中於對準框架短邊或者長邊的位置時,不指定應該首先對準哪一方向的順序。根據需要,選擇性地執行首先對準某一方向或者同時對準。 In addition, in the present invention, when aligning the position of the short side or the long side of the frame, the order in which direction should be aligned first is not specified. According to needs, the first alignment in a certain direction or simultaneous alignment is selectively performed.

另外,接觸於各個短邊或者長邊的位置調節器121首先對準一側或者同時接觸來執行對準也是選擇調整的,並不指定順序。 In addition, the position adjuster 121 contacting each short side or the long side first aligns one side or simultaneously contacts to perform alignment is also optional adjustment, and the order is not specified.

所述S500步驟包括以下步驟:構成各個焊接器部210、220的焊接位置檢測儀215、225檢查裝載的分割遮罩與框架的焊接位置是否對準;然後,在焊接位置對準的情況下,構成各個焊接器部210、220的焊接器214、224在台架停滯的狀態下沿著焊接軌道216、226移動的同時進行精確的焊接,其中焊接軌道216、226由以與台架的移動方向相同的軸方向構成。 The step S500 includes the following steps: the welding position detectors 215, 225 constituting the respective welder parts 210, 220 check whether the welding position of the loaded segmentation mask and the frame are aligned; then, when the welding position is aligned, The welders 214, 224 constituting the respective welder parts 210, 220 perform precise welding while moving along the welding rails 216, 226 when the platform is stagnant. The welding rails 216, 226 are aligned with the moving direction of the platform. The same axial direction configuration.

如此,在通過兩個焊接器部210、220均衡地調整台架重量平衡的狀態下只有焊接檢測儀部230在台架上水平移動,以檢測焊接於框架的分割遮罩的焊接品質,進而不會發生由移動引起的重量變動,因此在抑制振動發生的狀態佳實現對焊接品質精確的檢測。 In this way, when the weight balance of the gantry is adjusted in a balanced manner by the two welder parts 210 and 220, only the welding detector part 230 moves horizontally on the gantry to detect the welding quality of the divided masks welded to the frame. There will be weight changes caused by movement, so the state of suppressing vibration is good to achieve accurate detection of welding quality.

焊接品質檢測儀234在調整好重量平衡的狀態下檢測焊接品質的步驟如下:懸掛在台架的兩個焊接器部210、220位於兩側端且在未移動的停滯的狀態下以使處於起到重量平衡作用的狀態的焊接品質檢測儀234確認左右分割遮罩的焊接品質。 The welding quality tester 234 measures the welding quality with the weight balance adjusted as follows: the two welder parts 210 and 220 suspended on the platform are located at both ends and are in a stagnant state without moving to make them stand up. The welding quality tester 234 in the state of the weight balance function confirms the welding quality of the left and right divided masks.

因此,在未發生於台架沿著焊接部位移動時出現振動的狀態下進行精確的焊接。 Therefore, accurate welding can be performed without vibration occurring when the gantry moves along the welding part.

本發明不限於上述的特定的較佳實施例,在不超出在申請專利範圍請求的本發明的要點的範圍內只要是該發明所屬技術領域的技術人員當然可進行各種變形,與此相同的改變屬於申請專利範圍的記載範圍。 The present invention is not limited to the above-mentioned specific preferred embodiments, and within the scope of the gist of the present invention claimed in the scope of the patent application, a person skilled in the technical field of the invention can of course make various modifications and the same changes. It belongs to the scope of record in the scope of patent application.

1‧‧‧框架位置對準部 1‧‧‧Frame position alignment part

2‧‧‧焊接及檢測部 2‧‧‧Welding and Inspection Department

3‧‧‧夾持部 3‧‧‧Clamping part

4‧‧‧遮罩架部 4‧‧‧Mask frame

5‧‧‧框架 5‧‧‧Frame

6‧‧‧分割遮罩 6‧‧‧Segmentation mask

20‧‧‧台架 20‧‧‧Bench

21‧‧‧軌道 21‧‧‧Orbit

201‧‧‧台架軌道 201‧‧‧Bench rail

Claims (16)

