KR100941007B1 - Stick(splilt) type mask for manufacturing big size of amoled mobile or tv panel and manufacturing method of mask frame assembly using thereof - Google Patents

Abstract

PURPOSE: A stick(splilt) type mask for manufacturing big size of an AMOLED mobile or a TV panel is provided to match a total pitch of mask frame assembly by including an X direction skirt and an Y direction skirt and controlling tension. CONSTITUTION: A plurality of X direction skirts(1) formed in the either side X direction of a disassembly is formed in skirt unit(3). An Y direction skirt(2) supplying an Y direction tension is formed and the tension is controlled. At least one Y direction skirt is formed in the both sides of skirt unit respectively. The both sides shape of Y direction of the disassembly mask is formed as the divided pixel. The both sides shape of Y direction of the disassembly mask is formed as a form the divided rip.

Description

Split (Splilt) Type Mask for manufacturing big size of AMOLED Mobile or TV panel and manufacturing method of mask frame assembly using equivalent}

The present invention relates to a method for manufacturing a large area AMOLED mobile or TV panel split mask and a mask frame assembly using the same, in detail to produce a large area AMOLED display panel, pattern glass (Pattern Glass) The present invention relates to a split mask having a mask frame assembly precisely manufactured so as to deposit organic materials and a tension applying structure in which such a large-area mask frame assembly can be manufactured. In particular, a large area AMOLED using a split mask is used. Heat transfer and organic material by radiation in vacuum chamber of heat source that vaporizes organic material of linear source or point source which is organic material source for making mobile / TV panel The substrate to be masked / deposited by thermal expansion of the mask / frame according to the temperature rise of the mask by temperature The shape and division method of the division mask for manufacturing the mask frame assembly for the large-area AMOLED that prevents the shadow phenomenon that may occur when the organic material is deposited by applying a sufficient tension to the mask due to the misalignment caused by the position change. A technique for manufacturing a mask frame assembly.

OLEDs have a much faster reaction rate than thin film transistor liquid crystal displays (TFT LCDs). The self-illumination reduces thickness and weight by one third without backlight, and is a next-generation display with a wide viewing angle and low power consumption.

These OLEDs are divided into AM type (active) and PM type (passive). PMOLED has lower manufacturing cost than AMOLED and has limitations in power consumption, lifespan and resolution. Since AMOLED has TFT and capacitor in each pixel and is excellent in terms of power consumption, lifespan, and resolution, the manufacturing cost is increased due to the manufacture of TFT.

Most of all, AMOLED's strength is image quality competitiveness. Compared to LCD, the biggest competitor, the color reproduction rate is 30 percentage points higher and the contrast ratio is 20 times better. Afterimage of video, the biggest weakness of LCD, is not found in AMOLED. This is because LCD creates a complicated screen by passing a simple light source called backlight through liquid crystal and color filter, while AMOLED reproduces natural color screen by emitting organic material by itself.

Moreover, OLED has a simple structure compared to LCD, which is very advantageous in terms of parts in manufacturing.

However, in terms of OLED material cost, driver circuit, and driver IC, OLED depreciation accounts for half of the total cost. This is because OLED is not yet popularized to consumers and it is difficult to see the cost effect of manufacturing by mass production. However, as time goes by, the depreciation costs will decrease and competition with LCDs will be possible. The reason for this is that since the components are small and simple, such as the BLU and the color filter are not required by the self-luminous method, the unit price can be lowered sufficiently.

Therefore, efforts to reduce depreciation costs are needed to secure price competitiveness.

However, there are still technical problems to overcome for mass production. In other words, the organic material that emits light is very sensitive to the manufacturing environment, so it is not difficult to make a high-quality display of high quality. Therefore, there is a problem to overcome the problem of low yield. have.

Hereinafter, a method of manufacturing a display panel using AMOLED will be described.

The basic structure of the AMOLED display panel is to form ITO (Induim-Tin-Oxide), a positive electrode on a glass substrate, and deposit R, G, and B organic materials on the upper surface of the AMOLED display panel, and then form a negative electrode on the upper surface, and then energize the positive and negative electrodes. It has a simple structure.

The conventional mask stretching method for manufacturing an AMOLED display having such a basic configuration is a stripe position of a mask frame assembly by fitting a mask to a predetermined target position. It is a system that generates a lot of losses in terms of manufacturing time and cost by repeatedly matching and measuring flows. This stretching method using the ledger mask is currently used in the fourth generation half-class 30 "ledger TV due to limitations in manufacturing error of the ledger mask itself, yield reduction due to mask defects, and mask coil size. 42 "chamfering level is very expensive in terms of the highest level technology and consumables for deposition.

