JP2006092752A - Manufacturing method of combination mask - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a combination mask capable of removing wrinkles and slacks during a manufacturing process, even when wrinkles and slacks are easily generated on a mask member, and as a result, capable of keeping the positional accuracy of a pattern to be formed, while enabling correspondence with a fine evaporation pattern. <P>SOLUTION: The manufacturing method of the combination mask, composed of a mask member 4 made of thin-film metal 4, a gauze-formed screen-mesh member 3, and a square-shaped frame member 2, formed by stretching the mask member 4 in the frame member 2 via the screen-mesh member 3, comprises a temporary fixing process temporarily fixing the screen-mesh member 3 and the mask member 4, a stretching process imparting the screen-mesh member 3 with tension, after temporarily fixing the mask member 4, and a principal fixing process principally fixing the fixed mask member 4 to the screen-mesh member 3, after imparting the screen-mesh member 3 with the tension. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing a combination mask in which a mask member and a screen mesh member, which are different materials, are combined to correspond to a fine vapor deposition pattern.

  In general, in the manufacturing process of an organic electroluminescent element (organic electroluminescent element; hereinafter referred to as “organic EL element”), the water resistance of the organic material forming the organic layer is low and a wet process cannot be used. An organic layer (thin film) is formed thereon. Further, in the manufacturing process of the organic EL element, in order to perform patterning film formation (for example, film formation corresponding to each color component of R, G, B) on the glass substrate, the shape corresponding to the formation pattern is usually used. An evaporation mask having an opening (passage for organic material) is used.

  By the way, in recent years, it has been required for the evaporation mask to cope with the refinement (miniaturization) of the formation pattern. From this, as a deposition mask, a mask member made of a thin film metal in which an opening having a shape corresponding to a formation pattern is formed and a soot-shaped screen mesh member which is a separate material are combined, so-called Combination masks (composite masks) are being used (see, for example, Patent Document 1). In the case of a vapor deposition mask in which only a mask member is stretched, it becomes difficult to achieve a desired pattern position accuracy when the formation pattern becomes finer, whereas in a combination mask, the mask member is made of a screen mesh member. Since the screen mesh member is stretched through the screen mesh member, isotropic tension can be applied to the mask member by utilizing the elasticity (stretchability) of the screen mesh member, thereby maintaining high pattern position accuracy of the formed pattern. is there. Furthermore, because the mask member is indirectly tensioned via a screen mesh member having a different elastic coefficient from that of the mask member, displacement in the μm order in the mask member can be replaced and managed by displacement in the mm order in the screen mesh member. This is because the tension adjustment amount can be increased.

  Such a combination mask is usually manufactured by the following procedure. First, on a screen plate frame formed in a rectangular frame shape (hereinafter simply referred to as “frame member”), a cage-like screen mesh member made of synthetic fiber such as polyester-based or polyamide-based synthetic fiber or stainless steel is used. A first step of fixing and stretching with an adhesive is performed in a state where tension is applied in each direction of the screen mesh member (for example, two directions of the X direction and the Y direction orthogonal to each other). Next, a mask member made of a thin film metal is disposed near the approximate center of the screen mesh member stretched on the frame member, and an adhesive is applied over the entire periphery of the mask member, and the mask member, the screen mesh member, A second step of bonding and fixing is performed. After that, when the adhesive is cured, the unnecessary area portion of the screen mesh member overlapping the mask member is cut and removed along the edge of the mask member using a cutter knife or the like, and the mask is applied by the tension applied to the screen mesh member. A third step of pulling the member is performed. As a result, the mask member is pulled to produce a combination mask having a predetermined size and shape without wrinkles or sagging (see, for example, Patent Document 1).