一種製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,對運送至框架的分割遮罩進行位置測量和焊接,並檢測焊接品質,其特徵在於,包括:框架位置對準部(1),以利用氣浮部(110)而氣浮的狀態安置通過框架升降部(130)已裝載的框架(5),進而利用框架位置調節部(120)對準基準定心位置以提供對抗力;以及三頭方式焊接及檢測部(2),在精確安置的框架上部通過夾持部(3)以單張力方式夾持在裝載於遮罩架部(4)中的分割遮罩(6)中選出的分割遮罩來裝載於焊接位置,然後在降低振動的狀態下對準焊接位置之後進行焊接,並檢測焊接的焊接品質,其中,所述氣浮部(110)包括:氣孔部(111),接收並噴射壓縮空氣,並且分別設置在短邊與長邊方向;以及氣罩部(112),設置在氣孔部(111)上部,並分別構成在短邊與長邊方向,進而以使接收到的空氣以均勻的壓力分割供應於框架下部面。 A single-tension welding device for manufacturing AMOLED movable mask frame elements, which performs position measurement and welding of the divided masks transported to the frame, and detects the welding quality, and is characterized in that it includes: a frame position alignment part (1) , The frame (5) loaded by the frame lifting part (130) is placed in a state of air-floating using the air-floating part (110), and then the frame position adjusting part (120) is used to align the reference centering position to provide a counter force; And the three-head welding and inspection part (2), clamp the divided mask (6) loaded in the mask frame part (4) by the clamping part (3) on the upper part of the precisely placed frame with single tension The selected segmentation mask is loaded on the welding position, and then the welding position is aligned with the vibration reduced, and then the welding is performed, and the welding quality of the welding is checked. The air float part (110) includes: the air hole part (111 ), receiving and spraying compressed air, and setting them in the short side and long side directions respectively; and the air cover part (112), which is provided in the upper part of the air hole part (111), and is respectively formed in the short side and long side direction, so as to make The received air is divided and supplied to the lower surface of the frame under uniform pressure. 如申請專利範圍第1項所述之製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,其中,所述氣孔部(111)由凸出型支撐架(111a)和形成在該凸出型支撐架的多個氣孔(111b)構成,以及所述氣罩部(112)上部面被加工成扁平狀,而在下部面向內側面方向形成插入所述凸出型支撐架(111a)的空氣腔室(112a),空氣腔室的上部形成有多個氣孔(112b)。 The single-tension welding device for manufacturing AMOLED movable mask frame elements as described in the first item of the scope of patent application, wherein the air hole portion (111) is formed by a protruding support frame (111a) and the protruding A plurality of air holes (111b) of the type support frame are formed, and the upper surface of the air cover portion (112) is processed into a flat shape, and the lower surface is formed with air inserted into the convex support frame (111a) in the direction of the inner side surface. A plurality of air holes (112b) are formed in the upper part of the air chamber (112a). 如申請專利範圍第1項或第2項所述之製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,其中,形成在所述長邊的氣罩部(112)具有兩個空氣腔室(112a),以從位於其下部的兩個氣孔部(111)接收空氣。 The single-tension type welding device for manufacturing AMOLED movable mask frame elements as described in item 1 or item 2 of the scope of patent application, wherein the gas mask portion (112) formed on the long side has two air cavities The chamber (112a) to receive air from the two air hole portions (111) located at the lower part thereof. 如申請專利範圍第1項所述之製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,其中,所述框架位置調節部(120)在短邊與長邊側分別形成一個以上的位置調節器(121),所述位置調節器(121)包括:伺服馬達(122),使接觸部精確地前進和後退;以及接觸部(123),根據伺服馬達的運作與框架接觸。 The single-tension welding device for manufacturing AMOLED movable mask frame elements as described in the first item of the scope of patent application, wherein the frame position adjusting portion (120) forms more than one position on the short side and the long side respectively An adjuster (121), the position adjuster (121) includes: a servo motor (122) that makes the contact part accurately advance and retreat; and a contact part (123) that contacts the frame according to the operation of the servo motor. 如申請專利範圍第1項所述之製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,其中,所述框架升降部(130)由四個角落升降器(131)和四個框架長邊升降器(132)構成,用連接桿(133)連接位於一側長邊側的一個長邊升降器與一個角落升降器來配成對,進而在連動的同時進行升降。 The single-tension welding device for manufacturing AMOLED movable mask frame elements as described in the first item of the scope of patent application, wherein the frame lifting part (130) consists of four corner lifters (131) and four frame lengths. The side lifter (132) is constituted by connecting a long side lifter and a corner lifter on the long side of one side with a connecting rod (133) to form a pair, and then move up and down simultaneously. 