As described above, the conventional AMOLED is manufactured in a mask frame assembly using a mask composed of one ledger, which is mostly mass-produced, and has a limitation in size when producing a large-area AMOLED. The reason why it is difficult to enlarge the size using a mask made of one ledger is that the supply size of the coil, which is a raw material of the mask, is not produced in the size having the size necessary for the enlargement. In other words, due to profitability, coil producers do not produce the size required by AMOLED display companies.

As a way to solve the structural coil size problem of the ledger method mask, there is a method using a split mask, but this also has a structural limitation in making a large-area mask frame assembly. It is used.

In the manufacturing method using a split mask, as shown in FIG. 8, which shows a manufacturing process of a mask frame assembly using a split mask, a plurality of split masks are welded and assembled one by one on a frame, and are covered by a frame that does not contain a split mask during assembly. Welding the masks together, and after the mask frame assembly is manufactured to prevent the shaking of the mask is a method of completing the mask frame assembly by welding the shake masks together.

However, the reason why a large-area mask frame assembly cannot be produced even by using a conventional split mask is that the split mask shape used in the manufacture of a small mask frame assembly has been described. There is a limit to increasing the size of the partition, for example. This is because a yield problem occurs due to poor deposition by stripe of incorrectly positioned mask when vacuum deposition of R, G, and B organic materials onto the pattern glass using a conventional mask mask assembly after fabrication of a large mask frame assembly. to be.

In more detail, the manufacturing process and problems of the conventional AMOLED (active OLED) display device will be described.

During the manufacturing process of making AMOLED (Active OLED) display devices, the deposition quality of R, G, B organic matters determines the display quality, and the deposition degree of R, G, B organic matters depends on the quality and positioning of each cell stripe in the mask frame. Quality depends on accuracy. As a result, the quality of the mask frame assembly, which is the key to deposition, is at the same time urgently needed to improve productivity.

AMOLED manufacturing process consists of back plane, organic material deposition process and module process. In the deposition process, the organic material of organic EL (AMOLED, PMOLED) is positioned at the exact position of the desired panel. A mask frame assembly is an essential device for depositing organic materials only where necessary, and the mask frame assembly is composed of a frame and a mask.

Mask and frame materials mainly use thin film Invar (alloy of steel and nickel) and stainless steel sheet in consideration of thermal expansion.

9 is an exemplary view showing the shape of a conventional mask frame assembly. The conventional mask frame assembly having a shape as shown in the figure is fixed in mobile phones, navigation windows, digital cameras and the like for mobile. When manufacturing the mask according to the standardization, it is manufactured as a split mask in consideration of the productivity decrease, but it copes with high definition, but it is used for the enlargement of the size (3.5 "or more), TV (TV), Monitor (IT) In manufacturing the large area panel, there is a limit that the size of the coil, which is a raw material before mask etching, can cope only up to about 4 generations (730 * 920mm). This is because the company does not produce large size coils due to profitability problems.

However, in order to secure mass production of AMOLED panels, it is inevitable that 4G or more generations, namely 5th generation, 5.5th generation, 6th generation, 7th generation, 8th generation, and 9th generation, are inevitable. This is because it is possible to simultaneously manufacture large AMOLED panels by producing multi-sided odors when such large area is made.

Therefore, as a method for the large area, a low resolution multi-faceted fixed metal mask (FMM: Fine metal mask-multiple panels in one case) can be implemented in the case of television, which can be implemented at a lower resolution than IT use such as mobile or monitor. Panel manufacturing) In consideration of the raw material size limit of Invar, stainless steel, etc., it is essential to divide and manufacture mask and weld.

Hereinafter, the structure of the conventional division mask will be described in detail.

FIG. 10 is an exemplary view showing the shape of a conventional dividing mask. In the conventional dividing mask configuration, the mask has a sufficient total pitch desired in Mobile and IT in the Y direction (X or Y may be changed in the cell or the effective surface direction). In the etching process, the tolerance of the length 'L' of the mask in the Y direction is sufficiently secured to the desired degree in the AMOLED process, and the gripping portion for the mask tension in the X direction is gripper. Apply uniform tension by adjusting while applying tension, and adjust counter force to mask frame by compensating minute distortion of 1 ~ 2um in Y direction using position gripper of each gripper. The mask frame assembly was constructed by precisely welding the cell pattern on the back plane while adjusting the amount.