JP 2003-64468 A

  However, in the above-described conventional method for manufacturing a combination mask, the pattern position accuracy of the pattern formed by the combination mask cannot always be kept high. The mask member constituting the combination mask is made of a thin film metal having a thickness of about 15 to 20 μm so as to correspond to the fine vapor deposition pattern, and wrinkles and sagging are likely to occur. For example, even if the mask member is once placed on the surface plate and wrinkles and sagging are eliminated, wrinkles and sagging may occur when the mask member is moved from the surface plate. Therefore, when the mask member is arranged and bonded and fixed on the screen mesh member fixedly stretched to the frame member as in the conventional method of manufacturing a combination mask, the mask member itself has wrinkles and sagging from the beginning. Even if the remaining part of the screen mesh member is cut and removed and the mask member is pulled after that, there is a possibility that wrinkles and slack remaining on the mask member may not be completely removed. In particular, when wrinkles, sagging, etc. remain in the area for adhesion and fixation, it results in poor adhesion between the mask member and the screen mesh member, and after cutting and removing unnecessary areas of the screen mesh member. When the mask member is pulled, there is a risk that the mask member may be peeled off due to the poor adhesion, and isotropic tension cannot be applied to the mask member. For these reasons, in the conventional method of manufacturing a combination mask, the pattern position accuracy of the formation pattern cannot always be kept high.

  Therefore, in view of such a conventional situation, the present invention is likely to cause wrinkles and sagging in a mask member alone, and even if there is a possibility that wrinkles and sagging may remain in the mask member. It is an object of the present invention to provide a method for manufacturing a combination mask that can remove wrinkles, sagging, and the like, and thereby can maintain a high pattern position accuracy of a formation pattern while allowing for a fine deposition pattern. .

  The present invention is a method of manufacturing a combination mask devised to achieve the above object. That is, a mask member made of a thin film metal in which an opening having a shape corresponding to a formation pattern is formed, a bowl-shaped screen mesh member, and a rectangular frame member, and the mask member is interposed through the screen mesh member. A method for manufacturing a combination mask stretched in the frame member, wherein the mask member is disposed on an upper surface or a lower surface of the screen mesh member to temporarily fix the screen mesh member and the mask member. A tensioning step for applying tension to the screen mesh member after the mask member is temporarily fixed; and the mask member temporarily fixed to the screen mesh member stretched on the frame member. And a main fixing step of main fixing to the member.

In the method of manufacturing a combination mask according to the above procedure, the mask member is temporarily fixed to the screen mesh member, and after the tension is applied to the screen mesh member in this state, the mask member is permanently fixed to the screen mesh member. Yes.
Here, “temporarily fixing” means temporarily fixing some points on the mask member, for example, point bonding or minimal area in the vicinity of the peripheral edge of the mask member. On the other hand, “main fixing” refers to fixing the mask member on the screen mesh member in order to form a combination mask, such as applying and bonding an adhesive over the entire area near the peripheral edge of the mask member. .
In this manner, once the mask member is temporarily fixed to the screen mesh member, if tension is applied to the screen mesh member, isotropic tension is also applied to the temporarily fixed mask member via the screen mesh member. become. Therefore, even if wrinkles and sagging occur in the mask member, the wrinkles and sagging are removed by the applied tension. In addition, since the mask member is permanently fixed to the screen mesh member after the removal of wrinkles and sagging is eliminated, fixing defects caused by wrinkles and sagging in the mask member do not occur during the final fixing.

As described above, in the method for manufacturing a combination mask according to the present invention, even if wrinkles and sagging occur in the mask member, the wrinkles and sagging are eliminated and the mask member is screen mesh after the elimination. This is fixed to the member. Therefore, even when wrinkles and sagging are likely to occur in the mask member alone, and wrinkles and sagging may remain on the mask member, the wrinkles and sagging are removed and eliminated during the manufacturing process of the combination mask. be able to. In addition, there is no possibility of improper fixing due to wrinkles or sagging in the mask member during the main fixing.
From these facts, according to the method for manufacturing a combination mask of the present invention, it is possible to obtain a combination mask that can keep the pattern position accuracy of the formation pattern high while making it possible to cope with a fine vapor deposition pattern.

  Hereinafter, a method for manufacturing a combination mask according to the present invention will be described with reference to the drawings. Here, a manufacturing method for manufacturing a combination mask used in the manufacturing process of the organic EL element will be described as an example.

First, before describing the method for manufacturing a combination mask according to the present invention, a schematic configuration of the combination mask obtained by the manufacturing method will be briefly described.
FIG. 1 is an explanatory view showing a schematic configuration example of a combination mask obtained by the method for manufacturing a combination mask according to the present invention. As illustrated, the combination mask 1 described here includes a frame member 2, a screen mesh member 3, and a mask member 4.