如申請專利範圍第1項所述之製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,其中,所述三頭方式焊接及檢測部(2)包括:兩個焊接器部(210、220),設置形成在台架(20)的台架軌道(201)並以水平方向移動;以及焊接檢測儀部(230),設置在焊接器部之間。 The single-tension welding device for manufacturing AMOLED movable mask frame elements as described in the first item of the scope of patent application, wherein the three-head welding and inspection part (2) includes: two welding parts (210, 220), arranged on the stage rail (201) formed on the stage (20) and moving in a horizontal direction; and the welding detector part (230) is arranged between the welder parts. 如申請專利範圍第6項所述之製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,其中,所述兩個焊接器部(210、220)與焊接檢測儀部(230)分別具有水平台車(211、221、231)以及垂直台車(212、222、232),所述水平台車(211、221、231)沿著形成在台架(20)的台架軌道(201)以水平方向移動,所述垂直台車(212、222、232)沿著分別形成在水平台車(211、221、231)的垂直軌道(213、223、233)以上下方向移動。 As described in item 6 of the scope of patent application, the single-tension welding device for manufacturing AMOLED movable mask frame components, wherein the two welder parts (210, 220) and the welding detector part (230) respectively have The water platform vehicles (211, 221, 231) and the vertical vehicles (212, 222, 232), the water platform vehicles (211, 221, 231) along the platform rail (201) formed on the platform (20) in a horizontal direction Moving, the vertical trolleys (212, 222, 232) move in the up and down directions along vertical rails (213, 223, 233) respectively formed on the water platform vehicles (211, 221, 231). 如申請專利範圍第7項所述之製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,其中,在所述焊接器部(210、220)的垂直台車(212、222)分別設置有一對焊接器(214、224)與焊接位置檢測儀(215、225),在所述焊接檢測儀部(230)的垂直台車(232)設置焊接品質檢測儀(234)。 As described in item 7 of the scope of patent application, the single-tension welding device for manufacturing AMOLED movable mask frame elements, wherein the vertical trolleys (212, 222) of the welder parts (210, 220) are respectively provided with a For welders (214, 224) and welding position detectors (215, 225), a welding quality detector (234) is installed on the vertical trolley (232) of the welding detector section (230). 如申請專利範圍第8項所述之製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,其中,設置在所述焊接器部(210、220)中某一側的焊接器及焊接位置檢測儀與跨過焊接檢測儀部(230)而相鄰的另一側焊接器部的焊接器及焊接位置檢測儀對稱設置,以調整重量平衡。 The single-tension welding device for manufacturing AMOLED movable mask frame elements as described in item 8 of the scope of patent application, wherein the welding device and the welding position are arranged on one side of the welding device part (210, 220) The detector is symmetrically arranged with the welder and the welding position detector of the adjacent welder part across the welding detector part (230) to adjust the weight balance. 如申請專利範圍第8項所述之製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,其中,所述焊接器(214、224)在焊接時台架停滯的狀態下,沿著由與台架的移動方向相同的軸方向構成的焊接器軌道(216、226)移動的同時進行焊接。 The single-tension welding device for manufacturing AMOLED movable mask frame elements as described in item 8 of the scope of patent application, wherein the welding device (214, 224) moves along the welding device when the stage is stagnant during welding. The welder rails (216, 226) formed in the same axial direction as the moving direction of the gantry are welded while moving. 如申請專利範圍第8項所述之製造AMOLED移動式遮罩框架元件的單張力型焊接裝置,其中,所述焊接檢測儀部(230)兩側端設置有懸掛在台架的兩個焊接器部(210、220)起到平衡重量的作用,在這一狀態下,所述焊接檢測儀部(230)在水平移動台架的同時檢測焊接在框架的遮罩的焊接品質。 The single-tension welding device for manufacturing AMOLED movable mask frame elements as described in item 8 of the scope of patent application, wherein the welding detector part (230) is provided with two welding devices suspended on the platform at both ends The device parts (210, 220) play a role in balancing the weight. In this state, the welding detector part (230) detects the welding quality of the shield welded to the frame while moving the stage horizontally. 一種利用單張力型焊接裝置的AMOLED移動式遮罩框架元件的製造方法,包括:步驟(S100),框架升降部(130)上升而裝載運送的框架之後下降,之後安置在框架位置對準部(1)的氣罩部(112);步驟(S200),被分割成四個部分的氣罩部(112)均勻地噴射從氣浮部(110)供應的氣體來氣浮框架;步驟(S300),使框架位置對準部(1)的框架位置調節部(120)接觸的框架前進和後退,以按照基準定心對準氣浮狀態的框架;步驟(S400),若框架的定心對準結束,則夾持部夾持分割遮罩之後移動至框架上的焊接位置,之後以施加張力的狀態定位分割遮罩;步驟(S500),三頭方式焊接及檢測部(2)移動來檢查運送的分割遮罩是否對準框架的焊接位置後進行焊接,其中,所述三頭方式焊接及檢測部(2)由設置在台架的兩個焊接器部(210、220)與焊接品質檢測儀(234)構成;步驟(S600),焊接結束之後,焊接品質檢測儀(234)在調整重量平衡的狀態下檢測焊接品質;以及 步驟(S700),反復執行運送並焊接所述分割遮罩後檢測焊接品質的步驟,若完成遮罩框架元件的製造,則由框架升降部(130)上升遮罩框架元件。 