However, the problem of the prior art having such a divided mask structure, there is a problem that the wrinkles occur in the Y direction by breaking in the Y direction by applying tension only in one direction (X direction).

In addition, since the split mask is welded to the frame, only the tensile force in the X direction is maintained, so that the organic material is vaporized by applying heat to the organic material to vaporize the organic material at the deposition temperature and the organic material temperature during the process. To achieve temperature conditions, the capacity of the heater, the heat source of the source, is required.

FIG. 11 is an exemplary view illustrating a positioning change relationship according to a temperature and a distance between a conventional organic material source and a mask frame assembly.

As shown in the drawing, it is essential to minimize the capacity of a heat source in manufacturing a deposition source for depositing organic material on panel glass through a mask frame assembly. The reason is that in the vacuum atmosphere, since the temperature applied from the deposition source to the mask frame by radiation is inversely proportional to the square of the distance from the deposition source to the mask frame, the tension is in the Y direction. If the welding is performed without applying, there is a structural problem that the deposition quality (shadow = shadow) is reduced due to wrinkles in the Y direction in the deposition process before or during vacuum, thereby lowering the deposition yield.

That is, even if the mask is well positioned, such as the mask frame assembly positioned before deposition, the elongation (ε Tension) due to the mechanically applied mask tension is not sufficiently larger than the mask elongation (εT) according to the temperature change in the deposition in Equation 2 Otherwise, positioning change / sag may occur due to an increase in the mask temperature during deposition. As can be seen from the temperature gradient in the evaporator, the process tries to reduce the distance 'TS' between the organic material source and the deposition panel / mask if possible in consideration of the deposition uniformity and organic efficiency, but if the distance is reduced, The shadow phenomenon due to the change in the position of the mask frame assembly due to the temperature rise of the mask frame assembly due to the radiation in the evaporator, that is, the position of the deposition due to the lifting of the mask frame assembly from the panel on which the organic material is to be deposited There is a structural problem that it is difficult to reduce the distance 'TS' unless the tension to pull the mask is sufficiently supported by the deposition occurs at other points. The proportional expression of equation 1 expresses this.

As such, in the conventional split mask, when a radiation heat source for vaporizing a deposition source is transferred in a mask frame assembly in which tension is applied in only one direction, a shadow phenomenon occurs when organic materials are deposited by wrinkles in the Y direction of FIG. 10. do. In the case of a mask frame assembly for a large area AMOLED, it is difficult to make the length of the "L" in FIG. 10 that is divided too small, and even if the width L is made small, the length of the mask length M becomes long, thereby making the mask state. There is a structural problem that it is difficult to maintain the position change of 1 ~ 2um due to the total pitch and mask deformation.

Therefore, even when the mask is manufactured by dividing, there is a demand for the manufacture of a mask frame assembly having a precise high-precision that wrinkles do not occur in a direction in which tension by one-way tension is not applied.

However, the technology for manufacturing OLED mask frame assembly of this size is not provided yet.

An object of the present invention for solving the above problems is to apply a tension to make a large area AMOLED mobile or TV panel using a split mask, the shadow due to the wrinkles of the mask that can occur when the organic material deposition ) It is to provide a split mask for manufacturing a high-definition mask frame assembly that secures the desired AMOLED large-area pattern by overcoming the manufacturing tolerances of masks due to the phenomenon prevention and the division of large patterns such as TVs.

Another object of the present invention is to provide a multi-faceted multi-faceted AMOLED having a mask having various cell division (Rib division or pixel division) structures according to resolution, pattern shape, and surface draw. The present invention provides a split mask having various shapes of side portions for manufacturing a mask frame assembly for a panel.

In addition, another object of the present invention is to wrinkle by applying a tension in the four directions of the mask by using a mask having a structure for overcoming the mask manufacturing error to secure sufficient positioning properties to minimize the deflection / wrinkle of the mask The present invention provides a method for manufacturing a mask frame assembly having a high definition for large area AMOLED which is free from occurrence and has good positioning.

In addition, another object of the present invention is to increase the stable position / tension quality through the adjustment of the number of skirt (Skirt) and the variety of side skirt (Skirt) shape for preventing wrinkles and ensuring sufficient positioning properties, improve the degree of mask The present invention provides a method of manufacturing a mask frame assembly for a large-area multi-faceted AMOLED panel having a mask having a structure of the above structure.