  The frame member 2 is formed in a rectangular frame shape by a metal member such as aluminum, and supports the screen mesh member 3 and the mask member 4. In order to give the frame member 2 tension to the screen mesh member 3 and the mask member 4 as will be described later, for example, at a plurality of locations on the upper surface side (the stretched surface side of the screen mesh member 3), It is desirable that a slidable slide mechanism 2a is provided. Note that the slide mechanism 2a can be realized by using a known single-axis slide table. The number and position of the slide mechanism 2a are the tension on the screen mesh member 3 and the mask member 4, and the mask member 4. What is necessary is just to determine suitably based on a relationship with an opening pattern shape etc.

  The screen mesh member 3 is a bowl-shaped member made of a synthetic fiber such as polyester-based or polyamide-based synthetic fiber or stainless steel, and is used to apply isotropic tension to the mask member 4 using elasticity (stretchability). Is. This screen mesh member 3 has a quick-drying adhesive such as cyanoacrylate on the upper surface side of the frame member 2 and, when the frame member 2 has the slide mechanism 2a, on the upper surface side of the slide mechanism 2a. It comes to be stretched by. In addition, the screen mesh member 3 does not cover the entire area in the frame member 2 in the completed state of the combination mask 1, but an unnecessary region portion 3 a overlapping with the mask member 4 is cut and removed.

  The mask member 4 is made of a thin film metal such as a copper plate, a nickel plate, a rolled stainless steel plate, etc., and the region on the plane is roughly divided into a pattern forming region 4a and other portions. In the pattern formation region 4a, an opening 4b having a shape corresponding to the formation pattern is formed by etching, laser processing, or the like as a passage for the vapor deposition material. The mask member 4 may be formed of a thin metal film such as nickel provided with a large number of fine openings 4b in the pattern formation region 4a by the “electroforming (plating) manufacturing method”. Further, a fixing region 4c to the screen mesh member 3 is disposed in a portion other than the pattern forming region, specifically, in the vicinity of the peripheral portion of the mask member 4 on the outer peripheral side of the pattern forming region 4a. Is fixed to the screen mesh member 3 by a quick-drying adhesive such as cyanoacrylate.

  Next, a manufacturing procedure of the combination mask 1 configured as described above, that is, a manufacturing method of the combination mask according to the present invention will be described. 2-4 is explanatory drawing which shows the specific example of the procedure in the manufacturing method of the combination mask which concerns on this invention.

  In manufacturing the combination mask 1 having the above-described configuration, a temporary fixing step, a tensioning step, a main fixing step, and a cutting step are sequentially performed. In addition to these steps, steps other than the steps may be included. Even in this case, the combination mask 1 having the above-described configuration can be obtained as long as these steps are included. Is possible.

  In the temporary fixing step, as shown in FIG. 2, first, tension is applied to the screen mesh member 3 in directions along the constituent sides of the frame member 2 (hereinafter referred to as “X direction” and “Y direction”). In this state, the screen mesh member 3 is attached to the upper surface side of the frame member 2, preferably the upper surface side of the slide mechanism 2a disposed on the frame member 2, using a quick-drying adhesive such as cyanoacrylate. wear.

  Further, in the temporary fixing step, as shown in FIG. 3, a mask member 4 is arranged in the vicinity of a substantially central portion on the upper surface or the lower surface (the lower surface side in the example) of the screen mesh member 3 to form a pattern of the mask member 4. A portion other than the region is temporarily fixed to the screen mesh member 3. “Temporary fixing” means, for example, some points in the mask member 4 such as point bonding or bonding in a minimum region in a portion other than the pattern formation region of the mask member 4 (particularly, in the vicinity of the peripheral portion). Is temporarily fixed. This temporary fixing may be performed using a quick-drying adhesive such as cyanoacrylate. The temporarily fixed position is a position 4d where the slide mechanisms 2a existing on opposite sides of the frame member 2 are connected by a straight line along the X direction or the Y direction, and the straight lines thus obtained intersect. It is possible. At this time, it is desirable that the mask member 4 does not have wrinkles or sagging, but even if wrinkles or sagging has occurred, temporary fixing can be performed. In the stage where the mask member 4 is temporarily fixed on the screen mesh member 3, it is only necessary to secure some positions on the mask member 4 as temporarily fixed positions 4d, and it is necessary to secure a good adhesion region over the entire circumference of the peripheral edge. Because there is no.