A method for manufacturing AMOLED movable mask frame elements using a single-tension type welding device includes: step (S100): the frame lifting part (130) rises and loads the transported frame and then descends, and then is placed in the frame position alignment part (1) The gas hood part (112); step (S200), the gas hood part (112) divided into four parts uniformly sprays the gas supplied from the air floatation part (110) to float the frame; step (S300) ) To make the frame contacted by the frame position adjustment part (120) of the frame position alignment part (1) advance and retreat, so as to align the frame in the air floating state according to the reference; step (S400), if the frame is centered After the quasi-end, the clamping part moves to the welding position on the frame after clamping the split mask, and then positions the split mask with tension applied; step (S500), three-head welding and inspection part (2) move to check Whether the transported split mask is aligned with the welding position of the frame and then welded, wherein the three-head welding and inspection part (2) consists of two welder parts (210, 220) set on the gantry and welding quality inspection The composition of the instrument (234); step (S600), after the welding is completed, the welding quality detector (234) detects the welding quality while adjusting the weight balance; and In step (S700), the step of transporting and welding the divided masks and inspecting the welding quality is repeated. If the manufacturing of the mask frame element is completed, the mask frame element is raised by the frame lifting part (130). 如申請專利範圍第12項所述之利用單張力型焊接裝置的AMOLED移動式遮罩框架元件的製造方法,包括以下步驟:所述框架升降部(130)為了製作而運送的框架的下降或者焊接完成遮罩框架元件上升時,所述框架升降部(130)以同時支撐框架的下部面角落與長邊的狀態進行升降。 As described in item 12 of the scope of patent application, the method for manufacturing AMOLED movable mask frame elements using a single-tension type welding device includes the following steps: the frame lifter (130) is lowered for manufacturing, or When the shield frame element is raised after welding, the frame lifting part (130) is raised and lowered while supporting the corners and long sides of the lower surface of the frame. 如申請專利範圍第12項所述之利用單張力型焊接裝置的AMOLED移動式遮罩框架元件的製造方法,包括以下步驟:所述框架位置調節部(120)分別對應於短邊與長邊側設置由伺服馬達(122)與接觸部(123)構成而驅動的位置調節器(121),在使接觸部(123)接觸於框架的狀態下運作伺服馬達(122)細微地調節前進和後退。 As described in item 12 of the scope of patent application, the method for manufacturing AMOLED movable mask frame components using a single tension type welding device includes the following steps: the frame position adjustment portion (120) corresponds to the short side and the long side, respectively A position regulator (121) driven by a servo motor (122) and a contact part (123) is installed on the side, and the servo motor (122) is operated while the contact part (123) is in contact with the frame to finely adjust the forward and backward movement. . 如申請專利範圍第12項所述之利用單張力型焊接裝置的AMOLED移動式遮罩框架元件的製造方法,其中,所述步驟(S500)包括如下的步驟:構成各個焊接器部(210、220)的焊接位置檢測儀(215、225)檢查裝載的分割遮罩與框架的焊接位置是否對準;然後,在焊接位置對準的情況下,構成各個焊接器部(210、220)的焊接器(214、224)在台架停滯的狀態下沿著焊接軌道(216、226)移動的同時進行精確的焊接,其中所述焊接軌道(216、226)由以與台架的移動方向相同的軸方向構成。 As described in item 12 of the scope of patent application, the method for manufacturing AMOLED movable mask frame components using a single-tension type welding device, wherein the step (S500) includes the following steps: forming each welder portion (210, The welding position detector (215, 225) of 220) checks whether the welding position of the loaded split mask and the frame is aligned; then, when the welding position is aligned, the welding of each welding device (210, 220) is formed The welding device (214, 224) moves along the welding track (216, 226) while the stage is stagnant for precise welding, wherein the welding track (216, 226) is moved in the same direction as the moving direction of the stage Axis direction composition. 如申請專利範圍第12項所述之利用單張力型焊接裝置的AMOLED移動式遮罩框架元件的製造方法,其中,所述步驟(S600),在懸掛在台架的兩個焊接器部(210、220)位於兩側端起到平衡重量的狀態下,焊接檢測儀部(230)在水平移動台架的同時確認分割遮罩的焊接品質。 As described in item 12 of the scope of patent application, the method for manufacturing AMOLED movable mask frame components using a single-tension type welding device, wherein the step (S600) is carried out in two welder parts ( 210 and 220) are positioned at both ends to balance the weight, the welding detector part (230) checks the welding quality of the split mask while moving the stage horizontally.
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