The present invention to achieve the object as described above and to perform the problem for eliminating the conventional defects in the division mask is welded to the mask frame a plurality of mask frame assembly,

The skirt portion is formed on both sides of the divided mask in the X direction and gripped by the X-direction gripper to apply the tension, is gripped by the Y-direction gripper to apply both sides of the Y-direction tension perpendicular to the X-direction skirt By forming the Y-direction skirt to control the tension, it prevents the wrinkles in the Y-direction and overcomes the manufacturing process of the mask in the Y-direction according to the diversification of the division size (L) through the mask tension to secure the required positioning accuracy. It is achieved by providing a split mask for producing large-area AMOLED mobile or TV ledger multi-faceted panel, characterized in that the configuration.

One or more Y-direction skirts are formed on both sides of one skirt unit per unit division mask, and at least four or more skirts are formed on both sides of the other skirt unit.

Both side surfaces of the division mask in the Y direction may be formed by dividing a pixel.

Both side surfaces of the split mask in the Y direction may be formed by dividing a rib.

The division mask may be formed by dividing two or more upper and lower respective inch cells formed in the X direction when manufacturing a multi-faceted mask frame assembly.

Both sides of the cell division partition mask in the Y direction may be formed by dividing a pixel.

Both sides of the Y-direction of the cell-divided splitting mask may be formed by dividing a rib.

In another embodiment of the present invention, a method of manufacturing a mask frame assembly by continuously welding a plurality of split masks to the mask frame,

The mask is manufactured according to the division of large patterns such as Y direction wrinkle prevention and TV by adjusting tension by using X and Y direction grippers in X and Y directions with a plurality of split masks having the Y direction skirt formed thereon. Tension is applied in four directions of the mask by using a mask having a structure to secure the total pitch of the total pitch required for the AMOLED mask frame assembly by overcoming the tolerance of the total pitch. The welding is applied to secure positioning / preventing wrinkles, but the second and subsequent split masks are provided with a low friction roller contacting the Y-direction gripper and the Y-direction skirt to prevent interference with neighboring previously welded split masks. Welding while applying the tension while lifting the Y-direction skirt at a predetermined angle, the half-etched mask (M) that is not necessary It is achieved by providing a method for manufacturing a mask frame assembly using a split mask for producing a large-area AMOLED mobile or TV ledger multi-faceted panel, characterized by a method of cutting and manufacturing ask).

The Y-direction gripper is characterized in that the gripper (Gripper) having X, Y, Theta degrees of freedom.

The predetermined angle is greater than 0 degrees, characterized in that the angle between 270 degrees.

Both sides of the Y-direction of the division mask having the Y-direction skirt are formed by dividing a pixel.

Both sides of the Y-direction side surface of the split mask formed with the Y-direction skirt is characterized in that it is used to form a divided rib (Rib).

The division mask is characterized in that for use in the production of the multi-faceted mask frame assembly is formed by dividing two or more upper and lower cells formed in the X direction.

Both sides of the cell-divided division mask in the Y direction may be formed by dividing a pixel.

Both sides of the cell-divided split mask in the Y-direction are formed by dividing a rib.

The division mask according to the present invention is provided with a mask mask in the Y direction to reduce tension only in the X direction, whereas the mask is provided with a mask mask in the Y direction by adjusting the tension and the size of the mask or the large size mask ( The total pitch of the mask frame assembly can be adjusted by adjusting the total pitch, which is a mask manufacturing tolerance according to the variation of the length L in the Y direction of the mask. It is possible to manufacture a large-area AMOLED panel because it is possible to manufacture a mask frame assembly having a high definition for large-area AMOLED by preventing the shadow phenomenon.

In the manufacture of large-area AMOLED panels, pixel or rib-divided masks and multi-sided cell-dividing masks having such divisional shapes are provided to enable the manufacture of mask frame assemblies having a high definition for large-area AMOLED panels. It is possible to manufacture large area AMOLED panel

In addition, by overcoming the limitations of the size of Invar and stainless sheet materials of AMOLED Mask, and realizing the large area of Mask Frame Assembly, which is a key part of AMOLED organic deposition, TV is realized. Or by contributing to the enlargement and quality of AMOLED panel size for mobile and IT, AMOLED Display secures a competitive system with LCD, and the weight, weight, and recall of AMOLED are the advantages. It is a useful invention with the advantage that it can contribute to competing with LCD with advantages in moving picture and power consumption.