  In the tensioning step performed following such a temporary fixing step, tension is applied to the screen mesh member 3 after the mask member 4 is temporarily fixed. If the screen mesh member 3 is fixed to the slide mechanism 2a disposed on the frame member 2, the tension to the screen mesh member 3 can be easily applied using the slide mechanism 2a. However, tension may be applied using other known techniques. When tension is applied to the screen mesh member 3, isotropic tension is also applied to the mask member 4 temporarily fixed to the screen mesh member 3 via the screen mesh member 3. Therefore, even if the mask member 4 has wrinkles, sagging, etc., the wrinkles, sagging, etc. are removed by the tension applied through the screen mesh member 3. At this time, if the temporarily fixed position 4d of the mask member 4 is arranged in relation to the straight line connecting the slide mechanisms 2a as described above, the tension applied to the screen mesh member 3 by the slide mechanism 2a is effective. Then, it is transmitted to the mask member 4. That is, it can be said that it is very effective in eliminating and eliminating wrinkles and sagging in the mask member 4.

  Then, in the main fixing step performed after the tensioning step, the mask member 4 temporarily fixed to the screen mesh member 3 stretched on the frame member 2 is attached to the screen mesh member 3 as shown in FIG. Fix it. “Main fixing” means fixing the mask member 4 on the screen mesh member 3 in order to form the combination mask 1, such as applying and bonding an adhesive over the entire area near the peripheral edge of the mask member 4. Say. Specifically, the entire fixing region 4c in the mask member 4 is fixed to the screen mesh member 3 using a quick-drying adhesive such as cyanoacrylate. The fixing may be performed from the upper surface side of the screen mesh member 3, that is, the opposite surface side to which the mask member 4 is temporarily fixed by utilizing the fact that the screen mesh member 3 has a bowl shape. At this time, wrinkles and slack are removed from the mask member 4 in the tensioning process. Therefore, a good adhesion region can be secured between the screen mesh member 3 and the mask member 4. Therefore, there is no improper fixing due to wrinkles or sagging in the mask member 4 during the main fixing, and it is possible to prevent the mask member 4 from being peeled off from the screen mesh member 3 later. .

  Thereafter, a cutting process is performed to complete the combination mask 1. That is, as shown in FIG. 1, the screen mesh member 3 after the mask member 4 is fixed to the screen mesh member 3 is an unnecessary region portion 3a that overlaps the mask member 4, specifically, a fixing region 4c for the main fixing. The portion that overlaps the pattern formation region 4a of the mask member 4 is cut and removed at the inner peripheral portion. However, in the cutting step, the screen mesh member 3 is cut using a laser cutter whose output is adjusted so that only the screen mesh member 3 is cut. As the laser cutter, for example, a carbon dioxide laser is known, but other lasers may be used as long as the output can be adjusted. If the laser cutter is capable of adjusting the output, the mask member 4 may be damaged even if the object has a thickness that is very difficult to mechanically control, such as the screen mesh member 3 and the mask member 4. In addition, it is possible to cut out only the screen mesh member 3 in a non-contact manner without causing damage, and further, it is possible to vary the cutting thickness that can be handled by adjusting the output. This is because it becomes possible to ensure flexibility and the like.

  By performing each of these steps in sequence, a combination mask 1 as shown in FIG. 1 is obtained. In addition, after the main fixing of the mask member 4 on the screen mesh member 3 by the main fixing process is completed, or after the unnecessary area portion of the screen mesh member 3 is cut and removed by the cutting process, the screen mesh member 3 is further tensioned. Then, isotropic tension may be transmitted to the mask member 4 through the screen mesh member 3, and the mask member 4 may be pulled by this to improve the formation pattern position accuracy by the mask member 4.

  As described above, in the method for manufacturing a combination mask described in the present embodiment, even if wrinkles or sagging occurs in the mask member 4 as in the invention described in claim 1, the wrinkles or sagging are removed. The mask member 4 is permanently fixed on the screen mesh member 3 after the removal is eliminated. Therefore, even when the mask member 4 alone is likely to be wrinkled or slack, and the mask member 4 may remain wrinkled or slack, the wrinkle or sagging may be removed during the manufacturing process of the combination mask 1. It can be eliminated. In addition, there is no possibility of improper fixing due to wrinkles or sagging in the mask member 4 during the main fixing. From these facts, according to the method for manufacturing a combination mask of this embodiment, even if the mask member 4 is made of a thin film metal so as to be compatible with the fine vapor deposition pattern, the formation on the mask member 4 is performed. The pattern position accuracy of the pattern can be kept high.

  Further, as described in the present embodiment, if tension is applied to the screen mesh member 3 using the slide mechanism 2a disposed on the frame member 2 as in the invention described in claim 2, the tension is applied. Can be easily provided while allowing fine adjustment of the size. Moreover, depending on the arrangement position of the slide mechanism 2a, the tension applied to the screen mesh member 3 can be effectively transmitted to the mask member 4, which is very effective in eliminating wrinkles and slack in the mask member 4. It will be a thing. Further, depending on the arrangement position of the slide mechanism 2a, various types of mask members 4 can be supported.

  Further, as described in the present embodiment, as in the invention described in claim 3, if the unnecessary area portion 3a of the screen mesh member 3 overlapping the mask member 4 is cut and removed by using a laser cutter, It is possible to cut out only the screen mesh member 3 without damaging the mask member 4 and without damaging it. In addition, it is possible to vary the cutting thickness that can be handled by adjusting the output of the laser cutter, and it is possible to ensure versatility and flexibility in the cutting process.

  In the present embodiment, the case of manufacturing a combination mask used in the manufacturing process of the organic EL element has been described as an example. However, the present invention is not limited to this, and has a shape corresponding to the formation pattern. If the mask member in which the opening is formed is a combination mask stretched in the frame member via the screen mesh member, it can be applied in the same way even if it is used in the manufacturing process of other devices. It is.

It is explanatory drawing which shows schematic structural example of the combination mask obtained by the manufacturing method of the combination mask which concerns on this invention, (a) is a top view, (b) is AA sectional drawing. It is explanatory drawing which shows the specific example of the state after bonding a screen mesh member to a frame member among the procedures in the manufacturing method of the combination mask which concerns on this invention, (a) is a top view, (b) is a side view. It is. It is explanatory drawing which shows the specific example of the state after temporarily fixing a mask member to a screen mesh member among the procedures in the manufacturing method of the combination mask which concerns on this invention, (a) is a top view, (b) is B- It is B sectional drawing. It is explanatory drawing which shows the specific example of the state after this mask member is permanently fixed to a screen mesh member among the procedures in the manufacturing method of the combination mask which concerns on this invention, (a) is a top view, (b) is C- It is C sectional drawing.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Combination mask, 2 ... Frame member, 2a ... Slide mechanism, 3 ... Screen mesh member, 3a ... Unnecessary area part, 4 ... Mask member, 4a ... Pattern formation area, 4b ... Opening, 4c ... Adhesion area, 4d ... Temporary Fixed position

Claims (3)

A mask member made of a thin film metal in which an opening having a shape corresponding to a formation pattern is formed, a bowl-shaped screen mesh member, and a rectangular frame member, and the mask member is disposed in the frame via the screen mesh member. A method of manufacturing a combination mask stretched in a member,
A temporary fixing step of temporarily fixing the screen mesh member and the mask member by arranging the mask member on an upper surface or a lower surface of the screen mesh member;
A tensioning step of applying tension to the screen mesh member after the mask member is temporarily fixed;
And a main fixing step of permanently fixing the mask member temporarily fixed to the screen mesh member stretched on the frame member to the screen mesh member. The method of manufacturing a combination mask according to claim 1, wherein in the tensioning step, tension is applied to the screen mesh member using a slide mechanism disposed on the frame member. Including a cutting step of cutting and removing an unnecessary region overlapping the mask member with respect to the screen mesh member after the mask member is permanently fixed;
The combination mask according to claim 1 or 2, wherein in the cutting step, the screen mesh member is cut using a laser cutter whose output is adjusted so that only the screen mesh member is cut. Method.

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