Hereinafter, the configuration and the operation of the embodiments of the present invention will be described in detail with reference to the accompanying drawings. In describing the present invention, when it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted.

1 is a plan view of a split mask having one or more skirts at each corner in the Y direction according to an embodiment of the present invention, Figure 2 is a Y of the split mask according to an embodiment of the present invention It is an exemplary figure which shows the gripper which applies tension to a directional skirt, and the tension application direction of a gripper.

Hereinafter, the present invention will be described in the X direction and the Y direction for convenience of description of the direction, and the direction is referred to as the Y direction based on one direction as the X direction based on a plane and not an absolute specific direction.

In order to manufacture a mask frame assembly, a mask of a small size TV or a mobile mask assembly is manufactured as a ledger, but considering a high definition of the mask frame assembly and a production yield And in order to secure economic feasibility, the demand for large-scale multi-sided chamfering is urgent. However, in order to overcome this problem, it is impossible to supply raw materials in the form of a thin film of Invar or stainless steel sheets, which is a raw material for making a mask. The addition of an X-direction tension skirt (wing) prevents the occurrence of wrinkles in a split mask of 3 "or more in size, and in the case of a TV, it uses a split mask technique to overcome the limitation of the ledger multi-facet. In this mask segmentation technique, a rib split that divides a rib existing between the pixel and the pixel, and the pixel is halved. In the case of multi-sided, there is a cell division for dividing Inch / Inch, and in the end, a pixel division or a rib division is called a cell division method. .

As shown, the split mask according to the present invention is a split mask used in split masks for mobile / large-area televisions / monitors having a size of 3 inches or more, and its configuration consists of a plurality of grippers (G1 to Gn) when welding the split mask to a mask frame. X-direction skirt on the structure of the skirt portion 3 formed with G1 ~ Gn skirt (Skirt), which is a plurality of X-direction skirts (1) formed on both sides of the X-direction of the split mask so as to apply tension in both X-directions In order to apply tension in both Y directions perpendicular to (1), G6 skirts of two Y-direction skirts 2 are formed in both Y-directions of one skirt portion, and two Y-direction skirts 2 of the other skirt portion. G6 skirt is formed.

The multiple Y-direction G6 skirts formed in this way are applied with the minimum tension for the anti-wrinkle prevention and the total pitch of the mask frame assembly when the gripper G6 is mounted after the Y-direction tension. It is a mask skirt for securing the positioning accuracy of each pixel required by a television which must have a mask width of 40 mm or more when applying a large-area division mask for (IT) or television (TV).

According to an embodiment, the width L (Y direction) of the division mask of the present invention is limited to a mask width within 40 mm to 1000 mm, and the number of G1 to Gn skirts in the X direction of the division mask is two or more as necessary. The limit is 30 or less. The reason is that if the number is too large, the gripper configuration is difficult, and if the number is too small, the positioning is inferior, so the number is limited. Positioning and minimum tension are secured by the tension of the G6 skirt formed in the Y direction, and gripper in the X direction plays a role of preventing mask deflection, securing positionability and tension when constructing a mask frame assembly. Do it. That is, the skirts formed in the Y direction have a limited number of places to be formed in comparison with the skirts in the X direction. The G6 skirt according to the present invention is formed of two pieces, one on each side and two on each side, and one on each side of the skirt. For example, if two per side skirts are formed on one side, including up to the other side skirt can form a total of eight Y-direction skirts.

In addition, as shown, half etching is applied to the A part welding part to facilitate mask cutting, and an image is easily taken with a CCD camera during mask tension. And N positioning keys (Align Keys) are formed to feed back control the motor.

In addition, the Y-direction mask skirt should be placed at the position where the gripper or clamper is used to weld the frame after applying tension to the dividing mask. The configuration of the clamper or gripper is an essential condition to give an angle to the horizontal or vertical tension of the conventional G1 ~ Gn gripper to avoid interference with the welded split mask during the next split mask welding.

3 is an exemplary view showing a split plane when a split mask is manufactured according to the present invention, and FIG. 4 is an exemplary view showing that a pixel split unit mask and a unit split mask are connected according to another embodiment of the present invention. Is an exemplary view showing that the lip-divided unit division mask and unit division mask is connected according to another embodiment of the present invention, Figure 6 is a cell division unit division mask between multi-faceted inch in accordance with an embodiment of the present invention and This is an exemplary view showing a multi-faceted mask frame assembly composed of unit division masks.

As shown, the division mask according to the present invention may be divided into various side shapes according to the manufacturing environment of the mask frame assembly. According to the division method, the division mask and rib are divided into pixels. It can be configured with a divided mask.

Similarly, the mask frame assembly can be manufactured by using a split mask that divides cells when manufacturing the mask frame assembly in a multifaceted manner. In this case, the lateral shape of the division mask in which each cell is divided may be configured as a pixel division partition mask and a rib division partition mask.

In this way, the division mask can be manufactured in various shapes, and when manufacturing a large-area AMOLED mask frame assembly, each division mask can be connected and welded, and the Y-direction skirt is welded while applying a tension at a predetermined angle to form wrinkles in the Y direction. It prevents wrinkles and overcomes mask manufacturing tolerances in the Y direction to secure the deposition position of AMOLED organic material, thereby manufacturing a mask frame assembly having high definition.

7 is an exemplary view showing a method of applying tension to the Y-direction skirt formed in accordance with the present invention. As shown, G1 to Gn grippers (Gripper) can be used as a gripper (Gripper) having only X, Y, Theta degrees of freedom, or a gripper (Gripper) having only Y degrees of freedom.

In addition, the configuration of the G6 gripper (Gripper) to apply the tension in the Y direction according to the present invention in order to avoid interference with the pre-divided welding mask in the direction of the gripper (Gripper) angle configuration from an angle greater than 0 degrees to 270 degrees Use a gripper with X, Y and Theta degrees of freedom to deform and apply tension. At this time, as a configuration for changing the tension direction of the split mask was installed so that the gripper is in contact with the low friction roller in contact with the tension applied to the angle conversion is made to precisely adjust the tension. Where Theta means the angles plotted on the X and Y planes, and the gripper's position applies tension at a fixed angle Theta.

Since the G6 gripper is provided to apply tension to the Y-direction G6 skirt, the division mask having the Y-direction skirt of the present invention is welded by applying the X-direction tension and the Y-direction tension when welding the division mask to the frame.

Therefore, when fabricating a large-area AMOLED mask frame assembly, each split mask is welded by welding, and the Y-direction skirt is oriented at a predetermined angle when welding the next split mask to prevent interference with neighboring pre-welded split masks. By applying tension while welding, it is possible to manufacture mask frame assembly with high definition that AMOLED secures desired positioning accuracy by overcoming Y direction wrinkle prevention and mask manufacturing tolerance.

 The Y-direction skirt is larger than 0 degrees and has an angle between 270 degrees, allowing the G6 gripper to be installed in various positions.

The present invention is not limited to the above-described specific preferred embodiments, and various modifications can be made by any person having ordinary skill in the art without departing from the gist of the present invention claimed in the claims. Of course, such changes will fall within the scope of the claims.

1 is a plan view of the division mask according to an embodiment of the present invention,

2 is an exemplary view illustrating a gripper for applying tension to a Y-direction skirt of a split mask and a tension application direction of the gripper according to an embodiment of the present invention;

3 is an exemplary view showing a split surface when manufacturing a split mask according to the present invention,

4 is an exemplary view illustrating that a pixel division unit division mask and a unit division mask are connected according to an embodiment of the present invention.

5 is an exemplary view illustrating that a lip-divided unit division mask and a unit division mask are connected according to another embodiment of the present invention.

6 is an exemplary view illustrating a multi-faceted mask frame assembly including a cell division unit division mask and a unit division mask according to another embodiment of the present invention.

7 is an exemplary view showing a method of applying tension to the Y-direction skirt formed in accordance with the present invention,

8 is a manufacturing process diagram of a mask frame assembly using a conventional dividing mask,

9 is an exemplary view showing the shape of a conventional mask frame assembly,

10 is an exemplary view showing a shape of a conventional split mask,

FIG. 11 is an exemplary view illustrating a positioning change relationship according to a temperature and a distance between a conventional organic material source and a mask frame assembly.

<Description of the symbols for the main parts of the drawings>

(1): skirt in X direction (2): skirt in Y direction

(3): skirt part

Claims (15)

In the division mask welded to the mask frame a plurality of masks for manufacturing the mask frame assembly, The skirt portion is formed on both sides of the divided mask in the X direction and gripped by the X-direction gripper to apply the tension, is gripped by the Y-direction gripper to apply both sides of the Y-direction tension perpendicular to the X-direction skirt By forming the Y-direction skirt to control the tension, the Y-direction mask manufacturing tolerances caused by the prevention of wrinkles in the Y-direction and the diversification of the division size (L) are overcome through the mask tension to secure the necessary positioning accuracy. Configure it, Large area AMOLED mobile, characterized in that the Y-direction skirt is formed at least one each on one side of the skirt portion per unit divided mask, at least one formed on each side of the other skirt portion. Or a split mask for the production of multi-sided panels of TV ledgers. delete The method according to claim 1, Both sides of the division mask in the Y-direction side partitioning mask for producing a large-area AMOLED mobile or TV ledger multi-faceted panel, characterized in that formed by dividing the pixel (Pixel). The method according to claim 1, The two-sided shape of the split mask in the Y direction is a split mask for producing a large-area AMOLED mobile or TV ledger multi-faceted panel, characterized in that the split (Rib) divided form. The method according to claim 1, The division mask is a large-area AMOLED mobile or TV ledger multi-faceted panel production mask, characterized in that formed in the form of dividing two or more upper and lower cells formed in the X direction when producing a multi-faceted mask frame assembly. The method according to claim 5, Both sides of the cell-divided division mask in the Y-direction both sides divided the pixels (Pixel) divided into a large-area AMOLED mobile or TV ledger multi-faceted panel manufacturing partition mask, characterized in that formed. The method according to claim 5, The two-sided shape of the cell-divided partition mask in the Y-direction is divided into ribs (Rib), a large-area AMOLED mobile or TV ledger multi-faceted panel production mask for partitioning. In the method of manufacturing a mask frame assembly by continuously welding a plurality of split mask to the mask frame, Manufactured mask according to large pattern division such as Y-wrinkle prevention and TV by adjusting tension using X-direction and Y-direction grippers in X-direction and Y-direction with a plurality of division masks with Y-direction skirt according to claim 1 Tension is applied in four directions of the mask by using a mask having a structure to secure the total pitch of the total pitch required for the AMOLED mask frame assembly by overcoming the tolerance of the total pitch. The welding is applied to secure positioning and to prevent wrinkles, but the second and subsequent split masks use a low friction roller contacting the Y-direction gripper and the Y-direction skirt to prevent interference with neighboring pre-welded split masks. Install and weld while applying tension while lifting Y-direction skirt at a certain angle, and half etching of outer peripheral part after welding (Hal) f Etched) to cut the mask (Manufacture), The Y-direction gripper is a gripper (Gripper) having X, Y, Theta degrees of freedom, a method of manufacturing a mask frame assembly using a split mask for producing a large-area AMOLED mobile or TV ledger multi-faceted panel. delete The method according to claim 8, The predetermined angle is greater than 0 degrees and the manufacturing method of the mask frame assembly using a large-area AMOLED splitting mask for producing a multi-sided panel of AMOLED mobile or TV. The method according to claim 8, A mask frame using a large-area AMOLED mobile or TV ledger multi-faceted panel production split mask, characterized in that the Y-direction both sides of the split mask formed in the Y-direction skirt is formed by dividing the pixel (Pixel) Method of manufacturing the assembly. The method according to claim 8, The mask frame using a large-area AMOLED mobile or TV ledger multi-faceted panel production split mask, characterized in that the Y-direction both sides of the split mask formed in the Y-direction skirt is formed by dividing the rib (Rib) Method of manufacturing the assembly. The method according to claim 8, When the division mask is used for producing a multi-faceted mask frame assembly, a split mask for producing a large-area AMOLED mobile or TV ledger multi-faceted panel, characterized in that it is formed by dividing two or more upper and lower cells formed in the X direction. Method of manufacturing a mask frame assembly. The method according to claim 13, The mask frame assembly using a large-area AMOLED mobile or TV ledger multi-sided panel manufacturing partition mask, characterized in that the two-sided shape of the cell-divided partition mask is formed by dividing the pixel (Pixel) Manufacturing method. The method according to claim 13, The two-sided shape of the cell-divided division mask in the Y-direction is formed by dividing the rib (Rib) of the mask frame assembly using a division mask for producing a large-area AMOLED mobile or TV ledger multi-faceted panel Manufacturing method.

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